• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.96-96
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• 2016

Nanotechnology mostly employs nano-materials and nano-structures with distinctive properties based on their size, structure, and composition. It is quite difficult to produce nano-materials and nano-structures with identical sizes, structures, and compositions in large quantities, because of spatiotemporal fluctuation of production processes. In other words, fluctuation is the bottleneck in nanotechnology. We propose three strategies to suppress such fluctuations: employing 1) difference between linear and nonlinear phenomena, 2) difference in time constants, and 3) nucleation as a bottleneck phenomenon. We are also developing nano- and micro-scale guided assembly using plasmas as a plasma nanofabrication.1-5) We manipulate nano- and micro-objects using electrostatic, electromagnetic, ion drag, neutral drag, and optical forces. The accuracy of positioning the objects depends on fluctuation of position and energy of an object in plasmas. Here we evaluate such fluctuations and discuss the mechanism behind them. We conducted in-situ evaluation of local plasma potential fluctuation using tracking analysis of fine particles (=objects) in plasmas. Experiments were carried out with a radio frequency low-pressure plasma reactor, where we set two quartz windows at the top and bottom of the reactor. Ar plasmas were generated at 200 Pa by applying 13.56MHz, 450V peak-to-peak voltage. The injected fine particles were monodisperse methyl methacrylate-polymer spheres of $10{\mu}m$ in diameter. Fine particles were injected into the reactor and were suspended around the plasma/sheath boundary near the powered electrode. We observed binary collision of fine particles with a high-speed camera. The frame rate was 1000-10000 fps. Time evolution of their distance from the center of mass was measured by tracking analysis of the two particles. Kinetic energy during the collision was obtained from the result. Potential energy formed between the two particles was deduced by assuming the potential energy plus the kinetic energy is constant. The interaction potential is fluctuated during the collision. Maximum amplitude of the fluctuation is 25eV, and the average is 8eV. The fluctuation can be caused by neutral molecule collisions, ion collisions, and fluctuation of electrostatic force. Among theses possible causes, fluctuation of electrostatic force may be main one, because the fine particle has a large negative charge of -17000e and the corresponding electrostatic force is large compared to other forces.

• Bulletin of the Korean Chemical Society
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• v.30 no.3
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• pp.567-572
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• 2009

In this study, the effects of counter ion valency of the electrolyte on the colloidal repulsion between two parallel cylindrical particles were investigated. Electrostatic interactions of the cylindrical particles were calculated with the variation of counter ion valency. To calculate the electrical repulsive energy working between these two cylindrical particles, Derjaguin approximation was applied. The electrostatic potential profiles were obtained numerically by solving nonlinear Poission-Boltzmann (P-B) equation and calculating middle point potential and repulsive energy working between interacting surfaces. The electrical potential and repulsive energy were influenced by counter ion valency, Debye length, and surface potential. The potential profile and middle point potential decayed with the counter ion valency due to the promoted shielding of electrical charge. On the while, the repulsive energy increased with the counter ion valency at a short separation distance. These behaviors of electrostatic interaction agreed with previous results on planar or spherical surfaces.

• Applied Chemistry for Engineering
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• v.19 no.1
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• pp.117-121
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• 2008

In this study, thin YSZ film was prepared by electrostatic spray deposition. The morphology of thin film was strongly influenced by precursor solution and substrate temperature. Especially, dense YSZ film was obtained at the substrate temperature of $400^{\circ}C$. The YSZ film growth rate was $12{\mu}m/h $ at the optimum conditions. Product film was characterized by XRD, FE-SEM and EDX.

• Journal of Environmental Science International
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• v.22 no.9
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• pp.1187-1197
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• 2013

The result of a small electrostatic precipitator which is in order to decrease indoor air pollution for optimal efficiency was shown as follows. Although the closer distance between the discharge electrode and dust collecting electrode shows the better throughput efficiency by forming strong electrostatic Field, it does not have profound impact in case of optimal dust collecting area. G.P(gas passage) which is the distance from dust collecting electrode to dust collecting electrode is a crucial factor to decide dust collecting efficiency. The narrower distance of G.P shows the better throughput efficiency whereas it decreases when the distance is too narrow since sparks ensue by increasing the capacity of electrostatic charging system 5 mm regards as optimal efficiency in this experiment. Although the higher voltage shows the higher dust collecting efficiency overall, the experiment was not able to keep performing since the sparks which decrease dust collecting efficiency ensue over 40 kV. The efficient and safe voltage state is considered 3.6 kV in this experiment. The most crucial factor for dust collecting efficiency of an electrostatic precipitator which is in order to decrease indoor air pollution is applied voltage. In addition, optimal raw gas flow rate(2.4 m/sec) is more important factor than the excessive increase of dust collecting area.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.9
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• pp.682-687
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• 2009

In order to investigate the effects of three different electrostatic discharge energies on gas explosions, a high-speed PIV system has been applied. The present study paid attention to the flame initiation by the gas explosions and its propagation at the existence of an obstacle within a chamber. Three different ignition energies such as 0.56 mJ, 52.87 mJ and 112.5 mJ were used. It is found that the ignition kernel is bent by the electrostatic discharge during the flame initiation. Tangential velocities of unburnt mixture ahead of initially propagating flame fronts are increased with increasing ignition energy, which makes the flame propagation faster before it reaches the obstacle. Although the flame speed was found to be less sensitive to the ignition energies, the flame developments were different. The effects of the energies on explosion pressures were also discussed.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2004.03a
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• pp.271-277
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• 2004

