• Title/Summary/Keyword: emission test

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Nitride/Oxide Etch Spectrum Data Verification by Using Optical Emission Spectroscopy (OES를 이용한 질화막/산화막의 식각 스펙트럼 데이터 분석)

  • Park, Soo-Kyoung;Kang, Dong-Hyun;Han, Seung-Soo;Hong, Sang-Jeen
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.25 no.5
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    • pp.353-360
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    • 2012
  • As semiconductor device technology continuously shrinks, low-open area etch process prevails in front-end etch process, such as contact etch as well as one cylindrical storage (OCS) etch. To eliminate over loaded wafer processing test, it is commonly performed to emply diced small coupons at stage of initiative process development. In nominal etch condition, etch responses of whole wafer test and coupon test may be regarded to provide similar results; however, optical emission spectroscopy (OES) which is frequently utilize to monitor etch chemistry inside the chamber cannot be regarded as the same, especially etch mask is not the same material with wafer chuck. In this experiment, we compared OES data acquired from two cases of etch experiments; one with coupon etch tests mounted on photoresist coated wafer and the other with coupons only on the chuck. We observed different behaviors of OES data from the two sets of experiment, and the analytical results showed that careful investigation should be taken place in OES study, especially in coupon size etch.

Interfacial Evaluation and Microfailure Mechanisms of Carbon Fiber/Bismaleimide (BMI) Composites using Tensile/compressive Fragmentation Tests and Acoustic Emission (인장/압축 Fragmentation 시험법과 음향방출을 이용한 Carbon Fiber/Bismaleimide (BMI) Composites 의 계면 평가와 미세파괴 메커니즘 연구)

  • 김진원;박종만;윤동진
    • Proceedings of the Korean Society For Composite Materials Conference
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    • 2000.11a
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    • pp.79-83
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    • 2000
  • Interfacial and microfailure properties of carbon liber/bismaleimide (BMI) composites were evaluated using both tensile fragmentation and compressive Broutman tests with acoustic emission (AE). Since BMI is rather difficult matrix to apply for the conventional fragmentation test because of its too low elongation and too brittle and high modulus properties, dual matrix composite system was applied. After carbon fiber/BMI composite was prepared for rod shape by controlling differing curing stage, composites rod was embedded in toughened epoxy as outer matrix. The typical microfailure modes including fiber break, matrix cracking, and interlayer failure were observed during tensile testing, whereas the diagonal slippage in fiber ends was observed during compressive test. On the other hand, AE amplitudes of BMI matrix fracture were higher than carbon fiber tincture under tensile test because BMI matrix has very brittle and high modulus. The waveform of signals coming from BMI matrix fractures was consistent with AE amplitude result under tensile tests.

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Study on the Relationship between CO2, Nuclear, and Renewable Energy Generation in Korea, Japan and Germany (CO2 배출, 원자력에너지, 신재생에너지 발전량과의 관계분석: 한국, 일본, 독일을 중심으로)

  • Yun, Junghye;Kang, Sangmok
    • New & Renewable Energy
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    • v.16 no.4
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    • pp.9-22
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    • 2020
  • This study analyzed the short- and long-term effects of nuclear and renewable energy generation on CO2 emissions in Korea, Japan, and Germany from 1987 to 2016 by using the unit root test, Johansen cointegration test, and ARDL model. The unit root test was performed, and the Johansen cointegration test showed cointegration relationships among variables. In the long run, in Germany, the generation of both nuclear and renewable energy was found to affect CO2 emission reduction, while South Korea's renewable energy generation, including hydropower, increased the emissions. Japan only showed significance in fossil fuels. In the short run, in the three countries, the generation of nuclear and renewable energy, excluding hydropower, affected CO2 emission. However, in Korea and Germany, nuclear and renewable energy generation, respectively, affected CO2 emission reduction. Although the rest are significant, the results showed that they increased CO2 emissions.

