• 제목/요약/키워드: dielectric barrier discharge

검색결과 298건 처리시간 0.032초

전자부품의 친환경 세정공정 적용을 위한 유전체장벽 방전 플라즈마 생성 장치 개발 (Development of the Dielectric Barrier Discharge Plasma Generator for the Eco-friendly Cleaning Process of the Electronic Components)

  • 손영수;함상용;김병인
    • 한국정밀공학회지
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    • 제28권10호
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    • pp.1217-1223
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    • 2011
  • In this paper, the dielectric barrier discharge plasma generator has been studied for producing of the high concentration ozone gas. Proposed plasma generator has the structure of extremely narrow discharge air gap(0.15mm) in order to realize the high electric field discharge. We investigate the performance of the dielectric barrier discharge plasma generator experimentally and the results show that the generator has very high ozone concentration characteristics of 13.7[wt%/$O_2$] at the oxygen flow rate of 1[${\ell}$/min] of each discharge cell. So, we confirmed that the proposed plasma generator is suitable for the high concentration ozone production facility of the eco-friendly ozone functional water cleaning system in the electronic components cleaning process.

플라즈마 유동제어를 위한 DBD 플라즈마 액츄에이터의 설계변수에 따른 특성 연구 (Study on Characteristics of DBD Plasma Actuator as Design Parameters for Plasma Flow Control)

  • 윤수환;권혁빈;김태규
    • 한국항공우주학회지
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    • 제40권6호
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    • pp.492-498
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    • 2012
  • DBD(Dielectric Barrier Discharge) 플라즈마 액츄에이터의 설계 파라미터에 따른 특성을 연구하였다. 방전전압, 주파수, 전극의 간격, 폭, 길이, 유전체 두께에 따른 DBD 플라즈마 액츄에이터의 유속 및 소모전력을 측정하였다. 방전전압과 주파수가 클수록 유속과 소모전력은 증가하였다. 전극간격은 클수록 소모전력은 감소하면서 유속은 증가하였으나, 플라즈마 방전을 위해 높은 전압이 요구되었다. 상부전극폭은 좁을수록, 하부전극폭은 넓을수록 일정한 소모전력으로 유속을 증가시킬 수 있었다. 주어진 방전조건과 전극형상에서 DBD 플라즈마 액츄에이터의 성능을 예측할 수 있을 것으로 기대된다.

DBD 전극구조에서의 He 가스 글로우방전 특성연구 (The Study on the Properties of He Glow discharge in a Dielectric Barrier Discharge (DBD) Model)

  • 소순열
    • 전기학회논문지P
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    • 제67권4호
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    • pp.214-220
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    • 2018
  • Light sources induced by gas discharge using rare gases have been widely used in the thin film deposition, the surface modification and the polymer etching. A dielectric barrier discharge (DBD) has been developed in order to consistently emit light and control the wavelength of the emission light. However, much research on the characteristics of the movement of discharge particles is required to improve the efficiency of the light lamp and the life-time of the light apparatus in detail. In this paper, we developed a He DBD discharge simulation tool and investigated the characteristics of discharge particles which were electrons, two positive ions ($He^+$, $He_2^+$) and 5 excited particles ($He^*(1S)$, $He^*(3S)$, $He^*$, $He^{**}$, $He^{***}$). The discharge currents showed the transition from pulse mode to continuous mode with the increase of power. With the accumulated charges on the barrier walls, the discharge current was rapidly increased and caused oscillation of the discharge voltage. As the gas pressure increased, $He_2^+$ and $He^*(3S)$ became the dominant activated particles. The input power was mostly consumed by electrons and $He_2^+$ ion. And the change curve showed that power consumption by electrons increased more with gas pressure than with source voltage or frequency.

