• Journal of the Semiconductor & Display Technology
• /
• v.20 no.4
• /
• pp.146-150
• /
• 2021

Plasma information based virtual metrology (PI-VM) that predicts wafer-to-wafer etch rate variation after wet cleaning of plasma facing parts was developed. As input parameters, plasma information (PI) variables such as electron temperature, fluorine density and hydrogen density were extracted from optical emission spectroscopy (OES) data for etch plasma. The PI-VM model was trained by stepwise variable selection method and multi-linear regression method. The expected etch rate by PI-VM showed high correlation coefficient with measured etch rate from SEM image analysis. The PI-VM model revealed that the root cause of etch rate variation after the wet cleaning was desorption of hydrogen from the cleaned parts as hydrogen combined with fluorine and decreased etchant density and etch rate.

• Journal of Korean Society for Atmospheric Environment
• /
• v.29 no.6
• /
• pp.757-772
• /
• 2013

In this study, a combination of sorbent tube (ST)-thermal desorption (TD)-gas chromatography (GC)-mass spectrometry (MS) was used for quantitative analysis of liquid phase standards of 10 BVOC ((1) (+)-${\alpha}$-pinene, (2) (+)-${\beta}$-pinene, (3) ${\alpha}$-phellandrene, (4) (+)-3-carene, (5) ${\alpha}$-terpinene, (6) p-cymene, (7) (R)-(+)-limonene, (8) ${\gamma}$- terpinene, (9) myrcene, and (10) camphene). The results of BVOC calibration yielded comparatively stable pattern with response factor (RF) of 23,560~50,363 and coefficient of determination ($R^2$) of 0.9911~0.9973. The method detection limit (MDL) of BVOC was estimated at 0.03~0.06 ng with the reproducibility of 1.30~5.13% (in terms of relative standard error (RSE)). Emissions of BVOC were measured from four types of fruit samples ((1) tangerine (TO), (2) tangerine peel (TX), (3) strawberry (SO), and (4) sepals of strawberry (SX)). The sum of BVOC flux (${\sum}flux$ (BVOC) in ng/hr/g) for each sample was seen on the descending order of (1) TX=291,614, (2) TO=2,190, (3) SO=1,414, and (4) SX=2,093. If the results are compared between the individual components, the highest flux was seen from (R)-(+)-limonene (265,395 ng/hr/g) from TX sample.

• Journal of Environmental Health Sciences
• /
• v.32 no.5 s.92
• /
• pp.485-491
• /
• 2006

It is widely known that Environmental Tobacco Smoke(ETS) is not good for health. ETS is composed of a lot of chemicals. So indicators are needed to evaluate the risk of ETS in air. One of the indicators is Nicotine. Active sampler has been used to measure nicotine concentration in air. The experiments were conducted to compare the active sampler method with diffusive sampler in exposure chamber and smoking areas, respectively. Sampling rate was 40.5 ml/min in exposure chamber. Experimental sampling rate (40.5 ml/min) was more than theoretical sampling rate (33.52 ml/min). And the higher was the concentration in air, the higher was experimental sampling rate. The average desorption, rate was 113.6%. The overall precision was 7.31 %. The overall accuracy was 18.96%, which were under NIOSH criteria. The average(GM) concentrations of nicotine by two sampling methods were $8.29{\mu}g/m^{3}$ (active sampler), $7.54{\mu}/m^{3}$ (diffusive sampler) in smoking area and smoking room. There was no regression between active sampler and diffusive sampler ($R^{2}=0.2397$). But slope, coefficient of determination was 1.017, 0.9292, respectively after removing outliers. And the slope (1.017) was close to the theoretical slope (1). In conclusion, this study indicated that diffusive sampler can be used to evaluate concentration of nicotine in air instead of active sampler.

• Bulletin of the Korean Chemical Society
• /
• v.28 no.8
• /
• pp.1375-1382
• /
• 2007

A column preconcentration method with pulverized Amberlite XAD-4 loaded with bismuthiol I (BI) has been developed for the determination of trace Cd(II) and Cu(II) in various real samples by flame atomic absorption spectrophotometry. Various experimental conditions, such as the size of XAD-4, adsorption flow rate, amount of bismuthiol I, stirring time for adsorbing bismuthiol I on XAD-4, pH of sample solution, amount of XAD-4- BI, desorption solvent, and desorption flow rate, were optimized. Also, the adsorption capacity and the adsorption rate of Cd(II) and Cu(II) on XAD-4-BI were investigated. The interfering effects of various concomitant ions were investigated, Bi(III), Sn(II) and Fe(III) were found to affect the determination. But the interference by these ions was completely eliminated by adjusting the amount of XAD-4-BI resin to 0.70 g, although the adsorption flow rate was slower. For Cd(II) our proposed technique obtained a dynamic range of 0.5-40 ng mL-1, a correlation coefficient (R2) of 0.9913, and a detection limit of 0.3 ng mL-1. For Cu(II), the corresponding values were 2.0-120 ng mL-1, 0.9921 and 1.02 ng mL-1. To validate this proposed technique, the aqueous samples (stream water, reservoir water, tap water and wastewater), the diluted brass sample and the plastic sample, as real samples, were used. Recovery yields of 91-103% were obtained. These measured data were not different from ICP-MS data at 95% confidence level. Our proposed method was also validated using rice flour CRM (normal, fortified) samples. From the results of our experiment, we found that the technique we present here can be applied to the determination of Cd(II) and Cu(II) in various real samples.

