• Title/Summary/Keyword: deposition amount

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Hafnium Oxide Nano-Film Deposited on Poly-Si by Atomic Layer Deposition

  • Wei, Hung-Wen;Ting, Hung-Che;Chang, Chung-Shu
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07a
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    • pp.496-498
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    • 2005
  • We reported that high dielectric hafnium oxide nano-film deposited by thermal atomic layer deposition on the poly-silicon film (poly-Si). The poly -Si film was produced by plasma enhanced chemical vapor deposition and excimer laser annealing. We used the hafniu m chloride ($HfCl_4$) and water as the precursors and analyzed the hafnium oxide film by transmission electron microscope and secondary ion mass spectrometer. Hafnium oxide produced by the ALD method showed very good coverage on the rough surface of poly-Si film. While deposited with 200 cycles, these hafnium oxide films revealed a relatively smooth surface and good uniformity, but the cumulative roughness produced by the incomplete reaction was apparent when the amount of deposition cycle increased to 600 cycles.

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Surface Properties of Superconducting Thick Film with Suspension Solution added with Polymer (폴리머를 첨가한 현탁용매에 따른 초전도 후막의 표면특성)

  • 소대화;이영매;임병제;김태완;전용우;코로보바나탈리아
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.503-506
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    • 2000
  • YBCO superconducting thick films were prepared on Ag wire by electrophoresis in acetone and ethanol with chemically modified suspension. The addition of organic compounds, such as PEG, EG into suspension solution for improving critical current density was investigated. Surface state, deposition condition, pore distribution and cracks were investigated by using SEM photographs. Controlling preparation conditions were studied for reducing these defects. As a results, in acetone solution, the surface crack of samples was decreased with increasing PEG. On the contrary, the surface crack of sample was increasing with increasing the amount of EG. In ethanol solution without I$_2$, which was generally used for an electrolyte, the deposition time was longer than this of acetone. For that reason the sample deposition in ethanol time was needed with enough stirring time for suspending YBCO powder and deposition time.

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Development of Packed Bed Lung Model for the Deposition Studies of Fire Smoke (흡입연기의 침착 실험을 위한 충전층 폐모델 개발에 관한 연구)

  • Goo, Jae-Hark
    • Fire Science and Engineering
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    • v.22 no.2
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    • pp.121-128
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    • 2008
  • Adverse health effects of inhaled smokes are associated with the amount of the particles deposited in human lung. Lung model is needed to simulate smoke deposition because of the hardness of the in vivo deposition experiment. However, it is hard to realize the successively decreasing bifurcations in the model. In this work, an experimental lung model was developed to simulate the smoke deposition in the lung. Instead of bifurcating airways, the lung model was made of packed beds of which size decreased downwards. The experimental results using this model showed good agreements with existing results for real lung in the deposition characteristics. The model could be applied to the studies of health risk assessment of the inhaled smoke particles generated by fire.

Annealing Effects of Laser Ablated PZT Films

  • Rhie, Dong-Hee;Jung, Jin-Hwee;Cho, Bong-Hee;Ryutaro Maeda
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.528-531
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    • 2000
  • Deposition of PZT with UV laser ablatio was applied for realization of thin film sensors and actuators. Deposition rate of more than 20nm/min was attained by pulsed KrF excimer laser deposition, which is fairly better than those obtained by the other methods. Perovskite phase was obtained at room temperature deposition with Fast Atom Beam(FAB) treatment and annealing. Smart MEMS(Micro electro-mechanical system) is now a suject of interest in the field of micro optical devices, micro pumps, AFM cantilever devices etc. It can be fabricated by deposition of PZT thin films and micromachining. PZT films of more than 1 micron thickness is difficult to obtain by conventional methods. This is the reason why we applied excimer laser ablation for thin film deposition. The remanent polarization Pr of 700nm PZT thin film was measured, and the relative dielectric constant was determined to about 900 and the dielectric loss tangent was also measured to be about 0.04. XRD analysis shows that, after annealing at 650 degrees C in 1 hour, the perovskite structure would be formed with some amount of pyrochlore phase, as is the case of the annealing at 750 degrees C in 1 hour.

