• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.3
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• pp.206-211
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• 2005

The device makers want to make higher density chips on the wafer through scale-down. The change of WSix/poly-Si gate film thickness is one of the key issues under 100 nm device structure. As a new device etching process is applied, end point detection(EPD) time delay was occurred in DPS+ poly chamber of Applied Materials. This is a barrier of device shrink because EPD time delay made physical damage on the surface of gate oxide. To investigate the EPD time delay, the experimental test combined with OES(Optical Emission Spectroscopy) and SEM(Scanning Electron Microscopy) was performed using patterned wafers. As a result, a EPD delay time is reduced by a new chamber seasoning and a new wavelength line through plasma scan. Applying a new wavelength of 252 nm makes it successful to call corrected EPD in WSix/poly-Si stack-down gate etching in the DPS+ poly chamber for the current and next generation devices.

• Proceedings of the Korean Environmental Health Society Conference
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• 2003.06a
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• pp.136-139
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• 2003

This study is to observe the occurrence of heterotrophic bacteria in terms of free chlorine residuals in two different water distribution system which belongs to both K and Y water treatment plant of S city of Korea. The data analyzing in distribution systems (DS) shows that the free chlorine residuals decrease from 0.10 to 0.56 mgmg/L for K, and 0.51 to 0.78 mg/L for Y. The decay of free chlorine is clearly higher in both March and August than those of in January. The HPC in DS are ranged from 0 to 40 CFU/mL for K, 0 to 270 CFU/mL for Y, on R2A medium. In particular, its level is relatively high at consumers ground storage tanks, taps and point-of-end area of Y. The predominant genera is studied in distribution systems are Acinetobacter, Sphingomonas (branch of Pseudomonas), Micrococcus, Bacillus, Staphylococcus. The diversity of heterotrophic bacteria increase in the end-point area. Most of them are either encapsulated cells or cocci of gram-positve. In conclusion, the point-of-end area in distribution systems shows the longer flow distance from water treatment plants, the greater diversity and higher level of heterotrophic bacteria due to the significant decay of free chlorine residuals.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.3
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• pp.175-184
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• 2001

In this study, the improved throughput and stability in device fabrication could be obtained by applying CMP process to STi structue in 0.18 um semiconductor device. To employ the CMP process in STI structure, the Reverse Moat Process used to be added after STI Fill, as a result, the process became more complex and the defect were seriously increased than they had been,. Removal rate of each thin film in STI CMP was not uniform, so, the device must have been affected. That is, in case of excessive CMP, the damage on the active area was occurred, and in the case of insufficient CMP nitride remaining was happened on that area. Both of them deteriorated device characteristics. As a solution to these problems, the development of slurry having high removal rate and high oxide to nitride selectivity has been studied. The process using this slurry afford low defect levels, improved yield, and a simplified process flow. In this study, we evaluated the 'High Selectivity Slurry' to do a global planarization without reverse moat step, and also we evaluated EPD(Eend Point Detection) system with which 'in-situ end point detection' is possible.

• Journal of Microbiology and Biotechnology
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• v.14 no.2
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• pp.262-267
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• 2004

This study was done to observe the occurrence of heterotrophic bacteria in terms of free chlorine residuals in two different water distribution systems, which belongs to both K and Y water treatment plant of S city in Korea. The data analyzed in the distribution systems show that the free chlorine residuals decreased from 0.10 to 0.56 mg/l for K, and 0.51 to 0.78 mg/l for Y. The decay of free chlorine is clearly higher in both March and August than in January. The HPC in the distribution systems are ranged from 0 to 40 cfu/ml for K, 0 to 270 cfu/ml for Y, on $R_2$A medium. In particular, its level is relatively high at the consumer's ground storage tanks, taps, and the point-of-end area of Y. The predominant genera that were studied in the distribution systems were Acinetobacter, Sphingomonas (branch of Pseudomonas), Micrococcus, Bacillus, Staphylococcus. The diversity of heterotrophic bacteria increases in the end-point area. Most of them are either encapsulated cells or of Gram-positve cocci. In conclusion, the point-of-end area in distribution systems shows the longer flow distance from the water treatment plants, along with a greater diversity and a higher level of heterotrophic bacteria, due to the significant decay of free chlorine residuals.

• Journal of Contemporary Eastern Asia
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• v.20 no.1
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• pp.120-133
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• 2021

This paper proposes an interpretation of Charles Ess's pros hen pluralism, especially concerning what constitutes the single end point (hen) toward which the pluralistic viewpoints converge (pros). The single end point, I argue, is constituted by an empirical social reality that obtains in the world at a particular period. In other words, it is the fact that we happen to agree largely and broadly on several ethical issues that serves as the end point in Ess's theory. The reason is that humans happen largely to share the same goals and values qua human beings, such as the desire for communication and cooperation with one another. It is not their rationality, or any other permanent and ideal characteristic, that serves as the source of normativity for human beings, but rather the contingent facts that obtain at a particular place and time, facts that humans happen to agree on. This raises an obvious objection of what to do with those who might cherish a very different set of values. The answer is that the globalized nature of the world today, especially deepened by information technology, makes it increasingly difficult for any groups to remain isolated. This does not imply, however, that disagreements are not possible. On the contrary, disagreements are a part of the whole process from the beginning. At the theoretical level, there is always a need for those who disagree on the theoretical issues rationally to persuade one another. This is also part of the empirical reality referred to earlier.

