• Title/Summary/Keyword: drift-diffusion model

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Numerical Modeling of an Inductively Coupled Plasma Sputter Sublimation Deposition System

  • Joo, Junghoon
    • Applied Science and Convergence Technology
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    • v.23 no.4
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    • pp.179-186
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    • 2014
  • Fluid model based numerical simulation was carried out for an inductively coupled plasma assisted sputter deposition system. Power absorption, electron temperature and density distribution was modeled with drift diffusion approximation. Effect of an electrically conducting substrate was analyzed and showed confined plasma below the substrate. Part of the plasma was leaked around the substrate edge. Comparison between the quasi-neutrality based compact model and Poisson equation resolved model showed more broadened profile in inductively coupled plasma power absorption than quasi-neutrality case, but very similar Ar ion number density profile. Electric potential was calculated to be in the range of 50 V between a Cr rod source and a conductive substrate. A new model including Cr sputtering by Ar+was developed and used in simulating Cr deposition process. Cr was modeled to be ionized by direct electron impact and showed narrower distribution than Ar ions.

Numerical Experiment on the Drift Diffusion of Harmful Algal Bloom (유해적조생물의 이동·확산에 관한 수치실험)

  • Seo, Ho-San;Kim, Dong-Sun
    • Journal of the Korean Society of Marine Environment & Safety
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    • v.20 no.4
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    • pp.335-344
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    • 2014
  • To understand the drift-diffusion of HAB(Harmful Algal Bloom) in this paper, we used three-dimensional hydrodynamic model POM(Pringceton Ocean Model) and Lagrangian particle track module. First, the results of residual flow that considered tide, wind, temperature, salinity, and TWC(Tsushima Warm Current) effect was tend to northeast in the coastal area and the flow in the offshore region showed results similar to TWC. To understand of HAB's movement, released each area that southern Kamak bay(Case 1), Mijo coast(Case 2), and southern Mireukdo coast(Case 3) assumption that red tide occurred. The areas where the HAB occurs frequently. As a result of HAB occurred in southern Kamak Bay(Case 1), mainly drifts to Narodo coast and Yeoja bay that located on the west side. Case 2 was mainly drifts to Yokjido coast and Saryangdo coast Especially, HAB occurred in Mireukdo coast(Case 3) relatively many particles drift to eastward as the influence of the TWC.

Temporal and Spatial Spreading Characteristic of Drift Soil due to the Reclamation in the Pusan Port (해양 매립 및 준설토 투기에 따른 부유사 확산의 시.공간적 특성에 관한 연구)

  • 김용원;김종인;윤한삼;홍도웅
    • Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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    • 2000.10a
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    • pp.196-203
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    • 2000
  • In this study, the evaluation method of diffusion characteristics of Suspended Soli&SS) and the generation limit(source and thick) are investigated, which is significantly affecting on marine examined by construction works such as dredging and reclamation. Dispersion characteristics of SS is examined by hydraulic tests and numerical works in consideration with the Pusan Port. Hydraulic model test was performed in 2-D wave flume to find the limit wave conditon of re-suspension of solid as well as the time dependent characteristics of settlement The results obtainded in the study are as follows; 1) The quantituative evaluation af SS is the basic parameter of marine environmental impact assessment in related with the port development The SS increases as the water content of sea bed solid increases and the density decreases. 2) The sea bed solid in Sinsundai area, Pusan Port has the water content range of 83~157% 3) The ratio of suspension velocity against settlement velocity is about 0.25 and SS concentration converges as the wave heigh. 4) The SS increases 2 time when time step increases 3 time(10 sec to 30 sec) in numerical simulation It means that the effect of the time step should be checked in detail to stable. The diffusion The diffusion coefficient are Affiected senstively in the dispersion process while sea ved friction coefficinet have not strong relation in the simulated area

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Further Properties of a Model for a System Subject to Continuous Wear

  • Lee, Eui-Yong;Laurence A. Baxter
    • Journal of the Korean Statistical Society
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    • v.20 no.2
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    • pp.139-146
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    • 1991
  • A generalization of an earlier diffusion model for system subject to continuous wear is presented. It is assumed that the state of the system is modelled by Brownian motion with negative drift and an absorbing barrier at the origin. A repairman arrives according to a stationary renewal process and increases the state of the system by a random amount if the state does not exceed a threshold. Various properties of this model are investigated including the distribution of the state of the system at time t, the first passage time to state 0 and the probability that the state of the system exceeds a certain level throughout a specified interval.

