• The Transactions of The Korean Institute of Electrical Engineers
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• v.67 no.7
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• pp.840-845
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• 2018

BLDC motor is widely used as a servo motor due to high efficiency, high power density, low inertia, and low maintenance. However, BLDC motor generally needs position and velocity sensors to control actuation system. Usually, analog tachometers and encoders have been used for velocity feedback sensors. However, using these types of sensors have problems such as the cost, space, and malfunction. So, This paper is to propose a new velocity measurement method using linear hall-effect and enhanced differentiator for BLDC motor. In order to verify the feasibility of the proposed method, several simulations and experiments are performed. It is shown that the proposed velocity measurement method can satisfy the requirements without using of velocity sensor.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1960-1962
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• 1996

A thermopneumatic micropump with two micronozzles has been fabricated and tested. The actuator consists of a p+ diaphragm and a pyrex glass on which a microheater is deposited. Two micronozzles are fabricated on either side of a single silicon wafer and behave as a dynamic passive valves. The actuator and the micronozzle are assembled to make a micropump. The center deflection of the actuator diaphragm to step voltage input has been measured. The dynamic test hag been performed by measuring the center deflection of the diaphragm under various input voltages and duty ratios. Also dynamic pumping test is performed. The measured built-up pressure between inlet and outlet of the micropump is 80 Pa for the actuation at 20V, 10 Hz.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2239-2241
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• 2000

In this study, we fabricated surface micromachined mirror that is actuated by magnetic force. The mirror was fabricated with Al, and Ni was electroplated on the surface of Al mirror as a magnetic material. The fabricated mirror is actuated by magnetic force of simple solenoid. The maximum deflection angle is about 70$^{\circ}$ when the applied magnetic field is about $1.5{\times}10^4$A/m.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.2108-2110
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• 2004

In this paper, a novel tunable bandpass filter using tunable series inductors and MEMS switches for wireless LAN applications was proposed. The proposed tunable filter was fabricated using a micromachining technology and performances of the fabricated filter were estimated. The filter consists of spiral inductors, MIM capacitors and direct-contact type MEMS switches, and its frequency tunability is achieved by changing the inductance that is induced by ON/OFF actuations of the MEMS switches. The actuation voltage of the MEMS switches was 58 V, and the measured center frequencies were 2.55 GHz and 5.1 GHz, respectively. The passband insertion loss and 3-dB bandwidth were 4.2 dB and 22.5 % at 2.55 GHz, and 5.2 dB and 23.5 % at 5.1 GHz, respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.596-602
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• 2002

An easy elevator for learning originated is opened to compare the existed learning equipment, and it had a high studying efficient that the sequence control circuit can opens and closes with the wire. The structure of equipment to be controlled from the first floor to the fifth floors is demonstrated a constructive apparatus by a lamp atc to express the function of the open-close of the door according to the cage moving with a mechanical actuation of the forward-reverse breaker and the motor of load and a mechanical actuation of hand-operation control components of push-button S/W and L/S and relay etc. These components let connects each other in order to control of the elevator function with the auto program and the designed sequence control circuit. Consequent1y the process of these functions of 1~5steps could operates the cage with an auto program of the elevator and the sequence control circuit. The sequence control circuit is controlled by the step of forward and reverse to follow as that the sensor function of the L/S1~L/S5 let posit with the control switchs of S/W1~S/W5 of PLC testing panel and switchs of S/W1~S/W5 installed on the transparent acryl plate of the frame. In here, improved apparatus is a hand-auto operation combined learning equipment to study the principle and a technique of the originated sequence control circuit and the auto program of PLC.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1547-1552
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• 2003

In this paper, we present a planar single-crystalline silicon x-axis micro-gyroscope fabricated with a perfectly aligned vertical actuation combs on one silicon wafer, using the extended SBM technology. The fabricated x-axis micro-gyroscope has the resolution of 0.1 deg/sec, the bandwidth of 100 Hz. These research results allow integrating 6 axes inertial measurement (3 accelerations and 3 angular rates) on the same silicon substrate using the same process for the first time.

