• 제목/요약/키워드: deep depth

검색결과 1,545건 처리시간 0.029초

실리콘에서 깊은 접합의 형성을 위한 알루미늄의 확산 모델 (Diffusion Model of Aluminium for the Formation of a Deep Junction in Silicon)

  • 정원채
    • 한국전기전자재료학회논문지
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    • 제33권4호
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    • pp.263-270
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    • 2020
  • In this study, the physical mechanism and diffusion effects in aluminium implanted silicon was investigated. For fabricating power semiconductor devices, an aluminum implantation can be used as an emitter and a long drift region in a power diode, transistor, and thyristor. Thermal treatment with O2 gas exhibited to a remarkably deeper profile than inert gas with N2 in the depth of junction structure. The redistribution of aluminum implanted through via thermal annealing exhibited oxidation-enhanced diffusion in comparison with inert gas atmosphere. To investigate doping distribution for implantation and diffusion experiments, spreading resistance and secondary ion mass spectrometer tools were used for the measurements. For the deep-junction structure of these experiments, aluminum implantation and diffusion exhibited a junction depth around 20 ㎛ for the fabrication of power silicon devices.

3-Dimensional Numerical Analysis of Deep Depletion Buried Channel MOSFETs and CCDs

  • Kim Man-Ho
    • Journal of Electrical Engineering and Technology
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    • 제1권3호
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    • pp.396-405
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    • 2006
  • The visual analysis of buried channel (Be) devices such as buried channel MOSFETs and CCDs (Charge Coupled Devices) is investigated to give better understanding and insight for their electrical behaviours using a 3-dimensional (3-D) numerical simulation. This paper clearly demonstrates the capability of the numerical simulation of 'EVEREST' for characterising the analysis of a depletion mode MOSFET and BC CCD, which is a simulation software package of the semiconductor device. The inverse threshold and punch-through voltages obtained from the simulations showed an excellent agreement with those from the measurement involving errors of within approximately 1.8% and 6%, respectively, leading to the channel implanted doping profile of only approximately $4{\sim}5%$ error. For simulation of a buried channel CCD an advanced adaptive discretising technique was used to provide more accurate analysis for the potential barrier height between two channels and depletion depth of a deep depletion CCD, thereby reducing the CPU running time and computer storage requirements. The simulated result for the depletion depth also showed good agreement with the measurement. Thus, the results obtained from this simulation can be employed as the input data of a circuit simulator.

MEMS 가공을 위한 실리콘 Deep Etching 기술 연구 (A Study on Deep Etching technology for MEMS process)

  • 김진현;이종권;류근걸;이윤배;이미영;김우혁
    • 한국산학기술학회논문지
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    • 제5권2호
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    • pp.128-131
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    • 2004
  • 본 연구에서는 STS-ICP ASEHR을 이용하여 Etch와 Deposition 공정을 반복하여 에칭을 하는 Bosch 식각에 관하여 연구하였다. 기본적인 Etch rate의 변화는 Etching하고자 하는 Wafer에 Deposition된 PR 또는 SiO₂의 두께와 Etching하고자 하는 Wafer의 Depth 및 Pattern size가 영향을 준다. 그러나 이러한 기본적인 변수 외에 STS-ICP ASEHR 장비의 Platen power, Coil power 및 Process pressure에 다양한 변화를 주어 각 변수에 따른 Etch rate을 관찰하였다. 각 공정별 변수를 준 결과 Platen power 12W, Coil power 500W, Etch/Passivation Cycle 6/7sec 일 경우 Etch rate은 1.2㎛/min 이었고, Sidewall prpfile은 90±0.2˚로 나타나 매우 우수한 결과를 보였다. 이는 ICP를 이용한 Bosch Process에 의한 결과임을 확인할 수 있었다.