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Modeling of deposition and erosion of CRUD on fuel surfaces under sub-cooled nucleate boiling in PWR

  • Seungjin Seo;Nakkyu Chae;Samuel Park;Richard I. Foster;Sungyeol Choi
    • Nuclear Engineering and Technology
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    • v.55 no.7
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    • pp.2591-2603
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    • 2023
  • Simulating the Corrosion-Related Unidentified Deposit (CRUD) on the surface of fuel assemblies is necessary to predict the axial offset anomaly and the localized corrosion induced by the CRUD during the operation of nuclear power plants. A new CRUD model was developed to predict the formation of the CRUD deposits, considering the deposition and erosion mechanisms. The heat transfer and capillary flow within the CRUD were also considered to evaluate the boiling amount within the CRUD layer. This model predicted a CRUD deposit thickness of 44 ㎛ during a one-cycle operation of the Seabrook nuclear power plant. The CRUD deposition tended to accelerate and decelerate during the simulation, by being related to boiling mechanism on the deposits surface. Additionally, during a three-cycle operation corresponding to the refueling period, the CRUD deposition was saturated at a thickness of 80 ㎛, which was in good agreement with the suggested thickness for CRUD buildupin pressurized water reactors. Surface boiling on the thin CRUD deposits enhanced the acceleration of the deposition, even when the wick boiling properties were not favorable for CRUD deposition. To ensure the certainty of the simulation results, sensitivity analyses were conducted for the porosity, chimney density, and the constants employed in the proposed model of the CRUD.

Effect of Crystal Particle Deposition on Morphology of Zeolite Membrane and its Separation Performance (결정입자 도포가 제올라이트 막 구조 및 분리성능에 미치는 영향)

  • Lee, Yong-Taek;Jeong, Heon-Kyu;Jeong, Dong-Jae;Yun, Mi-Hye;Ahn, Hyo-Seong
    • Membrane Journal
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    • v.18 no.3
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    • pp.198-205
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    • 2008
  • A novel technology for homogeneous deposition of zeolite particles on a porous support was developed so that those particles played a seeding role for the growth of zeolite crystals. After the particles were dispersed in water, the aqueous solution was 134 through the bore of a porous tubular support. By keeping the other side of the support in a vacuum, the aqueous solution passed through the pores of the support, leading the particles to be homogeneously deposited on the support. The amount of the deposited particles was investigated by changing the following operating parameters: a particle concentration in the solution, a time for deposition, and the feeding rate of the solution. The amount of the deposited particles increased from 0.0019 g to 0.0208 g as the concentration of the particles was changed from 0.01 wt% to 0.3 wt%, while the feeding rate and the deposition time were kept to 100 mL/min and 4 min, respectively. As the deposition time was varied from 1 min to 4 min, the deposition amount increased from 0.0004g to 0.0019g at the typical condition of the rest parameters. Also, it was observed that the deposited weight increased from 0.0029 g to 0.01 g as the feeding rate increased from 100 mL/min to 300 mL/min. However, the total permeance of water and ethanol decreased through the zeolite membrane as the deposited weight increased.

Curcumin-Loaded PLGA Nanoparticles Coating onto Metal Stent by Electrophoretic Deposition Techniques

  • Nam, So-Hee;Nam, Hye-Yeong;Joo, Jae-Ryang;Baek, In-Su;Park, Jong-Sang
    • Bulletin of the Korean Chemical Society
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    • v.28 no.3
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    • pp.397-402
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    • 2007
  • Restenosis after percutaneous coronary intervention (PCI) continues to be a serious problem in clinical cardiology. To solve this problem, drug eluting stents (DES) with antiproliferative agents have been developed. Variable local drug delivery systems in the context of stenting require the development of stent manufacture, drug pharmacology and coating technology. We have worked on a system that integrates electrophoretic deposition (EPD) technology with the polymeric nanoparticles in DES for local drug delivery and a controlled release system. The surface morphology and drug loading amount of DES by EPD have been investigated under different operational conditions, such as operation time, voltage and the composition of media. We prepared poly-D,L-lactide-co-glycolic acid (PLGA) nanoparticles embedded with curcumin, which was done by a modified spontaneous emulsification method and used polyacrylic acid (PAA) as a surfactant because its carboxylic group contribute negative charge to the surface of CPNPs (?53.5 ± 5.8 mV). In the process of ‘trial and error' endeavors, we found that it is easy to control the drug loading amount deposited onto the stent while keeping uniform surface morphology. Accordingly, stent coating by EPD has a wide application to the modification of DES using various kinds of nanoparticles and drugs.

