• Title/Summary/Keyword: dielectric test

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A Study of a Method to Evaluate the Corrosion Resistance of Al2O3 Coated Vacuum Components for Semiconductor Equipment (반도체 장비용 Al2O3 코팅 진공부품의 내부식성 평가 연구)

  • You, S.M.;Yun, J.Y.;Kang, S.W.;Shin, J.S.;Seong, D.J.;Shin, Y.H.
    • Journal of the Korean Vacuum Society
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    • v.17 no.3
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    • pp.175-182
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    • 2008
  • This study is concerned with the evaluation of the corrosion resistance of coated semiconductor equipment parts with various processes. To select the appropriate basis for evaluation, replacement parts were observed during the semiconductor manufacturing process. This study also ran a dry corrosion test using $Al_2O_3$, which is mostly used as a coating material. This test quantitatively measured the efficiency of coated parts. Surface morphology, leakage current and breakdown voltage were also evaluated. This study showed that a dry corrosion process led to the drop of electrical properties, for example, the leakage current increase and the dielectric strength decrease. The surface morphology test displayed that surface damage is largely dependent on the exposure time to corrosive environments. By using the values that changed during the corrosion process, it may be possible to contrive a method to evaluate the efficiency of coated parts with various processes.

A Study on the partial Discharge Characteristics according to the Distribution pattern of voids within LDPE (보이드 분포 형태에 따른 LDPE의 부분 방전 특성 연구)

  • Shin, Doo-Seong;Jeon, Seung-Ik;Lee, Jun-Ho;Yun, Do-Hong;Han, Min-Koo
    • Proceedings of the KIEE Conference
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    • 1995.07c
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    • pp.1081-1084
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    • 1995
  • Internal voids located within an insulation will arise partial discharge that causes local breakdown and even the entire insulation breakdown. For HV apparatuses, it is usual case that several voids are formed within non-uniform electric field condition rather than single void within uniform field, which can be solved analitically. The purpose of this work is to study partial discharge and breakdown characteristics of an insulation according to the distribution pattern of two disc-type voids that are located within non-uniform field. The results from numerical field analysis and experiments show that the electric field within the voids decreases as they are arranged more serially, which accordingly results in the increase of partial discharge inception field(PDIF) much higher than that of single void model. With parallel arranged voids, PDIF is almost the same as that of single void model. On the other hand, AC breakdown strength decreases as voids are arranged more serially, which is a natural result considering the reduction of effective insulation thickness. For parallel voids, this effect cannot he noticed where as they show different pattern compared with single void and serial void models in $\Phi$-Q-N analysis. Considering these results may leads us to the conclusion that, in the evaluation of insulating products through PD test, it is not sufficient to determine only PDIV or existence of PD at predetermined voltage level. We could evaluate more accurately by considering all the available data such as PDIV, PD magnitude, PD occurring phase, number of PD pulses, and etc.

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Application of DBD Plasma Catalysis Hybrid Process to remove Organic Acids in Odors (악취물질인 유기산 제거를 위한 DBD 플라즈마 촉매 복합공정의 적용)

  • Hong, Eun-Gi;Suh, Jeong-Min;Choi, Kum-Chan
    • Journal of Environmental Science International
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    • v.23 no.9
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    • pp.1627-1634
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    • 2014
  • Odor control technology include absorption, adsorption, incineration and biological treatments. But, most of processes have some problems such as secondary organic acids discharge at the final odor treatment facility. In order to solve the problems for effective treatment of organic acids in odor, it is necessary to develop a new type advanced odor control technology. Some of the technology are plasma only process and plasma hybrid process as key process of the advanced technology. In this study, odor removal performance was compared DBD(Dielectric Barrier Discharge)plasma process with PCHP(plasma catalysis hybrid process) by gaseous ammonia, formaldehyde and acetic acid. Plasma only process by acetic acid obtained higher treatment efficiency above 90%, and PCHP reached its efficiency up to 96%. Acetic acid is relatively easy pollutant to control its concentration other than sulfur and nitrogen odor compounds, because it has tendency to react with water quickly. To test of the performance of DBD plasma process by applied voltage, the tests were conducted to find the dependence of experimental conditions of the applied voltage at 13 kV and 15 kV separately. With an applied voltage at 15 kV, the treatment efficiency was achieved to more higher than 13 kV from 83% to 99% on ammonia, formaldehyde and acetic acid. It seems to the odor treatment efficiency depends on the applied voltage, temperature, humidity and chemical bonding of odors.

