• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.2
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• pp.310-317
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• 2013

In this paper, the contact pressure of the wafer and polishing pad for final polishing process for 300 mm-wafer were investigated through numerical analysis using FEM tool, ANSYS. The distribution of the contact pressure is one of main parameters which affects on the flatness and surface roughness of polished wafers. Two types of polishing head, a hard type head with ceramic disk and a soft type head with air bag were considered. The effects of the deformation and initial shape of table on the contact pressure were also examined. Both heads and tables were modeled as 3D finite element model from solid model, and the material properties of polishing pads and rubber plate for the air-bag head were obtained from tensile tests. The contact pressure deviation on wafer surface was smaller with air bag head than hard type head even when the table had form errors such as convex or concave. From this 3D analysis, it could be concluded that the air-bag head has better uniformity of the contact pressure on wafer. Also, the effects of inner diameter of air bag and radial clearance between wafer and retainer were investigated as view point of contact pressure concentration on the edge of wafer.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.7
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• pp.139-148
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• 1998

Internal and external heat sources will cause to deform to machine elements in the contact joint of structure, which results in the change of contact pressure distribution different from initial assembly. Heat induced variations of contact pressure will change the static and dynamic properties such as contact stiffness, damping as well as contact heat conduction in the structure In order to design and control the intelligent machine tool operating in variant conditions more sophisticatedly, the good prediction for the changes of prescribed properties are strongly required especially in the contact elements adjacent to the rotational or linear bearing. This paper presents some computational and experimental results in regard to static and dynamic characteristics of the press-fitted bush and shaft assembly which is a model of the bearing innerrace and shaft assembly. In the condition of heat generation on the outer surface of the bush, the effects of changes in the negative clearance and the heat flux on pressure distribution and dynamic properties are investigated. Results of this study show that the edge effect of the bush and the initial clearance have effects on the transient dynamic characteristics significantly.

• Journal of the Korean Society of Safety
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• v.12 no.4
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• pp.39-46
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• 1997

This study describes a computer aided design system on involute gear for power transmition. Input data for gear design are pressure angle $20^{\circ}$, transmitted power, gear volume, gear ratio, addendum ratio of rack, dedendum ratio of rack, edge radius of rack, allowable contact stress and allowable bending stress etc. Bending strength contact strength and scoring are considered as the design constraints. Method of optimization developed this study. The developed gear design system can design the optimized gear that minimize the number of pinion teeth with face tooth.

• Proceedings of the KAIS Fall Conference
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• 2003.06a
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• pp.239-242
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• 2003

Scale down으로 인해 부족해진 overlay margin을 통해 충분히 확보해주고, 이와 동시에 attPSM(attenuated phase shift)의 사용으로 발생하는 side-lobe 현상을 억제하기 위한 방법으로 rule-based OPC(optical proximity correction)룰 사용하여 side-lobe만을 효과적으로 추출한 후, 그 자리에 scattering bar를 삽입하였다. 그리고 ORC(optical rule checking)를 통해 original layout과 aerial image의 EPEs(edge placement errors)를 검사하여 검증에 걸리는 시간을 감소시켰다.

• International Journal of Highway Engineering
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• v.8 no.3 s.29
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• pp.143-153
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• 2006

The differences in the stress distribution and the critical stresses in concrete pavement systems were analyzed when the dual-wheel single-, tandem-, and tridem-axle loads were applied at the interior and the edge of the pavement. The effects of the concrete elastic modulus, slab thickness, foundation stiffness, and tire contact pressure were investigated. The stresses under the interior loads were calculated using the transformed field domain analysis and stresses under the edge loads were obtained using the finite element method. The critical stresses under the interior and the edge loads were compared with respect to various parameters and the equations to predict the ratio between the stresses under the edge and the interior loads were developed and verified. From this study, it was found that the trends of the changes in the critical concrete stresses under the interior and the edge loads were very similar and the critical stress locations under those loads were identical. The critical stress ratio, which was obtained by dividing the critical stress under the edge loads into that under the interior loads, decreased with increasing the number of axles. That ratio became larger as the concrete elastic modulus increased, the slab thickness increased, the foundation stiffness decreased, and the tire contact pressure increased.

