• Title/Summary/Keyword: ex-situ

검색결과 241건 처리시간 0.028초

Hall effect of K-doped $BaFe_2As_2$ superconducting thin films

  • Son, Eunseon;Lee, Nam Hoon;Hwang, Tae-Jong;Kim, Dong Ho;Kang, Won Nam
    • 한국초전도ㆍ저온공학회논문지
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    • 제15권3호
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    • pp.5-8
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    • 2013
  • We have studied Hall effect for potassium (K)-doped $BaFe_2As_2$ superconducting thin films by analyzing the relation between the longitudinal resistivity (${\rho}_{xx}$) and the Hall resistivity (${\rho}_{xy}$). The thin films used in this study were fabricated on $Al_2O_3$ (000l) substrates by using an ex-situ pulsed laser deposition (PLD) technique under a high-vacuum condition of ~$10^{-6}$ Torr. The samples showed the high superconducting transition temperatures ($T_c$) of ~ 40 K. The ${\rho}_{xx}$ and the ${\rho}_{xy}$ for K-doped $BaFe_2As_2$ thin films were measured by using a physical property measurement system (PPMS) with a temperature sweep (T-sweep) mode at an applied current density of $100A/cm^2$ and at magnetic fields from 0 up to 9 T. We report the T-sweep results of the ${\rho}_{xx}$and the ${\rho}_{xy}$ to investigate Hall scaling behavior on the basis of the relation of ${\rho}_{xy}={A{\rho}_{xx}}^{\beta}$. The ${\beta}$ values are $3.0{\pm}0.2$ in the c-axis-oriented K-doped $BaFe_2As_2$ thin films, whereas the thin films with various oriented-directions like a polycrystal showed slightly lower ${\beta}$ than that of c-axis-oriented thin films. Interestingly, the ${\beta}$ value is decreased with increasing magnetic fields.

HVCVD를 이용한 다결정 SiGe 박막의 증착 및 활성화 메카니즘 분석

  • 강성관;고대홍;전인규;양두영;안태항
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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    • pp.66-66
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    • 1999
  • 최근 들어 다결정 SiGe은 MOS(Metal-Oxide-Semiconductor)에서 기존에 사용되던 다결정 Si 공정과의 호환성 및 여러 장점으로 인하여 다결정 Si 대안으로 많은 연구가 진행되고 있다. 고농도로 도핑된 P type의 다결정 SiGe은 Ge의 함량에 따른 일함수의 조절과 낮은 비저항으로 submicrometer CMOS 공정에서 게이트 전극으로 이용하려는 연구가 진행되고 있으며, 55$0^{\circ}C$ 이하의 낮은 온도에서도 증착이 가능하고, 도펀트의 활성화도가 높아서 TFT(Thin Film Transistor)에서도 유용한 재료로 검토되고 있다. 현재까지 다결정 SiGe의 증착은 MBE, APCVD, RECVD. HV/LPCVD 등 다양한 방법으로 이루어지고 있다. 이중 HV/LPCVD 방법을 이용한 증착은 반도체 공정에서 게이트 전극, 유전체, 금속화 공정 등 다양한 공정에서 사용되고 있는 방법으로 현재 사용되고 있는 반도체 공정과의 호환성의 장점으로 다결정 SiGe 게이트 전극의 증착 공정에 적합하다고 할 수 있다. 본 연구에서는 HV/LPCVD 방법을 이용하여 게이트 전극으로의 활용을 위한 다결정 SiGe의 증착 메카니즘을 분석하고 Ex-situ implantation 후 열처리에 따라 나타나는 활성화 정도를 분석하였다. 도펀트를 첨가하지 않은 다결정 SiGe을 주성엔지니어링의 EUREKA 2000 장비를 이용하여, 1000$\AA$의 열산화막이 덮혀있는 8 in 웨이퍼에 증착하였다. 증착 온도는 55$0^{\circ}C$에서 6$25^{\circ}C$까지 변화를 주었으며, 증착압력은 1mtorr-4mtorr로 유지하였다. 낮은 증착압력으로 인한 증착속도의 감소를 방지하기 위하여 Si source로서 Si2H6를 사용하였으며, Ge의 Source는 수소로 희석된 10% GeH4와 100% GeH4를 사용하였다. 증착된 다결정 SiGe의 Ge 함량은 RBS, XPS로 분석하였으며, 증착된 박막의 두께는 Nanospec과 SEM으로 관찰하였다. 또한 Ge 함량 변화에 따른 morphology 관찰과 변화 관찰을 위하여 AFM, SEM, XRD를 이용하였으며, 이온주입후 열처리 온도에 따른 활성화 정도의 관찰을 위하여 4-point probe와 Hall measurement를 이용하였다. 증착된 다결정 SiGe의 두게를 nanospec과 SEM으로 분석한 결과 Gem이 함량이 적을 때는 높은 온도에서의 증착이 더 빠른 증착속도를 나타내었지만, Ge의 함량이 30% 되었을 때는 온도에 관계없이 일정한 것으로 나타났다. XRD 분석을 한 결과 Peak의 위치가 순수한 Si과 순수한 Ge 사이에 존재하는 것으로 나타났으며, ge 함량이 많아짐에 따라 순수한 Ge쪽으로 옮겨가는 경향을 보였다. SEM, ASFM으로 증착한 다결정 SiGe의 morphology 관찰결과 Ge 함량이 높은 박막의 입계가 다결정 Si의 입계에 비해 훨씬 큰 것으로 나타났으며 근 값도 증가하는 것으로 나타났다.

