• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.2
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• pp.81-86
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• 2006

The machining parts must be produced within the specification of drawing and those will be able to meet function and efficiency. At that time, it is very important not only precision machine and machining technique but also the measurement technique. So, the improvement of measurement technique is to be joined together at once with improvement of machining technique. Finally, the quality and value of the parts are decided by precision measurement. This paper aims to study on the machined surfaces characteristics of aluminum alloy by AFM(Atomic force microscope) measurement. The objective is contribution to ultra-precision machining by exhibit foundation data of surface roughness and tool wear when parts are cutting with diamond tool at the factory.

• Journal of the Semiconductor & Display Technology
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• v.18 no.4
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• pp.1-5
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• 2019

This study has been focused on properties of surface technology for large diameter upper electrode using in high density plasma process as like semi-conductor manufacturing process. The experimental studies have been carried out to get mirror surface for upper electrode. For a formation of high surface quality upper electrode, single crystal silicon upper electrode has been mechanical and chemical machining worked. Mechanical machining work of the upper electrode is carried out with varying mesh type using diamond wheel. In case of chemical machining work, upper electrode surface roughness was observed to be strongly dependent upon the etchant. The different surface roughness characteristics were observed according to etchant. The machining result of the surface roughness and surface morphology have been analyzed by use of surface roughness tester, laser microscope and ICP-MS.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.10 no.1
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• pp.73-79
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• 2011

In this study, coring with diamond core drill on the sintered $Al_2O_3$ ceramic plate were carried out with different coring conditions such as various cutting speed and feed rate to evaluate their effectiveness on the wearing behavior of diamond tool and coring quality. The wearing rate of diamond core drill were getting better with increasing cutting speed and feed rate but the quality of cored hole were getting worse as increasing cutting speed and feed rate.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.71-74
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• 1995

Diamond shaping is one of the machining strategies to make the optical micro-groove molds,and it is especially useful when rhe component is an assembly of the linear micro-groove array. A mirror-like surface and arbitrary crose-sectional curve can be easily made by diamond. Howerver, the cutting speed of shaping is relatively lower than that of the other cutting methods, and there exist an unstable cutting conditions that generate the chatter. This study is focused on the modeling of the simplified self-induced chatter of the diamond shapping. Form the chatter model and experiments, it is found that the unstable cutting conditions exist wwhen the depth of cut is low and cutting speed is high.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.1020-1024
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• 1997

Recently the use of ceramic materals has been greatly increased in the industries. But machining of the ceramics is quite unproductive because of their high stength,high hardness,and brittleness. The efficiency of the grinding operation of ceramics depends on the preparation of diamond grinding wheel, i.e.,truning and dressing. This paper describes some experimental results on the dressing conditions of diamond grinding wheel. The dressing performance is evaluated by the magnitude of normal grinding force. The better dressed wheels result in the lower normal grinding forces. The dressing performances of copper plate and aluminum oxide dressing stick are compared. The optimum dressing conditions including the grit size of dressing sticks, the depth of the dressing operation, and the dressing speed qre determined.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1881-1884
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• 2003

Diamond turning machines have, been used for the processing of surface like a mirror with the control scheme of minimizing shape error, Ultra-precision diamond fuming is applied to produce highly precision optical components required not only a high machining accuracy but also a good surface roughness. Al-6061 is widely used as optical parts such as laser reflector's mirror or multimedia instrument. In this study, thermal-imaged Al flat mirrors are fabricated by SPDT. The surface roughness 3.472 nm Ra, power 2 fringe(at 632.8 nm) and irregularity 1 fringe(at 632.8 nm) for form waviness of thermal-imaged Al flat mirror are very satisfied to the required specification in industry.

• Journal of the Korean Professional Engineers Association
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• v.22 no.2
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• pp.10-18
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• 1989

New Materials such as fine ceramics have attracted much attention as structural materials. The industrial needs of machining such materials will be emphasized more and more in the future. The objective of this study is to supply useful knowledges for improvement by cooled cutting of sintered diamond tool. This study treats with experimental analysis of tool wear, surface roughness and thermal stress which will lead to the machinability of fine ceramics.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.399-400
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1223-1227
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• 2005

Fine microgroove is the key component to fabricate micro-grating, micro-grating lens and so on. Conventional groove fabrication methods such as etching and lithography have some problems in efficiency and surface integrity. This study deals with the creation of ultra-precision micro grooves using non-rotational diamond tool and CNC machining center. The shaping type machining method proposed in the study allows to produce V-shaped grooves of $40\mu{m}$ in depth with enough dimensional accuracy and surface. For the analysis of machining characteristics in micro V-grooving, three components of cutting forces and AE signal are measured and processed. Experimental results showed that large amplitude of cutting forces and AE appeared at the beginning of every cutting path, and cutting forces had a linear relation with the cross-sectional area of uncut chip thickness. From the results of this study, proposed micro V-grooving technique could be successfully applied to forming the precise optical parts like prism patterns on light guide panel of TFT-LCD.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.376-381
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• 2003

Ultra precision diamond cutting is a very efficient manufacturing method for optical parts such as HOE, Fresnel lenses, diffraction lenses, and others. During micro cutting, the rake angle is likely to become negative because the tool edge radius is considerably large compared to the sub-micrometer-order depth of cut. Depending on the ratio of the tool edge radius to the depth of cut, different micro-cutting mechanism modes appear. Therefore, the tool edge sharpness is the most important factor affecting the qualities of machined parts. That is why diamond especially mono-crystal diamond, which has the sharpest edge among all other materials is widely used in micro-cutting. The question arises, given a diamond tool, what is the minimum (critical) depth of cut to get continuous chips while in the cutting process\ulcorner In this paper, the micro machinability around the critical depth of cut is investigated in micro grooving with a diamond tool, and introduce the minimizing method of cutting depth using vibration cutting. The experimental results show the characteristics of micro cutting in terms of cutting force ratio (Fx/Fy), chip shape, surface roughness, and surface hardeing around the critical depth of cut.