• 한국산학기술학회논문지
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• 제19권4호
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• pp.650-656
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• 2018

TFT-LCD 산업은 반도체와 유사한 공정기술을 갖는 대규모 장치 산업으로 일종의 Giant Microelectronics 산업이다. 습식 에칭(Wet Etching)은 전체 TFT 공정에서 비교적 큰 비중을 차지하고 있지만 발표된 연구사례는 부족한 실정이다. 그 주요 원인은 반응이 일어나는 에칭액(Etchant) 성분이 기업의 비밀로 간주되어 외부에 발표되는 사례가 거의 없기 때문이다. 최근 대면적 LCD 제조를 위하여 사용되는 알루미늄(Al)과 구리(Cu)는 습식 에칭을 진행하기에 매우 까다로운 물질이다. 저 저항성 재료인 Cu는 습식 에칭 공정에서만 가능하며 높은 속도와 낮은 실패율, 적은 소비전력으로 Al 에칭 대용으로 사용하고 있다. 그리고 에칭액으로 사용하는 과산화수소($H_2O_2$)의 이상 반응으로 추가적인 배관 및 전기적인 안전장치가 필요하다. 본 논문에서는 과산화수소의 이상 반응을 제한하지는 못하나 이상 반응 발생 시 설비의 피해를 최소화 할 수 있는 방법을 제안한다. 또한 최근에 알루미늄 에칭설비에서 구리 에칭설비로 변경하는 사례가 많아 구리 에칭설비에 대한 하드웨어 인터록을 제안하고 안전 등급이 높은 안전 PLC로 구현하여 이상 반응에 대한 대비책을 강구하는 방안을 제안한다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.319.1-319.1
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• 2016

Recently, the Al-doped ZnO (ZnO:Al) films are intensively used in thin film a-Si solar cell applications due to their high transmittance and good conductivity. The textured ZnO:Al films are used to enhance the light trapping in thin film solar cells. The wet etch process is used to texture ZnO:Al films by dipping in diluted acidic solutions like HCl or HF. During that process the glass substrate could be damaged by the acidic solution and it may be difficult to apply it for the inline mass production process since it has to be done outside the chamber. In this paper we report a new technique to control the surface morphology of RF-sputtered ZnO:Al films. The ZnO:Al films are textured with vaporized HF formed by the mixture of HF and H2SiO3 solution. Even though the surface of textured ZnO:Al films by vapor etching process showed smaller and sharper surface structures compared to that of the films textured by wet etching, the haze value was dramatically improved. We achieved the high haze value of 78% at the wavelength of 540 nm by increasing etching time and HF concentration. The haze value of about 58% was achieved at the wavelength of 800 nm when vapor texturing was used. The ZnO:Al film texture by HCl had haze ratio of about 9.5 % at 800 nm and less than 40 % at 540 nm. In addition to low haze ratio, the texturing by HCl was very difficult to control etching and to keep reproducibility due to its very fast etching speed.

• Restorative Dentistry and Endodontics
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• 제24권1호
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• pp.240-250
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• 1999

The purpose of this study was to evaluate the effect of different etching time on the shear bond strength and adaptibility of composite to enamel and dentin when used one-bottle adhesive Prime & Bond$^{TM}$ 2.0. The proximal and occlusal surfaces of 88 extracted human molars were ground to expose enamel(n=44) and dentin (=44) using diamond wheel saw. Teeth were randomly assigned to four test groups(n=11) and received the following treatments : Control group were conditioned with 36% phosphoric acid for 20 sec. according to the manufacturer's directions. Experimental 10 sec. group, 30 sec. group and 60 sec. group were conditioned with 36% phosphoric acid for 10 sec., 30 sec. and 60 sec., respectively. Teeth were rinsed and dried for 2 sec. Prime & Bond$^{TM}$ 2.0 were applied according to the manufacturer's directions and Spectrum$^{TM}$ TPH composite resins were bonded to enamel and dentin surfaces. All specimens were stored in distilled water for 24 hours. Eighty specimens were sheared in a Universal Testing Machine with a crosshead speed of 5mm/minute. One way ANOVA and LSD test were used for statistical analysis of the data. Failure modes of all specimens after shear bond strength test were examined and listed. Also, representive postfracture modes and eight specimens were examined under scanning electron microscope. The results of this study were as follows: 1. The shear bond strength to enamel was the highest value in 30 sec. group (20.68${\pm}$8.54MPa) and the lowest value in 10 sec. group (14.92${\pm}$6.07MPa), so there was significant difference of shear bond strength between two groups (p<0.05). But there was no significant difference among other groups (p>0.05). With longer etching time to enamel from 10 sec. to 30 sec., higher the shear bond strength was obtained, but the shear bond strength was decreased at 60 sec. etching time. 2. The shear bond strength to dentin was the highest value in control group (13.08${\pm}$6.25MPa) and the lowest value in 60 sec. group (9.47${\pm}$3.35MPa), but there was no significant difference among the all groups (p>0.05). The eching time over 20 sec. decreased the shear bond strength to dentin. 3. In SEM observation, the enamel and resin interfaces were showed close adaptation with no relation to etching time of enamel. And the dentin and resin interfaces were showed close adaptation at 20 sec. and 30 sec. etching time, but showed some gaps at 10 sec. and 60 sec. etching time. Accordingly, these results indicated that a appropriate etching time in Prime & Bond$^{TM}$ 2.0 was required to be 30 sec. in enamel and 20 sec. in dentin for the high shear bond strength and good adaptation between the composite resin and tooth substance.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 하계학술대회 논문집
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• pp.340-343
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• 2000