As one of the concepts of the laser/electric hybrid propulsion system, a feasibility study on possibilities of electrostatic acceleration of a laser ablation plasma induced from a solid target was conducted. Energy distributions of accelerated ions were measured by a Faraday cup. A time-of-flight measurement was also conducted for ion velocity measurement. It was found that an average speed of ions from a pure laser ablation in this case was about 20 km/sec for pulse energy of 40 $\mu$J/pulse with pulse width of 250 psec. On the other hand, through an electrostatic field with a + I ,000 V electrode, the speed could be accelerated up to 40 km/sec. It was shown that the electrode with positive potential was more effective than that with negative potential for positive-ion acceleration in laser induced plasma, or pulsed plasma, in which ions were induced with the Coulomb explosion following electrons. In addition, the ion-acceleration or deceleration strongly depended on conditions of pairs of inner diameter and electrodes gap.

• Journal of Electrical Engineering and Technology
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• v.9 no.1
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• pp.239-246
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• 2014

Incineration is conceptually sound as a waste treatment technology. There is, however, concern over its emissions when it is improperly designed and operated. An electrostatic precipitator is one of the most commonly used devices to control particulate emissions from boilers, incinerators and some other industrial processes. In this work, a modular electrostatic precipitator with sizing of $1m{\times}1m{\times}1m$ was developed for removal of particulate matter from the exhaust gases of a small waste incinerator. Its design was based on a simple wire-and-plate concept. The corona discharge wires were connected to a positive high-voltage pulse generator, while the collection plates were grounded. The high-voltage pulse generator was used to produce the corona discharge field between the individual discharge wire and the collection plate. The particulate-laden exhaust gas flow was directed across the corona discharge field. The charged particles were deflected outward and collected on the plate. The collection efficiency was evaluated as a mass loading ratio between the difference at the inlet and the outlet to the particulate loading at the inlet of the precipitator. The collection efficiency of this modular electrostatic precipitator design was approximately 80 %.

• Journal of the Semiconductor & Display Technology
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• v.21 no.1
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• pp.5-11
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• 2022

Despite the increasing importance of manufacturing and application R&D for ultrapure deionized water and electrolyzed ion water, various and systematic studies have not been conducted until now. In this study, the electrostatic discharge (ESD) behavior of electrolyzed ion water using a proton exchange membrane(PEM) was evaluated according to the type, flow rate, and bubble of electrolyzed ion water. In addition, by observing that Oxidation Reduction Potential (ORP) value returns to the unique value of electrolyzed ion water after electrostatic discharge, the possibility of two types of ions participating in electrostatic discharge ((H₂O)_n⁺ (assumed)) and ions for maintaining the characteristics of electrolyzed water could be inferred. In order to confirm the chemical structure and characteristics of the cations, in-depth research related to water molecular orbital energy or band gap should be followed.

• Journal of Korean Society for Atmospheric Environment
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• v.26 no.2
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• pp.234-240
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• 2010

Gas flow uniformity is an important factor to guarantee particle removal performance of electrostatic precipitators (EP), and the gas flow uniformity is evaluated by a fraction of standard deviation to the mean of gas flow distribution (%RMS) or a technical standard, ICAC EP-7, provided by The Institute of Clean Air Companies. In this study, relationship between the ICAC EP-7 and %RMS in evaluation of gas flow uniformity was investigated in terms of flow velocity. The maximum values of %RMS for gas velocity distribution of normal distribution has been obtained, and the maximum values of %RMS with gas velocity distribution satisfying ICAC EP-7 standards were also evaluated. With gas flow distribution obtained from CFD analysis and physical model test of real EP, %RMS values were calculated and it was tested if those gas flow distribution satisfy the criteria specified in ICAC EP-7. The %RMS values satisfying criteria of ICAC have been appeared to have similar values with %RMS values calculated with normal distribution of gas velocities.

• Journal of Surface Science and Engineering
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• v.49 no.6
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• pp.567-574
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• 2016

We have analyzed chemical properties of polysiloxane and polysilazane films, respectively, as sealing materials for electrostatic chuck (ESC) and have investigated the possibility of polysilazane as an alternative sealant to polysiloxane. It has been revealed that Si-O with organic bonding ($Si-CH_3$) existed in polysiloxane films compared to only pure Si-O bonding in polysilazane films. The sealing property of polysilazane has been found outstanding even in a short time of application. In the polysiloxane films containing $H_2O$, pin holes have been found possibly due to $CO_2$ gas evolution, and low adhesion with Si substrate has been observed after heat stress test in connection with the existence of organic bonding. After acid resistance test in 0.5 vol.% HF, 68 wt.% $HNO_3$, and 37 wt.% HCl solution, polyilazane films have shown a longer survival times. Compared to the conventional polysiloxane sealant, polysilazane is expected as a new sealing material because of good thermal and chemical stability.