• Proceedings of the Korean Society of Computer Information Conference
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• 2016.01a
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• pp.251-252
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• 2016

접촉각을 이용한 표면에너지 측정방법은 부품소재분야를 비롯한 폴리머 화학제품 등에서 널리 사용되고 있다. 그중 측정할 대상의 고체 표면에 액체 방울을 떨어뜨리고 측면 접점 방향에 대한 영상을 촬영하여 고체 표면과 액체 방울이 이루고 있는 각도를 측정하는 방식을 가장 많이 사용하고 있다. 본 논문에서는 기존 접촉각 측정기의 배경과 액체 방울 사이의 명암 차를 이용하여 경계선을 찾는 Sessile-drop 영상처리 기법을 보완 및 개선하기 위하여 캐니 에지 검출 알고리즘을 적용하였다.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1509_1510
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• 2009

This paper presents the design and simulation results of ohmic contact RF MEMS silicon switch with a high isolation at high frequencies along with the position of a contact part, initial off-state and intermediate off-state including the state where a contact part is placed right over a signal line of coplanar waveguide (CPW). The ohmic contact part is connected with comb drives made of high resistivity single crystalline silicon. The released contact part is $30{\mu}m$ apart from the edge of signal line on the glass substrate along the lateral direction (x-direction) at initial off-state. The electrostatic force of the comb electrode creates the x-directional movement thus initial state is converted to the intermediate off-state. The initial off-state of the switch results in isolations of -31 dB, -24 dB and reflections of -0.45 dB, -0.67 dB at 50 GHz and 110 GHz, respectively. It shows the isolation degradation when the contact part moves right over the signal line of CPW like an initial off-state of a conventional MEMS switch. The isolations and reflections are -31 dB, -24 dB and -0.50 dB, -1.31 dB at 50 GHz and 110 GHz, respectively at the intermediate off-state.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.12
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• pp.2261-2267
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• 1992

The equations are derived for the evaluation of the axial contact force. The contact forces for rubber seals are analyzed as a function of the ratio of real contact length, the thickness of seal lip, the inclined angle of seal lip, and the interference between the edge of seal lip and the rotating inner ring. The design data for rubber seals are presented in terms of the ratio of real contact length, initial inclined lip angle, lip thickness and the interference. The calculated results show that the deflected interference and the circumferential stress cause considerable change of contcat forces for the low sealed pressure.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2003.11a
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• pp.377-383
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• 2003

In this study, the methodology for determination of shoulder height in the internal shape design of ball bearing using 3D contact analysis is proposed. The quasi-static analysis of a ball bearing was performed to calculate the distribution of applied contact load and angles among the rolling elements. From each rolling element loads and the contact geometry between ball and inner/outer raceway, 3D contact analyses using influence function are conducted. These methodology is applied to HDD ball bearing. The critical axial load and the critical shoulder height which are not affected by edge in the present shoulder height is calculated. The proposed methodology may be applied to other rolling element bearing for the purpose of reducing the material cost and improving the efficiency of the bearing design process.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.2 s.257
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• pp.197-204
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• 2007

Fretting is a contact damage process that occurs between two contact surfaces. Fretting fatigue reduces fatigue strength of the material due to low amplitude oscillatory sliding and changes in the contact surfaces of strongly connected machine and structure such as bolt, key, pin, fixed rivet and connected shaft, which have relative slip of repeatedly extreme low frequency amplitude. In this research, the fretting fatigue behavior of 2024-T3511 and 7050-T7451 aluminum alloys used mainly in aircraft and automobile industry were experimentally estimated. Based on this experimental wort the following results were obtained: (1) A significant decrease of fatigue lift was observed in the fretting fatigue compared to the plain fatigue. The fatigue limit of 2024-T3511 aluminum alloy decreased about 59% while 7050-T7451 aluminum alloy decreased about 75%. (2) In 7050-T7451 specimen using ATSI4030 contact pad, crack was initiated more early stage than using 2024-T3511 contact pad. (3) In all specimens, oblique cracks were initiated at contact edge. (4) Tire tracks and rubbed scars were observed in the oblique crack region of fracture surface.