Application of Acoustic Emission Technique for Bridge Cable Monitoring (교량 케이블 적용 강연선 모니터링을 위한 음향방출 기법 검토)

  • Kim, Ga-Young;Seo, Dong-Woo
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.22 no.4
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    • pp.121-125
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    • 2018
  • This paper presents the assessment of 7-wire strand monitoring using acoustic emission technique for bridges. 7-wire strand is widely used construction materials to provide additional tensile force to bridges. PSC (PreStressed Concrete) bridge and cable-stayed bridge are representatives for such cases. However, as the bridge aging progresses recently, corrosion problems of strand are emerging. For this reason, various NDT (Non-Destructive Test) methods for cable inspection are being studied and applied to the field. One of the NDT methods, acoustic emission technique, is known as an effective technique to detect cable damage and breakage. In this study, to evaluate the applicability of acoustic emission technique to bridges, acoustic emission signals according to damage of the strand were acquired and analyzed by tensile test. Moreover, The optimal AE sensor type was selected for field application. As a result, it is considered that the acoustic emission technique will be able to detect corrosion breakage and signs of rupture.

A Study on Reduction Effects of Air Pollutant Emissions by Automotive Fuel Standard Reinforcement (자동차연료 기준강화에 따른 대기오염물질 배출량 저감효과)

  • Lim, Cheol-Soo;Hong, Ji-Hyung;Kim, Jeong-Soo;Lee, Jong-Tae;Lim, Yun-Sung;Kim, Sang-Kyu;Jeon, Sang-Jin
    • Journal of Korean Society for Atmospheric Environment
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    • v.27 no.2
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    • pp.181-190
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    • 2011
  • The air pollutants from vehicle exhaust gas are affected by many factors including fuel qualities, engine and vehicle technologies, driving patterns. In particular, fuel qualities and after-treatment devices could directly affect the emission level of pollutants. The pollutant reduction characteristics that caused by enforced fuel quality standard were analyzed. Three types of test fuel were selected in accordance with Korean automotive fuel standard in 2006, 2009, 2012 and used for vehicle emission test in chassis dynamometer. European COPERT correction equation of fuel impact was considered as reference information to quantify the vehicle emission test results. The contribution rates of exhaust emission by COPERT correction equation showed that aromatic compounds and oxygen contents in gasoline fuel was most important. In case of diesel fuel, cetane index and polycyclic aromatic compounds accounted for the greater part. The exhaust emission effects by COPERT correction equation revealed that CO and VOC was increased 0.86%, 1.57% respectively in after 2009 gasoline when compared to before 2009 gasoline fuel. In case of light-duty diesel vehicle CO, VOC and PM were decreased in range of 3~7%. The result from this study could be provided for developing future fuel standards and be used to fundamental information for Korean clean air act.

A Study on the Emission Characteristics of Korean Light-duty Vehicles in Real-road Driving Conditions (국내 소형자동차의 실제 도로 주행 배출가스 특성에 관한 연구)

  • Park, Junhong;Lee, Jongtae;Kim, Sunmoon;Kim, Jeongsoo;Ahn, Keunwhan
    • Transactions of the Korean Society of Automotive Engineers
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    • v.21 no.6
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    • pp.123-134
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    • 2013
  • Strengthening vehicle emission regulation is one of important policies to improve air quality in urban area. Due to the limitation of specified driving cycles for certification test to reflect real driving conditions, additional off-cycle emission regulations have been adopted in US and being developed in Europe. The driving cycles of US or Europe have been used in emission certification for Korean light-duty vehicles, but it has not been known how well the driving cycles reflect various real driving patterns in Korea. In that point of view, it is required to estimate vehicle emission based on real road driving conditions to raise the effectiveness of vehicle emission regulation in Korea. In this study, real driving emission measurements have been conducted for three Korean light-duty vehicles with PEMS. The driving routes consisted of urban, rural and motorway in Seoul and Incheon. The data have been analyzed with various averaging methods including moving averaging windows method and compared to emission limits set with emission certification modes applied to tested vehicles. The results have shown that the real driving pollutant emissions of a gasoline and a LPG vehicles have been ranged quite lower than those of emission limits on CVS-75 driving cycle. But real driving NOx of a light duty diesel vehicle has been considerably higher than emission limit of NEDC driving cycle. The higher than expected NOx emission of a diesel vehicle might be caused by different strategy to control EGR in real driving condition from NEDC driving.

