• Title/Summary/Keyword: defect engineering

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Humidity Induced Defect Generation and Its Control during Organic Bottom Anti-reflective Coating in the Photo Lithography Process of Semiconductors

  • Mun, Seong-Yeol;Kang, Seong-Jun;Joung, Yang-Hee
    • Journal of information and communication convergence engineering
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    • v.10 no.3
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    • pp.295-299
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    • 2012
  • Defect generation during organic bottom anti-reflective coating (BARC) in the photo lithography process is closely related to humidity control in the BARC coating unit. Defects are related to the water component due to the humidity and act as a blocking material for the etching process, resulting in an extreme pattern bridging in the subsequent BARC etching process of the poly etch step. In this paper, the lower limit for the humidity that should be stringently controlled for to prevent defect generation during BARC coating is proposed. Various images of defects are inspected using various inspection tools utilizing optical and electron beams. The mechanism for defect generation only in the specific BARC coating step is analyzed and explained. The BARC defect-induced gate pattern bridging mechanism in the lithography process is also well explained in this paper.

The Design & Manufacture and Characteristic Analysis of Eddy Current Sensor for Bolt Hole Defect Evaluation (볼트 홀 결함 평가용 와전류 센서 설계제작 및 특성분석)

  • Ahn, Y.S.;Gil, D.S.;Park, S.G.
    • Journal of Power System Engineering
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    • v.15 no.4
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    • pp.37-41
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    • 2011
  • This paper introduces the special eddy current sensor and its characteristic for bolt hole defect evaluation in gas turbine rotor. In the past, Fluorescent penetration inspection method was used for qualitative defect evaluation in gas turbine rotor bolt hole. This method can defect the bolt hole defect but can not evaluate the defect size. Nowadays, eddy current method is used quantitative defect evaluation due to advanced sensor design technology. And eddy current method is more time and cost saving than the old method. We developed bolt shape eddy current sensor for the rotor bolt hole defect detection and evaluation. The eddy current sensor moves to the bolt hole guided by screw nut and detects the defect on the bolt hole. The bolt hole mock-up and artificial defects were made and used for the signal detection & resolution analysis of eddy current sensor. The results show that signal detection capability is enough to detect 0.2 mm depth defect. And the resolution capability is enough to differentiate 02, 0.5, 1.0 and 2.0 mm depth defect.

Defect Engineering for High-Performance Thermoelectric Semiconductors (결함제어를 통한 열전 반도체 연구 동향)

  • Min, Yuho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.35 no.5
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    • pp.419-430
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    • 2022
  • Defects in solids play a vital role on thermoelectric properties through the direct impacts of electronic band structure and electron/phonon transports, which can improve the electronic and thermal properties of a given thermoelectric semiconductor. Defects in semiconductors can be divided into four different types depending on their geometric dimensions, and thus understanding the effects on thermoelectric properties of each type is of a vital importance. This paper reviews the recent advances in the various thermoelectric semiconductors through defect engineering focusing on the charge carrier and phonon behaviors. First, we clarify and summarize each type of defects in thermoelectric semiconductors. Then, we review the recent achievements in thermoelectric properties by applying defect engineering when introducing defects into semiconductor lattices. This paper ends with a brief discussion on the challenges and future directions of defect engineering in the thermoelectric field.

Suggestion of the Domestic CCTV Inspection Sewer Pipe Defect Codeby Sewer Defect Frequency Analysis (국내 하수관로 결함빈도 분석을 통한 CCTV 조사 결함항목 코드 제안)

  • Son, Jooyoung;Lee, Jaehyun;Kim, Jungryul;Oh, Jeill;Yoon, Sungsoo
    • Journal of Korean Society of Water and Wastewater
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    • v.30 no.6
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    • pp.623-634
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    • 2016
  • Sewer condition assessment involves the determination of defective points and status of aged sewers by a CCTV inspection according to the standard manual. Therefore, it is important to establish a reliable and effective standard manual for identifying the sewer defect. In this study, analytic reviews of the CCTV inspection manuals of the UK, New Zealand, Canada and South Korea were performed in order to compare the defect codes and the protocols of condition assessment. Through this, we also established the standardized method for defect code and revised the calculation method of assigning the condition grade. Analyses of the types and frequencies of sewer defects that obtained by CCTV inspection of 7000 case results, showed that the joint defect and lateral defect were the most frequent defects that occurred in Korea. Some defect codes are found to be modified because those did not occur at all. This study includes a proposed new sewer defect codes based on sewer characteristics.

Pipeline defect detection with depth identification using PZT array and time-reversal method

  • Yang Xu;Mingzhang Luo;Guofeng Du
    • Smart Structures and Systems
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    • v.32 no.4
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    • pp.253-266
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    • 2023
  • The time-reversal method is employed to improve the ability of pipeline defect detection, and a new approach of identifying the pipeline defect depth is proposed in this research. When the L(0,2) mode ultrasonic guided wave excited through a lead zirconate titinate (PZT) transduce array propagates along the pipeline with a defect, it will interact with the defect and be partially converted to flexural F(n, m) modes and longitudinal L(0,1) mode. Using a receiving PZT array attached axisymmetrically around the pipeline, the L(0,2) reflection signal as well as the mode conversion signals at the defect are obtained. An appropriate rectangle window is used to intercept the L(0,2) reflection signal and the mode conversion signals from the obtained direct detection signals. The intercepted signals are time reversed and re-excited in the pipeline again, result in the guided wave energy focusing on the pipeline defect, the L(0,2) reflection and the L(0,1) mode conversion signals being enhanced to a higher level, especially for the small defect in the early crack stage. Besides the L(0,2) reflection signal, the L(0,1) mode conversion signal also contains useful pipeline defect information. It is possible to identify the pipeline defect depth by monitoring the variation trend of L(0,2) and L(0,1) reflection coefficients. The finite element method (FEM) simulation and experiment results are given in the paper, the enhancement of pipeline defect reflection signals by time-reversal method is obvious, and the way to identify pipeline defect depth is demonstrated to be effective.