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도루묵의 체내 변화에 따른 음향산란특성 (Acoustical backscattering characteristic depending on the changes in the body of sandfish (Arctoscopus japonicus))

  • 윤은아;이경훈;황강석;이형빈;한인우;황두진
    • 수산해양기술연구
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    • 제52권1호
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    • pp.36-41
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    • 2016
  • Changes in target strength (TS) values of sandfish when sandfish was alive and dead were investigated using ex-situ at 120 kHz. TS values measured by tilt angles with -50~+50 degrees showed ranges from -71.0 to -53.3 dB for live sandfish, -63.1~-46.3 dB for thawed sandfish, and -70.0~-50.4 dB after 24 hours from thawed, respectively. It was shown that while TS values were similar between the case of live and the case of after 24 hours from thawed, mean TS values were higher by approximately 5 dB in the case of immediate thawed sandfish. It was also seen that TS values were similar between the case of thawed sandfish and the case of after 21 hours from live. The results showed that TS values of live sandfish were different from those of frozen sandfish. It implies that when estimating TS of frozen fish, the influx of bubbles and changes of body should be considered.

Ecological and Ethnomedicinal Survey of Plants within Homesteads in Abia State, Nigeria

  • Chima, Uzoma Darlington;Adekunle, Adekunle Tajudeen;Okorie, Maureen Chiamaka Funmilayo
    • Journal of Forest and Environmental Science
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    • 제29권4호
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    • pp.257-274
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    • 2013
  • Ecological and ethnomedicinal survey of plants was conducted in one hundred and twenty homesteads in Mbala, Amuda, Umuaku, and Nneato communities of Nneochi Local Governement Area, Abia State-Nigeria. A total of ninety-one medicinal plant species belonging to seventy-eight genera and forty-eight families, used in the treatment of malaria, yellow fever, fibroid, hepatitis, convulsion, hypertension, diabetes, insomnia, ulcer, rashes, low sperm count, snake bite, among others, were documented. Plant remedies were prepared mostly as infusions or decoctions from different plant parts with mainly water, and palm wine/gin sometimes. The highest number of medicinal plant species (73) was recorded in Mbala, followed by Amuda (71), Umuaku (68) and Nneato (61). Medicinal plant species diversity was highest in Amuda (Simpson 1-D=0.9621;H=3.663), followed by Umuaku (Simpson 1-D=0.9481; H=3.471), Mbala (Simpson 1-D=0.9345; H=3.341), and Nneato (Simpson 1-D=0.9307; H=3.277), respectively. Similarity in medicinal plant species was highest between Umuaku and Nneato (76.71%), followed by Amuda and Umuaku (75.95%), Mbala and Amuda (71.43%), while Mbala and Nneato had the lowest similarity (59.52%). The results of the study showed that traditional medicine is pivotal in the treatment of ailments in the study area, and that the indigenous people of Nneochi have recognized the need to conserve medicinal plants of importance ex situ within homesteads due to threats from unsustainable exploitation and deforestation.

