• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.146-150
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• 2021

Plasma information based virtual metrology (PI-VM) that predicts wafer-to-wafer etch rate variation after wet cleaning of plasma facing parts was developed. As input parameters, plasma information (PI) variables such as electron temperature, fluorine density and hydrogen density were extracted from optical emission spectroscopy (OES) data for etch plasma. The PI-VM model was trained by stepwise variable selection method and multi-linear regression method. The expected etch rate by PI-VM showed high correlation coefficient with measured etch rate from SEM image analysis. The PI-VM model revealed that the root cause of etch rate variation after the wet cleaning was desorption of hydrogen from the cleaned parts as hydrogen combined with fluorine and decreased etchant density and etch rate.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.38 no.2
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• pp.129-137
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• 2014

In this study, the characteristics of exhaust gas as a function of the biodiesel mixing ratio were investigated. Diesel and waste oil were used for preparing mixed fuel, and the ratios of the mixed fuel were varied in the BD3~BD100 range. The injection pressures(${\Delta}p_{inj}$) was considered as an experimental variable and was set to 400 bar, 600 bar, 800 bar, 1000 bar, and 1200 bar. Furthermore, for quantitatively analyzing the characteristics of exhaust gas(NOx and Soot), the concepts of Pearson correlation coefficient and Spearman rank-order correlation coefficient based on statistics were introduced. Consequently, it was found that the correlation of the emission of NOx and Soot is linear, and the Pearson and Spearman coefficients are -0.732 and -0.724, respectively, under all analysis conditions. Especially, for the injection pressure of 800 bar, a simultaneous reduction in NOx and Soot emission is possible by controlling the biodiesel mixing ratio. This is because the correlation coefficients of NOx and Soot emissions were nearly 0, as the Pearson correlation coefficient was -0.089.

• Journal of the Korean institute of surface engineering
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• v.35 no.3
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• pp.121-126
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• 2002

WC/C multilayered films were deposited by arc ion plating and magnetron sputter hybrid system with various $C_2$H$_2$ flow rates and bias voltages. The coatings have been characterized with respect to their chemical composition (Glow Discharge Optical Emission Spectroscopy), hardness(Knoop micro-hardness), residual stress(Laser beam bending) and friction coefficient(Ball on disc type wear test). Deposition rate, microhardness and residual stress of WC/C films were observed to increase with increasing the $C_2$$H_2$ flow rates. The highest hardness and residual stress were measured to be 26.5 GPa and 1.1GPa for, WC/C film deposited at substrate bias of -100V. WC/C multilayered film was obtained very low friction coefficient(~0.1).

• Journal of Korean Society for Atmospheric Environment
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• v.14 no.6
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• pp.643-650
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• 1998

Many atmospheric dispersion models have been based on the Gaussian distribution concept of plume spread. In application of Gaussian plume dispersion models, vertical dispersion coefficient 3 has been known as a sensitive variable. Vertical diffusivity K2 (=Oz2/2t) tends to increase with surface roughness, and the value of K3 in urban area is larger than that in rural area due to heat emission as well as increased roughness. Though Pasquill proposed a modification scheme for qz vs x system of Pasquill-Gifford under consideration of roughness effect in 1976, there appears not to be realistic reexamination on the modification scheme. In this study literature review on the effect of terrain or roughness on venical plume dispersion has been carried out in order to improve the prediction results of atmospheric pollution concentration. Again a few research objectives on vertical atmospheric dispersion in complex terrain were Proposed.

• Proceedings of the Korean Vacuum Society Conference
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• 1997.07a
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• pp.169-172
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• 1997

MgO dielectric pprotection layer is ppreppared by R.F. reactive magnetron spputtering with Mg target under various conditions of spputtering ppressure, time and substrate tempperature. Discharge characteristics of ppDpp is also studied as a pparameter of MgO pprepparation conditions. As the working ppressure and substrate tempperature was increase, the discharge voltage was decreased. Two kinds of MgO ppreppared both spputtering and E-beam methods were stable after annealing at 35$0^{\circ}C$ for 120min. discharge voltage under 3 mixed gas(He+Xe0.2%+Ne30%) was V=130V, V=102V and ${\gamma}$ coefficient was twiced as much as that of dielectric layer.