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심층학습 기법을 활용한 효과적인 타이어 마모도 분류 및 손상 부위 검출 알고리즘 (Efficient Tire Wear and Defect Detection Algorithm Based on Deep Learning)

  • 박혜진;이영운;김병규
    • 한국멀티미디어학회논문지
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    • 제24권8호
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    • pp.1026-1034
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    • 2021
  • Tire wear and defect are important factors for safe driving condition. These defects are generally inspected by some specialized experts or very expensive equipments such as stereo depth camera and depth gauge. In this paper, we propose tire safety vision inspector based on deep neural network (DNN). The status of tire wear is categorized into three: 'safety', 'warning', and 'danger' based on depth of tire tread. We propose an attention mechanism for emphasizing the feature of tread area. The attention-based feature is concatenated to output feature maps of the last convolution layer of ResNet-101 to extract more robust feature. Through experiments, the proposed tire wear classification model improves 1.8% of accuracy compared to the existing ResNet-101 model. For detecting the tire defections, the developed tire defect detection model shows up-to 91% of accuracy using the Mask R-CNN model. From these results, we can see that the suggested models are useful for checking on the safety condition of working tire in real environment.

Deformation characteristics and stability analysis of semi-covered deep excavations with existing buildings

  • Linfeng Wang;Xiaohan Zhou;Tao Chen;Xinrong Liu;Peng Liu;Shaoming Wu;Feng Chen;Bin Xu
    • Geomechanics and Engineering
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    • 제34권1호
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    • pp.87-102
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    • 2023
  • The cover plate and the building loads often make the semi-covered deep excavations with existing buildings bearing asymmetric load, presenting different deformation characteristics with normal excavations, which is not absolutely clear in current studies. Based on a typical engineering, the building storeys, the basement storeys, the pile length, the existence of the cover plate (CP) and the depth of the diaphragm walls (DW) were selected as variables, and 44 groups of simulation were designed to study the influence of existing buildings and the semi-covered supporting system on the deformation of the excavations. The results showed that the maximum lateral displacement of DW, δhm, and the depth of δhm, Hm, are affected seriously by the building storeys and the basement storeys. Asymmetric structures and loading lead to certain lateral displacement of DW at the beginning of excavation, resulting in different relationships between δhm and excavation depth, H. The maximum surface settlement outside the pit, δvm, increases significantly and the location, dm, moves away from the pit with the building storeys increases. δvm has a quadratic correlation with H due to the existing buildings. CP and building load will affect the style of the lateral displacement curve of DW seriously in different aspects.

Statics variation analysis due to spatially moving of a full ocean depth autonomous underwater vehicle

  • Jiang, Yanqing;Li, Ye;Su, Yumin;Cao, Jian;Li, Yueming;Wang, Youkang;Sun, Yeyi
    • International Journal of Naval Architecture and Ocean Engineering
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    • 제11권1호
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    • pp.448-461
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    • 2019
  • Changes in gravity and buoyancy of a Full Ocean Depth Autonomous Underwater Vehicle (FOD-AUV) during its descending and ascending process must be considered very carefully compared with a Human Occupied Vehicle (HOV) or a Remotely Pperated Vehicle (ROV) whose activities rely on human decision. We firstly designed a two-step weight dropping pattern to achieve a high descending and ascending efficiency and a gravity-buoyancy balance at designed depth. The static equations showed that gravity acceleration, seawater density and displacement are three key aspects affecting the balance. Secondly, we try our best to analysis the gravity and buoyancy changing according to the previous known scientific information, such as anomaly of gravity acceleration, changing of seawater states. Finally, we drew conclusion that gravity changes little (no more than 0.1kgf, it is impossible to give a accurate value). A density-depth relationship at the Challenger Deep was acquired and the displacement changing of the FOD-AUV was calculated preciously.