ITO(Indium Tin Oxide) films for transparent electrodes of FPD(Flat Panel Display) were patterned in atmosphere using laser. A pulse type(repetition rate of 10 Hz) Q-switched Nd:YAG laser which can generate the fundamental wavelength at 1064 nm or its harmonics(532, 266 nm) was used for Patterning of the ITO film. In case of using the second harmonic(532 nm) of Nd:YAG laser, the ITO film(thickness of 20 nm) was removed clearly with a laser fluence of 5.2 J/$\textrm{cm}^2$ and a beam scan speed of 200${\mu}{\textrm}{m}$/s. But the glass substrate was damaged when the laser fluence was over 5.2 J/$\textrm{cm}^2$. We discussed the etching mechanism of the ITO film using Nd:YAG laser with observation of the etching characteristics including a depths and widths of ITO films as a function of laser fluence using SEM(Scanning Electron Microscopy) and surface profiler($\alpha$-step 500).

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2001년도 추계학술대회 논문집
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• pp.186-189
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• 2001

The main method in micro-etching process, used in manufacturing semiconductors, electronic components, circuits, is Photo Masking method that exposes and develops on the photo-sensitivity solutions or films. This method enables one to process highly precisely, $\pm$0.03 mm in end line location area. But this has limits in a high speed / wide width process, difficulties in endless masking, and the problem of high price. We have developed the direct masking method to make use of Gravure printing, widely used in grocery packing sheet printing. We made cylinder tools to influence the masking quality by laser stream process. We have confirmed that the end line location accuracy in the line width of the product is improved from 0.12 mm to $\pm$0.07 mm level, after etching process.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.318-318
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• 2011

Etching of an ultrathin aluminum oxide film on NiAl(110) substrate by methanol is studied by home-built scanning tunneling microscopy at room-temperature. We deposited liquid methanol on thin alumina film by using a high speed solenoid valve suitable for deposition of thermally unstable molecules. It is found that only the reflection domain boundary between two domains was preferentially etched by methanol. Since the reflection domain boundary has many oxygen vacancies and irregular structures, judging from the fact, we assume that oxygen vacancies cause the chemically reactive phenomena of methanol in reflection domain boundary on an alumina film. The reactivity of the reflection domain boundary is attributed to the oxygen vacancies due to irregular structures. Similar reactivity is found on the oxygen deficient alumina produced on top of the intact alumina.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1999년도 추계학술대회 논문집
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• pp.173-176
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• 1999

Continuing improvement of microprocessor performance involves in the devece size. This allow greater device speed, an increase in device packing density, and an increase in the number of functions that can reside on a single chip. However this has led to propagation delay, crosstalk noise, and power dissipation due to resistance-capacitance(RC) coupling become significant due to increased wiring capacitance, especially interline capacitance between the metal lines on the same metal level. Becase of pattering MSSQ (Methylsilsequioxane), we use RIE(Reactive ton Etching) which is a good anisotrgpy. In this study, according as we control a flow rate of CF$_4$/O$_2$ gas, RF power, we analysis by using ${\alpha}$ -step, SEM and AFM,

• 대한치과기공학회지
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• 제31권2호
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• pp.23-30
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• 2009