Binder-free Sn/Graphene Nanocomposites Prepared by Electrophoretic Deposition for Anode Materials in Lithium Ion Batteries

  • Bae, Eun Gyoung;Hwang, Yun-Hwa;Pyo, Myoungho
    • Bulletin of the Korean Chemical Society
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    • v.34 no.4
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    • pp.1199-1204
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    • 2013
  • Nanocomposites consisting of Sn nanoparticles and graphene oxide (GO) were electrophoretically deposited onto Cu current collectors that was used for anodes in Li ion batteries (LIBs). In order to optimize the electrochemical performance of nanocomposites as an anode material by controlling the oxygen functionality, the GO was subjected to $O_3$ treatment prior to electrophoretic deposition (EPD). During thermal reduction of the GO in the nanocomposites, the Sn nanoparticles were reduced in size, along with the formation of SnO and/or $SnO_2$ at a small fraction, relying on the oxygen functionalities of the GO. The variation in the duration of time for the $O_3$ irradiation resulted in a small change in total oxygen content, but in a significantly different fraction of each functional group in the GO, which influenced the Sn nanoparticle size and the amount of SnO (and/or $SnO_2$). As a result, the EPD films prepared with the GO that possessed the least amount of carboxylic groups (made by treating GO in an $O_3$ environment for 3 h) showed the best performance, when compared with the nanocomposites composed of untreated GO or GO that was $O_3$-treated for a duration of less than 3 h.

Co-deposition of Si Particles During Electrodeposition of Fe in Sulfate Solution (황산철 도금액 중 Si 입자의 공석 특성)

  • Moon Sung-Mo;Lee Sang-Yeal;Lee Kyu-Hwan;Chang Do-Yon
    • Journal of the Korean institute of surface engineering
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    • v.37 no.6
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    • pp.319-325
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    • 2004
  • Fe thin films containing Si particles were prepared on metallic substrates by electrodeposition method in sulfate solutions and the content of codeposited Si particles in the films was investigated as a function of applied current density, the content of Si particels in the solution, solution pH, solution temperature and concentration of $FeSO_4$$7H_2$O in the solution. The amount of Si codeposited in the film was not dependent on the applied current density, solution pH and solution temperature, while it was dependent on the content of Si particles in the solution and the concentration of $FeSO_4$$7H_2$O in the solution. The amount of Si codeposited in the film increased with increasing content of Si particles in the solution but reached a maximum value of about 6 wt% when the content of Si particles in the solution exceeds 100 g/l. On the other hand, the content of Si codeposited in the film increased up to about 17 wt% with decreasing concentration of $FeSO_4$$7H_2$O in the solution. These results would be applied to the fabrication of very thin Fe-6.5 wt% Si sheets for electrical applications.

Microstructural Characteristics of Al-Pb Hyper-Monotectic Alloys Produced by Spray Cast Deposition Process (분사주조공정에 의하여 제조된 Al-Pb 과편정합금의 조직특성)

  • Bae, Cha-Hurn;Jeong, Hae-Young;Park, Heung-Il;Kim, Chang-Up;Lee, Sung-Ryeol
    • Journal of Korea Foundry Society
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    • v.12 no.4
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    • pp.346-354
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    • 1992
  • In Al-Pb monotectic alloys Pb particles are difficult to uniformly distribute over the Al matrix because of the gravity segregation of pb element. Therefore the effects of centrifugally spray casting process on microstructures and distributions of Pb particle were investigated. As the preform thickened the sine of Pb particle became larger, the amount of porosity became lower and microstructures showed the change from spray-deposition microstructures in the lower part of the preform to spray-casting microstructures in the upper part of it. The size of Pb particles, amount of porosity and splat layer boundaries in hot forged preform showed still less than of as-deposited preform.

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