• 한국정보통신설비학회:학술대회논문집
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• 2004.08a
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• pp.11-14
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• 2004

In this paper, a novel tunable bandpass filter using tunable series inductors and MEMS switches for wireless LAN applications was proposed. The proposed tunable filter was fabricated using a micromachining technology and performances of the fabricated filter were estimated. The filter consists of spiral inductors, MIM capacitors and direct-contact type MEMS switches, and its frequency tunability is achieved by changing the inductance that is induced by ON/OFF actuations of the MEMS switches. The actuation voltage of the MEMS switches was 58 V, and the measured center frequencies were 2.55 GHz and 5.1 GHz, respectively. The passband insertion loss and 3-dB bandwidth were 4.2 dB and 22.5 % at 2.55 GHz, and 5.2 dB and 23.5 % at 5.1 GHz, respectively.

• Transactions on Electrical and Electronic Materials
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• v.11 no.2
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• pp.65-68
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• 2010

The operation principle of a traveling wave rotary type ultrasonic motor can be successfully applied to the fluidic transfer mechanism of the micro-pump. This paper proposes an innovative valveless micro-pump type that uses an extensional vibration mode of a traveling wave as a volume transportation means. The proposed pump consists of coaxial cylindrical shells that join the piezoelectric ceramic ring and metal body, respectively. In order to confirm the actuation mechanism of the proposed pump model, a numerical simulation analysis was implemented. In accordance with the variations in the exciting wave mode and pump body dimension, we analyzed the vibration displacement characteristics of the proposed model, determined the optimal design condition, fabricated the prototype pump from the analysis results and evaluated its performance. The maximum flow rate was approximately $595\;{\mu}L/min$ and the highest back pressure was 0.88 kPa at an input voltage of $130\;V_{rms}$. We confirmed that the peristaltic motion of the piezoelectric actuator was effectively applied to the fluid transfer mechanism of the valveless type micro pump throughout this research.

• 한국정보통신설비학회:학술대회논문집
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• 2006.08a
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• pp.67-70
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• 2006

This paper deals with a single crystalline silicon (SCS) RF MEMS switch for telecommunication system applications. The proposed SCS switch was fabricated using a silicon-on-glass (SiOG) process and its performances in terms of RF responses, switching time, lifetime were characterized. The proposed SCS switch consists of movable plates, mechanical spring structures, which are composed of robust SCS, resulting in mechanically good stability, The measured actuation voltage was 30 V, and with this applied voltage, the insertion loss and isolation characteristics were measured to be 0.05 and 44.6 dB at 2 GHz respectively. The measured switch ON and OFF time were 13 and $9{\mu}s$, respectively. The lifetime of the fabricated switch was tested. Even after over 1 billion cycles repeated ON/OFF actuations, the switch maintained its own characteristics.

• KIEE International Transactions on Electrophysics and Applications
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• v.5C no.6
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• pp.264-269
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• 2005

The electrostatic comb drive actuator is one of the main building blocks in the field of micro electro-mechanical systems (MEMS). Most of the comb actuators presented previously have fingers that are rectangular in shape which produce a stable, constant force output during actuation. The use of sawtooth fixed fingers in a comb drive, which were presumed to produce an increasing force output with displacement due to the increased number of regions where fringing force, the driving force of comb actuators, appear. The dimensions of the sawtooth were derived from finite element analysis (FEA) of simplified finger models with sawtooth type fingers of various dimension and were compared to the rectangular finger model that showed that the sawtooth type fingers have $7\~9$ times stronger driving force. Finally, comb drive actuators with sawtooth type and rectangular fingers were fabricated and although the gap was bigger, the comb actuator with sawtooth type fingers showed about 1.7 times greater electrostatic force than the one with rectangular fingers at equal driving voltages. In conclusion, using the proposed sawtooth type comb fingers in a comb drive makes it possible to increase its displacement or reduce the driving voltage.