• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
• /
• pp.164-164
• /
• 2008

금속배선공정에서 높은 전도율과 재료의 값이 싸다는 이유로 최근 Cu를 사용하였으나, 디바이스의 구조적 특성을 유지하기 위해 높은 압력으로 인한 새로운 다공성 막(low-k)의 파괴와, 디싱과 에로젼 현상으로 인한 문제점이 발생하게 되었다. 이러한 문제점을 해결하고자, 본 논문에서는 Cu 표면에 Passivation layer를 형성 및 제거하는 개념으로 공정시 연마제를 사용하지 않으며, 낮은 압력조건에서 공정을 수행하기 위해, 전해질의 농도 변화에 따른 Liner sweep voltammetry 법을 사용하여 전압활성화에 의한 전기화학적 반응이 Cu전극에 어떤 영향을 미치는지 연구하였으며, 표면 조성을 알아보기 위하여 Energy Dispersive Spectroscopy (EDS) 분석을 하였고, Cu disk의 결정성과 배향성 관찰을 위해 X-Ray diffraction (XRD)로 금속 표면을 비교하여 실험 결과로 얻어진 데이터를 통하여 ECMP 공정에 적합한 전해액 선정과 농도를 선택하였다.

• 한국기계가공학회지
• /
• 제6권3호
• /
• pp.16-23
• /
• 2007

An experimental investigation with diode laser system was carried out to study the effect of surface heat treatment on the die materials(SM45C, SKD11, SK3). The surface heat treatment characteristics of the laser beam are evaluated using hardness tests, optical microscopy, X-ray diffraction and energy dispersive X-ray spectroscopy(EDS). Results indicated that the beam size, focal length, feed rates are changed surface hardened characteristics. SM45C is higher hardness than other materials and composed to martensite grain at hardened zone, whereas other materials(SKD11, SK3)are low hardness than expected and composed to austenite and allayed martensite at hardened zone. The intensive X-ray diffraction patterns of (110)-(200)-(211) is detected hardened surface and the hardened surface distributed plenty of carbon density than metal zone.

• Korean Chemical Engineering Research
• /
• 제48권1호
• /
• pp.98-102
• /
• 2010

목련잎 추출액을 이용하여 Au core-Ag shell 합금 나노입자를 합성하였다. 환원제인 식물잎 추출액을 먼저 $HAuCl_4$ 용액과 반응시키고 다음에 $AgNO_3$ 용액과 반응시켜 금 seed와 은 shell을 형성시켰다. 반응시간에 따른 UV-visible spectroscopy의 변화를 모니터링하여 합금 나노입자의 형성을 관찰하였다. 합성된 합금 나노입자를 transmission electron microscopy(TEM), energy dispersive X-ray spectroscopy(EDS), X-ray photoelectron spectroscopy(XPS) 등으로 특성화 하였다. TEM image로부터 관찰된 합금 나노입자는 삼각형, 오각형, 육각형 등의 평판과 구 구조의 혼합물이었다. EDS와 XPS 분석으로부터 결정된 금/은 합금 나노입자의 원자 은 함량은 각각 34와 65 wt%로 Au core-Ag shell 나노구조가 형성되었음을 알 수 있었다. 이러한 core-shell 형태의 나노구조는 표면 강화 라만 분광 및 생물분자의 고감도 검출 등에 잠재적인 응용이 기대된다.

• 한국전기전자재료학회논문지
• /
• 제24권8호
• /
• pp.647-653
• /
• 2011

In this study, a method to measure the thickness of thin film by EDS (energy dispersive spectroscopy) is suggested. We have developed a model which calculates the thickness of thin film from the characteristic x-ray intensity ratio of the elements in thin film and substrate by considering incident electron beam energy, x-ray generation curve, backscattering and absorption of x-ray, take-off angle of x-ray and tilt angle of the sample. We obtained the relation curve between the film thickness measured experimentally and the x-ray intensity ratio of elements. The film thicknesses calculated from the model agrees quite well with those measured experimentally. Therefore, the thin film thickness can be measured rapidly and accurately by using the model developed in this study and the x-ray intensity ratio obtained in EDS analysis.

• Maxillofacial Plastic and Reconstructive Surgery
• /
• 제36권3호
• /
• pp.103-110
• /
• 2014

Purpose: The current gold standard for clinical jawbone formation involves autogenous bone as a graft material. In addition, demineralized dentin can be an effective graft material. Although demineralized dentin readily induces heterotopic bone formation, conventional decalcification takes three to five days, so, immediate bone grafting after extraction is impossible. This study evaluated the effect of vacuum ultrasonic power on the demineralization and processing of autogenous tooth material and documented the clinical results of rapidly processed autogenous demineralized dentin (ADD) in an alveolar defects patient. Methods: The method involves the demineralization of extracted teeth with detached soft tissues and pulp in 0.6 N HCl for 90 minutes using a heat controlled vacuum-ultrasonic accelerator. The characteristics of processed teeth were evaluated by scanning electron microscopy (SEM), and energy dispersive X-ray spectroscopy (EDS). Bone grafting using ADD was performed for narrow ridges augmentation in the mandibular area. Results: The new processing method was completed within two hours regardless of form (powder or block). EDS and SEM uniformly demineralized autotooth biomaterial. After six months, bone remodeling was observed in augmented sites and histological examination showed that ADD particles were well united with new bone. No unusual complications were encountered. Conclusion: This study demonstrates the possibility of preparing autogenous tooth graft materials within two hours, allowing immediate one-day grafting after extraction.

