• 한국재료학회지
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• 제22권10호
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• pp.552-561
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• 2012

Diamond-like carbon (DLC) films have been widely used in many industrial applications because of their outstanding mechanical and chemical properties like hardness, wear resistance, lubricous property, chemical stability, and uniformity of deposition. Also, DLC films coated on paper, polymer, and metal substrates have been extensively used. In this work, in order to improve the printing quality and plate wear of polymer printing plates, different deposition conditions were used for depositing DLC on the polymer printing plates using the Pulsed DC PECVD method. The deposition temperature of the DLC films was under $100^{\circ}C$, in order to prevent the deformation of the polymer plates. The properties of each DLC coating on the polymer concave printing plate were analyzed by measuring properties such as the roughness, surface morphology, chemical bonding, hardness, plate wear resistance, contact angle, and printing quality of DLC films. From the results of the analysis of the properties of each of the different DLC deposition conditions, the deposition conditions of DLC + F and DLC + Si + F were found to have been successful at improving the printing quality and plate wear of polymer printing plates because the properties were improved compared to those of polymer concave printing plates.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.1054-1057
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• 2004

The nitrogenated diamond-like carbon (NDLC) exhibits high electrical resistivity and thermal conductivity that are similar to the properties shown by diamond-like carbon (DLC) films. These diamond-like transparent properties in NDLC come in a material consisting of $sp^2$-bonded carbon versus the $sp^3$-carbon of DLC. The diamond-like properties and nondiamond-like bonding make NDLC an attractive candidate for applications. Liquid crystal (LC) alignment capabilities with ion beam exposure on NDLC thin films and electro-optical (EO) performances of the ion-beam-aligned twisted nematic liquid crystal display (TN-LCD) with oblique ion beam exposure on the NDLC thin film surface were studied. An excellent uniform alignment of the nematic liquid crystal (NLC) alignment with the ion beam exposure on the NDLC thin films was observed. In addition, it can be achieved that the good EO properties of the ion-beam-aligned TN-LCD. Finally, we will present the residual DC property of the ion-beam-aligned TN-LCD on the NDLC thin film surface.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2005년도 창립60주년 기념 추계 학술대회
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• pp.238.1-238.1
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• 2005

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 추계학술발표대회
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• pp.12.2-12.2
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• 2011

Diamond-like carbon (DLC) coatings are used nowadays in various applications such as a protective coating against wear or corrosion in automotive parts, and recently its use is more and more apparent in particular biomedical applications [1]. The Japanese Ministry of Economy, Trade and Industry has started a program of collaborative study for industrial standardization of DLC films and their evaluation techniques. Japan New Diamond Forum (JNDF), Nanotec Corporation and the Nagaoka University of Technology are conducting this program. This project includes national organizations (businesses, universities, and research facilities), encompassing a wide range of requirements. JNDF organize Japanese project committee and working group. The purpose of this report is to discuss standardization and classification of DLC coatings.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.467-470
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• 2004

Diamond-Like Carbon (DLC) thin film is a semiconductor with high mechanical hardness, low friction coefficient, high chemical inertness, and optical transparency. DLC thin films have widespread applications as protective coatings and solid lubricant coatings in areas such as Hard Disk Drive (HDD) and Micro-Electro-Mechanical-Systems (MEMS). In this work, the wear characteristics of DLC thin films deposited on silicon substrates using a DC-magnetron sputtering system were analyzed. The wear tracks were measured with an Atomic Force Microscope (AFM). To identify the sp2 and sp3 hybridization of carbon bonds and other bonds Raman spectroscopy was used. The structural information of DLC thin films was obtained with Fourier transform infrared spectroscopy and wear tests were conducted by using a micro-pin-on-reciprocator tester. Results showed that the wear characteristics were dependent on the sputtering conditions. The wear rate could be correlated with the bonding state of the DLC thin film.

• 한국진공학회지
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• 제21권4호
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• pp.193-198
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• 2012

플라즈마화학기상증착 장치를 이용하여 플라즈마 폴리머와 다이아몬드상 탄소(diamond-like carbon, DLC) 박막을 합성하였다. 플라즈마 폴리머 박막 위에 패시베이션 층으로 DLC 박막을 두께에 따라 합성하였고, DLC/플라즈마 폴리머 박막의 구조적, 물리적, 전기적 특성들을 고찰하였다. 기존 플라즈마 폴리머는 누설 전류 특성이 좋고 낮은 유전상수 값을 가지고 있다. 그러나 실제 반도체 공정에 적용되기 위해서는 물리적 특성도 만족되어야 하기 때문에 플라즈마 폴리머 박막 위에 DLC 패시베이션을 적용하여 플라즈마 폴리머의 물리적, 전기적 특성들을 향상시키고자 하였다. DLC 박막의 두께가 증가함에 따라 플라즈마 폴리머의 경도와 탄성계수 값은 증가하였고, root-mean-square 표면거칠기 값은 감소하고 접촉각은 증가하였다. DLC 패시베이션 되어진 플라즈마 폴리머의 경우 패시베이션이 없는 폴리머보다 유전상수 값이 증가하였지만 전기적 누설전류 특성은 향상되었다.