심층혼합공법의 최저 개량 심도 결정에 관한 해석적 연구 (An Analytical Study on the Determination of the Lowest Improvement Depth of Deep Mixing Method)

  • 박춘식;송지원
    • 한국지반신소재학회논문집
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    • 제19권1호
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    • pp.35-44
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    • 2020
  • 연약지반 개량 공법 중 심층혼합공법에 대한 설계 기법으로는 복합지반으로 해석하는 방법과 말뚝지반으로 해석하는 방법이 있다. 그러나 이러한 해석에 대한 비교 연구는 부족한 실정으로 설계 시 해석 기준을 명확하게 정의 내리는 것에 어려움이 있다. 본 연구에서는 2차원 및 3차원 해석을 통해 성토 높이와 연약지반의 심도, 보강구간의 치환율을 변화시키며 각 조건별로 복합지반과 말뚝지반을 가정하여 해석하였다. 그 결과 최저 개량 심도는 3차원 해석에 비해 2차원 해석 결과가 6.85~9.08% 더 깊은 결과를 도출하였다. 또한 말뚝지반 해석의 경우 복합지반 해석에 비해 개량 심도는 12.22~14.45% 더 깊은 것을 확인하였다. 이 결과를 통하여 보다 정확한 설계를 위해서는 2차원 해석보다는 3차원 해석을 실시해야 하고, 경제적인 설계를 위해서는 복합지반으로 해석해야 하며, 안정적인 설계를 위해서는 말뚝지반 해석을 실시해야 된다고 판단된다.

미소구멍의 가공 깊이에 따른 미세방전 가공특성 (Micro-Hole Machining Using MEDM According to Machining Depth)

  • 김재현;김보현;류시형;주종남
    • 한국정밀공학회지
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    • 제20권7호
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    • pp.227-232
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    • 2003
  • In order to make a deep and precise micro-hole, electrode wear and clearance between the electrode and the workpiece are important parameters using micro-electrical discharge machining. In this study, experiments were carried out to show the characteristics of electrode wear and radial clearance with respect to the depth of machined hole. Electrode wear varied with respect to the depth of hole. With deeper machined hole, bigger clearance was observed. Also it was found that the diameter of electrode influences machining characteristics of deep holes.

Infrared and Visible Image Fusion Based on NSCT and Deep Learning

  • Feng, Xin
    • Journal of Information Processing Systems
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    • 제14권6호
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    • pp.1405-1419
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    • 2018
  • An image fusion method is proposed on the basis of depth model segmentation to overcome the shortcomings of noise interference and artifacts caused by infrared and visible image fusion. Firstly, the deep Boltzmann machine is used to perform the priori learning of infrared and visible target and background contour, and the depth segmentation model of the contour is constructed. The Split Bregman iterative algorithm is employed to gain the optimal energy segmentation of infrared and visible image contours. Then, the nonsubsampled contourlet transform (NSCT) transform is taken to decompose the source image, and the corresponding rules are used to integrate the coefficients in the light of the segmented background contour. Finally, the NSCT inverse transform is used to reconstruct the fused image. The simulation results of MATLAB indicates that the proposed algorithm can obtain the fusion result of both target and background contours effectively, with a high contrast and noise suppression in subjective evaluation as well as great merits in objective quantitative indicators.

각막 압평을 이용한 로봇 바늘 삽입법: 심부표층각막이식수술에의 적용 (Robotic Needle Insertion Using Corneal Applanation for Deep Anterior Lamellar Keratoplasty)

  • 박익종;신형곤;김기훈;김홍균;정완균
    • 로봇학회논문지
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    • 제16권1호
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    • pp.64-71
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    • 2021
  • This paper describes a robotic teleoperation system to perform an accurate needle insertion into a cornea for a separation between the stromal layer and Descemet's membrane during deep anterior lamellar Keratoplasty (DALK). The system can reduce the hand tremor of a surgeon by scaling the input motion, which is the control input of the slave robot. Moreover, we utilize corneal applanation to estimate the insertion depth. The proposed system was validated by performing the layer separation using 25 porcine eyes. The average depth of needle insertion was 742 ± 39.8 ㎛ while the target insertion depth was 750 ㎛. Tremor error was reduced from 402 ± 248 ㎛ in the master device to 28.5 ± 21.0 ㎛ in the slave robot. The rate of complete success, partial success, and failure were 60, 28, and 12%, respectively. The experimental results showed that the proposed system was able to reduce the hand tremor of surgeons and perform precise needle insertion during DALK.