• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2003년도 하계종합학술대회 논문집 V
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• pp.2733-2736
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• 2003

This paper proposes a dry-type active surface EMG electrode for the myoelectric prosthetic hand. The designed electrode is small size for embedding in the socket of prosthetic hand, and it has three leads including the reference of signal. To acquire EMG signal rejected the power noise, a precision differential amplifier and various filters such as the band pass filter band rejection filter, low pass and high pass filter are embedded on the electrode. The final output of the electrode is integrated absolute EMG (IEMG) obtained by full rectifier and moving average circuits. From experimental results using the implemented dry-type active surface EMG electrode, the proposed electrode is feasible for the myoelectric prosthetic hand.

• 대한전기학회논문지:시스템및제어부문D
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• 제55권12호
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• pp.550-557
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• 2006

This paper proposes a dry-type surface myoelectric sensor for the myoelectric hand prosthesis. The designed surface myoelectric sensor is composed of skin interface and processing circuits. The skin interface has one reference and two input electrodes, and the reference electrode is located in the center of two input electrodes. In this paper is proposed two types of sensors with the circle- and bar-shaped reference electrode, but all input electrodes are the bar-shaped. The metal material of the electrodes is the stainless steel (SUS440) that endures sweat and wet conditions. Considering the conduction velocity and the median frequency of the myoelectric signal, the inter-electrode distance (IED) between two input electrodes as 18mm, 20mm, and 22mm is selected. The signal processing circuit consists of a differential amplifier with a band pass filter, a band rejection filter for rejecting 60Hz power-line noise, amplifiers, and a mean absolute value(MAV) circuit. Using SUS440, six prototype skin interface with different reference electrode shape and IED is fabricated, and their output characteristics are evaluated by output signal obtained from the forearm of a healthy subject. The experimental results show that the skin interface with parallel bar shape and the 18mm IED has a good output characteristics. The fabricated dry-type surface myoelectric sensor is evaluated for the upper-limb amputee.

• Annals of Clinical Neurophysiology
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• 제13권2호
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• pp.80-86
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• 2011

Background: A dry-type electrode is an alternative to the conventional wet-type electrode, because it can be applied without any skin preparation, such as a conductive electrolyte. However, because a dry-type electrode without electrolyte has high electrode-to-skin impedance, an impedance-converting amplifier is typically used to minimize the distortion of the bioelectric signal. In this study, we developed an active dry electroencephalography (EEG) electrode using an impedance converter, and compared its performance with a conventional Ag/AgCl EEG electrode. Methods: We developed an active dry electrode with an impedance converter using a chopper-stabilized operational amplifier. Two electrodes, a conventional Ag/AgCl electrode and our active electrode, were used to acquire EEG signals simultaneously, and the performance was tested in terms of (1) the electrode impedance, (2) raw data quality, and (3) the robustness of any artifacts. Results: The contact impedance of the developed electrode was lower than that of the Ag/AgCl electrode ($0.3{\pm}0.1$ vs. $2.7{\pm}0.7\;k{\Omega}$, respectively). The EEG signal and power spectrum were similar for both electrodes. Additionally, our electrode had a lower 60-Hz component than the Ag/AgCl electrode (16.64 vs. 24.33 dB, respectively). The change in potential of the developed electrode with a physical stimulus was lower than for the Ag/AgCl electrode ($58.7{\pm}30.6$ vs. $81.0{\pm}19.1\;{\mu}V$, respectively), and the difference was close to statistical significance (P=0.07). Conclusions: Our electrode can be used to replace Ag/AgCl electrodes, when EEG recording is emergently required, such as in emergency rooms or in intensive care units.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2007년도 하계학술대회 논문집
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• pp.247-249
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• 2007

This paper proposes a dry-type surface myoelectric sensor for the myoelectric hand prosthesis. The designed surface myoelectric sensor is composed of skin interface and processing circuits. The skin interface has one reference and two input electrodes, and the reference electrode is located in the center of two input electrodes. Considering the conduction velocity and the median frequency of the myoelectric signal, the inter-electrode distance (IED) between two input electrodes as 18mm, 20mm, and 22mm is selected. The signal processing circuit consists of a differential amplifier with a band pass filter, a band rejection filter for rejecting 60㎐ power-line noise, amplifier, and a level circuit. Using SUS440, six prototype skin interface with different reference electrode shape and IED is fabricated, and their output characteristics are evaluated by output signal obtained from the forearm of a healthy subject. The experimental results show that the skin interface with parallel bar shape and the 18mm IED has a good output characteristics. The fabricated dry-type surface myoelectric sensor is evaluated for the upper-limb amputee.

• 정보통신설비학회논문지
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• 제10권3호
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• pp.92-97
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• 2011

In this paper, a controller recognizing human gestures using EMG signal is shown. The tiny and band-type controller is developed for image training to excercise the specific area in the body, and uses a dry-type silver fiber electrode easy to be attached or detached itself to a skin. The captured EMG signals are converted to 10-bit digital values via amplification and frequency filtering processes within the controller, and are transmitted to the server by wireless. As the gesture recognition ratio using the proposed controller on biceps is up to 80%, we expect the practical potential of the controller is very promising.

• 한국전자파학회지:전자파기술
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• 제14권3호
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• pp.15-19
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• 2003

본 연구에서는 RF magnetron sputtering으로 상온에서 증착된 ZnO압전박막을 이용하여, 1.96 GHz 대역의 air gap type의 FBAR BPF를 개발하였다. FBAR BPF는 Si wafer에 절연막으로 열 산화막층(SiO$_2$)을 형성한 후, 형성된 산화막 위에 바닥전극(Al), ZnO압전층 그리고 상부전극(Mo)를 차례로 RF magnetron sputter장비를 사용하여 증착시키고, Si wafer를 dry etching하여 air hole을 구현함으로써 device를 제조하였다. 제조된 FBAR BPF의 ZnO압전층의 XRD분석 결과 (002)면 방향으로 우선 배향되었으며, XRC의 $\sigma$값은 1.018이었다. 삽입손실 1 dB 내외로 우수한 특성을 나타내었다.