• 대한치과보철학회지
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• 제46권2호
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• pp.209-216
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• 2008

본 연구의 목적은 내측연결형 임플랜트와 일체형 지대주를 사용하여 최종 보철물을 시적한 뒤에 5만 번의 반복하중 후에 다시 체결하고 20만 번의 반복하중을 가한 후의 지대주 풀림토크와 20만 번의 반복하중을 받은 지대주 풀림토크가 어떻게 달라지는지를 비교하고자 하는 것이다. 실험 재료로는 타이타늄 지대주와 DLC 코팅된 지대주를 사용하였다. 실험군은 4군으로 모두 8개의 ITI SLA $4.1{\times}10mm$ 를 사용하였다. A군과 B군은 5만번, 20만번 반복하중을 가하고 Periotest값과 풀림 토크값을 측정하였으며 C군과 D군은 20만번 반복하중을 가하고 Periotest 값과 풀림토크값을 측정하였다. 풀림 토크값의 측정은 디지털 토크 게이지를 사용하였고, 반복하중은 MTS. (Bionix 850 II, MTS, U.S.A.)를 사용하였으며 100N/cm의 힘을 20도의 경사, 14Hz 의 조건으로 가하였다. A군과 C군은 코팅하지 않은 타이타늄 지대주를 사용하였으며, B군과 D군은 DLC 코팅한 지대주를 사용하였다. 1. 5만번 반복하중을 가한 뒤 측정한 풀림 토크는 B군에서 약간 더 큰 평균값을 보였다. 하지만 통계학적으로 두 군간에 유의한 차이를 보이지 않았다 (P>0.05). 2. 20만번 반복하중을 가한 뒤 측정한 최종 풀림 토크 값은 A군은 C군보다, B군은 D군보다 약간 더 큰 평균값을 보였으나 통계학적으로 두 군간에 유의한 차이를 보이지 않았다 (P>0.05). 3. 20만번 반복하중을 가한 최종 풀림 토크 값은 A, B군과 C, D군 사이에 통계학적으로 유의할 만한 차이가 없었다 (P>0.05).

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 하계학술대회 논문집 C
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• pp.1383-1386
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• 1997

Dimond-like carbon(DLC) films have been deposited by using both rf plasma-enhanced chemical vapor deposition (PECVD) and filtered cathodic vacuum arc (FCVA) deposition systems. Effects of deposition conditions, such as dc self-bias, $CH_4$ gas pressure, substrate bias, and $N_2$ partial pressure, on the structural and electrical properties of DLC films are examined. The experimental results obtained have also been discussed by considering a theoretical model for film growth.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.1737-1739
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• 2004

Diamond-like carbon (DLC) films were prepared with RF-PECVD (Plasma Enhanced Chemical Vapor Deposition) method on coming glass and silicon substrates using methane ($CH_4$) and hydrogen ($H_2$) gases. We examined the effects of $CH_4$ to $H_2$ ratios on tribological and optical properties of the DLC films. The structure and surface morphology of the films were examined using Raman spectroscopy and atomic force microscopy (AFM). The hardness of the DLC film was measured with nano-indentor. The optical properties of DLC thin film were investigated by UV/VIS spectrometer and ellipsometry. And also, solar cells were fabricated using DLC as antireflection coating before and after coating DLC on silicon substrate and compared the efficiency.

• 한국전기전자재료학회논문지
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• 제19권7호
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• pp.618-623
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• 2006

Hydrogenated Diamond-like carbon (DLC) films were prepared by the radio frequency plasma enhanced chemical vapor deposition (RF PECVD) method on silicon substrates using methane $(CH_4)$ and hydrogen $(H_2)$ gas. The wear track on the DLC films was examined after the ball-on disk (BOD) measurement with a Raman mapping method. The BOD measurement of the DLC films was performed for 1 to 3 hours with a 1-hour step time. The sliding traces on the hydrogenated DLC film after the BOD measurement were also observed using an optical microscope. The surface roughness and cross-sectional images of the wear track were obtained using an atomic force microscope (AFM). The novel Raman mapping method effectively shows the graphitization of DLC films of $300{\mu}m\times300{\mu}m$ area according to the sliding time by G-peak positions (intensities) and $I_D/I_G$ ratios.