반도체 클린룸용 증기가습 및 수분무가습 외기공조시스템의 에너지소비량 비교연구 (Comparative Study on Energy Consumption in Steam-Humidification- and Water-Spray-Humidification-Type Outdoor Air-Conditioning Systems for Semiconductor Manufacturing Clean Rooms)
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- 대한기계학회논문집B
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- 제35권12호
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- pp.1249-1255
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- 2011