JSTS:Journal of Semiconductor Technology and Science

The Institute of Electronics and Information Engineers (대한전자공학회)
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Fabrication Uncertainty and Noise Issues in High-Precision MEMS Actuators and Sensors

  • Cho, Young-Ho (Korea Advanced Institute of Science and Technology) ;
  • Lee, Won-Chul (Korea Advanced Institute of Science and Technology) ;
  • Han, Ki-Ho (Korea Advanced Institute of Science and Technology)
  • Published : 2002.12.01
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Abstract

We present technical issues involved in the development of actuators and sensors for applications to high-precision Micro Electro Mechanical System (MEMS). The technical issues include fabrication uncertainty and noise disturbance, causing major difficulties for MEMS to achieve high-precision actuation and detection functions. For nano-precision actuators, we solve the fabrication instability and electrical noise problems using digital actuators coupled with nonlinear mechanical modulators. For the high-precision capacitive sensors, we present a branched finger electrodes using high-amplitude anti-phase sensing signals. We also demonstrate the potential applications of the nanoactuators and nanodetectors to high-precision positioning MEMS.

Keywords

References

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