• Transactions on Electrical and Electronic Materials
• /
• 제17권2호
• /
• pp.92-97
• /
• 2016

This paper presents design and simulation of wide band RF microswitch that uses electrostatic actuation for its operation. RF MEMS devices exhibit superior high frequency performance in comparison to conventional devices. Similar techniques that are used in Very Large Scale Integration (VLSI) can be employed to design and fabricate MEMS devices and traditional batch-processing methods can be used for its manufacturing. The proposed switch presents a novel design approach to handle reliability concerns in MEMS switches like dielectric charging effect, micro welding and stiction. The shape has been optimized at actuation voltage of 14-16 V. The switch has an improved restoring force of 20.8 μN. The design of the proposed switch is very elemental and primarily composed of electrostatic actuator, a bridge membrane and coplanar waveguide which are suspended over the substrate. The simple design of the switch makes it easy for fabrication. Typical insertion and isolation of the switch at 1 GHz is -0.03 dB and -71 dB and at 85 GHz it is -0.24 dB and -29.8 dB respectively. The isolation remains more than - 20 db even after 120 GHz. To our knowledge this is the first demonstration of a metal contact switch that shows such a high and sustained isolation and performance at W-band frequencies with an excellent figure-of merit (fc=1/2.pi.Ron.Cu =1,900 GHz). This figure of merit is significantly greater than electronic switching devices. The switch would find extensive application in wideband operations and areas where reliability is a major concern.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
• /
• pp.160-163
• /
• 2003

This paper describes on anodic bonding characteristics of MLCA(Multi Layer Ceramic Actuator) to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with same properties were deposited on MLCA under optimum RF magneto conditions(Ar 100 %, input power $1\;/cm^2$). After annealing in $450^{\circ}C$ for 1 hr, the anodic bonding of MLCA to Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in - 760 mmHg. Then, the MLCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity is 0.05-008 %FS. Moreover, any damages or separation of MICA/Si bonded interfaces do not occur during actuation test. Therefore, it is expected that anodic bonding technology of MICA/Si wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

• 한국전기전자재료학회논문지
• /
• 제16권4호
• /
• pp.351-357
• /
• 2003

An easy learning elevator originated is opened to compare the existed teaming equipment, and it had a high studied efficiency that the sequence control circuit can open and close with the wire. The structure of equipment to be controlled from the first floor to the fifth floors is demostrated by the constructive apparatus with the lamps to express the function of the open-close of the door according to the cage moving with a mechanical actuation of the forward reverse breaker and the motor of load, and the mechanical actuation of hand-operation control components of push-button S/W and L/S and relay etc. These components let connect each other in order to control of the elevator function with the auto program and the designed sequence control circuit. Consequently the cage could go and come till 1∼5 steps with an auto program of the elevator and the sequence control circuit. The sequence control circuit is controlled by the step of forward and reverse to follow as that the sensor function of L/S1 ∼ L/S5 let posit with the control switchs of S/W1 ∼ S/W5 of PLC testing panel and switchs of S/W1 ∼ S/W5 installed on the transparent acryl plate of the frame. In here, improved apparatus is the hand-auto operation combined learning equipment to study the principle and technique of the originate sequence control circuit and the auto program of PLC.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
• /
• pp.374-375
• /
• 2006

This paper describes anodic bonding characteristics of MCA to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with the same properties were deposited on MCA under optimum RF sputter conditions (Ar 100 %, input power $1\;W/cm^2$). After annealing at $450^{\circ}C$ for 1 hr, the anodic bonding of MCA to Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in $110^{-6}$ Torr vacuum condition. Then, the MCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation and simulation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity being 0.05-0.08 %FS. Moreover, any damages or separation of MCNSi bonded interfaces did not occur during actuation test. Therefore, it is expected that anodic bonding technology of MCNSi-wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