All-ceramic restorations have gained acceptance among clinicians and patients because of their superior esthetics. Most all-ceramic systems have a 2-layer structure, using a weak veneering ceramic over a strong supporting core. often, failure of all-ceramic restorations occurs when the veneering ceramic fractures, exposing the core material. The purpose of this study was to compare the shear bond strength of heat press ceramic system (Zirpress) to zirconia core with various surface treatments. 10 metal cores and 50 zirconia cores were fabricated and divided into six groups according to surface treatment such as Zirliner application, aluminium oxide blasting, and 9.5% HF etching. Sixty specimens were prepared using Zirpress, veneered 8mm height and 3mm in diameter, over the zirconia cores (n=10). The shear bond strength test was performed in a universal testing machine with a crosshead speed of 1/min. Ultimate shear bond strength data were analyzed with One-way ANOVA and the Scheffe's test (p=.05). Within the limits of this study, the following conclusions were drawn: The mean shear bond strengths (MPa) were: 12.93 for $110{\mu}m$ aluminium oxide blasting/Rexillium III/IPS e.Max Zirpress; 14.92 for $50{\mu}m$ aluminium oxide blasting ${\pm}9.5%$ HF etching/Zirconis core/IPS e.Max Zirpress; 16.37 for $110{\mu}$ aluminium oxide blasting + 9.5% HF etching/Zirconis core/IPS e.Max Zirpress; 12.89 for $200{\mu}$ aluminium oxide blasting + 9.5% HF etching/Zirconis core/IPS e.Max Zirpress; 19.30 for 9.5% HF etching/Zirconis core/IPS e.Max Zirpress; 19.55 for Zirliner/Zirconis core/IPS e.Max Zirpress. The mean shear bond strength for ZNTZH (Zirliner/Zirconis core) and ZNTEH (9.5% HF etching/Zirconis core) were significantly superior to MS110H ($110{\mu}$ aluminium oxide blasting/Rexillium III) and ZS200EH ($200{\mu}$ aluminium oxide blasting + 9.5% HF etching/Zirconis core) (p<0.05).

• Restorative Dentistry and Endodontics
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• 제20권1호
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• pp.362-371
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• 1995

The purpose of this study was to evaluate the shear bond strength between composite resin and glass ionomer cement according to surface treatment methods of glass ionomer cement. Sixty round acrylic cylinders were fabricated. And then, a round undercut cavity(8 mm diameter, 2.5mm depth) was prepared in the center of the every acrylic cylinder. After all cavities were restored by using light-cured glass ionomer cement. A total of sixty acrylic cylinders restored with glass ionomer cement were divided into 4 groups according to surface treatment methods of glass ionomer cement. The surface treatment of each group were as follows : control group : no treatment Group 1 : acid etching Group 2 : sandblasting Group 3 : air-podwer abrasive polishing The composite resin was bonded to glass ionomer cement of each specimens. And the shear bond strength was tested with a universal testing machine at a cross-head speed of 1mm/min and 500kg in full scale. The results were as follows : 1. The sandblasting group(group 2) had the highest shear bond strength with $272.50{\pm}24.96\;kg/cm_2$ and the acid etching group(group 1) had the lowest shear bond strength with $192.89{\pm}29.32kg/cm_2$. 2. The no treated group(control group) had higher shear bond strength than acid etching group(group 1) (p<0.05). 3. The sandblasting group(group 2), air-powder abrasive polishing group(group 3) and no treated group(control group) had higher shear bond strength than the acid etching group(group 1) (p<0.05). 4. The sandblasting group(group 2) and air-powder abrasive polishing group(group 3) had higher shear bond strength than the no treatment group(control group), but there was not significant(p>0.05).

• Restorative Dentistry and Endodontics
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• 제20권1호
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• pp.289-302
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• 1995

The purpose of this study was to estimate the shear bond strength and observe the fractured and interfacial surfaces of various dentin bonding agents used conjunction with a visible light cured composite. The senentytwo human premolars and molars extracted due to periodontal or orthodontic reasons were used and randomely divided into six groups. All the prepared dentin surfaces were treated with Superbond D-liner, Scotchbond Multi-Purpose, All-Bond 2 and Prisma Universal Bond 3 accroding to the manufacturer's instructions. Six specimens were then demineralized in 10 % HCl for 24 hours and the other six specimens were not demineralized in order to observe the interfacial surfaces with Hitachi X-450 SEM at 25Kv. Also shear bond strength were obtained using an Instron Testing Machine with a crosshead speed of 1mm/min. The following results were obtained : 1. Although shear bond strength of Superbond D-Liner(17.35 MPa) and Scotch-bond Multi-Purpose group(17.29 MPa) were higher than the All-Bond 2(12.80 MPa) and Prisma Universial Bond 3 (13.43 MPa), there were no significant statistic differences in the shear bond strength between 4 groups.(P<0.05) As a result of etching to dentin in Prism a Universial BOND 3 experimentally, the resin tag was formed, but shear bond strength was decreased. 2. The resin tag into the opened dentinal tubule was formed in Superbond D-Liner, Scotchbond Multi-Purpose, All-Bond 2(etching) and Prisma Universial Bond 3(etching), but not in the All-Bone 2 and Prism a Universial Bond 3(non-etching). 3. Strong, durable bonds between dentin and dentinal bonding agents are essential, not only resin tag into the dentinal tubules, but also hybrid layer.