• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.113-113
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• 2008

Cu CMP (Chemical Mechanical Planarization) has been used to remove copper film and obtain a planar surface which is essential for the semiconductor devices. Generally, it is known that chemical reaction is a dominant factor in Cu CMP comparing to Silicon dioxide CMP. Therefore, Cu CMP slurry has been regarded as an important factor in the entire process. This investigation focused on understanding the effect of corrosion inhibitor on copper surface and CMP results. Benzotriazole (BTA) was used as a corrosion inhibitor in this experiment. For the surface analysis, electrochemical characteristics of Cu was measured by a potentiostat and surface modification was investigated by X-ray photoelectron spectroscopy (XPS). As a result, corrosion potential (Ecorr) increased and nitrogen concentration ratio on the copper surface also increased with BTA concentration. These results indicate that BTA prevents Cu surface from corrosion and forms Cu-BTA layer on Cu surface. CMP results are also well matched with these results. Material removal rate (MRR) decreased with BTA concentration and static etch rate also showed same trend. Consequently, adjustment of BTA concentration can give us control of step height variation and furthermore, this can be applicable for Cu pattern CMP.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.117-117
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• 2008

In MIM capacitor, poly-Si bottom electrode is replaced with metal bottom electrode. Noble metals can be used as bottom electrodes of capacitors because they have high work function and remain conductive in highly oxidizing conditions. In addition, they are chemically very stable. Among novel metals, Ru (ruthenium) has been suggested as an alternative bottom electrode due to its excellent electrical performance, including a low leakage of current and compatibility to high dielectric constant materials. Chemical mechanical planarization (CMP) process has been suggested to planarize and isolate the bottom electrode. Even though there is a great need for development of Ru CMP slurry, few studies have been carried out due to noble properties of Ru against chemicals. In the organic chemistry literature, periodate ion ($IO_4^-$) is a well-known oxidant. It has been reported that sodium periodate ($NaIO_4$) can form $RuO_4$ from hydrated ruthenic oxide ($RuO_2{\cdot}nH_2O$). $NaIO_4$ exist as various species in an aqueous solution as a function of pH. Also, the removal mechanism of Ru depends on solution of pH. In this research, the static etch rate, passivation film thickness and wettability were measured as a function of slurry pH. The electrochemical analysis was investigated as a function of pH. To evaluate the effect of pH on polishing behavior, removal rate was investigated as a function of pH by using patterned and unpatterned wafers.

• Proceedings of the KSME Conference
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• 2008.11b
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• pp.2198-2203
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• 2008

Hydrogen which can be produced through reforming process of hydrocarbon fuel is supplied into anode side of fuel cell system. In the fuel cell, only 70% of hydrogen is consumed through electrochemical reaction and 30% hydrogen passed by as anode off gas. When electrical output of fuel cell is within range of 1.0 to 3.0kW, burner for the reformer uses only anode off gas. And it uses mixture gas of anode off gas and LNG within range of 3.5 to 5.0kW in electrical output. CHEMKIN 4.1 program's Premixed code was used for calculating the properties of each gas. Results show that burning velocity and adiabatic flame temperature are 34.4cm/s, 1681.7K at equivalence ratio 0.8 within range of 1.0kW to 3.0kW and for cases of 3.5kW, 5.0kW, of electrical output, burning velocity and adiabatic flame temperature represent 30.5, 29.8cm/s and 1722.8, 1750K respectively. CO shows the lowest emission index at equivalence ratio 0.8 and NOx reveals the highest emission index at equivalence ratio 1.

• Bulletin of the Korean Chemical Society
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• v.30 no.4
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• pp.783-786
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• 2009

Thermogravimetric analysis (TGA), differential scanning calorimetry (DSC) and ion chromatography(IC) were employed to analyze the thermal behavior of $Li_xCoO_2$ cathode material of lithium ion battery. The mass loss peaks appearing between 60 and 125 ${^{\circ}C}$ in TGA and the exothermic peaks with 4.9 and 7.0 J/g in DSC around 75 and 85 ${^{\circ}C}$ for the $Li_xCoO_2$ cathodes of 4.20 and 4.35 V cells are explained based on disruption of solid electrolyte interphase (SEI) film. Low temperature induced HF formation through weak interaction between organic electrolyte and LiF is supposed to cause carbonate film disruption reaction, $Li_2CO_3\;+\;2HF{\rightarrow}\;2LiF\;+\;CO_2\;+\;H_2O$. The different spectral DSC/TGA pattern for the cathode of 4.5 V cell has also been explained. Presence of ionic carbonate in the cathode has been identified by ion chromatography and LiF reported by early researchers has been used for explaining the film SEI disruption process. The absence of mass loss peak for the cathode washed with dimethyl carbonate (DMC) implies ionic nature of the film. The thermal behavior above 150 ${^{\circ}C}$ has also been analyzed and presented.

