• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.10
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• pp.804-808
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• 1998

The inductively coupled plasma(ICP) etching of platinum with BCl$_3$/Cl$_2$ gas chemistry has been studied. X-ray photoelectron spectroscopy (XPS) was used to investigate the chemical binding states of the etched surface. The plasma characteristics was extracted from optical emission spectroscopy (OES) and a single Langmuir probe. In this case of Pt etching using BCl$_3$/Cl$_2$ gas chemistries, the result of OES and Langmuir probe showed the increase of Cl radicals and ion current densities in the plasmas with increasing Cl$_2$ gas ratio. At the same time, XPS results indicated that the intensities of Pt 4f decreased with increasing Cl$_2$ gas ratio. The decrease of Pt 4f intensities implies the increase of residue layer thickness on the etched Pt surface.

• Journal of the Semiconductor & Display Technology
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• v.4 no.2 s.11
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• pp.11-14
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• 2005

In plasma processing reactors, it is common practice to control plasma density and ion bombardment energy by manipulating excitation voltage and frequency. In this paper, a dually excited capacitively coupled rf plasma reactor is self-consistently simulated with a three moment model. Effects of phase differences between primary and secondary voltage waves, simultaneously modulated at various combinations of commensurate frequencies, on plasma properties are investigated. The simulation results show that plasma potential and density as well as primary self-dc bias are nearly unaffected by the phase lag between the primary and the secondary voltage waves. The results also show that, with the secondary frequency substantially lower than the primary frequency, secondary self·do bias remains constant regardless of the phase lag. As the secondary frequency approaches to the primary frequency, however, the secondary self-dc bias becomes greatly altered by the phase lag, and so does the ion bombardment energy at the secondary electrode. These results demonstrate that ion bombardment energy can be more carefully controlled through plasma simulation.

• Korean Journal of Optics and Photonics
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• v.12 no.6
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• pp.437-445
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• 2001

We examine theoretically the properties of the force on Mie particles induced by evanescent fields at a system of multilayer films (including a metal film), at which the surface plasmon resonance is excited by a p-polarized plane electromagnetic wave. An expression of the surface plasmon-coupled evanescent fields produced in Kretschmann (or Sarid) geometry is expanded in terms of vector spherical wave functions, while multiple reflections between the Mie particle and the metal boundary are taken into account. The Cartesian components of the force on Mie particles by the evanescent fields are analytically formulated and numerically evaluated. The force components are increased by one or two orders of magnitude at metal boundaries over those at dielectric boundaries. As a result, we can confirm the possibility of stable manipulation or rotation of a finite-sized object by forces of surface plasmon-coupled evanescent fields.

• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.2418-2420
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• 2005

In this paper, parameters of electron temperature and density for the mercury-free lighting-source were measured to diagnosis and analyze in Xe based inductively coupled plasma(ICP). In results at several dependences of $20{\sim}100mTorr$ Xenon pressure, $50{\sim}200W$ RF power and horizontal distribution were especially mentioned. When Xe pressure was 20mTorr and RF power was 200W, the electron temperature and density were respectively 3.58eV and $3.56{\times}10^{12}cm^{-3}$. The key parameters of Xe based ICP depended on Xe pressure more than RF power that could be verified. A high electron temperature and low electron density with a suitable Xe pressure are indispensible parameters for Xe based ICP lighting-source.

• Proceedings of the KIEE Conference
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• 2004.11a
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• pp.147-149
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• 2004

Inductively coupled plasma is commonly used for electrodeless lamp due to its ease of plasma generation. Optical characteristics significantly depend on the RF power and gas pressure of the plasma. This paper describes the measurement of spectrum as a function of RF power and gas pressure with a goal of finding optimal operating conditions of the electrodeless lamp. The gas pressure was varied from 10 [mTorr] to 100 [mTorr] and the RF power was varied from 10 [W] to 120 [W]. It was found that the intensity of wavelength tends to be decreased when argon pressure is increased, and the intensity of wavelength is increased as RF power is increased.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1695-1697
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• 2003

In this paper the emission properties of electrodeless fluorescent lamp were discussed using the inductively coupled plasma. To transmit the electromagnetic energy into the chamber a RF power of 13.56MHz was appied to the antenna and considering the Ar gas pressure and the RF electric power change, the emission spectrum, Ar-I line, luminance were investigated. At this time the input parameter for ICP RF plasma, Ar gas pressure and RF power were applied in the range of 10${\sim}$60m Torr, 10${\sim}$300W respectively.