• Structural Engineering and Mechanics
• /
• 제35권4호
• /
• pp.387-407
• /
• 2010

In this paper, using perturbation and Galerkin method, the response of a resonant viscoelastic microbeam to an electric actuation is obtained. The microbeam is under axial load and electrical load. It is assumed that midplane is stretched, when the beam is deflected. The equation of motion is derived using the Newton's second law. The viscoelastic model is taken to be the Kelvin-Voigt model. In the first section, the static deflection is obtained using the Galerkin method. Exact linear symmetric mode shape of a straight beam and its deflection function under constant transverse load are used as admissible functions. So, an analytical expression that describes the static deflection at all points is obtained. Comparing the result with previous research show that using deflection function as admissible function decreases the computation errors and previous calculations volume. In the second section, the response of a microbeam resonator system under primary and secondary resonance excitation has been obtained by analytical multiple scale perturbation method combined with the Galerkin method. It is shown, that a small amount of viscoelastic damping has an important effect and causes to decrease the maximum amplitude of response, and to shift the resonance frequency. Also, it shown, that an increase of the DC voltage, ratio of the air gap to the microbeam thickness, tensile axial load, would increase the effect of viscoelastic damping, and an increase of the compressive axial load would decrease the effect of viscoelastic damping.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1997년도 하계학술대회 논문집 A
• /
• pp.168-170
• /
• 1997

This paper presents the dynamic analysis of a reciprocating actuation system based on moving magnet actuator for gas compression. For the analysis of the linear actuator, an axisymmetric finite element method (FEM) considering the saturation effect of the magnetic material is used, and electrical circuit equation, mechanical dynamic equation and pressure dynamics are coupled. In the FE analysis, we adopt a moving line technique. The pressure dynamics of the gas in the compressor is modeled by using the law of thermodynamics. The analysis results are compared fairly well with experimental ones.

• Transactions on Electrical and Electronic Materials
• /
• 제17권1호
• /
• pp.7-12
• /
• 2016

This paper proposes a metal contact RF MEMS switch which utilizes a see-saw mechanism to acquire a switching action. The switch was built on a quartz substrate and involves vertical deflection of the beam under an applied actuation voltage of 5.46 volts over a signal line. The see-saw mechanism relieves much of the operation voltage required to actuate the switch. The switch has a stiff beam eliminating any stray mechanical forces. The switch has an excellent isolation of −90.9 dB (compared to − 58 dB in conventional designs ), the insertion of −0.2 dB, and a wide bandwidth of 88 GHz (compared to 40 GHz in conventional design ) making the switch suitable for wide band applications.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2009년도 제40회 하계학술대회
• /
• pp.1499_1500
• /
• 2009

In this paper, we present a simple fabrication process for sloped electrodes in 2-degree of fredom(DOF) scanning micromirror employing pholydimethylsiloxane(PDMS). Using this process, quasi-conic figure electrode is successfully fabricated on the substrate. Simulation results show sloped electrodes decrease actuation voltage down to 22% compared with parallel plate type of electrodes having the same electrode area.

• 센서학회지
• /
• 제9권3호
• /
• pp.203-207
• /
• 2000

ISFET 포도당센서는 전류법적인 엑츄에이션(amperometric actuation)기법을 도입하여 감도 향상에 큰 이점을 얻을 수 있었다. 그러나 이러한 측정법은 측정 후, 감지막 내부와 외부사이에 화학적 평형상태를 유지하려는 수소이온의 이동 때문에 초기 출력 값을 회복하는 데 많은 시간을 필요로 한다. 이러한 회복시간 지연문제는 센서의 실용화 장애 요인 중 하나이다. 본 논문에서는 백금작업전극에 환원전위를 인가하여 수산화($OH^-$)이온을 인위적으로 발생시킴으로써 감지막 내의 수소이온 농도를 조절하는 새로운 방법을 제안하였다. 제안된 방법으로 실험한 결과, 기존에 수십 분 소요되었던 회복시간을 2분 이내로 단축하였다.

• KIEE International Transactions on Electrophysics and Applications
• /
• 제4C권5호
• /
• pp.247-251
• /
• 2004

We report highly improved yield strength of nickel thin film, prepared using electroplating. The micro-scaled nickel cantilever is found to have significantly higher yield strength than bulk nickel. For the yield strength test, the heights of the micro-scaled cantilever were varied up to 60 ${\mu}{\textrm}{m}$ and electrostatic force was used for actuation. Stress of the bent cantilever was estimated using the FEM large deflection model. The yield strength of the thin nickel film is found to be over five times higher than that of the bulk nickel previously published. Results from this study indicate that metal microstructures can be used for MEMS applications requiring large deflection.