• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.06a
• /
• pp.59-59
• /
• 2009

현재 CMP분야는 광역 평탄화 반도체 소자의 집적화 및 소형화가 진행됨에 따라서 CMP 공정의 중요성은 날로 성장하고 있다. 하지만 이러한 CMP공정은 불가피하게도 scratch, pit, CMP residue와 같은 defect들을 발생시키고 있으며, 점점 선폭이 작아짐에 따라, 이러한 defect들이 반도체 수율에 미치는 영향은 심각해지고 있다. Defect들 중에 특히 scratch는 반도체에 치명적인 circuit failure를 일으키게 된다. 또한 반도체 내구성과 신뢰성을 감소시키게 되고, 누전전류를 증가시키는 등 바람직하지 못한 현상들이 생기게 된다. 본 연구에서는 scratch 와 같은 deflect들을 효율적으로 검출, 분석하고, scratch를 감소시키는데 그 목적이 있다. 본 실험을 위해 8" TEOS wafer와 commercial oxide slurry 및 friction polisher (Poli-500, G&P tech., Korea)를 사용하여 CMP 공정을 진행하였으며, CMP 공정조건은 각각 80rpm/80rpm/1psi(Platen speed/Head speed/Pressure)에서 1분 동안 연마를 한 후 scratch 발생 경향을 살펴보았다. CMP 후 wafer위에 오염되어 있는 slurry residue들을 제거하기 위해 SC-1, HF 세정을 이용하여 최적화된 post-CMP 공정기술을 제안하였다. Scratch 검출 및 분석을 위해 wafer surface analyzer (Surfscan 6200, Tencor, USA)와 optical microscope (LV100D, Nicon, Japan)를 사용하였다. CMP 공정 변수들에 따른 scratch 발생정도를 비교하였으며, scratch 발생 요인들에 따른 scratch 형태 및 발생정도를 살펴보았다. 최적화된 post-CMP 세정 조건은 메가소닉과 함께 SC-1 세정을 실시하여 slurry residue들을 제거한 후, HF 세정을 실시하여 잔여 오염물들을 제거하고 검출이 용이하도록 scratch를 확장시킬 수 있도록 제안하였으며, 100%의 particle removal efficiency (PRE)를 얻을 수 있었다. 실제 CMP 공정후 post-CMP 세정 단계별 scratch 개수를 측정한 결과, SC-1 세정 후 약 220개의 scratch가 검출되었으며, 검출되지 않았던 scratch가 HF 세정 후 확장되어 드러남에 따라 약 500개의 scratch 가 검출되었다.

• Journal of Periodontal and Implant Science
• /
• v.28 no.4
• /
• pp.559-568
• /
• 1998

direct bone apposition during bone remodelling. To address these problem, we developed a new ceramic, calcium metaphosphate(CMP), and report herein the biologic response to CMP in subcutaneous tissue, muscle and bone. Porous CMP blocks were prepared by condensation of anhydrous $Ca(H_2PO_4)_2$ to form non-crystalline $Ca(PO_3)_2$. Macroporous scaffolds were made using a polyurethane sponge method. CMP block possesses a macroporous structure with approximate pore size range of 0.3-1mm. CMP blocks were implanted in 8mm sized calvarial defect, subcutaneous tissue and muscle of 6 Newzealand White rabbits and histologic observation were performed at 4 and 6 weeks later. CMP blocks in subcutaneous tissue and muscle were well adapted without any adverse tissue reaction and resorbed slowly and spontaneously. Histologic observation of calvarial defect at 4 and 6 weeks revealed that CMP matrix were mingled with and directly apposed to new bone without any intervention of fibrous connective tissue. CMP blocks didn't show any adverse tissue reaction and resorbed spontaneously also in calvarial defect. This result revealed that CMP had a high affinity for bone and was very biocompatible. From this preliminary result, it was suggested that CMP was a promising ceramic as a bone substitute and tissue engineering scaffold for bone formation.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.29 no.5
• /
• pp.458-465
• /
• 2009

