Characterization of Solid Phase Crystallization in Sputtered and LFCVD Amorphous Silicon Thin Film (스퍼터링 및 저압화학기상증착 비정질 실리곤 박막의 고상 결정화 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 1995.11a
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- pp.89-93
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- 1995