• 한국정밀공학회지
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• 제19권6호
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• pp.77-85
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• 2002

An analysis method which calculates corrective machining information for improving the motion accuracy of linear motion guide Is proposed in this paper. The method is composed of two algorithms. One is the algorithm fur prediction of the motion errors from rail form error. The other is the algorithm for prediction of rail form error from the motion errors of table. Transfer function is utilized in each algorithm, which represents the ratio of bearing reaction force variation to unit magnitude of spatial frequencies of raid from error. As the corrective machining information is acquired from the measured motion errors of table, the method has a merit not to measure rail form error directly. Validity of the method is verified both theoretically and experimentally. By applying the method, linear motion error of test equipment is reduced from 5.97$\mu$m to 0.58$\mu$m, and reduced from 32.78arcsec to 6.21 arcsec in case of angular motion error. From the results, it is confirmed that the method is very effective to improve the motion accuracy of linear motion guide.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.658-662
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• 2000

In order to achieve systematical method for improving motion accuracy of hydrostatic table, an algorithm using finite element method is proposed in this paper. Quantification of averaging effect of oil film on motion error is performed theoretically by analysis on the relationship between spacial frequency of rail form error and motion error of table. Influences of film stiffness and pocket size on the motion error of table are also analyzed theoretically Validity of the algorithm is verified experimentally from the test on the motion error of table with three types of rail which have different form profile. Experimental results show that the algorithm is very effective to analyze theoretically the motion error of hydrostatic table.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• 한국정밀공학회지
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• 제14권12호
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• pp.114-120
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• 1997

For compensating the error motion of hydrostatic tables, we have introduced a way that the clearance of table is controlled corresponding to the amount of eror with the actively controlled variable capillary, named as ACC. In previous paper, through the basic test, it was confirmed that by the use of ACC, the error motion within 2.7$\mu$ m of a hydrostatic table could be compensated with the resolution of 27nm, 1/100 contollable range, and with the frequency bandwidth of 5.5Hz, structurally. In this paper, we performed practical compensation of the linear and angular motion error of hydrostatic table using ACC. For improving the compensated motion accuracy, iterative control method is put into the control system. The experimental results show that by the simultaneous compensation of error, the linear and angular motion error are improved upto 0.25$\mu$ m and 0.4arcsec, which are about 1/10 and 1/3 of the non-compensated motion errors respectively.

• 한국정밀공학회지
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• 제14권7호
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• pp.15-21
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• 1997

This paper presented a linear motion accuracy by using two-dimensional probe with the master block and the square for NC machine tools. This measuring system could be measured motion error due to numerical control system. The results of measurement and simulation for motion error were similar, and so, this system had enough accuracy to measure a linear motion accuracy for NC machine tools. The experimental results are as follows. 1. This measuring system could be measured motion error due to mumerical control system. 2. The results of measurement and simulation for motion error were similar. 3. This measuring system had enough accuracy to measure a linear motion accuracy for NC machine tools.

• 제어로봇시스템학회논문지
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• 제7권8호
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• pp.697-702
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• 2001

The ring laser gyro(RLG) has been used extensively in strapdown inertial navigation system(SDINS) because of the apparent of having wide dynamic range, digital output and high accuracy. The dithered RLG system has dynamic motion at sensor level, caused by the dithering motion to overcome the lock-in threshold. In this case, an attitude error is produced by not only the true coning of the vehicle motion but also the pseudo coning of the sensor motion. This paper describes the definition of the multi-frequency coning motion and its noncommutativity error to reject the pseudo coning error produced by the sensor motion such as the dithered RLG. The simulation results are presented to minimize the multi-frequency coning error.

• 한국생산제조학회지
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• 제4권3호
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• pp.58-66
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• 1995

It is very important to test motion accuracy and performance of NC machine tools as they affect that of all other machines machined by them in industry. In this paper, in has become possible to detect errors of linear displacement of radial direction for circular motion test using newly assembled magnetic type of linear scales so called Magnescale ball bar system, and to calculate time interval getting error motion data and revolution angle of circular motion in machining center using tick pulses come out from computer. And a set of error data gotten from test is expressed to a plot by computer treatment and to numerics of error motion by statistical treatment and results of test are compared with those of Renishaw ball bar system.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2004년도 학술대회지
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• pp.819-822
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• 2004

To transmit MPEG-2 video on an erroneous channel, a number of error control techniques He needed. Especially, error concealment techniques which can be implemented on receivers independent of transmitters are essential to obtain good video quality. In this paper, a motion adaptive boundary matching algorithm (MA-BMA) is presented for temporal error concealment. Before carrying out BMA, we perform error concealmmt by a motion vector prediction using neighboring motion vectors. If the candidate of error concealment is rot satisfied, search range and reliable boundary pixels are selected by the motion activity or motion vectors ane a damaged macroblock is concealed by applying the MA-BMA. This error concealment technique reduces the complexity and maintains PSNR gain of 0.3 0.7dB compared to the conventional BMA.

• 한국통신학회논문지
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• 제22권8호
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• pp.1691-1697
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• 1997

This paper presents a new motion compensated error coding method suitable for region based image coding system. Compared with block based conding, the region based coding improves subjective quality as it estimates and compensates 2D (or 3D) translantional, rotational, and scaling motion for each regions. although the region based coding has this advantage, its merit is reduced as bock-DCT (2D-DCT) is used to encode motion-compensated error. To overcome this problem, a new region adaptive motion compensated error coding technique which improver subjective and objective quality in the region boundary is proposed in this paper. In the proposed method, regions with large error are estimated using contour of the regions and contrast between the regions. The regions estiated as those with large error are coded by arbitrarily shaped image segment coding method. The mask information of the coded regions is not transmitted because it is estimated as the same algorithm in the encoder and the decoder. The proposed region adaptive motion conpensated error coding method improves about 0.5dB when it is compared with conventional block based method.

• 연구논문집
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• 통권34호
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• pp.101-112
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• 2004

In order to analyze the motion errors of the aerostatic stage, it is necessary to consider the influence of the moment variation occurredinside the pads. In this paper, a motion error anaysis method utilizing the transfer functions on the reaction force and moment is proposed, and general characteristics of the transfer functions are discussed. Calculated motion errors by the proposed method show good agreement with the ones calculated by Multi Pad Method, which is considered the entire table as an analysis object. Also, by the introduction of the transfer function of motion errors, which represent the relationship between the spatial frequency components of the rail form error and motion errors, motional characteristics of the porous aerostatic stage can be generalized. In detail, the influence of the spatial frequencies is analyzed quantatively, and the patterns of the insensitive frequencies which almost do not affect the linear motion error or angular motion error according to the rail length ratio and the number of the pad are verified. The relationship between the moment variation occurred inside the pads and the motion errors is also verified together.