• 제목/요약/키워드: deposit stress

검색결과 90건 처리시간 0.029초

Crystallization and Characterization of GeSn Deposited on Si with Ge Buffer Layer by Low-temperature Sputter Epitaxy

  • Lee, Jeongmin;Cho, Il Hwan;Seo, Dongsun;Cho, Seongjae;Park, Byung-Gook
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제16권6호
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    • pp.854-859
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    • 2016
  • Recently, GeSn is drawing great deal of interests as one of the candidates for group-IV-driven optical interconnect for integration with the Si complementary metal-oxide-semiconductor (CMOS) owing to its pseudo-direct band structure and high electron and hole mobilities. However, the large lattice mismatch between GeSn and Si as well as the Sn segregation have been considered to be issues in preparing GeSn on Si. In this work, we deposit the GeSn films on Si by DC magnetron sputtering at a low temperature of $250^{\circ}C$ and characterize the thin films. To reduce the stresses by GeSn onto Si, Ge buffer deposited under different processing conditions were inserted between Si and GeSn. As the result, polycrystalline GeSn domains with Sn atomic fraction of 6.51% on Si were successfully obtained and it has been demonstrated that the Ge buffer layer deposited at a higher sputtering power can relax the stress induced by the large lattice mismatch between Si substrate and GeSn thin films.

A Novel Fabrication Method of the High-Aspect-Ratio Nano Structure (HAR-Nano Structure) Using a Nano X-Ray Shadow Mask (나노 X-선 쉐도우 마스크를 이용한 고폭비의 나노 구조물 제작)

  • Kim Jong-Hyun;Lee Seung-S.;Kim Yong-Chul
    • Transactions of the Korean Society of Mechanical Engineers A
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    • 제30권10호
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    • pp.1314-1319
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    • 2006
  • This paper describes the novel fabrication method of the high-aspect-ratio nano structure which is impossible by conventional method using a shadow mask and a Deep X-ray Lithography (DXRL). The shadow mask with $1{\mu}m-sized$ apertures is fabricated on the silicon membrane using a conventional UV-lithography. The size of aperture is reduced to 200nm by accumulated low stress silicon nitride using a LPCVD (low pressure chemical vapor deposition) process. The X-ray mask is fabricated by depositing absorber layer (Au, $3{\mu}m$) on the back side of nano shadow mask. The thickness of an absorber layer must deposit dozens micrometers to obtain contrast more than 100 for a conventional DXRL process. The thickness of $3{\mu}m-absorber$ layer can get sufficient contrast using a central beam stop method, blocking high energy X-rays. The nano circle and nano line, 200nm in diameter in width, respectively, were demonstrated 700nm in height with a negative photoresist of SU-8.

Effects of Naphthalene Trisulfonic Acid on the Surface Properties of Electrodeposited Ni Layer (Naphthalene Trisulfonic Acid가 니켈 전착층의 표면 특성에 미치는 영향)

  • Lee Joo-Yul;Kim Man;Kwon Sik-Chol;Kim Jung-Hwan;Kim In-gon
    • Journal of the Korean institute of surface engineering
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    • 제39권1호
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    • pp.13-17
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    • 2006
  • The effects of an organic additive, naphthalene trisulfonic acid (NTSA), contained in the nickel sulfamate bath on the surface properties of the electrodeposited nickel layer were investigated through electrochemical technique, x-ray diffraction analysis, and microscopic observation. The addition of NTSA facilitated the oxidation process of electrodeposited nickel layer during anodic scan and also increased the hardness and internal stress of the nickel film as the applied current density became higher. It seems that NTSA modulated the deposit structure during electrodeposition and so induced higher distribution of (110) orientation with respect to (200). With the increase of the NTSA in the bath, nickel layer was formed in small grain size, which resulted in enhanced surface evenness and brightness.

Characterization of Microbial Nitrate Uptake by Bacillus sp. PCE3 (Bacillus sp. PCE3 균주에 의한 질산이온 흡수 특성)

  • Yun, Yeong-Bae;Park, Soo-Jin;Han, Min-Woo;Kim, Young-Kee
    • Journal of Applied Biological Chemistry
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    • 제56권4호
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    • pp.241-244
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    • 2013
  • Nitrate is one of the major nutrients in plants, and nitrate fertilizer often overused for the high yields of crops. Nitrate deposit in soil became one of the major reasons causing salt stress. Specially, salt stress is a serious problem in the soils of plastic film or glass houses. In this study, six microorganisms have been isolated from the wet soils near the disposals of livestock farms and their nitrate uptake activities were investigated. These bacteria were able to remove nitrate as high as 1,000-3,000 ppm (10-50 mM). The strain PCE3 showed the highest nitrate uptake activity and it removed more than 3,700 ppm. In order to identify these bacteria, genes of 16S rRNA were sequenced and analyzed. Phylogenetic trees were constructed with the neighbor-joining methods. Among these bacteria, strain PCE3 was identified as Bacillus species. When the growth and nitrate uptake activities were measured, both were maximal at $37^{\circ}C$ and optimal pH was pH 7-9. Bacillus sp. PCE3 removed nitrate up to 40-60 mM (2,500-3,700 ppm) depending on the nitrate concentration in media. Therefore, Bacillus sp. PCE3 can be a good candidate for the microbial remediation of nitrate-deposited soils in glass and plastic film houses.