A Basic Experiment of Head/Disk Interaction of Subambient Tri-Pad Slider by Using Acoustic Emission Test System

  • Pan Galina;Hwang Pyung;Choi Sung-Ryul
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2003.11a
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    • pp.384-387
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    • 2003
  • The object of the present work is the analysis of head/disk interaction during start/stop and constant speed operation using acoustic emission (AE). The frequency spectrum analysis is performed using the AE signal obtained during the head/disk interaction. The FFT (Fast Fourier Transform) analysis of the AE signals is used to understand the interaction between the AE signal and the state of contact.

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A Study on Urban Driving Pattern (실 도로 주행 특성에 대한 연구)

  • 한상명;김창현
    • Transactions of the Korean Society of Automotive Engineers
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    • v.10 no.5
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    • pp.9-14
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    • 2002
  • The durability prediction of emission control components, especially 02 sensor and catalytic converter, is getting more important as emission regulation is getting stricter and vehicle durability mileage requirement is also extended from 80,000 ㎞ to 160,000 km in Korean market. And the duration of vehicle mileage accumulation to get vehicle exhaust emission deterioration factor for certification is required to be shorter in order to reduce the vehicle development time. Since most of the vehicle emission development tests are done on chassis dynamometer and aging bench by using vehicle aging modes, real road condition and in-use driving patterns must be reflected into them to predict the vehicle emission level and to meet emission regulation especially at high mileage. In order to get the frequent driving pattern of vehicle and the aging characteristic of emission components, a vehicle was tested by changing drivers and driving roads around Seoul. Real road driving patterns were analyzed and compared with those of the certification modes which are well known in automotive industry.

Predicting the CO2 Emission of Concrete Using Statistical Analysis

  • Hong, Tae-Hoon;Ji, Chang-Yoon;Jang, Min-Ho;Park, Hyo-Seon
    • Journal of Construction Engineering and Project Management
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    • v.2 no.2
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    • pp.53-60
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    • 2012
  • Accurate assessment of $CO_2$ emission from buildings requires gathering $CO_2$ emission data of various construction materials. Unfortunately, the amount of available data is limited in most countries. This study was conducted to present the $CO_2$ emission data of concrete, which is the most important construction material in Korea, by conducting a statistical analysis of the concrete mix proportion. Finally, regression models that can be used to estimate the $CO_2$ emission of concrete in all strengths were developed, and the validity of these models was evaluated using 24 and 35MPa concrete data. The validation test showed that the error ratio of the estimated value did not exceed a maximum of 5.33%. This signifies that the models can be used in acquiring the $CO_2$ emission data of concrete in all strengths. The proposed equations can be used in assessing the environmental impact of various construction structural designs by presenting the $CO_2$ emission data of all concrete types.

Suppression of Diesel Emission Particle Extract-induced Micronuclei in Mouse Bone Marrow Cells by Pre-treatment with Ascorbic acid, ${\alpha}-Tocopherol$ or Glutathione

  • Heo, Moon-Young;Choi, Seong-Kyu;Yu, Ki-Seon;Kim, Hyun-Pyo;Sohn, Dong-Hun
    • Archives of Pharmacal Research
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    • v.12 no.2
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    • pp.94-98
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    • 1989
  • Induction of micronuclei by diesel emission particle extract (DEPE) in mouse bone marrow cells was suppressed by pre-treatment with ascorbic acid, ${\alpha}-tocopherol$ or glutathione (GSH). These compounds were given orally to mice at the dose of 1, 10 or 100 mg/kg/day for 5 consecutive days. The dose of DEPE (200 mg/kg) was administered intraperitoneally once to mice with the 5th administration of test compounds. Ascorbic acid, ${\alpha}-tocopherol$ and GSH all showed the dose-dependent suppression on DEPE-induced micronuclei.

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