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Neutralization and Ionization of movable ion at insulator-metal interface (절연체-금속계면에서 가동이온의 중성화와 이온화)

  • 이성길;국상훈
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1988.10a
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    • pp.33-35
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    • 1988
  • From the study of mechanism of electrical conduction of film which is made from Polyethylene Terephthalate at very high temperature which is larger than low electric field and glass transition point, we find that there is a extraordinary non ohmic region (I∝V$^n$, 0

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Particle deposition on a rotating disk in application to vapor deposition process (VAD) (VAD공정 관련 회전하는 원판으로의 입자 부착)

  • Song, Chang-Geol;Hwang, Jeong-Ho
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.22 no.1
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    • pp.61-69
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    • 1998
  • Vapor Axial Deposition (VAD), one of optical fiber preform fabrication processes, is performed by deposition of submicron-size silica particles that are synthesized by combustion of raw chemical materials. In this study, flow field is assumed to be a forced uniform flow perpendicularly impinging on a rotating disk. Similarity solutions obtained in our previous study are utilized to solve the particle transport equation. The particles are approximated to be in a polydisperse state that satisfies a lognormal size distribution. A moment model is used in order to predict distributions of particle number density and size simultaneously. Deposition of the particles on the disk is examined considering convection, Brownian diffusion, thermophoresis, and coagulation with variations of the forced flow velocity and the disk rotating velocity. The deposition rate and the efficiency directly increase as the flow velocity increases, resulting from that the increase of the forced flow velocity causes thinner thermal and diffusion boundary layer thicknesses and thus causes the increase of thermophoretic drift and Brownian diffusion of the particles toward the disk. However, the increase of the disk rotating speed does not result in the direct increase of the deposition rate and the deposition efficiency. Slower flow velocity causes extension of the time scale for coagulation and thus yields larger mean particle size and its geometric standard deviation at the deposition surface. In the case of coagulation starting farther from the deposition surface, coagulation effects increases, resulting in the increase of the particle size and the decrease of the deposition rate at the surface.

Plasma Uniformity Numerical Modeling of Geometrical Structure for 450 mm Wafer Process System (450 mm 웨이퍼 공정용 System의 기하학적 구조에 따른 플라즈마 균일도 모델링 분석)

  • Yang, Won-Kyun;Joo, Jung-Hoon
    • Journal of the Korean Vacuum Society
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    • v.19 no.3
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    • pp.190-198
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    • 2010
  • Asymmetric model for plasma uniformity by Ar and $CF_4$ was modeled by the antenna structure, the diameter of chamber, and the distance between source and substrate for the development of plasma equipment for 450 mm wafer. The aspect ratio of chamber was divided by diameter, distance from substrate, and pumping port area. And we found the condition with the optimized plasma uniformity by changing the antenna structure. The drift diffusion and quasi-neutrality for simplification were used, and the ion energy function was activated for the surface recombination and etching reaction. The uniformity of plasma density on substrate surface was improved by being far of the distance between substrate wall and chamber wall, and substrate and plasma source. And when the antenna of only 2 turns was used, the plasma uniformity can improve from 20~30% to 4.7%.

Monte Carlo Simulation of Phonon Transport in One-Dimensional Transient Conduction and ESD Event (1 차원 과도 전도와 정전기 방전 현상에 관한 포논 전달의 몬테 카를로 모사)

  • Oh, Jang-Hyun;Lee, Joon-Sik
    • Proceedings of the KSME Conference
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    • 2007.05b
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    • pp.2165-2170
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    • 2007
  • At nanoscales, the Boltzmann transport equation (BTE) can best describe the behavior of phonons which are energy carriers in crystalline materials. Through this study, the phonon transport in some micro/nanoscale problems was simulated with the Monte Carlo method which is a kind of the stochastic approach to the BTE. In the Monte Carlo method, the superparticles of which the number is the weighted value to the actual number of phonons are allowed to drift and be scattered by other ones based on the scattering probability. Accounting for the phonon dispersion relation and polarizations, we have confirmed the one-dimensional transient phonon transport in ballistic and diffusion limits, respectively. The thermal conductivity for GaAs was also calculated from the kinetic theory by using the proposed model. Besides, we simulated the electrostatic discharge event in the NMOS transistor as a two-dimensional problem by applying the Monte Carlo method.

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An Analysis on the Discharge Characteristics through 1-D Numerical Simulation in an AC PDP (AC PDP에서 1차원 수치해석을 통한 방전 특성 연구)

  • Lee, J.H.;Seo, J.H.;Lee, S.H.
    • Proceedings of the KIEE Conference
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    • 2003.10a
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    • pp.220-222
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    • 2003
  • In this paper, we analyze on the discharge characteristics through 1-D simulations in an at plasma display panel discharge cell. The model is based on a Poisson' equation, continuity and drift-diffusion equation. Results are presented in a 95% neon, 5% xenon gas mixture, for a gap length of 100us and a gas pressure of 400Torr at ambient temperature. Results for other gap length are also discussed. As a result, an increase of the gap cause increase of luminous efficiency but with larger sustaining voltage.

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Numerical Modeling and Simulations of Electrical Characteristics of Multi-layer Organic Light Emitting Diodes

  • Lee, Hyun-Jung;Lee, Yong-Soo;Park, Jae-Hoon;Choi, Jong-Sun
    • Journal of Information Display
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    • v.8 no.3
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    • pp.11-16
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    • 2007
  • Theoretical simulations of spatial distribution of charge carriers and recombination rate, and J-V characteristics of the multi-layer organic light emitting diodes are carried out. Drift-diffusion current transport, field-dependent carrier mobility, exponential and Gaussian trap distribution, and Langevin recombination models are included in this computer model. The simulated results show good agreement with the experimental data confirming the validity of the physical models for organic light emitting diodes.