• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.147-150
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• 2005

Low actuation voltage and no contact stiction are the important factors to apply MEMS RF switches to mobile devices. Conventional electrostatic MEMS RF switches require several tens of voltages for actuation. In this paper we propose PAS MEMS RF switch which adopt PZT actuators and seesaw cantilevers to meet the above requirements. The fundamental structures of PAS MEMS switch were designed, optimized, and fabricated. Through the developed processes PAS SPDT MEMS RF switches were successfully fabricated on 4" wafers and they showed good electrical properties. The driving voltage was less than 5 volts. And the insertion loss was -0.5dB and the isolation was 35dB at 5GHz. The switching speed was about 5kHz. So these MEMS RF switches can be applicable to mobile communication devices or wireless multi-media devices at lower than 6GHz.

• Applied Chemistry for Engineering
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• v.17 no.6
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• pp.586-590
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• 2006

As one of electro active polymers for soft smart materials, the ionic polymer metal composites (IPMC) are easy to produce through chemical reduction processing and show high displacements at low voltage. When the IPMC actuates, the deformation depends on a few factors including the structure of based membrane, species and morphology of the metal electrodes, the nature of cations and the level of hydration. As previously published, we have been studying on improvement of actuation through surface electrode modification of IPMC to grasp the effect of electrode morphology on actuation. This study is comparative experiments through the chemical reaction and deposition by ion beam assisted deposition (IBAD) in order to prepare the very thin and homogeneous surface electrode of IPMC. The IPMCs were prepared with different surface roughness of polymer membrane, and the influence of the surface roughness on the actuation was studied. By investigating the electrical properties and driving displacement, the actuating properties of IPMC with different surface roughness were studied.

• JSTS:Journal of Semiconductor Technology and Science
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• v.2 no.4
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• pp.280-287
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• 2002

We present technical issues involved in the development of actuators and sensors for applications to high-precision Micro Electro Mechanical System (MEMS). The technical issues include fabrication uncertainty and noise disturbance, causing major difficulties for MEMS to achieve high-precision actuation and detection functions. For nano-precision actuators, we solve the fabrication instability and electrical noise problems using digital actuators coupled with nonlinear mechanical modulators. For the high-precision capacitive sensors, we present a branched finger electrodes using high-amplitude anti-phase sensing signals. We also demonstrate the potential applications of the nanoactuators and nanodetectors to high-precision positioning MEMS.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.06a
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• pp.1521-1527
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• 2000

A micromirror actuated by piezoelectric unimorph cantilevers is proposed as a tine-tracking device for high-density optical data storage. Bending motions of the metal/PZT/metal unimorphs translate an integrated micromirror along the out-of-plane vertical direction. The micromirror alters the optical path of the incident laser beam and linearly steers the reflected laser beam by its out-of-plane parallel actuation. Numerical analysis shows that the actuated micromirror can satisfy the tracking speed imposed by the requirement on the access time for the high-density optical data storage up to few tens Gbitlin2 owing to the light mass of the micromirror. In this paper, preliminary characteristics of the micro-machined PZT actuated micromirror (PAM) are reported. Only a 360 nm-thick PZT film deposited by sol-gel process shows both good electrical and mechanical characteristics for the fine-tracking actuator. The micromirror can be easily actuated up to several micrometers under low voltage operation condition well below 10 volts.

• Proceedings of the KIEE Conference
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• 1995.11a
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• pp.606-608
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• 1995

A thermally actuated micro-relay using a mercury-contact has been designed and fabricated. The mercury actuation was achieved by external nitrogen pressure and the mercury-contact was moved by actuation pressure of 110torr in the 100${\mu}m$ wide microchannel. The Injection pressure of mercury was 300torr in the 60${\mu}m$ wide microchannel of the micro relay structure.

• Journal of Power Electronics
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• v.18 no.3
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• pp.871-878
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• 2018

In this paper, the conducted EMI reduction performances of active feed-forward current-sensing current-actuation (CSCA) and voltage-sensing current-actuation (VSCA) filters for a three-phase induction motor drive system are evaluated by experiments. For comparison purposes, the conducted EMI (CM emission, DM emission and total emission) of a three-phase induction motor drive with a conventional CM choke, a conventional CM choke in series with an active VSCA filter, and an active CSCA filter (where the CM choke was modified and used as a sensing current transformer) were compared to the case of a system without any filter inserted. Experimental results show that the active CSCA and VSCA filters can improve the CM reduction performance of the conventional CM choke by about 5 dB especially at low-frequencies. However, for DM comparisons, it shows that there is no different between cases with and without filters inserted.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.275-278
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• 2004

Electro-Active Paper (EAPap) is attractive for EAP actuator due to its merit in terms of light weight, dry condition, large displacement output, low actuation voltage and low power consumption. The EAPap is based on cellulose paper, and is shown to involve primarily transport of ions in response to an external electric field. This actuating mechanism is similar to conductive polymer based actuators. For performance improvement of EAPap, hybrid actuators are tried. The actuators based on cellulose paper attached conducting polypyrrole, polyaniline and single wall carbon nanotube/polyaniline(emeraldine base) have been achieved by Electro chemical deposition and mechanical deposition of the polymers onto cellulose paper.

• Advances in materials Research
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• v.3 no.1
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• pp.237-257
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• 2014

In this paper, we adopted a two-dimensional analytical electro-elastic model to predict the stress distributions of the piezoelectric actuator in 3D case. The actuator was embedded in an elastic host structure under electrical loadings. The problem is reduced to the solution of singular integral equations of the first kind. The interfacial stresses and the axial normal stress in both plane stress state and plane strain state were obtained to study the actuation effects being transferred from the actuator to the host. The stress distributions of the PZT actuator in different length and different thickness were analyzed to guarantee the generality. The validity of the present model has been demonstrated by application of specific examples and comparisons with the corresponding results obtained from the Finite Element Method.

• Advances in aircraft and spacecraft science
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• v.9 no.5
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• pp.433-447
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• 2022

This work deals with an explicit guidance and control architecture for autonomous lunar ascent and orbit injection, i.e., the locally-flat near-optimal guidance, accompanied by nonlinear reduced-attitude control. This is a new explicit guidance scheme, based on the local projection of the position and velocity variables, in conjunction with the real-time solution of the associated minimum-time problem. A recently-introduced quaternion-based reduced-attitude control algorithm, which enjoys quasi-global stability properties, is employed to drive the longitudinal axis of the ascent vehicle toward the desired direction. Actuation, based on thrust vectoring, is modeled as well. Extensive Monte Carlo simulations prove the effectiveness of the guidance, control, and actuation architecture proposed in this study for precise lunar orbit insertion, in the presence of nonnominal flight conditions.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.9
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• pp.54-61
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• 1996

Because of its high energy density, the use of shape memory alloys(SMA) in designing microactuatiors is gaining much attention in recent years. Shape memory alloys can undergo a shape change at a low temperature with a small applied deformation force, and retain this deformation until they are heated, at which point they return to the original shape. This is called the shape memory effect(SME), and a plethora of alloys show this effect. Among them, TiNi-based alloys have relatively high electrical resistivity, which to develope helical-shape memory springs. These springs are used to develop fast protatonist/antagonist configuration actuators. The developed actuator has an actuation speed of 1 mm per 15 .approx. 20 ms and a minimum operating period of 2 sec.