In general, ultrasonic guided wave techniques that used for an evaluation of the internal defect have been applied without considering energy loss. It can be found out that the significant attenuation is observed in the signal of structure with defect by the scattering and absorption. Even in the signal acquired from defect-free structure, this attenuation can be also significant. Therefore, it is very essential to determine the Lamb wave propagation characteristics depending on modes because the dispersibility of Lamb wave can be easily influenced by the attenuation effect with frequency and thickness. For this reason, changing the propagation distance, attenuation coefficient of each Lamb wave mode needs to be investigated by the contact pitch-catch method with PZT(piezoelectric) sensors. In this paper, the experimental attenuation coefficient is measured by choosing the following three different variables; mode, thickness and plate materials. As a result, experimental attenuation coefficient is obtained as the function of variables.

• Composites Research
• /
• v.31 no.4
• /
• pp.151-155
• /
• 2018

Mechanical joint and adhesive joint are two typical joining methods for structures. The adhesive joints distribute the load over a larger area than mechanical joints and have excellent fatigue properties. However, the strength of adhesive joint greatly depends on the environmental conditions and the skill of the operator. Therefore, there is a need for techniques to evaluate the quality of the adhesive joints. The electric resistance method is a very promising technique for detecting defects by measuring the electrical resistance of an adhesive joint in which CNTs are dispersed in an adhesive. In this study, Aluminium-Aluminium adhesive single lap joint specimens were fabricated by using the adhesive dispersing CNTs using a sonicator and a 3-roll mill, and the static strengths and defect detection capabilities of the joints using the electrical resistance method were evaluated according to the CNTs content.

• Journal of Powder Materials
• /
• v.24 no.6
• /
• pp.489-493
• /
• 2017

In this study, the surface passivation process for InP-based quantum dots (QDs) is investigated. Surface coating is performed with poly(methylmethacrylate) (PMMA) and thioglycolic acid. The quantum yield (QY) of a PMMA-coated sample slightly increases by approximately 1.3% relative to that of the as-synthesized InP/ZnS QDs. The QYs of the uncoated and PMMA-coated samples drastically decrease after 16 days because of the high defect state density of the InP-based QDs. PMMA does not have a significant effect on the defect passivation. Thioglycolic acid is investigated in this study for the effective surface passivation of InP-based QDs. Surface passivation with thioglycolic acid is more effective than that with the PMMA coating, and the QY increases from 1.7% to 11.3%. ZnS formed on the surface of the InP QDs and S in thioglycolic acid show strong bonding property. Additionally, the QY is further increased up to 21.0% by the photochemical reaction. Electron-hole pairs are formed by light irradiation and lead to strong bonding between the inorganic and thioglycolic acid sulfur. The surface of the InP core QDs, which does not emit light, is passivated by the irradiated light and emits green light after the photochemical reaction.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.40 no.7
• /
• pp.647-652
• /
• 2016

Guided waves can be used for the inspection of long range pipelines. Surface corrosion is often found as a major defect type in pipelines. The reciprocity relation is a well-established theorem by which one can simplify complicated mathematical expressions. The approach has been already applied to plate and half-space structures to obtain the closed-form solutions of scattered amplitude. However, results for the case of cylindrical structures have not been reported yet. In this paper, the scattering of torsional waves, which is widely used in commercial applications, is explored by the reciprocity theorem approach. Obtaining closed-form solutions of the amplitudes of propagating waves is much simplified by using the reciprocal relation. The scattered amplitudes for elliptical and rectangular defect shapes are calculated with respect to defect depth and width, at frequencies between 0 and 500 kHz. The amplitude shows the periodic result as a function of frequency. The derived closed-form solutions can play a significant role in quantitative signal interpretation.

• Journal of the Institute of Electronics Engineers of Korea SC
• /
• v.44 no.4 s.316
• /
• pp.67-73
• /
• 2007

An optical pick up generally has coupled dynamics between focusing and tracking servos. The coupled dynamics reduces tracking performance of optical disk drives. A conventional control method is holding the previous tracking control command in the presence of surface defect. The method has a long settling time. If the defective area is getting larger, objective lens will get away from the following track. In order to overcome this problem, this paper proposed a new control method for optical disk drives based on a prediction of tracking error and focusing error. We present how to compensate the coupled dynamics so that reduced setting time is achieved. It is verified by experiments that the proposed method brings an improved performance in the presence of surface defect as well as in the normal operating condition.