• Corrosion Science and Technology
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• v.19 no.4
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• pp.203-210
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• 2020

The corrosion behavior of super austenitic stainless steel was studied by examining the characteristics of the sigma phase formed in the steel. A range of experimental and analytical methods was employed, including potentiodynamic polarization tests, critical pitting temperature tests, transmission electron microscopy, and energy-dispersive spectroscopy. Three steel samples with different sigma phase levels were obtained by intentionally adjusting the manufacturing process. The results showed that the corrosion resistance of the samples was strongly dependent upon the size and distribution of the sigma phase precipitated in the samples. The larger the size of the sigma phase, the higher the Mo content in the sigma phase and the higher the depletion level of Mo at the interface between the matrix/sigma phase, the more samples with a coarse-sized sigma phase were susceptible to localized pitting corrosion at the interface. These results suggest that various manufacturing processes, such as welding and the post-heat treatment of the steel, should be optimized so that both the size and fraction of the sigma phase precipitated in the steel are small to improve the resistance to localized corrosion.

• Journal of Hydrogen and New Energy
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• v.25 no.4
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• pp.436-442
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• 2014

$LaCoO_3$ powders synthesized by Pechini process were pulverized by planetary ball-milling to decrease particle size and characterized as a catalyst in alkaline solution for oxygen reduction and evolution reaction (ORR & OER). The changes of physical properties, such as particle size distribution, surface area and electric conductivity, were analyzed as a function of ball-milling time. Also, the variations of the crystal structure and surface morphology of ball-milled powders were examined by X-ray diffraction (XRD) and scanning electron microscopy (SEM), respectively. The electrochemically catalytic activities of the intrinsic $LaCoO_3$ powders decreased with increasing ball-milling time, but their electrochemical performance as an electrode improved by the increase of the surface area of the powder.

• Ceramist
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• v.23 no.2
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• pp.200-210
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• 2020

Supported catalysts are at the heart of manufacturing essential chemical, agricultural and pharmaceutical products. While the longevity of such systems is critically hinged on the durability of metal nanoparticles, the conventional deposition/dispersion techniques are difficult to enhance the stability of the metal nanoparticles due to the lack of control over the interaction between metal-support. Regarding this matter, ex-solution has begun to be recognized as one of the most promising methodologies to develop thermally and chemically robust nanoparticles. By dissolving desired catalysts as a cation form into a parent oxide, fine and uniformly distributed metal nano-catalysts can be subsequently grown in situ under reductive heat treatment, which is referred to ex-solution. Over the several years, ex-solved analog has resulted in tremendous progress in the chemical-electrochemical applications due to the exceptional robustness coupled with ease synthesis. Herein, we describe the ex-solution process in detail which therein introducing the unique characteristics of ex-solved particles that distinguish them from conventionally dispersed nanoparticles. We then go through the history of science regarding the ex-solution phenomena and summarize several major research achievements which embrace the ex-solved nanoparticles to markedly promote the catalytic performances. In conclusion, we address the remaining challenges and the future perspectives of this rapidly growing field.

• Journal of the Microelectronics and Packaging Society
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• v.19 no.2
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• pp.55-59
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• 2012

Defects such as voids or seams are frequently found in TSV via filling process. To achieve defect-free copper via filling, organic additives such as suppressor, accelerator and leveler were necessary in a copper plating bath. However, by-products stemming from the breakdown of these organic additives reduce the lifetime of the devices and plating solutions. In this research, the effects of levelers on copper electrodeposition were investigated without suppressor and accelerator to lower the concentration of additives. Threelevelers(janus green B, methylene violet, diazine black) were investigated to study the effects of levelers on copper deposition. Electrochemical behaviors of these levelers were different in terms of deposition rate. Filling performances were analyzed by cross sectional images and its characteristics were different with variations of levelers.

• Journal of Surface Science and Engineering
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• v.50 no.5
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• pp.322-331
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• 2017

Hydrogen evolution reaction(HER) was studied over $Ni_4Cr$ nanofibers(NFs) prepared by electrospinning method and oxidation/reduction heat treatment for alkaline water electrolysis. The physicochemical and electrochemical properties such as average diameter, lattice parameter, HER activity of synthesized $Ni_4Cr$ NFs could be modified by proper electrospinning process condition and reduction temperature. It was shown that $Ni_4Cr$ NFs had average diameter from 151 to 273 nm. Also, it exhibited the overpotential between 0.419 V and 0.526 V at $1mA/cm^2$ and Tafel slope of -334.75 mV to -444.55 mV per decade in 1 M KOH solution. These results indicate that $Ni_4Cr$ NFs with reduction heat treatment at $600^{\circ}C$ show thinnest diameter and highest HER activity among the other catalysts.

• Korean Journal of Materials Research
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• v.10 no.10
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• pp.715-720
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• 2000

By the mechanical alloying method. Ni-WC composite materials were prepared to improve the deformation-resistance for creep and sintering of Ni-anode at the operating temperature of $650^{\circ}C$. Mechanically alloyed powder w was initially fabricated by ball milling for 80hr, and then amorphization was occurred by the destruction of ordered crystals based on XRD analysis. In order to investigate the electrochemical performance and sheet characteristics of Ni-WC anode, tape casting process was adopted. Finally, the obtained sheet thickness of Ni- we after sintering at $1180^{\circ}C$ for 60 minutes in $H_2$ atmosphere was O.9mm and the average pore size was $3~5{\mu\textrm{m}}$ with porosities of 55%. The second phase was not observed in Ni- W matrix while W particles were finely and uniformly distributed in Ni matrix. This fine and uniform distributed W particles in Ni matrix are expected to enhance the mechanical properties of Ni anode through the dispersion and solid solution hardening mechanisms.