• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2010.11a
• /
• pp.511-512
• /
• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2011.06a
• /
• pp.765-766
• /
• 2011

• Journal of the Korean Society for Precision Engineering
• /
• v.31 no.3
• /
• pp.181-187
• /
• 2014

Micro patterns are used to maximize the performance and efficiency of the product in many industries such as energy, display, printing, biology, etc. Nowadays, the fabrication technology for micro patterns has been developed in various ways such as photolithography, laser machining, electrical discharge machining and mechanical machining. Recently, mechanical machining the size of smaller than 1 micrometer could be tried, because the technology related to the machining was developed brilliantly. This paper shows the experiments using cutting processes in order to fabricate the micro pattern. Micro patterns of the size of several micrometers were machined by the diamond tools of two different shape, the deformation and generation of burr were investigated.

• Journal of Powder Materials
• /
• v.20 no.4
• /
• pp.297-301
• /
• 2013

Mirror surface machining for large area flattening in the display field has a problem such as a tool wear and a increase in machining time due to large area machining. It should be studied to decrease machining time and tool wear. In this paper, multi-tool machining method using a PCD tool and a SCD tool was applied in order to decrease machining time and tool wear. Machining characteristics (cutting force, machined surface and surface roughness) of PCD tool and SCD tool were evaluated in order to apply PCD tool to flattening machining. Based on basic experiments, the PCD/SCD multi-tool method and the SCD single-tool method were compared through surface roughness and machining time for appllying large area mold machining.

• Journal of the Korean Society for Precision Engineering
• /
• v.32 no.11
• /
• pp.983-988
• /
• 2015

This paper details a new ultra-precise turning method for increasing surface quality, "Multi Point B Axis Control Method." Machined surface error is minimized by the compensation machining process, but the process leaves residual chip marks and surface roughness. This phenomenon is unavoidable in the diamond turning process using existing machining methods. However, Multi Point B axis control uses a small angle (< $1^{\circ}$) for the unused diamond edge for generation of ultra-fine surfaces; no machining chipping occurs. It is achieved by compensated surface profiling via alignment of the tool radial center on the center of the B axis rotation table. Experimental results show that a diamond turned surface using the Multi Point B axis control method achieved P-V $0.1{\mu}m$ and Ra 1.1nm and these ultra-fine surface qualities are reproducible.

• Design & Manufacturing
• /
• v.14 no.2
• /
• pp.56-61
• /
• 2020

Recently, research for machining next-generation micro semiconductor processes and micro patterns has been actively conducted. In particular, it is applied to various industrial fields depending on the machining method in the case of FIB (Focused ion beam) milling. In this study, intends to deal with FIB milling machining technology for ultra-precision diamond tool fabrication technology. Ultra-precision diamond tools require nano-scale precision, and FIB milling is a useful method for nano-scale precision machining. However, FIB milling has a problem of Gaussian characteristics that are differently formed according to the beam current due to the input of an ion beam source, and there are process conditions to be considered, such as a side clearance angle problem of a diamond tool that is differently formed according to the tilting angle. A series of process steps for fabrication a ultra-precision diamond tool were studied and analyzed for each process. It was confirmed that the effect on the fabrication process was large depending on the spot size of the beam and the current of the beam as a result of the experimental analysis.

• Journal of Powder Materials
• /
• v.20 no.5
• /
• pp.355-358
• /
• 2013

Micro trench structures are applied in gratings, security films, wave guides, and micro fluidics. These micro trench structures have commonly been fabricated by micro electro mechanical system (MEMS) process. However, if the micro trench structures are machined using a diamond tool on large area plate, the resulting process is the most effective manufacturing method for products with high quality surfaces and outstanding optical characteristics. A nonferrous metal has been used as a workpiece; recently, and hybrid materials, including polymer materials, have been applied to mold for display fields. Thus, the machining characteristics of polymer materials should be analyzed. In this study, machining characteristics were compared between nonferrous metals and polymer materials using single crystal diamond (SCD) tools; the use of such materials is increasing in machining applications. The experiment was conducted using a square type diamond tool and a shaper machine tool with cutting depths of 2, 4, 6 and 10 ${\mu}m$ and a cutting speed of 200 mm/s. The machined surfaces, chip, and cutting force were compared through the experiment.

• Journal of the Korean Society for Precision Engineering
• /
• v.13 no.1
• /
• pp.78-83
• /
• 1996

This paper presents the characteristics of surface roughness and cutting force in ultraprecision cutting of aluminium alloy using natural diamond tools whose edge radii are smaller than those of tools made of other materials. The feed rate and depth of engagement were set to be a micrometer order. After measuring the surface roughness of machined surface and cutting force for each cutting condition, the relations between the surface quality and its condition were investigated qualitatively. If the feed rate was under a certain limit, the machined surface quality was deteriorated unexpectedly. This is supposed to have happened due to vibration leading its condition to abnormal one. In a certain situation the machined surface roughness by a natural diamond tool was inferior to that made by a carbide tool whose cutting edge radius is larger. This is supposed to be caused by not normal machining but burnishing effect.

• Journal of the Korean Ceramic Society
• /
• v.35 no.1
• /
• pp.41-47
• /
• 1998

Cutting and planarization of diamond films have been performed using copper vapor laser under air at-mosphere. Diamond films of about 350${\mu}{\textrm}{m}$ and 800 ${\mu}{\textrm}{m}$ thick have been synthesized with DC plasma assisted chemical vapor deposition. The position of a specimen has been controlled by computer-driven stage. With copper vapor laser beam of 7W cutting depth increases rapidly and saturates with increasing scan number and decreasing scan speed. 8 repetitive scans at scan speed 0.5 mm/sec produce the maximum cutting depth without focus shifting Rod-shape copper vapor laser beam can be made and used effectively in planar-ization of rough diamond surface.

• Journal of the Korean Society for Precision Engineering
• /
• v.11 no.5
• /
• pp.189-198
• /
• 1994

The achievable machining accuracy depends upon the level of the micro-engineering, and the today's accuracy targets are dimensional tolerances in the order of 10nm and surface roughness in the order of 1nm. Such requirements cannot be satisfied by the conventional machining processes. Single point diamond turning is the one of new techniques which can produce the parts with such accuracy limits. The aims of this thesis are to get a better understanding of the complex cutting process with a diamond tool and, consequently, to develope a predicting model of a turned surface profile. In order to predict the turned surface profile, a numerical model has been developed. By means of this model, the influence of the operational settings-the material properties of the workpiece, the geometry of the cutting tool and the dynamic behaviour of the lathe-and their influences via the cutting forces upon the surface roughness have been estimated.