Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2004.11a
- /
- Pages.147-149
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- 2004
Spectrum Properties of Inductively Coupled Argon Plasma
유도결합형 플라즈마에서의 아르곤 가스의 스펙트럼 특성
- Lee, Young-Hwan (WonKwang University) ;
- Pack, Kwang-Hyeon (WonKwang University) ;
- Choi, Yong-Sung (WonKwang University) ;
-
park, Dae-Hee
(WonKwang University)
- 이영환 (원광대학교 전기전자 및 정보공학부) ;
- 백광현 (원광대학교 전기전자 및 정보공학부) ;
- 최용성 (원광대학교 전기전자 및 정보공학부) ;
-
박대희
(원광대학교 전기전자 및 정보공학부)
- Published : 2004.11.05
Abstract
Inductively coupled plasma is commonly used for electrodeless lamp due to its ease of plasma generation. Optical characteristics significantly depend on the RF power and gas pressure of the plasma. This paper describes the measurement of spectrum as a function of RF power and gas pressure with a goal of finding optimal operating conditions of the electrodeless lamp. The gas pressure was varied from 10 [mTorr] to 100 [mTorr] and the RF power was varied from 10 [W] to 120 [W]. It was found that the intensity of wavelength tends to be decreased when argon pressure is increased, and the intensity of wavelength is increased as RF power is increased.
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