• E2M - 전기 전자와 첨단 소재
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• 제10권1호
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• pp.8-14
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• 1997

The UV/O$_{3}$ dry cleaning has been well known in removing organic molecules. The UV/O$_{3}$ dry cleaning method was performed to clean the Si wafer surfaces and contact holes contaminated by organic molecules such as residual PR. During the cleaning process, the Si surfaces were analyzed with X-ray photoelectron spectroscopy (XPS), atomic force microscope (AFM) and ellipsometer. When the UV/O$_{3}$ dry cleaning at 200'C was performed for 3 minutes, the residual photoresist was almost removed on Si wafer surfaces, but Si surfaces were oxidized. For UV/O$_{3}$ application of contact hole cleaning, the contact string were formed using the equipment of ISRC (Inter-university Semiconductor Research Center). Before Al deposition, UV/O$_{3}$ (at 200.deg. C) dry cleaning was performed for 3 minutes. After metal annealing, the specific contact resistivity was measured. Because UV/O$_{3}$ dry cleaning removed organic contaminants in contact holes, the specific contact resistivity decreased. Each contact hole size was different, but the specific contact resistivities were all much the same. Thus, it is expected that the UV/O$_{3}$ dry cleaning method will be useful method of removal of the organic contaminants at smaller contact hole cleaning.

• 분석과학
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• 제32권3호
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• pp.113-119
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• 2019

Enhancement of footwear impressions in urine on the surface of tiles by using p-dimethylaminocinnamaldehyde (DMAC), which react with urea, and ninhydrin, 1,8-diazafluoren-9-one (DFO), 1,2-indanedione/zinc (1,2-IND/Zn), which react with amino acid, was studied. As a result of comparing the application methods of reagents, the ninhydrin and the 1,2-IND/Zn were suitable for application with spray method, which is spray directly on footwear impression, DFO and DMAC were suitable for application with dry contact method, which is applying heat with press to DMAC impregnated paper on footwear impression. In addition, DMAC applied with dry contact method showed best contrast and enhancement result in both white and black colored tiles by comparing of the sensitivity by different dilution ratio of urine and the aging time of footwear impressions in urine. And the result of applied with DMAC (with dry contact method) on the floor tiles collected at various places in a building's men's and women's bathrooms, it can be successfully enhanced that footwear impressions in urine. So it is believed that the method can be used to recover footwear impressions in urine from real crime scenes.

• Tribology and Lubricants
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• 제34권2호
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• pp.60-66
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• 2018

Graphene is a monolayer of carbon atoms (approximately 0.34 nm), arranged in a honeycomb network. It has been hailed as a next-generation flexible and transparent material because it has high electrical and thermal conductivities, excellent mechanical properties, as well as flexible and transparent properties. The wettability of graphene alters its adhesion or surface energy, and it is therefore an important parameter influencing its application in the fabrication of next-generation flexible and transparent electronics. Studies on the wettability of graphene are numerous and various opinions exist. However, almost all of these studies use the wet transfer method to transfer the graphene. In this study, therefore, we investigated the effect of wet and dry transfer methods on water contact angles of graphene on a substrate. The contact angles of substrates vary depending on the type of substrate. It was found that after graphene is transferred to the substrate, regardless of transfer method, the graphene/substrate contact angle increases to a value. The contact angle of graphene transferred using the dry transfer method is higher than the contact angle of graphene transferred using wet transfer methods. The wet transferred graphene is affected by the poly(methyl methacrylate) (PMMA) residue and the polar surface of substrate. The dry transferred graphene is influenced by the conformal contact between graphene and substrate.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.421-425
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• 2007

In the fabrication of dry adhesive structure, increasing contact-points or contact-area is the primary goal because the adhesive force grows in proportion to the contact-area. The simplest way to extend the contact surface is the fabrication by using soft materials. However, the column-array structure could confront the matting phenomenon which columns are stuck together. Therefore, we need a novel design to reduce the effective stiffness with adequate stiff materials like a gecko's setae. In this study, we propose a novel design for the dry adhesive structure. Moreover, we analyzed whether the adhesive structure conforms the rough surface sufficiently through finite element method adopted the non-bonding interaction as the body force. Also, we fabricated the novel structures via UV lithography and some techniques. In addition, we examined the adhesive force of the novel structures.

• 한국안광학회지
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• 제15권1호
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• pp.39-46
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• 2010

목적: 자동렌즈미터를 이용한 소프트 콘택트렌즈의 굴절력 측정에서 dry blotting과 wet cell 방법에 따른 신뢰도를 평가하고자 하였다. 방법: 측정에 사용한 소프트렌즈는 현재 국내에서 유통되고 있는 렌즈 5종류, 4개의 굴절력(-1.50D, -3.00D, -6.00D, -9.00D)을 이용하였고, 두 검사자가 자동렌즈미터로 측정하여 반복성과 재현성을 평가하였다. 결과: Dry blotting방법으로 측정한 굴절력의 평균 차이는 0.03~0.18D였으며, 실리콘 하이드로겔 렌즈에서 0.10~0.18D, 하이드로겔 렌즈에서 0.03~0.08D로 나타났다. 두 검사 간의 평균 차이는 0.10D이하로 측정자 간의 재현성이 좋은 것으로 나타났다. Wet cell방법으로 측정한 굴절력의 평균 차이는 0.09~0.69D였으며, 두 검사자 간에 평균 차이는 0.02~0.59D로 나타났으며, 소재에 따른 측정의 신뢰도와 검사자 간의 재현성은 낮았다. 결론: 모든 재질에 대해 dry blotting 방법이 wet cell방법보다 신뢰도가 좋았으며, 두 방법 모두 실리콘 하이드로겔 렌즈에서는 낮은 신뢰도를 보였다. 자동렌즈미터를 이용하여 신속히 후면 정점굴절력을 확인할 필요가 있는 실무 현장에서 dry blotting방법이 효율적인 것으로 판단된다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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• pp.417-420
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• 2004

