• Earthquakes and Structures
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• v.18 no.1
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• pp.1-14
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• 2020

The vehicle-bridge interaction (VBI) analysis might be cumbersome and computationally expensive in bridge engineering due to the necessity of solving large number of coupled system of equations. However, VBI analysis can provide valuable insights into the dynamic behavior of highway bridges under specific loading conditions. Hence, this paper presents a numerical study on the dynamic behavior of a conventional highway bridge under strong near-field and far-field earthquake motions considering the VBI effects. A recursive substructuring method, which enables solving bridge and vehicle equations of motion separately and suitable to be adapted to general purpose finite element softwares, was used. A thorough analysis that provides valuable information about the effect of various traffic conditions, vehicle velocity, road roughness and effect of soil conditions under far-field and near-field strong earthquake motions has been presented. A real-life concrete highway bridge was chosen for numerical demonstrations. In addition, sprung mass models of vehicles consist of conventional truck and car models were created using physical and dynamic properties adopted from literature. Various scenarios, of which the results may help to highlight the different aspects of the dynamic response of concrete highway bridges under strong earthquakes, have been considered.

• Smart Structures and Systems
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• v.19 no.5
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• pp.523-538
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• 2017

A series of field vibration tests are conducted on the Runyang Suspension Bridge during both the construction and operational stages. The purpose of this study is devoted to the analysis of the dynamic characteristics of the suspension tower. After the tower was erected, an array of accelerometers was deployed to study the evolution of its modal parameters during the construction process. Dynamic tests were first performed under the freestanding tower condition and then under the tower-cable condition after the superstructure was installed. Based on the identified modal parameters, the effect of the pile-soil-structure interaction on dynamic characteristics of the suspension tower is investigated. Moreover, the stiffness of the pile foundation is successfully identified using a probabilistic finite model updating method. Furthermore, challenges of identifying the dynamic properties of the tower from the coupled responses of the tower-cable system are discussed in detail. It's found that compared with the identified results from the freestanding tower, the longitudinal and torsional natural frequencies of the tower in the tower-cable system have changed significantly, while the lateral mode frequencies change slightly. The identified modal results from measurements by the structural health monitoring system further confirmed that the vibrations of the bridge subsystems (i.e., the tower, the suspended deck and the main cable) are strongly coupled with one another.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.124-124
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• 2010

Currently, extreme ultraviolet lithography (EUVL) is being investigated for next generation lithography. EUVL is one of competitive lithographic technologies for sub-22nm fabrication of nano-scale Si devices that can possibly replace the conventional photolithography used to make today's microcircuits. Among the core EUVL technologies, mask fabrication is of considerable importance due to the use of new reflective optics having a completely different configuration compared to those of conventional photolithography. Therefore, new materials and new mask fabrication process are required for high performance EUVL mask fabrication. This study investigated the etching properties of SnO2 (Tin Oxide) as a new absorber material for EUVL binary mask. The EUVL mask structure used for etching is SnO2 (absorber layer) / Ru (capping / etch stop layer) / Mo-Si multilayer (reflective layer) / Si (substrate). Since the Ru etch stop layer should not be etched, infinitely high selectivity of SnO2 layer to Ru ESL is required. To obtain infinitely high etch selectivity and very low LER (line edge roughness) values, etch parameters of gas flow ratio, top electrode power, dc self - bias voltage (Vdc), and etch time were varied in inductively coupled Cl2/Ar plasmas. For certain process window, infinitely high etch selectivity of SnO2 to Ru ESL could be obtained by optimizing the process parameters. Etch characteristics were measured by on scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) analyses. Detailed mechanisms for ultra-high etch selectivity will be discussed.

• Proceedings of the KIEE Conference
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• 1999.11d
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• pp.1066-1068
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• 1999

Magnetic field is commonly used in low temperature processing plasmas in order to obtain high density. E $\times$ B magnetron or surface multipole configuration were most popular. However, the properties of capacitively coupled rf plasma confined by axially applied static magnetic fields have rarely been studied. In this paper, the effects of magnetic field on the characteristics of 13.56MHz/40KHz argon plasma will be reported. Ion saturation current, electron temperature and plasma potential were measured by Langmuir probe and omissive probe. At low pressure region ($\sim$10mTorr), ion current was increased by a factor of 3 - 4 due to reduction of diffusion loss of charged particles to the wall. It was observed that magnetic field induces large time variation of the plasma potential. The experimental result was compared with particle-in-cell simulation. It was also observed that electron temperature tend to decrease with increasing magnetic induction level for 40KHz discharge.

• Journal of Surface Science and Engineering
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• v.29 no.6
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• pp.816-823
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• 1996

Chlorine containing high density plasmas are widely used to etch various materials in the microelectronic device fabrication. In this study, the characteristics of inductively coupled $Cl_2(O_2/N_2$) plasmas and their effects on the formation of silicon etching have been investigated using a Langmuir probe, quadrupole mass spectrometry(QMS), X-ray photoelectron spectroscopy(XPS), and Scanning Electron Microscopy(SEM). The addition of oxygen for chlorine plasmas reduced ion current densities and chlorine radical densities compared to the nitrogen addition by the recombination of oxygen with chlorine. Also, when silicon is etched in $Cl_2/O_2$ plasmas, etch products recombined with oxygen such as $SiCl_xO_y$ emerged. However, when nitrogen is added to chlorine, etch products recombined with nitrogen or Si-N bondings on the etched silicon surface were not found. All the silicon etch characteristics were dependent on the plasma conditions such as ion density, radical density, etc. As a result sub micron vertical silicon trench etch profiles could be effectively formed using optimized etch conditions for $Cl_2/O_2\; and \;Cl_2/N_2$ gas combinations.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.90.2-90.2
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• 2012

