Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

Diamond-like Carbon Protective Anti-reflection Coating for Solar Cell Application

태양전지 응용을 위한 DLC(Diamond-like Carbon) 반사방지막의 특성 분석

  • Choi, Won-Seok (School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Jeon, Young-Sook (School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Kim, Kyung-Hae (School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Yi, Jun-Sin (School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Heo, Jin-Hee (School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Chung, Il-Sub (School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Hong, Byung-You (School of Information and Communication Engineering, Sungkyunkwan University)
  • 최원석 (성균관대학교 정보통신공학부) ;
  • 전영숙 (성균관대학교 정보통신공학부) ;
  • 김경해 (성균관대학교 정보통신공학부) ;
  • 이준신 (성균관대학교 정보통신공학부) ;
  • 허진희 (성균관대학교 정보통신공학부) ;
  • 정일섭 (성균관대학교 정보통신공학부) ;
  • 홍병유 (성균관대학교 정보통신공학부)
  • Published : 2004.07.14
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Abstract

Diamond-like carbon (DLC) films were prepared with RF-PECVD (Plasma Enhanced Chemical Vapor Deposition) method on coming glass and silicon substrates using methane ($CH_4$) and hydrogen ($H_2$) gases. We examined the effects of $CH_4$ to $H_2$ ratios on tribological and optical properties of the DLC films. The structure and surface morphology of the films were examined using Raman spectroscopy and atomic force microscopy (AFM). The hardness of the DLC film was measured with nano-indentor. The optical properties of DLC thin film were investigated by UV/VIS spectrometer and ellipsometry. And also, solar cells were fabricated using DLC as antireflection coating before and after coating DLC on silicon substrate and compared the efficiency.

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