• Journal of ILASS-Korea
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• v.6 no.1
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• pp.1-8
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• 2001

Fuel injection system is very important in diesel combustion. Recently electronic control of fuel injection system and common rail systems are introduced to reduce the emission and to increase the energy efficiency from diesel engine by control of the injection timing and duration. In this study, evaluation possibility of the system for electronic control by spool valve, one of the accumulator type injection systems with spool valve using solenoid was composed and the operating characteristics were investigated to evaluate the effects of spring coefficient, initial spring force, solenoid driving time, fuel supply pressure on the injection timing and duration. We could confirm the capability that diesel injection was electronically controlled by spool valve.

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.10
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• pp.2690-2698
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• 1995

Fuel atomization and mixture formation in an gasoline engine has influence on the engine performance and pollutant emission. The throttle valve installed in an intake system plays a greater role in control of mixture quantity in accordance with engine drive condition. In this study, the characteristics of secondary atomization developed at the downstream of the valves were observed using an image processing method. Two major kinds of valves, solid and perforated ones, are chosen in order to compare the valve performance with the experimental parameters of air flow rate, valve opening angle, and valve shapes. For the perforated valve, we can obtain the relatively small sized droplets, and nearly uniformed and dense distributed sprays with low loss coefficient than for the solid valve.

• Transactions of the Korean Society of Automotive Engineers
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• v.4 no.1
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• pp.218-228
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• 1996

The behaviors of the mixture at the downstream of throttle valve in a TBI type gasoline engine plays a greater role in design of intake system. A good mixture has been influencing directly not only on the engine power but also on the pollutant emission. The mixture flow in an intake manifold is very complex, and the flow characteristics are varied with the valve type, valve angle, inlet air flow rate, and the other flow factors. Three kinds of valve are chosen in this study, and the informations of the mixture flow are observed experimentally using a PIV apparatus. Perforate valve has a smaller recirculation zone than the case of solid valve with a lower valve loss coefficient, and iti is verified that the perforated valve is also suitable to control the flow rate in a mixture flow system.

• Journal of the Optical Society of Korea
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• v.9 no.3
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• pp.107-110
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• 2005

An optical method of measuring hematocrit noninvasively is presented. An LED Light with multiple wavelengths was irradiated on fingernail and transmitted light from the finger was measured to predict hematocrit. A finger probe contained an LED array and detector. Our previous experience showed that prediction accuracy was sensitive to reliability of the finger probe hardware and we optimized the finger probe parameters such as the internal color, detector area and the emission area of a light source based on Design of Experiment. Using the optimized finger probe, we developed a hematocrit monitoring system and tested with 549 persons. For the calibration model with 368 persons, a regression coefficient of 0.74 and a standard deviation of 3.67 and the mean percent error of $8\%$ were obtained. Hematocrits for 181 persons were predicted. We achieved a mean percent error of $8.2\%$ where the regression coefficient was 0.68 and the standard deviation was 3.69.

• Journal of Power System Engineering
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• v.10 no.1
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• pp.77-82
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• 2006

In this study, dissimilar friction welding were produced using 15mm diameter solid bar in chrome molybedenum steel(SCM440) to carbon steel(S45C) to investigate their mechanical properties and the relationship between the weld parameters and the nondestructive coefficients, such as AE counts and ultrasonic attenuation coefficient. The main friction welding parameters were selected to endure good quality welds on the basis of visual examination, tensile tests, Vickers hardness surveys of the bond of area and heat affected zone. The specimens were tested as-welded and post weld heat treated(PWHT). The tensile strength of the friction welded steel bars was increased up to 100％ of the S45C base metal under the condition of all heating time. The ductility of PWHT specimens is higher than as-welded.