• Bulletin of the Korean Chemical Society
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• v.10 no.6
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• pp.572-577
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• 1989

Using the low valent titanium induced carbonyl-carbonyl coupling reaction, it was attempted to synthesize sterically hindered 17-membered cyclic chiral host 2. The semifinal dialdehyde 12 was obtained through 11 step reactions beginning from p-tert-butylphenol and dibenzofuran. When dialdehyde 12 was treated with $TiCl_3-Zn/Cu,$ only intermolecularly coupled dimer 14 was obtained instead of intramolecularly coupled cyclic alkene 2. The mechanistic consideration leading to 14 was discussed and the cation binding properties of dimer 14 and dicarboxylic intermediate 13 was reported, which implies the significance of the principle of preorganization of host's binding sites prior to complexation.

• Analytical Science and Technology
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• v.32 no.4
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• pp.121-130
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• 2019

Alumina is one of the most important ceramic materials because of its useful physical and chemical properties. Recently, high-purity alumina has been used in various industrial fields. This leads to increasing demand for reliable elemental analysis of impurities in alumina samples. However, the chemical inertness of alumina makes the sample preparation for conventional elemental analysis a tremendously difficult task. Herein, we demonstrated the feasibility of laser ablation for effective sampling of alumina powder. Laser ablation performs sampling rapidly without any chemical reagents and also allows simultaneous optical emission spectroscopy and mass spectrometry analyses. For six alumina samples including certified reference materials and commercial products, laser-induced breakdown spectroscopy (LIBS) and laser-ablation inductively-coupled plasma mass spectrometry (LA-ICP-MS) analyses were performed simultaneously based on a common laser ablation sampling. LIBS was found to be useful to quantify alkali and alkaline earth metals with limits-of-detection (LODs) around 1 ppm. LA-ICP-MS could quantify transition metals such as Ti, Cu, Zn, and Zr with LODs in the range from a few tens to hundreds ppb.

• International Journal of Highway Engineering
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• v.18 no.6
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• pp.41-50
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• 2016

OBJECTIVES : In this study, microstructural components of crumb rubber modified asphalt (CRMA) binder were investigated using environmental scanning electron microscope (ESEM). To clearly understand the elemental composition of the CRMA binder, energy dispersive X-ray spectroscopy (EDX) was employed on the ESEM samples. METHODS : CRMA binders were produced using open blade mixers at $177^{\circ}C$ for 30 min. The binders were artificially aged through a series of accelerated aging processes. Sample preparation was done by making a mold shape on the glass slide. Thereafter, the morphology of the CRMA binder was observed using the ESEM coupled with the EDX. RESULTS : The images captured from the ESEM indicate that the unaged CRMA binder appears to have a single-phase continuous nonuniform structure after the addition of crumb rubber particles, whereas the artificially aged CRMA binder was observed to have two different phases. ESEM coupled with EDX shows detailed internal structure of the modified binders compared to other technologies (i.e., optical microscopy, atomic force microscopy, and conventional scanning electron microscope). CONCLUSIONS : The captured images resemble the internal structures such as the viscous properties of the unaged CRMA binder and the interaction between the rubber particles and the base binder at aged condition. ESEM is a powerful instrument and with the introduction of EDX, it provided more details of the network microstructure of the asphalt binder. ESEM coupled with EDX is recommended for use in future investigation of microstructure of asphalt binders.

• Transactions of the Korean Society of Automotive Engineers
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• v.25 no.1
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• pp.35-41
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• 2017

The use of engineering plastics in automotive components is increasing with the trend towards improving the car strength and reducing weight. Among the different choices of materials, engineering plastic emerged as the necessary material for achieving lower costs, reduced weight and improved production efficiency. To produce the automotive parts, it is important to predict defect and validation of injection molding prior to design. Injection molding analysis and structural analysis are widely applied as a part of the design process when developing automotive parts. Injection molding analysis, in particular, involves a highly complicated mechanism that requires deep knowledge of polymer properties as well as an analytic approach different from that used for a general isotropic material when the molded material is used as a structural material. This is because the parts made of polymer have pre-stress factors such as intrinsic deformation and residual stress. The most important factors for injection molded plastic products are injection molding condition and cavity design, taking into account ease of molding, mass production and application. Despite optimal injection molding conditions and cavity design, however, glass fiber orientation is critically linked to strength reduction. The application of injection molding and structural coupled analysis provides a low-cost solution for product molding and structural validation, all prior to the actual molding. The purpose of this study involves the validation, pre-study, and solution of defect in injection-molded polymer automotive parts using the simulation software for injection molding and structural coupled analysis. Finally, this thesis provides validation of an injection molding and structural coupled analytic mechanism that can demonstrate the effect of glass fiber orientation on mechanical strength. Design improvement ideas for the injection molded product of PPS (Poly Phenylene Sulfide)+40% glass fiber are also suggested.