Ultrahigh Vacuum Technologies Developed for a Large Aluminum Accelerator Vacuum System

  • Hsiung, G.Y.;Chang, C.C.;Yang, Y.C.;Chang, C.H.;Hsueh, H.P.;Hsu, S.N.;Chen, J.R.
    • Applied Science and Convergence Technology
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    • 제23권6호
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    • pp.309-316
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    • 2014
  • A large particle accelerator requires an ultrahigh vacuum (UHV) system of average pressure under $1{\times}10^{-7}$ Pa for mitigating the impact of beam scattering from the residual gas molecules. The surface inside the beam ducts should be controlled with an extremely low thermal outgassing rate under $1{\times}10^{-9}Pa{\cdot}m^3/(s{\cdot}m^2)$ for the sake of the insufficient pumping speed. To fulfil the requirements, the aluminum alloys were adopted as the materials of the beam ducts for large accelerator that thanks to the good features of higher thermal conductivity, non-radioactivity, non-magnetism, precise machining capability, et al. To put the aluminum into the large accelerator vacuum systems, several key technologies have been developed will be introduced. The concepts contain the precise computer numerical control (CNC) machining process for the large aluminum ducts and parts in pure alcohol and in an oil-free environment, surface cleaning with ozonized water, stringent welding process control manually or automatically to form a large sector of aluminum ducts, ex-situ baking process to reach UHV and sealed for transportation and installation, UHV pumping with the sputtering ion pumps and the non-evaporable getters (NEG), et al. The developed UHV technologies have been applied to the 3 GeV Taiwan Photon Source (TPS) and revealed good results as the expectation. The problems of leakage encountered during the assembling were most associated with the vacuum baking which result in the consequent trouble shootings and more times of baking. Then the installation of the well-sealed UHV systems is recommended.

Structural Evolution of Layered $Li_{1.2}Ni_{0.2}Mn_{0.6}O_2$ upon Electrochemical Cycling in a Li Rechargeable Battery

  • 홍지현;서동화;김성욱;권혁조;박영욱;강기석
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2010년도 춘계학술발표대회
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    • pp.37.2-37.2
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    • 2010
  • Recently $Li_{1.2}Ni_{0.2}Mn_{0.6}O_2$ has been consistently examined and investigated by scientists because of its high lithium storage capacity, which exceeds beyond the conventional theoretical capacity based on conventional chemical concepts. Consequently, $Li_{1.2}Ni_{0.2}Mn_{0.6}O_2$ is considered as one of the most promising cathode candidates for next generation in Li rechargeable batteries. Yet the mechanism and the origin of the overcapacity have not been clarified. Previously, many authors have demonstrated simultaneous oxygen evolution during the first delithiation. However, it may only explain the high capacity of the first charge process, and not of the subsequent cycles. In this work, we report a clarified interpretation of the structural evolution of $Li_{1.2}Ni_{0.2}Mn_{0.6}O_2$, which is the key element in understanding its anomalously high capacity. We identify how the structural evolution of $Li_{1.2}Ni_{0.2}Mn_{0.6}O_2$ occurs upon the electrochemical cycling through careful study of electrochemical profiles, ex-situ X-ray diffraction (XRD), HR-TEM, Raman spectroscopy, and first principles calculation. Moreover, we successfully separated the structural change at subsequent cycles (mainly cation rearrangement) from the first charge process (mainly oxygen evolution with Li extraction) by intentionally synthesizing sample with large particle size. Consequently, the intermediate states of structural evolution could be well resolved. All observations made through various tools lead to the result that spinel-like cation arrangement and lithium environment are created and embedded in layered framework during repeated electrochemical cycling.