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 2009년도 추계학술대회 논문집
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• pp.411-414
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• 2009

Photo-capacitor electrodes are attracting great attention because of their high capacitance and potential applications in electronic devices. Carbon capacitor, active carbon capacitor and its combination will be fabricated using simple sandwich capacitor electrode method as carbonaceous material on each type of capacitor electrodes with 20 ${\times}$ 15 mm cell size. Carbon/active carbon cell was fabricated using sol-gel process with 120oC dry temperature in l hour and using sintering process with 500oC in 2 hour. The effect of sintering temperature on carbon properties was also investigated with X-ray diffraction technique to get the best sintering temperature. The detail of fabrication process will be explained. Elemental composition in electrode material can be measured using quantitative spectroscopic as and a cyclic voltammetric technique was used to study the combined effects of electrode material and effect of annealing temperature and also time on the capacitance of thermally treated in capacitor electrode. In this work, characterization impedance technique is used to measurement of capacitance and giving complementary results. Active carbon as carbonaceous material has a better capacitance in charge/discharge process with mean thickness $32{\mu}m$ and with particle size $1{\mu}m$ to $4.5{\mu}m$ in 20 ${\times}$ 15 mm sample size of capacitor electrode.

• 한국정보통신학회논문지
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• 제13권7호
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• pp.1393-1398
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• 2009

본 연구는 LCD용 비정질 실리콘박막트랜지스터의 제조공정중 가장 중요한 식각 공정에서 각 박막의 특성에 맞는 습식 및 건식식각공정을 개발하여 소자의 특성을 안정시키고자 한다. 본 연구의 수소화 된 비정질 실리콘 박막 트랜지스터는 Inverted Staggered 형태로 게이트 전극이 하부에 있다. 실험 방법은 게이트전극, 절연층, 전도층, 에치스토퍼 및 포토레지스터층을 연속 증착한다. 스토퍼층을 게이트 전극의 패턴으로 남기고, 그 위에 n+a-Si:H 층 및 NPR(Negative Photo Resister)을 형성시킨다. 상부 게이트 전극과 반대의 패턴으로 NPR층을 패터닝하여 그것을 마스크로 상부 n+a-Si:H 층을 식각하고, 남아있는 NPR층을 제거 한다. 그 위 에 Cr층을 증착한 후 패터닝 하여 소오스-드레인 전극을 위한 Cr층을 형성시켜 박막 트랜지스터를 제조한다. 여기서 각 박막의 패터닝은 식각 공정으로 각단위 박막의 특성에 맞는 건식 및 습식식각 공정이 필요하다. 제조한 박막 트랜지스터에서 가장 흔히 발생되는 문제는 주로 식각 공정시 over 및 under etching 이며, 정확한 식각을 위하여 각 박막에 맞는 식각공정을 개발하여 소자의 최적 특성을 제공하고자한다. 이와 같이 공정에 보다 엄격한 기준의 건식 및 습식식각 공정 그리고 세척 등의 처리공정을 정밀하게 실시하여 소자의 특성을 확실히 개선 할 수 있었다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2004년도 ICEIC The International Conference on Electronics Informations and Communications
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• pp.343-347
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• 2004

High oxidation temperature of SiC shows a tendency of carbide formation at the interface which results in poor MOSFET transfer characteristics. Thus we developed oxidation processes in order to get low interface charge densities. N-type 6H-SiC MOS capacitors were fabricated by different oxidation processes: dry, wet, and dry­reoxidation. Gate oxidation and Ar anneal temperature was $1150^{\circ}C.$ Ar annealing was performed after gate oxidation for 30 minutes. Dry-reoxidation condition was $950^{\circ}C,$ H2O ambient for 2 hours. Gate oxide thickness of dry, wet and dry-reoxidation samples were 38.0 nm, 38.7 nm, 38.5 nm, respectively. Mo was adopted for gate electrode. To investigate quality of these gate oxide films, high frequency C- V measurement, gate oxide leakage current, and interface trapped charge densities (Dit) were measured. The interface trapped charge densities (Dit) measured by conductance method was about $4\times10^{10}[cm^{-1}eV^{-1}]$ for dry and wet oxidation, the lowest ever reported, and $1\times10^{11}[cm^{-1}eV^{-1}]$ for dry-reoxidation

• 조명전기설비학회논문지
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• 제24권7호
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• pp.57-63
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• 2010

Photo-capacitor electrodes are attracting great attention because of their high capacitance and potential applications in electronic devices. Carbon capacitor, active carbon capacitor and its combination will be fabricated using a sandwich method as carbonaceous material on each type of storable electrode with $20{\times}15$[mm] cell size. Carbon/active carbon cell was fabricated using sol-gel process with $120[^{\circ}C]$ dry temperature in 2hour and using sintering process with $500[^{\circ}C]$ in 2hour. The effect of sintering temperature on carbon properties was also investigated with an X-ray diffraction technique to get the best sintering temperature. The detail of the fabrication process will be explained. Active carbon as carbonaceous material has a better capacitance in storable electrode with mean thickness $32[{\mu}m]$ and with particle size $1[{\mu}m]$ to $4.5[{\mu}m]$ in $20{\times}15$[mm] sample size of storable electrode.