• 한국염색가공학회:학술대회논문집
• /
• 한국염색가공학회 2009년도 학술발표대회
• /
• pp.110-111
• /
• 2009

A solution containing 3-Mercaptopropyltr-imethoxysilane(MPTMS) was employed to modify surface of cotton fabrics with a silver colloid. Silver nanoparticles were applied on cotton fabrics via treatment with 3-MPTMS. The rate of silver nanoparticles on the fabric surface were measured with Energy Dispersive Spectroscopy(EDS). EDS results confirm the silver atom on the cotton surface.

• 공업화학
• /
• 제25권6호
• /
• pp.645-647
• /
• 2014

본 연구에서는 수열합성법을 이용하여, 한단계의 과정으로 $TiO_2$와 Ru (Ruthenium)가 도입된 $TiO_2$ ($Ru_x/TiO_2$)를 합성하였다. 합성된 샘플의 결정성과 조성 및 형태를 X-ray diffraction (XRD)과 energy dispersive X-ray spectroscopy (EDS), transmission electron microscopy (TEM)를 통하여 확인하였으며, Benzyl alcohol의 Benzaldehyde로의 산화반응에 촉매로서 적용하였다. 높은 선택성을 가지는 산화반응이 진행되었으며, $TiO_2$에 도입된 Ru의 양이 증가할수록 촉매로서의 더 좋은 촉매활성을 보였다.

• 한국표면공학회:학술대회논문집
• /
• 한국표면공학회 2015년도 춘계학술대회 논문집
• /
• pp.112-112
• /
• 2015

The purposed of this work was to determine nanotube shape variation on the Ti-xNb alloys with alloying elements and applied potentials. Samples were prepared by arc melting, followed by followed by homogenization for 12 hr at $1000^{\circ}C$ in argon atmosphere. This study was evaluated the phase and microstructure of Ti-xNb alloys using an X-ray diffraction (XRD) and optical microscopy (OM). The morphology of the samples was investigated with a field-emission scanning electron microscope (FE-SEM) and energy dispersive X-ray spectroscopy (EDS). The nanotube on the alloy surface was formed in 1 M $H_3PO_4$ with small additions of NaF 0.8 wt.%. All anodization treatments were carried out using a scanning potentiostat (Model 362, EG&G, USA) at constant voltage 30 V for 120 min, respectively. The morphology of the samples was investigated with a field-emission scanning electron microscope (FE-SEM) and energy dispersive X-ray spectroscopy (EDS). Surface characteristics of nanotbue formed on Ti-xNb alloys was investigated by potentiodynamic test and potentiostatic in 0.9% NaCl solution at $36.5{\pm}1^{\circ}C$. It was observed that the changed ${\alpha}$ phase to ${\beta}$ phase with Nb content.

• 반도체디스플레이기술학회지
• /
• 제21권4호
• /
• pp.99-105
• /
• 2022

Public attention to the indoor environment of underground subway stations, which is a representative multi-use facility, has been increasing along with the increase in indoor activities. In underground stations, fine iron oxide, which affects the health of users, is generated because of the friction between wheels and rails. Among particulate pollutant reduction technologies, plants have been considered as a non-chemical air purification method, and their effects in reducing certain chemical species have been identified in previous studies. The present study aimed to derive the total quantitative and qualitative reduction effects of a bio-filter system comprising air purifying plants, installed in an underground subway station. The experiment proceeded in two ways. First, PM(particulate matter) reduction effect by vegetation biofilter was monitored with the IAQ(indoor air quality) station. In addition, chemical speciation analysis conducted on the samples collected from the experimental and control areas where plants and irrigation using SEM-EDS(scanning electron microscopy-energy dispersive X-ray spectroscopy). This study confirmed the effect of the vegetation bio-filter system in reducing the accumulation of particulate pollutants and transition and other metals that are harmful to the human body.

• 대한화학회지
• /
• 제55권4호
• /
• pp.644-649
• /
• 2011

Polyaniline/$SiO_2$ 촉매를 이용하여, acetophenone, aromatic aldehydes와 aromatic amines을 에탄올 용매 속에서 반응시켜서 다양한 various ${\beta}$-amino ketones을 one-pot mannich 반응을 수행하였으며, 이 반응을 위해 silica가 충진된 여러 가지 종류의 wt% polyaniline을 화학적인 산화방법에 의해 합성하였다. 합성한 촉매는 thermal analysis(TG-DTA), X-ray diffraction (XRD), scanning electron microscopy(SEM) energy dispersive spectroscopy(EDS), 및 Fourier transform infrared spectroscopy (FT-IR) 방법으로 확인하였으며, 촉매의 용매에 대한 안정도 UV-Visible spectroscopy로 측정하였다. Polyaniline/$SiO_2$ 촉매를 이용하는 합성 방법은높은 수율로 얻어지며, work up이 쉽고, 독성이 없으며, 쉽게 회수하여 재사용이 가능하다.