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충남 오서산과 봉수산의 식물상 및 관리방안 (Management Methods and Vascular Plants of the Ohseosan and the Bongsusan, Chungnam)

  • 오현경;김동필;오구균;강기래;배중남
    • 한국환경복원기술학회지
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    • 제16권3호
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    • pp.63-81
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    • 2013
  • The vascular plants in the Ohseosan and the Bongsusan, Chungnam were listed 439 taxa (9.0% of all 4,881 taxa of vascular plants); 95 families, 268 genera, 339 species, 5 subspecies, 75 varieties and 20 forms. Furthermore, the Ohseosan were listed 339 taxa and the Bongsusan were listed 306 taxa. So, Hemicryptophytes (H) were 107 taxa (24.4%), Therophytes (Th), Geophytes (G) same as were 82 taxa (18.7%) showed high proportional ratio in life form. Based on the list of rare plants, 4 taxa; Aristolochia contorta, Viola albida, Scutellaria insignis (LC) and Scrophularia koraiensis (DD) and endemic plants, 8 taxa; Aconitum pseudolaeve, Ajuga spectabilis, etc. Based on the list of specific plants, 35 taxa; Wisteria floribunda for. floribunda in class IV, 5 taxa (Scutellaria insignis, Scrophularia koraiensis, etc.) in class III, 5 taxa (Acer triflorum, Cymopterus melanotilingia, etc.) in class II, 24 taxa (Pyrus ussuriensis var. ussuriensis, Campanula punctata, etc.) in class I. Based on the list of naturalized plants, 9 families, 20 genera, 24 taxa (Persicaria orientalis, Carduus crispus, etc.) and ecosystem disturbing plants were Rumex acetocella, Ambrosia artemisiifolia. Naturalization rate was 5.5% of all 439 taxa of vascular plants and urbanization index was 7.5% of all 321 taxa of naturalized plants. In particular, for rare plants, in and ex-situ conservation of genetic resources must surely be done, by preserving present natural habitats, discovering additional natural habitats and securing seeds. Moreover, ecosystem disturbing plants require long-term monitoring and consistent management, since not only do they disturb the ecosystem in competition with Korean native species, but damage humans, too.

PBMS (Particle Beam Mass Spectrometer)를 이용한 크기 분류시 발생하는 입자 확산현상 분석에 관한 연구

  • 문지훈;신용현;강상우;김태성
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.232-232
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    • 2012
  • 반도체 공정에서 일반적으로 오염입자를 측정하는 방법은 테스트 웨이퍼를 ex-situ 방식인 surface scanner를 이용하여 분석하는 particle per wafer pass (PWP) 방식이 주를 이루고 있다. 이러한 오염입자는 반도체 수율에 결정적인 역할을 하는 것으로 알려져 있으며 반도체 선폭이 작아지면서 제어해야하는 오염입자의 크기도 작아지고 있다. 하지만, 현재 사용하는 PWP 방식은 실시간 분석이 불가능하기 때문에 즉각적인 대처가 불가능 하고 이는 수율향상에 도움이 되지 못하는 후처리 방식이다. 따라서 저압에서 오염입자를 실시간으로 측정할 수 있는 장비에 대한 요구가 늘어나고 있는 실정이다. 저압에서 나노입자를 측정할 수 있는 장비로 PBMS가 있다. PBMS는 electron gun을 이용하여 입자를 하전시킨 후 편향판을 이용하여 크기를 분류하고 Faraday cup으로 측정된 전류를 환산하여 입자의 농도를 측정하는 장비이다. 편향판에 의하여 Faraday cup으로 이동되는 입자들은 농도 차에 의한 확산현상이 발생한다. 본 연구에서는 Faraday cup 이동 시 발생하는 확산현상을 여러 크기의 Faraday cup과 polystyrene latex (PSL) 표준입자를 이용하여 분석하였다. Faraday cup을 고정 식이 아닌 이동 식으로 설계를 하여 축의 원점을 기준으로 이동시켜 가면서 입자 전류량을 측정하였으며, 이를 기준 (reference) Faraday cup의 측정량과 비교하여 효율을 계산하였다. PSL 표준 입자 100, 200 nm 크기에 대하여 cup의 크기를 바꿔 가면서 각각 평가 하였다. 그 결과 입자의 크기가 작을 수록 더 넓은 구간으로 확산되었고 크기가 작은 Faraday cup의 경우에 정밀한 결과를 얻을 수 있었다. 본 연구를 통하여 편향판을 지나면서 발생하는 입자의 확산현상에 대한 정량적 평가를 수행할 수 있었으며, 추후 PBMS 설계 시 Faraday cup 크기를 결정하고 Faraday cup array 기술을 적용하는데 유용하게 활용 될 수 있을 것으로 기대 된다.