전기집진기형 공기청정기의 미세 먼지 저감 특성에 관한 연구 (Characteristics of the Reduction of Fine Particles in an Indoor Air Cleaner Using Electrostatic Precipitation Technique)

  • 목영선;이호원
    • 한국산업융합학회 논문집
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    • 제7권1호
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    • pp.115-120
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    • 2004
  • An indoor air cleaner consisting of a dielectric barrier discharge system and an electrostatic precipitator (ESP) was experimentally investigated. The function of the dielectric barrier discharge is to precharge particles by producing nonthermal plasma before indoor air enters ESP, leading to an enhancement in dust collection efficiency. The dependence of particle size distribution on the plasma discharge was examined to understand the mechanism of the particle precharging. The plasma discharge was found to increase the electrical force of the particles, rather than agglomerate them. Coarse particles in the range of 0.5 to $5.0{\mu}m$ were observed to be easily collected by this indoor air cleaner, and the present study laid emphasis on the removal of fine particles of $0.3{\mu}m$. The collection efficiency of the fine particles was largely enhanced by the plasma discharge.

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SO2 제거를 위한 유전체 장벽 방전 - 광촉매 복합 공정에서의 입자 형성과 성장 (Particle Formation and Growth in Dielectric Barrier Discharge - Photocatalysts Hybrid Process for SO2 Removal)

  • 나소노바 안나;김동주;김교선
    • 산업기술연구
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    • 제30권A호
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    • pp.127-132
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    • 2010
  • We analyzed the effects of several process variables on the $SO_2$ removal and particle growth by the dielectric barrier discharge - photocatalysts hybrid process. In this process, $SO_2$ was converted into the ammonium sulfate ($(NH_4)_2SO_4$) particles. The size and crystallinity of ammonium sulfate particles were examined by using TEM and XRD analysis. The dielectric barrier discharge reactor consisted of two zones: the first is for plasma generation and the second is for ammonium sulfate particles formation and growth. The first zone of reactor was filled with glass beads as a dielectric material. To enhance $SO_2$ removal process, the $TiO_2$ photocatalysts were coated on glass beads by dip-coating method. As the voltage applied to the plasma reactor or the pulse frequency of applied voltage increases, the $SO_2$ removal efficiency increases. Also as the initial concentration of $SO_2$ decreases or as the residence time increases, the $SO_2$ removal efficiency increases. $(NH_4)_2SO_4$ particles continue to grow by particle coagulation and surface reaction, moving inside the reactor. Larger particles in site are produced according to the increase of residence time or $SO_2$ concentrations.

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수처리용 유전체장벽 플라즈마 반응기에 대한 기초 연구 (A Basic Study of Plasma Reactor of Dielectric Barrier Discharge for the Water Treatment)

  • 김동석;박영식
    • 한국환경과학회지
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    • 제20권5호
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    • pp.623-630
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    • 2011
  • This study investigated the degradation of N, N-Dimethyl-4-nitrosoaniline (RNO, indicator of the generation of OH radical) by using dielectric barrier discharge (DBD) plasma. The DBD plasma reactor of this study consisted of a quartz dielectric tube, titanium discharge (inner) and ground (outer) electrode. The effect of shape (rod, spring and pipe) of ground electrode, diameter (9~30 mm) of ground electrode of spring shape and inside diameter (4~13 mm) of quartz tube, electrode diameter (1~4 mm), electrode materials (SUS, Ti, iron, Cu and W), height difference of discharge and ground electrode (1~15.5 cm) and gas flow rate (1~7 L/min) were evaluated. The experimental results showed that shape of ground electrode and materials of ground and discharge electrode were not influenced the RNO degradation. The thinner the diameter of discharge and ground electrode, the higher RNO degradation rate observed. The effect of height gap of discharge between ground electrode on RNO degradation was not high within the experimented value. Among the experimented parameters, inside diameter of quartz tube and gas flow rate were most important parameters which are influenced the decomposition of RNO. Optimum inside diameter of quartz tube and gas flow rate were 7 mm and 4 L/min, respectively.