Field-emission Properties and Long-term Stability of Tip-type Carbon Nanotubes Coated with Gallium-incorporated Zinc Oxide Films (갈륨이 첨가된 산화아연막의 코팅에 따른 미세팁 구조 탄소나노튜브의 전계방출 특성 및 장시간 안정성)

  • Kim, Jong-Pil;Noh, Young-Rok;Jo, Kyoung-Chul;Lee, Sang-Yeol;Park, Jin-Seok
    • Journal of the Semiconductor & Display Technology
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    • 제8권4호
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    • pp.65-69
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    • 2009
  • Carbon nanotubes (CNTs) were coated with undoped zinc oxide (ZnO) or 5 wt% gallium-incorporated ZnO (GZO) using various deposition conditions. The CNTs were directly grown on conical-type tungsten substrates at $700^{\circ}C$ using inductively coupled plasma-chemical vapor deposition. The pulsed laser deposition technique was used to deposit the ZnO and GZO thin films with very low stress. Field-emission scanning electron microscopy and high-resolution transmission electron microscopy were used to monitor the variations in the morphology and microstructure of CNTs prior to and after ZnO or GZO coating. The formation of ZnO and GZO films on CNTs was confirmed using energy-dispersive x-ray spectroscopy. In comparison to the as-grown (uncoated) CNT emitter, the CNT emitter that was coated with a thin (10 nm) GZO film showed remarkably improved field emission characteristics, such as the emission current of $325\;{\mu}A$ at 1 kV and the threshold field of $1.96\;V/{\mu}m$ at $0.1\;{\mu}A$, and it also exhibited the highly stable operation of emission current up to 40 h.

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The relation of the bioprosthetic valve failure to its calcification (조직판막의 실패와 석회화에 관한 연구)

  • 홍유선
    • Journal of Chest Surgery
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    • 제22권6호
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    • pp.1001-1012
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    • 1989
  • In 1968, Carpentier and his associates introduced glutaraldehyde as a compound for preparing cardiac tissue valve, and this technique has provided a considerably more suitable and durable tissue valve substitute. To increase further durability of valve tissue, Reis and his colleagues designed a flexible stent to reduce the stress on the heterogeneous tissue valve mounted. However with the advent of more innovative mechanical valve currently, many bioprosthetic valves are being substituted by mechanical valves at our department of cardiothoracic surgery because of bioprosthetic valve failure. Main cause of bioprosthetic valves failure were calcification or/and tear of tissue valves. The purpose of this retrospective study is to clarify the relationship between the patients clinical profile during implantation of tissue valves and pathologic features of the failed bioprosthetic valve. From March, 1982 through June, 1988, 53 bioprosthetic heart valves that had been ex-planted from 45 patients at the department of cardiac surgery of Yonsei University Hospital were subjected to this study. The patients were 10 to 65 year-old [mean age: 30.3 yr] with 17 males and 28 females. Re-replacements of prosthetic valves were carried out twenty nine in mitral position, eight in aortic position and eight in both aortic and mitral position simultaneously. The grading and location for calcification of valves were verified by radiograms. The calcification of the explanted valves leaflets was graded from 0 to 4 plus according to Cipriano and associates method. The types of tear and perforation of leaflet were classified into four types as Ishihara has adopted initially in 1981. In younger age group under thirty three years, explanted tissue valves were significantly more affected in terms of grades of severity of valve calcification as compared with older age group [p < 0.035]. Valve calcification appeared more severe in male as compared to female [p< 0.002]. Ionescu-Shiley bovine pericardial bioprosthetic valves showed more severe calcification than Hancock porcine tissue valves [p< 0.035]. Calcium deposit was found very prevalent at the area of commissural attachment [86 % of all]. Type I of valve rupture was shown to be related with simultaneous calcification. However, the relation of explanted valve position, duration of implanted prosthetic valve, atrial fibrillation and anticoagulant therapy to the severity of bioprosthetic valve calcification were not significantly clear statistically [p > 0.05].