Non-Destructive Evaluation of Separation and Void Defect of a Pneumatic Tire by Speckle Shearing Interferometry

  • Kim, Koung-Suk;Kang, Ki-Soo;Jung, Hyun-Chul;Ko, Na-Kyong
    • Journal of Mechanical Science and Technology
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    • v.18 no.9
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    • pp.1493-1499
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    • 2004
  • This paper describes the speckle shearing interferometry, a non-destructive optical method, for quantitative estimation of void defect and monitoring separation defect inside of a pneumatic tire. Previous shearing interferometry has not supplied quantitative result of inside defect, due to effective factors. In the study, factors related to the details of an inside defect are classified and optimized with pipeline simulator. The size and the shape of defect can be estimated accurately to find a critical point and also is closely related with shearing direction. The technique is applied for quantitative estimation of defects inside of a pneumatic tire. The actual traveling tire is monitored to reveal the cause of separation and the starting points. And also unknown void defects on tread are inspected and the size and shape of defects are estimated which has good agreement with the result of visual inspection.

Robust Defect Size Measuring Method for an Automated Vision Inspection System (영상기반 자동결함 검사시스템에서 재현성 향상을 위한 결함 모델링 및 측정 기법)

  • Joo, Young-Bok;Huh, Kyung-Moo
    • Journal of Institute of Control, Robotics and Systems
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    • v.19 no.11
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    • pp.974-978
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    • 2013
  • AVI (Automatic Vision Inspection) systems automatically detect defect features and measure their sizes via camera vision. AVI systems usually report different measurements on the same defect with some variations on position or rotation mainly because different images are provided. This is caused by possible variations from the image acquisition process including optical factors, nonuniform illumination, random noises, and so on. For this reason, conventional area based defect measuring methods have problems of robustness and consistency. In this paper, we propose a new defect size measuring method to overcome this problem, utilizing volume information that is completely ignored in the area based defect measuring method. The results show that our proposed method dramatically improves the robustness and consistency of defect size measurement.

A study on Improvement Method for Systematic Defect Management of Apartment Life-cycle (공동주택 생애주기의 체계적인 하자관리를 위한 개선 방안 연구)

  • Park, Chang-Wook;Yun, Seok-Heon
    • Proceedings of the Korean Institute Of Construction Engineering and Management
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    • 2007.11a
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    • pp.618-621
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    • 2007
  • The existing defect management is focused on step before closing work, a builder preliminary research and tenant preliminary research. Each step is not related. And the existing study on defect management mainly classify into work type and defect type according to work type. This study divide into defect part. Also this study propose PDA based web and 3DCAD for improving method of existing defect management.

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A Study on Proper Location of Welding Defect in Three Point Bend Testing with MDPE Pipe

  • Lai, Huan Sheng;Yoon, Kee Bong;Kil, Seong Hee
    • Journal of Energy Engineering
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    • v.24 no.1
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    • pp.1-9
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    • 2015
  • Welding defects affect the performance of welded pipe joints. In this study, a three point bend test of welded steel and medium density polyethylene (MDPE) pipe joints with defects of various defect locations and defect materials was studied using the finite element method. The defect was assumed to be located at 12 o'clock, 3 o'clock or 6 o'clock direction. The results showed that pipes failed more easily on the compression side due to stress or local buckling. The air defect was more dangerous than the steel defect if the defect was located in the compression side; otherwise, the defect material effect on the integrity of pipes was ignorable. It is argued that the integrity of pipes with defects in the compression side is weaker than that in other regions, and the defect should be located in the compression side or the 12 o'clock position in the three point bend test to maximize the effect of defect existence on the pipe structural integrity.

Determination of defect depth in industrial radiography imaging using MCNP code and SuperMC software

  • Khorshidi, Abdollah;Khosrowpour, Behzad;Hosseini, S. Hamed
    • Nuclear Engineering and Technology
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    • v.52 no.7
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    • pp.1597-1601
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    • 2020
  • Background: Non-destructive evaluation of defects in metals or composites specimens is a regular method in radiographic imaging. The maintenance examination of metallic structures is a relatively difficult effort that requires robust techniques for use in industrial environments. Methods: In this research, iron plate, lead marker and tungsten defect with a 0.1 cm radius in spherical shape were separately simulated by MCNP code and SuperMC software. By 192Ir radiation source, two exposures were considered to determine the depth of the actual defined defect in the software. Also by the code, displacement shift of the defect were computed derived from changing the source location along the x- or y-axis. Results: The computed defect depth was identified 0.71 cm in comparison to the actual one with accuracy of 13%. Meanwhile, the defect position was recognized by disorder and reduction in obtained gamma flux. The flux amount along the x-axis was approximately 0.5E+11 units greater than the y-axis. Conclusion: This study provides a method for detecting the depth and position of the defect in a particular sample by combining code and software simulators.