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Thermal, Tribological, and Removal Rate Characteristics of Pad Conditioning in Copper CMP

  • Lee, Hyo-Sang;DeNardis, Darren;Philipossian, Ara;Seike, Yoshiyuki;Takaoka, Mineo;Miyachi, Keiji;Furukawa, Shoichi;Terada, Akio;Zhuang, Yun;Borucki, Len
    • Transactions on Electrical and Electronic Materials
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    • 제8권2호
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    • pp.67-72
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    • 2007
  • High Pressure Micro Jet (HPMJ) pad conditioning system was investigated as an alternative to diamond disc conditioning in copper CMP. A series of comparative 50-wafer marathon runs were conducted at constant wafer pressure and sliding velocity using Rohm & Haas IC1000 and Asahi-Kasei EMD Corporation (UNIPAD) concentrically grooved pads under ex-situ diamond conditioning or HPMJ conditioning. SEM images indicated that fibrous surface was restored using UNIPAD pads under both diamond and HPMJ conditioning. With IC1000 pads, asperities on the surface were significantly collapsed. This was believed to be due to differences in pad wear rates for the two conditioning methods. COF and removal rate were stable from wafer to wafer using both diamond and HPMJ conditioning when UNIPAD pads were used. Also, HPMJ conditioning showed higher COF and removal rate when compared to diamond conditioning for UNIPAD. On the other hand, COF and removal rates for IC1000 pads decreased significantly under HPMJ conditioning. Regardless of pad conditioning method adopted and the type of pad used, linear correlation was observed between temperature and COF, and removal rate and COF.

Effect of Hydroxyl Ethyl Cellulose Concentration in Colloidal Silica Slurry on Surface Roughness for Poly-Si Chemical Mechanical Polishing

  • Hwang, Hee-Sub;Cui, Hao;Park, Jin-Hyung;Paik, Ungyu;Park, Jea-Gun
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.545-545
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    • 2008
  • Poly-Si is an essential material for floating gate in NAND Flash memory. To fabricate this material within region of floating gate, chemical mechanical polishing (CMP) is commonly used process for manufacturing NAND flash memory. We use colloidal silica abrasive with alkaline agent, polymeric additive and organic surfactant to obtain high Poly-Si to SiO2 film selectivity and reduce surface defect in Poly-Si CMP. We already studied about the effects of alkaline agent and polymeric additive. But the effect of organic surfactant in Poly-Si CMP is not clearly defined. So we will examine the function of organic surfactant in Poly-Si CMP with concentration separation test. We expect that surface roughness will be improved with the addition of organic surfactant as the case of wafering CMP. Poly-Si wafer are deposited by low pressure chemical vapor deposition (LPCVD) and oxide film are prepared by the method of plasma-enhanced tetra ethyl ortho silicate (PETEOS). The polishing test will be performed by a Strasbaugh 6EC polisher with an IC1000/Suba IV stacked pad and the pad will be conditioned by ex situ diamond disk. And the thickness difference of wafer between before and after polishing test will be measured by Ellipsometer and Nanospec. The roughness of Poly-Si film will be analyzed by atomic force microscope.

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