• 제목/요약/키워드: critical density

검색결과 1,301건 처리시간 0.03초

후면 위상 패턴을 이용한 투과율 조절 포토마스크 (Transmittance controlled photomasks by use of backside phase patterns)

  • 박종락;박진홍
    • 한국광학회지
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    • 제15권1호
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    • pp.79-85
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    • 2004
  • 후면의 석영면에 위상 패턴을 형성하여 투과율 조절을 구현한 포토마스크에 대해 보고한다. 위상 패턴의 크기와 패턴 조밀도에 따른 조명 동공의 형태 변화에 관한 이론적 결과와 투과율 조절 포토마스크를 사용한 웨이퍼 상 CD(critical dimension) 균일도 개선에 관한 실험적 결과에 대해 기술한다. 투과율 조절을 위한 위상 패턴은 패턴이 형성되지 않은 영역에 대해 180$^{\circ}$의 상대적 위상을 갖도록 석영면을 식각한 콘택홀 형태의 패턴을 사용하였다. 콘택홀 패턴의 크기가 작을수록 본래의 조명동공 형태를 유지하게 되며, 동일한 패턴 조밀도에서 더욱 큰 노광 광세기 저하가 일어남을 알 수 있었다. 패턴 조밀도를 위치별로 변화시켜 CD균일도 개선에 적합한 투과율 분포를 포토마스크 후면에 형성하였다. 투과율 조절 포토마스크를 140nm 디자인 롤을 갖고 있는 DRAM(Dynamic Random Access Memory)의 한 주요 레이어에 적용하여 CD 균일도를 3$\sigma$값으로 24.0nm에서 10.7nm 로 개선할 수 있었다.

용융온도와 유지시간이 용융법으로 제작한 고온초전도체의 임계특성에 미치는 영향 (The Effects of Melting Temperature and Holding Time on Critical Characteristics of HTSC Fabricated by Melting Method)

  • 임성훈;한태희;박경국;임성우;조동언;한병성
    • 한국전기전자재료학회논문지
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    • 제11권2호
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    • pp.154-161
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    • 1998
  • The effects of melting temperature and holding time on the critical current density($J_c$) of $YBa_2Cu_3O_x$ based superconducting bulk fabricated by MPMG process were investigated. The amount of the formed $Y_2BaCuO_5$ phases increased with the melting temperature. However, the value of critical current density was highest at 1120 $^{\circ}C$. With this proper melting temperature, the effect of holding time on the critical characteristics was also investigated. In the case of Ag addition, the volume of the formed $Y_2BaCuO_5$ phase when the amount of Ag addition was 10 wt% and 20 wt% was observed to be highest at 20 minute and 40 minute respectively. But in the specimen without Ag, volume of $Y_2BaCuO_5$ phase increased as the holding time increased. The proper melting temperature and the holding time obtained were 1120 $^{\circ}C$ and 20 minute. The long holding time was not effective for the $J_c$ improvement as well as the formation of $Y_2BaCuO_5$.

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THE EFFECT OF DUST PARTICLES ON ION ACOUSTIC SOLITARY WAVES IN A DUSTY PLASMA

  • Choi, Cheong-Rim;Lee, Dae-Young;Kim, Yong-Gi
    • Journal of Astronomy and Space Sciences
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    • 제21권3호
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    • pp.201-208
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    • 2004
  • In this paper we have examined the effect of dust charge density on nonlinear ion acoustic solitary wave which propagates obliquely with respect to the external magnetic field in a dusty plasma. For the dusty charge density below a critical value, the Sagdeev potential $\Psi1(n)$ has a singular point in the region n < 1, where n is the ion number density divided by its equilibrium number density. If there exists a dust charge density over the critical value, the Sagdeev potential becomes a finite function in the region n < 1, which means that there may exist the rarefactive ion acoustic solitary wave. By expanding the Sagdeev potential in the small amplitude limit up to on4 near n=1, we find the solution of ion acoustic solitary wave. Therefore we suggest that the dust charge density plays an important role in generating the rarefactive solitary wave.

Research on the Correlation Between Rail Transit Entrances and Urban Form in High-Density Areas

  • Dongzhu Chu;Hong Su
    • 국제초고층학회논문집
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    • 제12권1호
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    • pp.35-47
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    • 2023
  • The transport system and its infrastructure are not only the fundamental means of sustaining the operation of contemporary cities, but also important drivers for the evolution of urban form. Rail transit, critical to improving the operational efficiency and optimizing the spatial layout in cities, is one of the critical conditions for high-density areas with limited land and concentrated resources to be compact to take on complex challenges. As a node element of infrastructure, rail transit entrances are the most important points connecting the rail transit system with urban space. Although influenced by urban form, their quantity and location also influence and shape the evolution of urban space form. Based on the development gap of high-density areas in various contexts, focusing on various rail transit stations in Asia, this research analyzes the correlation between rail transit entrances and peripheral high-density urban form in a delicate, dynamic and granular way. The research considers both horizontal and vertical perspectives, in combination with the urban evolution process in time series, to explore the development trend of high-density urban form in Asia from the aspect of correlation, and building a new foundation for research on urban form, suitable for different types of cities.