The electrical effects of dry-etch on n-type GaN by an inductively coupled $Cl_2/CH_4/H_2/Ar$ plasma were investigated as a function of ion energy, by means of ohmic and Schottky metallization method. The specific contact resistivity(${\rho}_c$) of ohmic contact was decreased, while the leakage current in Schottky diode was increased with increasing ion energy due to the preferential sputtering of nitrogen. At a higher rf power, an additional effect of damage was found on the etched sample, which was sensitive to the dopant concentration in terms of the ${\rho}_c$ of ohmic contact. This was attributed to the effects such as the formation of deep acceptor as well as the electron-enriched surface layer within the depletion layer. Furthermore, thermal annealing process enhanced the ohmic and Schottky property of heavily damaged surface.

• 한국안광학회지
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• 제13권4호
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• pp.59-63
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• 2008

목적: 본 연구의 목적은 수분제거 방법과 건조 방법에 따른 함수율 측정에 관하여 알아보고자 하였다. 방법: 다양한 함수율을 갖는(47%~58%) 72개의 하이드로젤 콘택트렌즈를 대상으로 중량측정법으로 함수율을 측정하였다. 실험실 온도는 $25^{\circ}C$, 습도는 21%로 유지하였다. 두 방법 모두 저온처리 후 실온에서 30분 건조하여 무게를 측정하는 방식으로 측정하였다. 결과: Dry blotting 방법은 함수율이 47.43${\pm}$8.48%로 측정되었으며, Wet blotting 방법은 48.15 ${\pm}$8.36%로 측정되었다. 또한 Wet blotting 방법으로 측정한 함수율이 약 0.7% 정도 높게 측정되었다. 건조 방법에 따른 함수율에서 vacuum oven을 사용하여 건조한 함수율이 47.89${\pm}$8.06%, microwave oven을 사용하여 건조하여 측정한 함수율이 49.56${\pm}$7.06%로 나타났으며, microwave oven을 사용하여 측정한 함수율이 약 1.67% 높은 함수율을 나타내었으나 통계적으로 유의한 차이를 나타내지는 않았다(p>0.05). 결론: 렌즈의 함수된 무게를 측정하기 위한 Dry blotting 방법과 Wet blotting 방법 중 Wet blotting에 의한 방법이 무게가 높게 측정되었으며, 함수율 역시 더 높게 측정되었다. 또한 건조된 무게를 측정하기 위해 렌즈를 건조시키는 방법에 있어 vacuum oven을 사용한 건조보다 microwave oven로 건조하여서 측정한 함수율이 더 높은 값을 나타내었으나 microwave oven을 사용할 경우 더 정확한 측정을 위해 그 microwave의 조사 강도나 시료의 위치에 있어 더욱 세심한 주의가 필요하다.

• 한국전산구조공학회:학술대회논문집
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• 한국전산구조공학회 2005년도 춘계 학술발표회 논문집
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• pp.383-389
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• 2005

This research is to develop a seismic response analysis method for a spent fuel storage cask. FEM model is built for the test model of 1/8 scale spent fuel dry storage cask using available 3D contact conditions in ABAQUS/Explicit. Input load for this analysis os a seismic wave of El-centro earthquake, and the friction and damping coefficients in the analysis condition we obtained from the test result. Penalty and kinematic contact methods of ABAQUS are used for mechanical contact formulation. The analysis method was verified for rocking angle obtained by seismic response tests. The kinematic contact method with an adequate normal contact stiffness showed a good agreement with tests.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2000년도 제32회 추계학술대회 정기총회
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• pp.11-17
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• 2000

The electric contact resistance between ball and disk was measured to estimate the real area of contact under dry and lubrication conditions. The results from the measured constriction resistance using the hypothesis of a single circular contact was compared with those of Hertzian contact theory and hardness. The resistance correlated well with the asperity contact area and friction when the ball slides on the flat disk spreaded with lubricant film. Therefore, the constriction resistance method was useful to identify the lubrication regimes with respect to various loads and speeds. The results of this work will aid in better prediction of lubrication regimes with respect to the operating conditions.

• 한국공작기계학회논문집
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• 제13권2호
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• pp.112-119
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• 2004

This paper discussed on the effect of an internal damping on the stability of an elastic material subjected to dry friction force. Dry friction forces act tangentially at the contact surface between a moving belt and elastic material. The elastic material on a belt moving is modeled for simplicity into a cantilevered beam subjected to distributed follower force. In the analysis, the discretized equations derived according to finite element method are used. The impulse response of the beam are studied by the mode superposition method to observe the growth rate of the motion. It is found that the internal damping in cantilevered beam subjected to distributed follower force may act destabilizing.