Polymer-Ceramic Composite Gel Polymer Electrolyte for High-Electrochemical-Performance Lithium-Ion Batteries (고성능 리튬 이온전지를 위한 폴리머-세라믹 복합 겔 고분자 전해질)

  • Jang, So-Hyun;Kim, Jae-Kwang
    • Journal of the Korean Electrochemical Society
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    • v.19 no.4
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    • pp.123-128
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    • 2016
  • In this study, poly(vinylidene fluoride-co-hexafluoropropylene) (PVdF-HFP)-based gel polymer electrolyte incorporating nano-size $Al_2O_3$ ceramic particle was prepared by electrospinning. The gel polymer electrolyte (GPE) incorporated with $Al_2O_3$ ceramic particle showed higher ionic conductivity of $9.5{\times}10^{-2}Scm^{-1}$ than pure PVdF-HFP GPE without ceramic particle and improved the electrochemical stability up to 5.2 V. The GPEs were assembled with $LiNi_{1/3}Mn_{1/3}Co_{1/3}O_2$ (NMC) cathode for electrochemical test. The GPE batteries at 0.1 C-rate delivered $168.2mAh\;g^{-1}$ for pure GPE and $189.6mAh\;g^{-1}$ for hybrid GPE, respectively. Therefore, the incorporation of high dielectric constant ceramic particle will be good strategy to enhance the stability and electrochemical properties of lithium ion gel polymer batteries.

Dehydration of foamed sardine-starch paste by microwave heating. (고주파가열을 이용한 정어리 발포건조제품의 가공 II. 제품저장중의 품질변화와 저장기간)

  • 이병호
    • Journal of the Korean Professional Engineers Association
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    • v.17 no.4
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    • pp.8-14
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    • 1984
  • In this part of the studies on dielectric dehydration of foamed fish-starch paste, quality stability and shelflife of the product of which the preparation formula and processing conditions were described in the previous report (Lee et at., 1982) were determined by means of accelerated reaction test. The product was stored for 50 days under the conditions of temperatures at 35, 45, and 55$^{\circ}C$ in steady state and various water activities of 0.44, 0.52, 0.65, and 0.75, respectively. The loss of available lysine, the extent of TBA value, and the development of browning during the storage were measured and reaction kinetically analysed to assess quality stability and shelf-life of the product for the storage at room temperature of 25$^{\circ}C$. The extent of browning was accelerated with the increase of water activity and temperature marking the time to reach a limit of color and flavor deterioration, or to reach brown color density of 0.17 O.D./g at 420nm, 106 days at a$\_$w/=0.44, 35$^{\circ}C$, and 41 days at aw=0.65, 55$^{\circ}C$. These reaction rates resulted in a prediction of shelf-life, 130 to 110 days in the storage at au=0.44 to 0.75, 25$^{\circ}C$. The quality limit assessed by TBA values and sensory evaluation of rancidity was 87 days at a$\_$w/=0.44, 35$^{\circ}C$, and 30 days at aw=0.73, 55$^{\circ}C$ which gave a predicted shelf-life, 128 to 113 days at a$\_$w/=0.44 to 0.75, 25$^{\circ}C$ storage.