보론 분말의 결정화에 대한 열처리 영향과 MgB2 초전도체의 임계전류밀도 특성 (Effect of Heat-Treatment on the Crystallization of B Powder and Critical Current Density Property of MgB2 Superconductor)

  • 유병윤;김찬중;박순동;전병혁
    • 한국재료학회지
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    • 제24권9호
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    • pp.465-468
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    • 2014
  • The crystallization effects of boron (B) powder on the phase, full width at half maximum (FWHM) values, and critical properties were investigated for in-situ reacted $MgB_2$ bulk superconductors. The semi-crystalline B powder was heat-treated at different temperatures of 1000, 1300 and $1500^{\circ}C$ for 5 hours in an Ar atmosphere. Then, using as-received and heat-treated B powders, the $MgB_2$ samples were prepared at $600^{\circ}C$ for 40 hours in an Ar atmosphere. As the heat-treatment temperature of the B powder increased, both the particle size of the B powder and crystalline phase increased. In the case of $MgB_2$ samples using B powders heat-treated at above $1300^{\circ}C$, unreacted magnesium (Mg) and B remained due to the improved crystallinity of the B powder. As the heat-treatment temperature of B powder increased, the critical current density of $MgB_2$ decreased continuously due to the reduction of grain boundary density and superconducting volume caused by unreacted Mg and B.

Micro-Gravity Research on the Atomization Mechanism of Near-Critical Mixing Surface Jet

  • Tsukiji, Hiroyuki;Umemura, Akira;Hisida, Manabu
    • 한국추진공학회:학술대회논문집
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    • 한국추진공학회 2004년도 제22회 춘계학술대회논문집
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    • pp.774-778
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    • 2004
  • The atomization process of a circular $SF_{6}$ liquid jet issued into an otherwise quiescent, high-pressure $N_2$ gas was observed to explore the breakup mechanism of liquid ligaments involved in turbulent atomization. Both liquid and gas temperatures were fixed at a room temperature but the gas pressure was elevated to more than twice the critical pressure of $SF_{6}$. Therefore, the liquid surface was in a thermodynamic state close to a critical mixing condition with suppressed vaporization. Since the surface tension and the surface gas density approach zero and the surface liquid density, respectively, phenomena equivalent to those which would appear when a very high speed laminar flow of water were injected into the atmospheric-pressure air can be observed by issuing $SF_{6}$ liquid at low speeds in micro-gravity environment which avoid disturbances due to gravity forces. The instability ob near-critical mixing surface jet was quantitatively characterized using a newly developed device, which could issue a very small amount of $SF_{6}$ liquid at small constant velocity into a very high-pressure $N_2$ gas.

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$MgB_2$ bulk의 미세구조와 임계전류밀도에 미치는 polyacrylic acid doping 효과 (Effects of Polyacrylic Acid Doping on Microstructure and Critical Current Density of $MgB_2$ Bulk)

  • 이승묵;황수민;이창민;주진호;김찬중
    • Progress in Superconductivity
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    • 제11권2호
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    • pp.87-91
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    • 2010
  • We fabricated the polyacrylic acid (PAA)-doped $MgB_2$ bulks and characterized their lattice parameters, actual C substitutions, microstructures, and critical properties. The boron (B) powder was mixed with PAA using N,N-dimethylformamide as solvent and then the solution was dried out at $200^{\circ}C$ and crushed. The C treated B powder and magnesium powder were mixed and compacted by uniaxial pressing at 500 MPa, followed by sintering at $900^{\circ}C$ for 1 h in high purity Ar atmosphere. We observed that the PAA doping increased the MgO amount but decreased the grain size, a-axis lattice constant, and critical temperature ($T_c$), which is indicative of the C substitution for B sites in $MgB_2$. In addition, the critical current density ($J_c$) at high magnetic field was significantly improved with increasing PAA addition: at 5 K and 6.6 T, the $J_c$ of 7 wt% PAA-doped sample was $6.39\;{\times}\;10^3\;A/cm^2$ which was approximately 6-fold higher than that of the pure sample ($1.04\;{\times}\;10^3\;A/cm^2$). This improvement was probably due to the C substitution and the refinement of grain size by PAA doping, suggesting that PAA is an effective dopant in improving $J_c$(B) performance of $MgB_2$.