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Residual Settlement for Dredged Soil Deposit Considering Stress History in Incheon Area (인천지역 준설토의 응력이력을 고려한 잔류 침하량)

  • Chun, Byungsik;Lee, Inhoon;Park, Dukhyum;Sung, Hwadon
    • Journal of the Korean GEO-environmental Society
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    • 제9권2호
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    • pp.5-13
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    • 2008
  • To identify the reclamation history formed by top dredged soil reclamation layer over the original ground, various field tests and laboratory tests were conducted. Especially when the original ground was not completely consolidated, CPTu test was carried out to calculate rational settlement due to the banking load. CPTu test results showed that the degree of consolidation of weak clay ground by dredged reclamation was on average 80%. As the research area was not completely consolidated by dredged reclamation in the past, the consolidation settlement should account for the residual settlement (20%) in the case of additional banking load. When the degree of consolidation of the original ground was not taken into account, the residual consolidation was expected in excessive settlement (up to 20%) and in such case PBD (Plastic Board Drain) was not effective in obtaining desired degree of consolidation.

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Characterization of Electro-deposited Ni-P Layer by Using Dynamic Nano-Indentation Method (동적 나노압침법을 이용한 Ni-P 도막의 특성 연구)

  • Jung, Moo Young;Baik, Youl;Kang, Bo Kyeong;Choi, Yong;Kwon, Hyuk Joo
    • Journal of the Korean institute of surface engineering
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    • 제51권4호
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    • pp.197-201
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    • 2018
  • Dynamic nano-indentation method was applied to characterize thin electroformed Ni-P layers. The Ni-P layers were produced in a sulphamic acid bath at $50^{\circ}C$ in $0.02A/cm^2$ for 10-60 minutes. The chemical analyses by XRD and EDX showed that the Ni-P layers were very fine grains with mainly $Ni_3P$ with Ni. The surface roughness determined by atomic force microscopy increased with thickness, which was relative to the surface morphology. The nano-hardness and the stiffness of the thin Ni-P layers with thickness of 1.9, 6.2 and $7.5{\mu}m$ were 5.52, 6.52 and 6.77 [GPa] and 56.7, 76.2 and 108.0 [${\mu}N/nm$], respectively. The elastic modulus of the Ni-P layer increased with thickness such as 37.29, 54.50 and 78.76 [GPa], respectively. The surface roughness of the electroplated Ni-P layers with diverse thickness was 8.66, 18.56 and 35.22 [nm], respectively. The enhanced nano-mechanical properties were related to mainly residual stress of the Ni-P layers.

Estimation of Undrained Shear Strength for Clays Using Effective Cone Factor (유효콘계수를 이용한 포화점토의 비배수전단강도 평가)

  • Kim, Chang-Dong;Kim, Soo-Il;Lee, Jun-Hwan
    • Journal of the Korean Geotechnical Society
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    • 제24권11호
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    • pp.133-141
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    • 2008
  • In this study, a new method for estimating the undrained shear strength $s_u$ of saturated clays using piezocone penetration test (CPTu) result is proposed. This is to develop more effective CPTu-based $s_u$ estimation method at lower cost with less uncertainty. For this purpose, a marine clay deposit is selected and tested through extensive experimental testing program including both in-situ and fundamental laboratory tests. The proposed method is based on a correlation between the undrained shear strength $s_u$ and the cone resistance $q_t$, without introduction of the total overburden stress into the $s_u-q_t$ correlation. As a result, no additional testing procedure for collecting undisturbed soils samples is required, which can reduce overall testing cost. To verify the proposed method, 4 test sites, which consist of a variety of soil conditions, are selected and used for comparison between measured and predicted undrained shear strength. From comparison, it is seen that predicted values of $s_u$ using the proposed method match well those from measured results.

Analysis Method for Non-Linear Finite Strain Consolidation for Soft Dredged Soil Deposit - Part II: Analysis Method and Craney Island Case Study (초연약 준설 매립지반의 비선형 유한변형 압밀해석기법 - Part II: 해석기법과 Craney Island 사례분석)

  • Choi, Hang-Seok;Kwak, Tae-Hoon;Lee, Chul-Ho;Lee, Dong-Seop;Stark, T.D.
    • Journal of the Korean Geotechnical Society
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    • 제27권11호
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    • pp.5-15
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    • 2011
  • This paper presents two analysis methods for characterizing the non-linear finite strain consolidation behavior of highly deformable dredged soil deposits along with the fundamental parameters obtained in the companion paper; that is, the zero effective stress void ratio, the non-linear relationships of void ratio-effective stress and void ratio-hydraulic conductivity. The simplified Morris's analytical solution (2002) and the widely recognized numerical program, PSDDF (primary Consolidation, Secondary Compression, and Desiccation of Dredged Fill) for both single and double drainage conditions are adopted in this paper to verify a series of laboratory experiments for self-weight consolidation of the Incheon clay and Kaolinite. The comparisons show that the analysis methods proposed herein can properly simulate the long-term non-linear finite strain consolidation behavior for dredged soils in the field. In addition, a case study for the artificial Craney Island has been conducted to illustrate the importance of obtaining appropriate non-linear finite strain consolidation parameters and the applicability of PSDDF in promoting dredged soil disposal.