• Journal of the Korean Society for Precision Engineering
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• v.29 no.8
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• pp.906-912
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• 2012

This paper presents the new method for a six-degree-of-freedom (DOF) motion measurement and those dynamic characterizations in an ultraprecision linear stage using angle sensor-implemented grating interferometry. It consists of a diffractive optical element, a corner cube, four separate two-dimensional position sensitive detectors, four photodiodes and auxiliary optics components. From the previous study, it was confirmed that the proposed optical system could measure a six-DOF motion error in a linear stage. In this article, six-DOF motion dynamic characteristics of the stage were investigated through the step response and with respect to the conditions with a different speed of a slide table. As a result, the natural frequency and damping ratio according to a six-DOF direction was obtained. Also, it was seen that the speed of slide table had an significant effect on a six-DOF displacement motion, especially, X, which was considered as the effect of friction mechanism and local elastic mechanical deformation in a slide guide.

• Journal of the Society of Naval Architects of Korea
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• v.55 no.4
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• pp.281-288
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• 2018

Acoustic radiation efficiency is a crucial factor to estimate Underwater Radiated Noise (URN) of ships accurately. This paper describes a numerical method to analyse acoustic radiation efficiency of one side-wetted rectangular Mindlin plate with simply supported boundaries excited by a harmonic point force. Transverse displacements of plate and acoustic radiation pressures are evaluated by the mode superposition method. The acoustic radiation efficiencies analyzed by both Mindlin and thin plate theories show little differences at monopole and corner modes of low frequency regions but relatively large differences at edge and critical modes of high frequency regions. Especially, the critical frequency with the highest acoustic radiation efficiency evaluated by the Mindlin plate theory is higher than that of thin plate theory. In addition, the acoustic loading effect of fluid also increases bending wave-number of plate and its critical frequency. Finally, the acoustic radiation characteristics of plates with different aspect ratios and thicknesses through numerical analyses are investigated and discussed.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.9 no.5
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• pp.105-111
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• 2000

Micronization of sensor is a trend of the silicon sensor development with regard to a piezoresistive silicon pressure sensor, the size of the pressure sensor diaphragm have become smaller year by year, and a microaccelerometer with a size less than 200~300${\mu}{\textrm}{m}$ has been realized. Over the past four or five years, numerical modeling of microsensors and microstructures has gradually been developed as a field of microelectromechanical system(MEMS) design process. In this paper, we study some of the micromachining processes of single crystal silicon(SCS) for the microaccelerometer, and their subsequent processes which might affect thermal and mechanical loads. The finite element method(FEM) has been a standard numerical modeling technique extensively utilized in structural engineering discipline for component design of microaccelerometer. Temperature rise sufficiently low at the suspended beams. Instead, larger temperature gradient can be seen at the bottom of paddle part. The center of paddle part becomes about 5~2$0^{\circ}C$ higher than the corner of paddle and suspended beam edges.

• 한국전산유체공학회:학술대회논문집
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• 2004.03a
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• pp.126-131
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• 2004

The interaction between the hypersonic free stream and the side jet flow at high altitudes is investigated by direct simulation Monte Carlo(DSMC) method. Since there is a great difference in density between the free stream and the side jet flow, the weighting factor technique which could control the number of simulation particles, is applied to calculate these two flows simultaneously. Chemical reactions are not considered in the calculation. For validation, the corner flow passing between a pair of plates that are perpendicularly attached is solved. The side jet flow is then injected into this comer flow and solution is found for the merged flow. Results are compared with the experiments. For a more realistic rocket model, the flow past a blunted cone cylinder shape is solved. The leeward or windward jet injection is merged with this flow. The effect on the rocket surface is observed at various flow angles. The lambda effect and the wake structure are found like low attitudes. High interaction between the free stream and the side jet flow is observed when the side jet is injected in the windward direction.

• Journal of Nutrition and Health
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• v.35 no.7
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• pp.791-799
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• 2002

The performance of educational program for preventive nutrition is more beneficial for children than for the adults based on the cost reduction and the effect of this education. Also children's education helps them to grow and to live as a healthy adult. The purpose of this study is to solve the nutritional problem in children by developing nutrition education program for children and correct their nutritional problems. The characteristics of this program (www.food79.net) are the customized program for grade level based on the level of learning ability, the various education method such as game, cooking practice, and quiz, animation, and the self educated method by managing children's meal management as the result. The contents of this site are constructed not only for children but also for parents, the teachers and the school dietitians to increasing educational effect. The children room consists of food tower, nutrition kingdom, calculation of obesity index, food information, nutrient exploration, cooking world, and evaluation of dietary life. In the room for dietitian and teachers include the contents of the easy gymnastics, nutrition counseling methods, the teaching plans for nutrition education, and the information interchange corner. The third room for parents is constructed of nutrition evaluation, food 114, correction of living habits, and free discussion. Through this site, we are expecting to contribute to national health promotion by correcting the food habits of children.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.6 no.3
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• pp.17-25
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• 1997