• International Journal of Computer Science & Network Security
• /
• v.22 no.2
• /
• pp.123-130
• /
• 2022

During the past decades, detection of gear defects remains as a major problem, especially when the gears are subject to non-stationary phenomena. The idea of this paper is to mixture a multilevel wavelet transform with a fast EMD decomposition in order to early detect gear defects. The sensitivity of a kurtosis is used as an indicator of gears defect burn. When the gear is damaged, the appearance of a crack on the gear tooth disrupts the signal. This is due to the presence of periodic pulses. Nevertheless, the existence of background noise induced by the random excitation can have an impact on the values of these temporal indicators. The denoising of these signals by multilevel wavelet transform improves the sensitivity of these indicators and increases the reliability of the investigation. Finally, a defect diagnosis result can be obtained after the fast transformation of the EMD. The proposed approach consists in applying a multi-resolution wavelet analysis with variable decomposition levels related to the severity of gear faults, then a fast EMD is used to early detect faults. The proposed mixed methods are evaluated on vibratory signals from the test bench, CETIM. The obtained results have shown the occurrence of a teeth defect on gear on the 5th and 8th day. This result agrees with the report of the appraisal made on this gear system.

• Journal of Periodontal and Implant Science
• /
• v.53 no.5
• /
• pp.321-335
• /
• 2023

Purpose: The aim of this study was to investigate the efficacy of photo-crosslinked gelatin methacryloyl (GelMa) hydrogel containing calcium phosphate nanoparticles (CNp) when applying different fabrication methods for bone regeneration. Methods: Four circular defects were created in the calvaria of 10 rabbits. Each defect was randomly allocated to the following study groups: 1) the sham control group, 2) the GelMa group (defect filled with crosslinked GelMa hydrogel), 3) the CNp-GelMa group (GelMa hydrogel crosslinked with nanoparticles), and 4) the CNp+GelMa group (crosslinked GelMa loaded with nanoparticles). At 2, 4, and 8 weeks, samples were harvested, and histological and micro-computed tomography analyses were performed. Results: Histomorphometric analysis showed that the CNp-GelMa and CNp+GelMa groups at 2 weeks had significantly greater total augmented areas than the control group (P<0.05). The greatest new bone area was observed in the CNp-GelMa group, but without statistical significance (P>0.05). Crosslinked GelMa hydrogel with nanoparticles exhibited good biocompatibility with a minimal inflammatory reaction. Conclusions: There was no difference in the efficacy of bone regeneration according to the synthesized method of photo-crosslinked GelMa hydrogel with nanoparticles. However, these materials could remain within a bone defect up to 2 weeks and showed good biocompatibility with little inflammatory response. Further improvement in mechanical properties and resistance to enzymatic degradation would be needed for the clinical application.

• Proceedings of the Korean Geotechical Society Conference
• /
• 2010.09a
• /
• pp.1264-1273
• /
• 2010

Soil-bentonite cutoff walls are widely recognized to be the effective barrier for containment of wastes and groundwater. Bentonite cake is usually found remaining on the trench surface due to the use of bentonite slurry during the excavation for the cutoff wall construction. Defects also inevitably take place due to the inappropriate construction procedures or improperly mixed soil-bentonite backfill. The defects include insufficient keys and windows in the soilbentonite cutoff wall. In this study, the performance of the soil-bentonite cutoff wall is evaluated based on the flow rates through the wall. Three-dimensional numerical models were applied to simulate the groundwater flow through the soil-bentonite cutoff walls of typical geometries with consideration of the defects and bentonite cake. Results of the simulations showed that the bentonite cake has no effect in the insufficient key cases. In the keyed wall cases, the bentonite cake with very low hydraulic conductivity significantly impedes the flow of groundwater through the wall. The presence of the bentonite cake not only compromises the window defect but also renders the wall construction more effective in blocking the groundwater flow. These findings show the significance of the bentonite cake in a soil-bentonite cutoff wall construction.