• 제목/요약/키워드: cubic boron nitride

검색결과 56건 처리시간 0.018초

냉각 공기장치에 의한 환경 친화 연삭 연구 (A Study on Environment- Friendly Grinding by Using Cold Air)

  • 김남경;이동호;성낙창;송지복
    • 한국정밀공학회지
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    • 제15권9호
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    • pp.145-151
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    • 1998
  • In this study, the experimental and analytic investigation with cold air system has been performed for improving the working environment of the conventional grinding fluid. Very simple cold air system was developed which could replace by the conventional grinding fluid system. The identification of heat of grinding Bone is very important for precision grinding. The experimental data was analysed to investigate the heat which was transferred to the workpiece. It was found that 45∼55% of the total energy for dry grinding, 22∼28% for wet grinding, and 32∼35% for cold air system are conducted to the workpiece in grinding with cubic boron nitride wheel. Cubic boron nitride wheel could reduce the residual stress and thermal demage comparing with aluminium oxide wheel, because cubic boron nitride wheel has very high extreme thermal conductivity.

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$BCl3-NH3-Ar$계의 플라즈마화학증착공정을 이용한 질화붕소막의 합성 (Synthesis of Boron-Nitride Film by Plasma Assisted Chemical Vapor Deposition Using $BCl3-NH3-Ar$ Mixed Gas)

  • 박범수;백영준;은광용
    • 한국세라믹학회지
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    • 제34권3호
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    • pp.249-256
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    • 1997
  • 100-500KHz범위의 주파수전원을 인가하여 발생한 플라즈마를 이용하여 질화붕소(boron nitride)막의 합성시 육방정상(hexagonal phase)과 입방정상(cubic phase)의 생성거동을 관찰하였다. BCl3와 NH3를 붕소와 질소의 공급기체로 선택하였고 Ar과 수소를 carrier기체로 사용하였다. 합성변수로는 플라즈마전원의 전압, 기판의 bias, 합성압력, 기체의 조성, 기판의 온도이었는데, 합성된 박막은 FT-IR결과로부터 육방정과 입방정의 혼합상으로 나타났고, 각 상의 분률은 변수의 크기에 의존하였다. TEM분석결과 육방정으로만 구성된 박막은 비정질상으로 이루어졌으며, 입방정과 육방정의 혼합상의 경우는 비정질기지상에 수십 nanometer크기의 입방정입자가 분산된 구조를 하고 있었다.

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유도결합 플라즈마 화학 기상 증착법을 이용한 cubic boron nitride 박막 증착에 관한 연구

  • 남경희;이승훈;홍승찬;이정중
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2003년도 추계학술발표회초록집
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    • pp.52-52
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    • 2003
  • cubic boron nitride(cubic BN)는 기계적, 전기적, 광학적, 열적으로 우수한 특성 때문에 다양한 분야에 응용 가능한 재료로, 수 십년 동안 연구되어 오고 있다. 그러나 아직까지 막내 cubic BN이 차지하는 함량과 접착력의 저조 때문에 실제로 응용되기에는 무리가 있다. 많은 이들이 이 문제점들을 해결하기 위해 노력하고 있다. Cubic BN의 생성 매카니즘에 관해서는 여러 모델들이 제시되고 있으나 아직까지 정론화된 것은 없다. 대표적인 모델들로는 스퍼터 모델, 스트레스 모델, 서브플렌테이션 모델 등이 있다. 그러나 BN 막내의 구조가 hexagal BN과 cubic BN이 혼합되어 있는 구조라는 것과 cubic BN이 형성되기 위해서는 이온 충돌 에너지가 필요하다는 점은 모든 모델들에서 일반적으로 취하고 있다. 본 연구에서는, 유도 결합 플라즈마 화학 기상 증착법을 이용해 cubic BN 박막을 증착하였다. 소스 가스로는 BCl$_3$, $N_2$, H$_2$, Ar를 사용하였다. 기판에 가해지는 R.F. 바이어스가 박막내 cubic BN의 함량에 어떠한 영향을 미치는 지에 대해 연구하였다. cubic BN 상의 확인은 FT-IR 장비로 분석하였고, 막내 조성은 AES로, 박막의 두께는 FE-SEM으로 확인하였다.

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Synthesis of Cubic Boron Nitride by Al-Mg Solvents

  • Park, Jong-Ku;Park, S.T.;S.K. Singhal;S. J. Cui;K. Y. Eun
    • The Korean Journal of Ceramics
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    • 제3권3호
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    • pp.187-190
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    • 1997
  • The aluminum-magnesium (Al-Mg) aklloys have been proved to be an effective solvent for synthesis of cubic-phase boron nitride (cBN) from hexagonal-phase boron nitride (hBN) at the conditions of high pressures and high temperatures (HP/HT). Various kinds of hBN powders having different crystallinity have been tested for cBN synthesis with Al-Mg solvents. The conversion ratio from hBN to cBN and the shape of synthesized cBN crystals appeared to be affected strongly by chemical composition and added amount of Al-Mg solvents as well as crystallinity of BN powders. As the magnesium content increased in the Al-Mg solvents, the conversion ratio increased and the size of cBN crystals became larger. The crystal facets developed well in the specimens with solvents having high Mg content. It was observed that a hBNlongrightarrowcBN transformation occurred more easily in the specimens having well crystallized hBN powders. Amorphous BN having much $B_2O_3$ impurity exhibited a low threshold temperature for transformation to cBN, which was attributed to crystallization of amorphous BN to well crystallized hBN prior to transformation into cBN with help of $B_2O_3$.

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OrthoMTA 컴팩터의 크리프피드 CBN 연삭을 위한 드레싱 조건 연구 (Study on Dressing Conditions for Creep-feed in Cubic Boron Nitride Grinding of OrthoMTA Compacters)

  • 맹희영;백은표
    • 한국생산제조학회지
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    • 제23권1호
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    • pp.69-74
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    • 2014
  • An OrthoMTA compacter is made by machining a Ni-Ti alloy wire using tapered helix creep-feed grinding machines. This aim of this study is to find the optimal dressing conditions to sharpen the corner of a cubic boron nitride (CBN) wheel. On the basis of the results of various experiments, it is verified that the most important factors in dressing are the dressing depth and feeding method, whereas the feed rate has less importance for producing a smaller corner R value. The study also finds the optimum dressing depth to reduce the dressing time, a feeding speed and method to stabilize the machining, and the mesh grade for the CBN wheel to make the groove of the compacter deeper.

Effect of residual oxygen in a vacuum chamber on the deposition of cubic boron nitride thin film

  • Oh, Seung-Keun;Kang, Sang Do;Kim, Youngman;Park, Soon Sub
    • Journal of Ceramic Processing Research
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    • 제17권7호
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    • pp.763-767
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    • 2016
  • The structural characterization of cubic boron nitride (c-BN) thin films was performed using a B4C target in a radio-frequency magnetron sputtering system. The deposition processing conditions, including the substrate bias voltage, substrate temperature, and base pressure were varied. Fourier-transform infrared spectroscopy and X-ray photoelectron spectroscopy were used to analyze the crystal structures and chemical binding energy of the films. For the BN film deposited at room temperature, c-BN was formed in the substrate bias voltage range of -400 V to -600 V. Less c-BN fraction was observed as the deposition temperature increased, and more c-BN fraction was observed as the base pressure increased.