• Proceedings of the Korea Concrete Institute Conference
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• 1999.04a
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• pp.721-726
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• 1999

Diverse strengthening methods for reinforced concrete are applied to real structures with a variety of materials. On the other hand, only external prestressing is used for strengthening damaged prestressed concrete girders. But the end brackets for external prestressing are hard to design and to manufacture, the magnitude of prestressing is limited when applied to real structures. The current end brackets are not clearly understood in load transmitting mechanisms and they may damage the original girder by drilling during construction. And also the designed welding area of the current bracket is insufficient to support the high load. The problems of current end bracket are solved in this study. And a new and improved end bracket is proposed and tested. The tested end bracket is similar to the end bearing bracket, but many supportting plates are addded to increase its welding length of the weakest point of the bracket. The increased welding length finally increases its load carrying capacity significantly.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.7
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• pp.144-153
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• 1997

The inverse kinematics problem of a reclaimer which excavates and transports raw materials in a raw yard is investigated. Because of the geometric feature of the equipment in which scooping buckets are attached around the rotating disk, kinematic redundancy occurs in determining joint variable. Link coordinates are introduced following the Denavit-Hartenbery representation. For a given excavation point the forward kinematics yields 3 equations, however the number of involved joint variables in the equations is four. It is shown that the rotating disk at the end of the boom provides an extra passive degree of freedom. Two approaches are investigated in obtaining inverse kinematics solutions. The first method pre-assigns the height of excavation point which can be determined through path planning. A closed form solution is obtained for the first approach. The second method exploits the orthogonality between the normal vector at the excavation point and the z axis of the end-effector coordinate system. The geometry near the reclaiming point has been approximated as a plane, and the plane equation has been obtained by the least square method considering 8 adjacent points near the point. A closed form solution is not found for the second approach, however a linear approximate solution is provided.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.14 no.6
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• pp.611-620
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• 1989

In this paper, Fingerprint matching method which is able to confirm one's identity using microcomputer is discussed. In matching method, fingerprint image is thinned and we extracted feature point data which is composed of position and direction of end-point and branch-point. Identification is conducted by decision of disagreement between reference finger print and input fingerprint us ing this extracted data. After averaging and binariztion process, thining method is conducted. Restoration process is carried out to seek precise feature pointdatd. We compensate position difference of reference fingerprint and input fingerprint, which is divied end-point and branch-point, and translated and rotated its position. Using this compensdate difference of position, we decide whether fingerp-print identity is true or not.

• Structural Engineering and Mechanics
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• v.21 no.3
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• pp.351-367
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• 2005

Multi-span beams carrying multiple point masses are widely used in engineering applications, but the literature for free vibration analysis of such structural systems is much less than that of single-span beams. The complexity of analytical expressions should be one of the main reasons for the last phenomenon. The purpose of this paper is to utilize the numerical assembly method (NAM) to determine the exact natural frequencies and mode shapes of a multi-span uniform beam carrying multiple point masses. First, the coefficient matrices for an intermediate pinned support, an intermediate point mass, left-end support and right-end support of a uniform beam are derived. Next, the overall coefficient matrix for the whole structural system is obtained using the numerical assembly technique of the finite element method. Finally, the natural frequencies and the associated mode shapes of the vibrating system are determined by equating the determinant of the last overall coefficient matrix to zero and substituting the corresponding values of integration constants into the related eigenfunctions respectively. The effects of in-span pinned supports and point masses on the free vibration characteristics of the beam are also studied.

• Biotechnology and Bioprocess Engineering:BBE
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• v.5 no.6
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• pp.400-406
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• 2000

Since the 1950s, the numbers of species and chemicals produced have significantly increased. Despite the fact that industrial chemicals have given us numerous benefits, there is no doubt that they have damaged the environment. The chemicals being dispersed on the earth should be carefully controlled to prevent adverse effects. Bioassay is one of the methods to assess chemical safety. In bioassay systems, chemical safety is estimated by monitoring biological responses to environmental pollutants and newly synthesized chemicals. This report introduces multiple-point bioassay systems that are based on chemical sensitivities of microorganisms, responses of one kind of organism, and micro-array technology. Multiple-end-point bioassays enable the prediction of chemicals in the environment and the understanding of toxicities of newly synthesized chemicals.