• Textile Coloration and Finishing
• /
• v.12 no.1
• /
• pp.52-60
• /
• 2000

In the prior studies, we reported that the dye uptakes of C. I. Disperse Violet 1 on polyester fiber in hexane and cyclohexane were higher than those in the other solvents, as the number of carbon atoms of alkanes decreased, the dye uptake increased, and the logarithmic plot of the dye uptakes vs. the solubilities of the dye showed that the dye uptakes are inversely proportional to the solubilities. In this study, for Interpretation of dyeing behavior of C. I. Disperse Violet 1 on polyester in alkanes, the thremodynamic parameters of dyeing, such as standard affnity, heat of dyeing(enthalpy change), entropy change, diffusion coefficient, and activation energy of diffusion, were obtained from isotherms and dyeing rates at different temperature. As the number of carbon atoms of alkanes increased, the standard affinity decreased, but the heat of dyeing(enthalpy change) and the entropy change showed larger negative values. These results mean that as the number of carbon atoms of alkanes increases, the dye uptake decreases, but both the fraction of the dye molecules dyed at relatively highly aligned or compact region of polyester fiber and the regularity of dye aggregates in the fiber become increased. As the number of carbon atoms of alkanes increased, the diffusion coefficient decreased, but the activation energy of diffusion increased. In the alkane of larger number of carbon atoms, because the solubility of the dye is higher, the desorption rate of the dye is faster and the diffusion coefficient is smaller than those in the smaller alkanes. But the energy required to separate the dye molecules from the alkane molecules is much higher because the interaction between the alkane molecule and the dye molecule become strong with the number of carbon atoms.

• 전기의세계
• /
• v.23 no.4
• /
• pp.46-52
• /
• 1974

Generally, it has been regarded that there are two kinds of the effect of the electrodes, especially of the cathode in the gas discharge, (a) the effect caused by the difference of the cathode meterial and (b) the effect by the change of the cathode surface state even in the same meterials. Thus the two effects must be investigated independently to study the roles of the cathode in gas discharges. This paper measured sparking voltage in Rare gas (Ar, He) for the change of sparking voltage in repeating sparks and for the effect of (a) and (b) mentioned above, under the condition that the desorption of impurities from the cathod can be nigligible, and it is obtained that the correlative relations of the work function, sparking voltage and secondary coefficient are comparatively simple. In addition, the interesting character of the minimum point of the paschen's curves is found. The results were as follows; 1) The value of (pd)min with minimum pint of sparking voltage, (Vs)min, is 0.7-0.9 Torr. cm in Argon, but is 5.6-7.1 Torr. cm in Helium, and Paschen's curve in Helium shows slow curve than in Argon. 2) The minimum point of the Paschen's curve is satisfied actually Townsend's self sustaining criterion in Argon, but non-satisfaction in Helium, and the Townsend's secondary coefficient .gamma. action have compound property (.gamma.$_{i}$, .gamma.$_{p}$, .gamma.$_{m}$) in Helium. 3) The dependenting character of work function in Helium is less than in Argon. 4) The minimum point of sparking voltage increase under oxidized electrode than clear electrode in Au and Ag, but minimum point decrease in Ni and Cu.

• The Transactions of the Korean Institute of Electrical Engineers P
• /
• v.55 no.1
• /
• pp.26-30
• /
• 2006

For the purpose of developing capacitive humidity sensor having interdigital electrodes, interdigital electrode was modeled and simulated to obtain capacitance and sensitivity as a function of geometric parameters like the structural gap and thickness. For the development of ASIC, switched capacitor signal processing circuits for capacitive humidity sensor were designed and simulated by Cadence using $0.25{\mu}m$ CMOS process parameters. The signal processing circuits are composed of amplifier for voltage gain control, and clock generator for sensor driving and switch control. The characteristics of the fabricated sensors are; 1) sensitivity is 9fF/%R.H., 2) temperature coefficient of offset(TCO) is $0.4%R.H./^{\circ}C$, 3) nonlinearity is 1.2%FS, 4) hysteresis is 1.5%FS in humidity range of $3%R.H.{\sim}98%R.H.$. The response time is 50 seconds in adsorption and 70 seconds in desorption. Fabricated process used in this capacitive humidity sensor having interdigital electrode are just as similar as conventional IC process technology. Therefore this can be easily mass produced with low cost, simple circuit and utilized in many applications for both industrial and environmental measurement and control system, such as monitoring system of environment, automobile, displayer, IC process room, and laboratory etc.

