Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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A Micromachined Tunable Bandpass Filter Using Tunable Series Inductors For WLAN Applications

가변 직렬 인덕터를 이용한 무선랜 응용 MEMS 가변 대역 통과 필터

  • Kim, Jong-Man (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Park, Jae-Hyoung (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Kim, Jung-Mu (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Lee, Sang-Hyoung (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Baek, Chang-Wook (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Kwon, Young-Woo (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Kim, Yong-Kweon (School of Electrical Engineering and Computer Science, Seoul National University)
  • 김종만 (서울대학교 전기 컴퓨터 공학부) ;
  • 박재형 (서울대학교 전기 컴퓨터 공학부) ;
  • 김정무 (서울대학교 전기 컴퓨터 공학부) ;
  • 이상효 (서울대학교 전기 컴퓨터 공학부) ;
  • 백창욱 (서울대학교 전기 컴퓨터 공학부) ;
  • 권영우 (서울대학교 전기 컴퓨터 공학부) ;
  • 김용권 (서울대학교 전기 컴퓨터 공학부)
  • Published : 2004.07.14
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Abstract

In this paper, a novel tunable bandpass filter using tunable series inductors and MEMS switches for wireless LAN applications was proposed. The proposed tunable filter was fabricated using a micromachining technology and performances of the fabricated filter were estimated. The filter consists of spiral inductors, MIM capacitors and direct-contact type MEMS switches, and its frequency tunability is achieved by changing the inductance that is induced by ON/OFF actuations of the MEMS switches. The actuation voltage of the MEMS switches was 58 V, and the measured center frequencies were 2.55 GHz and 5.1 GHz, respectively. The passband insertion loss and 3-dB bandwidth were 4.2 dB and 22.5 % at 2.55 GHz, and 5.2 dB and 23.5 % at 5.1 GHz, respectively.

Keywords