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Dielectric Passivation Effects for the Prevention of the Failures and for the Improvement of the Reliability in Microelectronic Thin Film Interconnections (극미세 전자소자 박막배선의 결함방지 및 신뢰도 향상을 위한 절연보호막 효과)

  • 양인철;김진영
    • Journal of the Korean Vacuum Society
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    • v.4 no.2
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    • pp.217-223
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    • 1995
  • 절연보호막에 따른 AI-1%Si 박막배선의 평균수명(MTF, Mean-Time-to-Failure) 및 electromigration에 대한 저항성, 즉 활성화에너지(Q)변화 등을 측정 비교하였다. 박막배선은 $5000\AA$두께로 열산화막 처리된 p-Si(100)기판위에 $7000\AA$의 AI-1%Si을 증착한 후 photolithography 공정으로 형성시켰다. Electromigration test를 위한 박막배선은 $3\mu$m의 폭과 $400\mu$m, $1600\mu$m의 두 가지 길이를 가지며 절연보호막 효과를 알아보기 위해 그 위에 $3000\AA$의 두께로 SiO2, PSG, Si3N4등 절연보호막을 APCVD 및 PECVD를 이용하여 각각 증착시켰다. 가속화 실험을 위해 인가된 전류밀도는 4.5X106A/cm2이었고 180, 210, $240^{\circ}C$온도에서 d.c. 인가 후의 저항변화를 측정하여 평균수명을 구한 후 Black 방정식을 이용하여 활성화에너지를 측정하였다. AI-1%Si 박막배선에서 electromigration에 대한 활성화에너지값은 $400\mu$m길이의 경우 0.44eV(nonpassivated), 0.45eV(Si3N4 passivated), 0.50 eV(PSG passivated), 그리고 0.66 eV(SiO2 passivated)로 각각 측정되었다. $1600\mu$m 길이의 AI-1%Si 박막배선 실험에서도 같은 절연보호막 효과가 관찰되었다. 따라서 SiO2, PSG, Si3N4등 절연보호막은 AI-1%Si 박막배선에서의 electromigration에 대한 저항력을 높여 결함방지효과를 보이며 수명을 향상시킨다. SiO2의 절연보호막의 경우가 AI-1%Si 박막배선의 electromigration에 대한 가장 강한 저항력을 보이며 평균수명도 높게 나타났다.

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Development of a Flat-type TDR System for Compaction Control (다짐관리를 위한 판형 TDR 시스템 개발)

  • Song, Minwoo;Choi, Chanyong;Kim, Daehyeon
    • Journal of the Korean Geotechnical Society
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    • v.32 no.4
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    • pp.51-61
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    • 2016
  • In this study, a new TDR system equipped with a flat type probe has been developed to improve the currently used TDR system that measures dry density and water content. To verify the developed TDR system, TDR tests were conducted on Jumunjin sand and three typical soils. Also, additional tests were performed to measure the correction value of the developed probe. Using the TDR signals, dielectric constant, electrical conductivity and soil constants were derived. The water content and dry density of the soils were determined through the TDR tests. The applicability of the TDR system was examined by comparison of the measured values by TDR and the real values. The values of dry density and water content were found to have about 2% and 0.5% error, respectively. Based on the test results, it has been confirmed that the new TDR system can be used as an alternative to the previous TDR system as it can measure the dry density and the water content with reasonable accuracy, leading to significant time and cost savings.

Bending Fatigue Characteristics of Surface-Antenna-Structure (복합재료 표면안테나 구조의 굽힘 피로특성 연구)

  • Kim D. H;Hwang W;Park H. C;Park W. S
    • Composites Research
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    • v.17 no.6
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    • pp.22-27
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    • 2004
  • The objective of this work is to design Surface Antenna Structure (SAS) and investigate fatigue behavior of SAS that is asymmetric sandwich structure. This term, SAS, indicates that structural surface becomes antenna. Constituent materials are selected considering electrical properties, dielectric constant and tangent loss as well as mechanical properties. For the antenna performance, SSSFIP elements inserted into structural layers were designed fur satellite communication at a resonant frequency of 12.5 GHz and final demonstration article was $16{\;}{\tiems}{\;}8$ array antenna. From electrical measurements, it was shown that antenna performances were in good agreement with design requirements. In cyclic 4-point bending, flexure behavior was investigated by static and fatigue test. Fatigue life curve of SAS was obtained. The fatigue load was determined experimentally at a 0.75 (1.875kN) load level, Experimental results were compared with single load level fatigue life prediction equations (SFLPE) and in good agreement with SFLPE. SAS concept is the first serious attempt at integration fur both antenna and composite engineers and promises innovative future communication technology.