This paper aims to clarify the effects of grinding conditions on the grinding force, ground surface and chipping size of workpiece in surface grinding of various ferrites with the resin bond diamond wheel. The main conclusions obtained were as follows: In a constant peripheral wheel speed, the specific grinding energy is fitted by straight lines with grinding depth coefficient($\delta$) in a logarithmic graph. The effect of both depth of cut and workpiece speed on grinding energy becomes larger in the order of Mn-Zn, Cu-Ni-Zn and Sr. When using the diamond grain of the lower toughness, the roughness of the ground surface becomes lower. The ground surfaces show that the fracture process during grinding becomes more brittle in the order of Sr, Mn-Zn and Cu-Ni-Zn. The chipping size at the corner of workpiece in grinding increases with the the increases of the depth of cut and workpiece speed, and the decrease of peripheral wheel speed. The effect of both depth of cut and workpiece speed on chipping size becomes more larger in the order of Sr, Mn-Zn and Cu-Ni-Zn.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.457-458
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• 2006

A method for obtaining smooth, jerk bounded feed rate profile in high speed machining has been developed. This study proposes a NURBS interpolator based on adaptive feed rate control with a well developed look ahead algorithm which takes into account the machining dynamics as well. Limitation of jerk and proportional torque rate result in smoothened loads on the machine which effectively reduces excitation of the resonant frequencies of the machine. It is found that the values of the feed rate of the down stream sharp corner have profound effect on the feed rate of the upstream sharp corners. By using a windowing scheme the feed rate profile obtained after look ahead method is re-interpolated to reduce the jerk related problems. This is compared with the adaptive NURBS interpolator to show the effectiveness of the proposed method. Simulation results indicate that the consideration of 'ripple effect' is important in avoiding jerk and thereby increasing the machining accuracy.

• Transactions of Materials Processing
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• v.17 no.1
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• pp.13-18
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• 2008

Mg and Mg alloys are promising materials for light weight high strength applications. In this paper, grain refinement of pure Mg using severe plastic deformation was tried to enhance the mechanical properties of the hard-to-deform metallic material. The microstructure and the mechanical properties of Mg processed by equal channel angular pressing(ECAP) at various processing temperatures were investigated experimentally. ECAP with channel angle of $90^{\circ}$ and corner angle of $0^{\circ}$ was successful at $300^{\circ}C$ without fracture of the samples during the processing. The hardness of the ECAP processed Mg decreased with increasing ECAP processing temperature. The effect of temperature on the hardness and microstructure of the ECAP processed Mg were explained by the dislocation glide in the basal plane and non-basal slip systems and by the dynamic recrystallization and recovery.

• Journal of the Semiconductor & Display Technology
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• v.14 no.3
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• pp.7-11
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• 2015

In order to protect the patterned mask from contamination during lithography process, pellicle has become a critical component for Extreme Ultraviolet (EUV) lithography technology. According to EUV pellicle requirements, the pellicle should have high EUV transmittance and robust mechanical property. In this study, silicon nitride, which is well-known for its remarkable mechanical property, was used as a pellicle membrane material to achieve high EUV transmittance. Since long silicon wet etching process time aggravates notching effect causing stress concentration on the edge or corner of etched structure, the remaining membrane is prone to fracture at the end of etch process. To overcome this notching effect and attain high transmittance, we began preparing a rather thick (200 nm) $SiN_x$ membrane which can be stably manufactured and was thinned into 43 nm thickness with HF wet etching process. The measured EUV transmittance shows similar values to the simulated result. Therefore, the result shows possibilities of HF thinning processes for $SiN_x$ EUV pellicle fabrication.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2008.03a
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• pp.143-149
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• 2008

A numerical study was performed for a vane of a compressor with a high-turning angle and meridional divergence. At first, the effect of the suction position was discussed. Then, the optimal suction position was applied to the cascades with the aspect ratio of 2.53 and 0.3, respectively, to get the knowledge of the effect of the endwall boundary layer removal on the secondary flow along the blade height. At last, using the critical principles of the three-dimensional separation, the topological structures of the flow patterns of the body surfaces and the separation configurations were discussed in detail. The results show that the largest reduction of the total loss can be achieved when the suction slot is near the suction side. The topological structure as well as the separation configuration varies due to boundary layer removal, which restrains the flow separation at the corner and delays or depresses the separation on the suction surface. Compared with the original cascade, the cascade with the endwall boundary layer removal has a higher blade loading along the most span. Furthermore the flow loss decreases and distributes uniformly along the span.