Graphene has recently attracted significant attention because of its unique optical and electrical properties. For practical device applications, special attention has to be paid to the synthesis of high-quality graphene on large-area substrates. Graphene has been synthesized by eloborated mechanical exfoliation of highly oriented pyrolytic graphite, chemical reduction of exfoliated grahene oxide, thermal decomposition of silicon carbide, and chemical vapor deposition (CVD) on Ni or Cu substrates. Among these techniques, CVD is superior to the others from the perspective of technological applications because of its possibility to produce a large size graphene. PECVD has been demonstrated to be successful in synthesizing various carbon nanostructures, such as carbon nanotubes and nanosheets. Compared with thermal CVD, PECVD possesses a unique advantage of additional high-density reactive gas atoms and radicals, facilitating low-temperature, rapid, and controllable synthesis. In the current study, we report results in synthesizing of high-quality graphene films on a Ni films at low temperature. Controllable synthesis of quality graphene on Cu foil through inductively-coupled plasma CVD (ICPCVD), in which the surface chemistry is significantly different from that of conventional thermal CVD, was also discussed.

• Journal of Surface Science and Engineering
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• v.38 no.2
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• pp.79-82
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• 2005

This study investigated the effect of nitriding on the hardness and adhesion properties of $TiB_2$ coatings. Inductively coupled plasma (ICP) was used for both nitriding and deposition. By applying ICP, H13 steel was nitrided at a high rate of $50\;{\mu}m/hr$. After nitriding, a Fe4N compound layer or a diffusion layer was formed according to the hydrogen/nitrogen ratio. Both layers could improve the load-bearing capacity of the substrate by increasing the substrate hardness. The adhesion of the $TiB_2$ coatings increased to $\~30N$ after nitriding, but the hardness of the coating was lowered to 20-30 GPa. However, the adhesion of the $TiB_2$ coatings with a high hardness (>60 GPa) could not be improved substantially by nitriding due to the large difference in hardness between the coating and the substrate. The grain size of the $TiB_2$ coating was larger on the nitrided substrates, resulting in a decrease in the hardness of the coating.

• Journal of the Optical Society of Korea
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• v.18 no.5
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• pp.582-588
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• 2014

We study polarization-dependent spontaneous emission (SE) rate and light extraction efficiency (LEE) in localized-surface-plasmon (LSP)-coupled light emitting diodes (LEDs). The closely packed seven $Ag/SiO_2$ core-shell (CS) nanoparticles (NPs) lie on top of the GaN surface for LSP coupling with a radiated dipole. According to the dipole direction, both the SE rate and the LEE are significantly modified by the LSP effect at the $Ag/SiO_2$ CS NPs when the size of Ag, the thickness of $SiO_2$, and the position of the dipole source are varied. The enhancement of the SE rate is related to an induced dipole effect at the Ag, and the high LEE is caused by light scattering with an LSP mode at $Ag/SiO_2$ CS NPs. We suggest the optimum position of the quantum well (QW) in blue InGaN/GaN LEDs with $Ag/SiO_2$ CS NPs for practical application.

• Computers and Concrete
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• v.3 no.2_3
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• pp.103-122
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• 2006

Drying shrinkage of concrete occurs due to the loss of moisture and thus, it is controlled by moisture diffusion process. On the other hand, the shrinkage causes cracking of concrete and affects its moisture diffusion properties. Therefore, moisture diffusion and drying shrinkage are two coupled processes and their interactive effect is important for the durability of concrete structures. In this paper, the two material parameters in the moisture diffusion equation, i.e., the moisture capacity and humidity diffusivity, are modified by two different methods to include the effect of drying shrinkage on the moisture diffusion. The effect of drying shrinkage on the humidity diffusivity is introduced by the scalar damage parameter. The effect of drying shrinkage on the moisture capacity is evaluated by an analytical model based on non-equilibrium thermodynamics and minimum potential energy principle for a two-phase composite. The mechanical part of drying shrinkage is modeled as an elastoplastic damage problem. The coupled problem of moisture diffusion and drying shrinkage is solved using a finite element method. The present model can predict that the drying shrinkage accelerates the moisture diffusion in concrete, and in turn, the accelerated drying process increases the shrinkage strain. The coupling effects are demonstrated by a numerical example.

• Structural Engineering and Mechanics
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• v.52 no.3
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• pp.573-593
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• 2014

Pounding between adjacent buildings is a significant challenge in metropolitan areas because buildings of different heights collide during earthquake excitations due to varying dynamic properties and narrow separation gaps. The seismic responses of adjacent buildings of varying height, coupled through soil subjected to earthquake-induced pounding, are evaluated in this paper. The lumped mass model is used to simulate the buildings and soil, while the linear visco-elastic contact force model is used to simulate pounding forces. The results indicate while the taller building is almost unaffected when the shorter building is very short, it suffers more from pounding with increasing height of the shorter building. The shorter building suffers more from the pounding with decreasing height and when its height differs substantially from that of the taller building. The minimum required separation gap to prevent pounding is increased with increasing height of the shorter building until the buildings become almost in-phase. Considering the soil effect; pounding forces are reduced, displacements and story shears are increased after pounding, and also, minimum separation gap required to prevent pounding is increased.