• Title/Summary/Keyword: e-beam inspection

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A study on Monitoring the Inner Structure of Dam Body Using High Resolution Seismic Reflection Method (고분해능 탄성파 반사법을 이용한 댐체 내부구조 모니터링 연구)

  • Kim, Jung-Yul;Kim, Hyoung-Soo;Oh, Seok-Hoon;Kim, Yoo-Sung
    • Journal of the Korean Geophysical Society
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    • v.8 no.1
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    • pp.1-6
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    • 2005
  • Defects of dam body which can be induced in seepage or leakage procedure can directly affect dam safety. Therefore, a proper inspection method should be carried out in the first place to find out their positions and sizes. After that, some reinforcement works such as grouting and the corresponding assessment could be taken in a proper way. The dam(center core type earth dam) issued in this study has been in need for intensive diagnosis and reinforcement work, because a lot of slumps similar to cracks, seepage and some boggy area have been observed on the downstream slope. High resolution seismic reflection method was performed on the crest profile twice before and after grouting work(Aug. 2001 and Nov. 2004) aimed at the dam inspection and the assessment of grouting efficiency as well. To enhance the data resolution, P-beam energy radiation technique which can reduce the surface waves and hence to reinforce the reflection events was used. Strong reflection events were recognized in the stack section before grouting work, It seems that the events would be caused by e.g. horizontal cracks with a considerable aperture. Meanwhile such strong reflection events were not observed in the section after grouting. That is, the grouting work was dear able to reinforce the defects of dam body. Hence, the section showed an well arranged picture of dam inner structure. In this sense, seismic reflection method will be a desirable technique for dam inspection and for monitoring dam inner structure as well.

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Analysis of Dispersion Characteristics of Circumferential Guided Waves and Application to feeder Cracking in Pressurized Heavy Water Reactor (원주 유도초음파의 분산 특성 해석 및 가압중수로 피더관 균열 탐지에의 응용)

  • Cheong, Yong-Moo;Kim, Sang-Soo;Lee, Dong-Hoon;Jung, Hyun-Kyu
    • Journal of the Korean Society for Nondestructive Testing
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    • v.24 no.4
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    • pp.307-314
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    • 2004
  • A circumferential guided wave method was developed to detect the axial crack on the bent feeder pipe. Dispersion curves of circumferential guided waves were calculated as a function of curvature of the pipe. In the case of thin plate, i.e. infinite curvature, as the frequency increases, the $S_0$ and $A_0$ mode coincide and eventually become Rayleigh wave mode. In the case of pipe, however, as the curvature increases, the lowest modes do not coincide even in the high frequencies. Based on the analysis, a rocking technique using angle beam transducer was applied to detect an axial defect in the bent region of PHWR feeder pipe. Based on the analysis of experimenal data for artificial notches, the vibration modes of each signal were identified. It was found that the notches with the depth of )0% of wall thickness can be detected with the method.

Development of the Automated Ultrasonic Flaw Detection System for HWR Nuclear Fuel Cladding Tubes (중수로형 핵연료 피복관의 자동초음파탐상장치 개발)

  • Choi, M.S.;Yang, M.S.;Suh, K.S.
    • Nuclear Engineering and Technology
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    • v.20 no.3
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    • pp.170-178
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    • 1988
  • An automated ultrasonic flaw detection system was developed for thin-walled and short tubes such as Zircaloy-4 tubes used for cladding heavy-water reactor fuel. The system was based on the two channels immersion pulse-echo technique using 14 MHz shear wave and the specially developed helical scanning technique, in which the tube to be tested is only rotated and the small water tank with spherical focus ultrasonic transducers is translated along the tube length. The optimum angle of incidence of ultrasonic beam was 26 degrees, at which the inside and outside surface defects with the same size and direction could be detected with the same sensitivity. The maximum permissible defects in the Zircaloy-4 tubes, i.e., the longitudinal and circumferential v notches with the length of 0.76mm and 0.38mm, respectively and the depth of 0.04 mm on the inside and outside surface, could be easily detected by the system with the inspection speed of about 1 m/min and the very excellent reproducibility. The ratio of signal to noise was greater than 20 dB for the longitudinal defects and 12 dB for the circumferential defects.

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Catadioptric NA 0.6 Objective Design in 193 nm with 266 nm Autofocus (이중 파장 심자외선 카타디옵트릭 NA 0.6 대물렌즈 광학 설계)

  • Do Hee Kim;Seok Young Ju;Jun Ho Lee;Hagyong Kihm;Ho-Soon Yang
    • Korean Journal of Optics and Photonics
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    • v.34 no.2
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    • pp.53-60
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    • 2023
  • We designed a catadioptric objective lens with a 0.6 numerical aperture (NA) for semiconductor inspection at 193 nm. The objective lens meets major requirements such as a spatial resolution of 200 nm and a field of view (FOV) of 0.15 mm or more. We selected a wavelength of 266 nm for autofocus based on the availability of the light source. First, we built the objective lenses of three lens groups: a focusing lens group, a field-lens group, and an NA conversion group. In particular, the NA conversion group is a group of catadioptric lenses that convert the numerical aperture of the beam focused by the prior groups to the required value, i.e., 0.6. The last design comprises 11 optical elements with root-mean-squared (RMS) wavefront aberrations less than λ/80 over the entire field of view. We also achieved the athermalization of the objective lens with focus-shift alone satisfying the performance of RMS wavefront aberration below λ/30 at a temperature range of 20 ± 1.2 ℃.