유전체 장벽 방전-광촉매 복합공정에 의한 NO와 $SO_2$ 제거 (NO and $SO_2$ Removal by Dielectric Barrier Discharge-Photocatalysts Hybrid Process)

  • 김동주;;김교선
    • 청정기술
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    • 제13권2호
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    • pp.115-121
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    • 2007
  • 본 연구에서는 유전체 장벽 방전-광촉매 복합 공정에 의한 NO 및 $SO_2$ 제거를 실험적으로 분석하였다. 유전체 장벽 방전을 위해 유전체로서 유리구가 사용되었고 $TiO_2$ 광촉매 입자는 딥코팅(dip-coating) 방법에 의해 높은 비표면적을 가지는 스펀지 형태로 유리구에 코팅되었다. 플라즈마 반응기에 인가된 전압이나 펄스 주파수, 혹은 기체의 체류시간이 증가함에 따라, NO 및 $SO_2$의 제거효율은 증가하였다. NO 및 $SO_2$ 공급농도 증가하면 NO 및 $SO_2$ 제거에 더 많은 에너지가 요구되어 NO 및$SO_2$의 제거효율이 감소하였다. 본 연구의 실험 결과들은 NO 와 $SO_2$를 제거하기 위한 유전체 장벽 방전-광촉매 복합 공정 설계의 기초 자료로 사용될 수 있다.

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슬릿 유전체 장벽을 갖는 선대 평판형 방전장치의 방전 및 오존 발생특성 (Discharge and Ozone Generation Characteristics of a Wire-Plate Discharge System with a Slit Barrier)

  • 문재덕;정재승
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제54권9호
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    • pp.421-426
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    • 2005
  • A wire-plate discharge system with a slit barrier has been proposed and investigated experimentally by focusing on the discharges on the slit barrier and ozone generation characteristics. This wire-plate discharge system with a slit barrier can generate an intensive corona discharges, and produce corona discharge twice, once from the corona wire electrode and second time from the surface and the slits of the slit dielectric barrier. As a result this propose wire-plate discharge system with the slit barrier can produce greatly increased ozone than without the slit barrier. This type of wire-plate discharge system with the slit barrier could be used for effective ozone generation as a means with retard to the removal of pollutant gas

유전체 방전 플라즈마 공정에 의한 일산화질소 제거 공정 모델링 (Modeling of Dielectric Barrier Discharge Plasma Process for the Removal of Nitric Oxide)

  • 목영선
    • 한국산업융합학회 논문집
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    • 제6권4호
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    • pp.277-289
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    • 2003
  • This study proposes a mathematical model to characterize the removal of nitrogen oxides in a dielectric barrier discharge plasma process. As well as the reactions between nitrogen oxides, water vapor, oxygen and nitrogen, the model takes into account the effect of ethylene often used as a chemical additive to reduce the power consumption of the process on the removal of nitrogen oxides. Since the concentrations of the radicals concerned in the main reactions including O, OH, H and N should be calculated to predict the removal efficiency of nitrogen oxides, they were theoretically derived. The parameters affecting the removal of nitrogen oxides, such as initial concentration, discharge power, humidity, and ethylene concentration were experimentally evaluated, which were compared with the calculated results to verify the validity of the model proposed. The predicted concentrations of several byproducts formed in this process were also presented and discussed. The effects of several parameters mentioned above on the removal of nitrogen oxides were reasonable described by the proposed model.

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Effects of Hydrophilic Surface Treatment on SUS Substrates by Using Dielectric Barrier Discharge

  • Joa, Sang-Beom;Kang, In-Je;Yang, Jong-Keun;Lee, Heon-Ju
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.458-458
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    • 2012
  • Fuel Cell is used stacking metal or polymer substrate. This hydro property of substrate surface is very important. Usually, surface property is hydrophilic. The surface oxidation of SUS is investigated through plasma treatments with an atmospheric-pressure dielectric barrier discharge (DBD) for increasing hydrophilic property. The plasma process makes an experiment under various operating conditions of the DBD, which operating conditions are treatment time, plasma gas mixture ratio, the plasma source supply frequency. Two kinds of SUS substrate, SUS-304 and SUS 316L, were used. Discharge frequency has a crucial impact on equipment performance and gas treatment. After the plasma treatment of a SUS plate, highly improved wettability was noted. But, when high oxygen supply, the substrate damaged seriously.

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