Reliability of COF Flip-chip Package using NCP (NCP 적용 COF 플립칩 패키지의 신뢰성)

  • Min, Kyung-Eun;Lee, Jun-Sik;Jeon, Je-Seog;Kim, Mok-Soon;Kim, Jun-Ki
    • Proceedings of the KWS Conference
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    • 2010.05a
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    • pp.74-74
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    • 2010
  • 모바일 정보통신기기를 중심으로 전자패키지의 초소형화, 고집적화를 위해 플립칩 공법의 적용이 증가되고 있는 추세이다. 플립칩 패키징 접합소재로는 솔더, ICA(Isotropic Conductive Adhesive), ACA(Anisotropic Conductive Adhesive), NCA(Non Conductive Adhesive) 등과 같은 다양한 접합소재가 사용되고 있다. 최근에는 언더필을 사용하는 플립칩 공법보다 미세피치 대응성을 위해 NCP를 이용한 플립칩 공법에 대한 요구가 증가되고 있는데, NCP의 상용화를 위해서는 공정성과 함께 신뢰성 확보가 필요하다. 본 연구에서는 LDI(LCD drive IC) 모듈을 위한 COF(Chip-on-Film) 플립칩 패키징용 NCP 포뮬레이션을 개발하고 이를 적용한 COF 패키지의 신뢰성을 조사하였다. 테스트베드는 면적 $1.2{\times}0.9mm$, 두께 $470{\mu}m$, 접속피치 $25{\mu}m$의 Au범프가 형성된 플리칩 실리콘다이와 접속패드가 Sn으로 finish된 폴리이미드 재질의 flexible 기판을 사용하였다. NCP는 에폭시 레진과 산무수물계 경화제, 이미다졸계 촉매제를 사용하여 다양하게 포뮬레이션을 하였다. DSC(Differential Scanning Calorimeter), TGA(Thermogravimetric Analysis), DEA(Dielectric Analysis) 등의 열분석장비를 이용하여 NCP의 물성과 경화거동을 확인하였으며, 본딩 후에는 보이드를 평가하고 Peel 강도를 측정하였다. 최적의 공정으로 제작된 COF 패키지에 대한 HTS (High Temperature Stress), TC (Thermal Cycling), PCT (Pressure Cooker Test)등의 신뢰성 시험을 수행한 결과 양산 적용 가능 수준의 신뢰성을 갖는 것을 확인할 수 있었다.

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New Packaging and Characteristics of PIN PD for CWDM Transmission (저밀도 파장분할 다중화용 PIN PD 제작 및 특성)

  • Kang, Jae-Kwang;Chang, Jin-Heyon
    • Journal of the Microelectronics and Packaging Society
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    • v.12 no.4 s.37
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    • pp.323-330
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    • 2005
  • We fabricate PIN PD (Positive Intrinsic Negative Photo-Diode) for CWDM optical repeater and optical transmission system, and analyze theoretically the characteristics to verify the capability of device fabricated. Furthermore, we integrate CWDM filter into PD package to enhance the cost and the performance when compared to the conventional system, in which CWDM filter and PD package are linked by optical fusion splicing. The integrated CWDM PD is fabricated by three steps as follows: CWDM filter design, PD packaging, and product assembly and test. The results of measurement for PD fabricated reveal 0.5 dB bandwidth of 17 nm, isolation over 60 dB at transmission port and over 20 dB at reflection port. Also, the IMD3 for wireless communication is over 63 dBc, and the responsivity of PD presents over 0.9 A/W for 20 samples of the total 23 PD. The total insertion loss reduces about 0.4${\~}$0.7 dB due to the integrated assembly of CWDM and PD.

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