• Mass Spectrometry Letters
• /
• v.2 no.3
• /
• pp.61-64
• /
• 2011

Matrix Assisted Laser Desorption/Ionization-Time-of-Flight mass spectrometry (MALDI-TOF-MS) is the most widely used MS technique for glycan analysis. However, the poor point-to-point and sample-to-sample reproducibility becomes a limit in glycan biomarker research. A prespotted MALDI plate which overcomes the large crystal formation of 2,5-dihydroxybenzoic acid (DHB) has been developed and applied for glycan analysis. A homogeneous matrix coated surface without a crystal structure was formed on a hydrophilic/ hydrophobic patterned surface using a piezoelectric device. The reproducible MALDI-TOF-MS data have been presented using MALDI imaging of beer glycan as well as serum glycan eluted from 10% and 20% ACN elution fractions. The glycan profile from the serum glycan by MALDI-TOF-MS with a DHB prespotted plate was highly conserved for 10 different spectra and the coefficient of variations of significant ion peaks of MALDI data varies from 3.59 to 19.95.

• Journal of the Korean Vacuum Society
• /
• v.4 no.2
• /
• pp.142-149
• /
• 1995

본 연구에서는 새로운 장전자 방출법(DOFEC법)으로 W(210)면의 수소 흡착에 의한 일함수의 변화, heat of desorption에 대하여 연구하였다. 텅스텐(210)면에 수소가 흡착될 때 흡착율에 따라 일함수가 증가하다가 다시 감소하는데 이것은 수소가 처음에는(210)면의 step((100)면)에 흡착되고 dose를 증가시킴에 따라 terrace((110)면)에 흡착되기 때문임을 알았다. 즉, terrace보다 step의 sticking coefficient가 더 크며 zero coverage에서의 그 비는 2.57이며 이는 타 연구 결과와 잘 일치한다. (210)면의 step과 terrace의 수소 흡착에 대한 일함수의 정량적인 변화량 그리고 수소 dose량에 대한 각각의 면에 대한 상대적인 흡착율을 얻었으며, 이 결과는 독립된(110)면 또는 (100)면의 결과와 잘 일치됨을 알았다. 또한 이 결과는 흡착 실험에 있어서 dose량을 흡착률로 환산하는데 사용될 수 있다. 텅스텐(210)면에는 4개의 흡착 site가 존재하며 이 site들 중 $\beta$2과 $\beta$4 state는 second order 탈착 과정을 따르며 $\beta$1과 $\beta$3 state는 first order 탈착과정을 따른다. 따라서 텅스텐(210)면에는 수소가 해리적 흡착을 함과 동시에 비해리적 흡착도 함을 알았으며(210)면의 각 흡착 site를 이에 대응되는 (100)면과 (110)면의 흡착 site와 비교 검토하였다.

• Journal of the Korean Wood Science and Technology
• /
• v.43 no.5
• /
• pp.539-547
• /
• 2015

To investigate dimensional responses of wood under dynamic temperature condition, poplar (populous euramericana Cv.) specimens, 20 mm in radial (R) and tangential (T) directions with two thicknesses of 4 and 10 mm along the grain, were exposed to cyclic temperature changes in square wave between $25^{\circ}C$ and $40^{\circ}C$ at 60% relative humidity (RH) for three different cycling periods of 6 h, 12 h and 24 h. R and T dimensional changes measured during the cycling gave the following results: 1) Transverse dimensional changes of the specimens were generally square but at an opposite phase and lagged behind the imposed temperature changes. The phase lag was inversely correlated with cycling period, but positively related to specimen thickness, while the response amplitude was directly proportional to cycling period, but in a negative correlation with specimen thickness. 2) The specimens showed swelling hysteresis behavior. The heat shrinkage coefficient (HSC) became greater as cycling period increased or specimen thickness decreased. 3) Dimensional changes of the specimens produced deformation accumulation during repeated adsorption and desorption. The deformation accumulating ratio decreased with an increase in cycling period and specimen thickness. 4) Wood suffered 1.5 times as many dimensional changes per unit temperature variation as per unit humidity variation, and this deformation behaved even more seriously under static condition.