Preparation of $Ba_{0.5}Sr_{0.5}TiO_3$ Thin Films by Off-Axis RF Magnetron Sputtering
(Off-Axis RF Magnetron Sputtering 방법에 의한 $Ba_{0.5}Sr_{0.5}TiO_3$ 박막의 제조)
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- Journal of the Korean Ceramic Society
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- v.31 no.12
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- pp.1429-1436
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- 1994