Vibration reduction control of 2-D nano scanner with displacement amplifier mechanism driven by PZT for scanning probe microscopy (SPM) (Command compensation filter를 이용한 scanning probe microscopy용 PZT구동 2축 나노 스캐너의 진동제어)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 2009.06a
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- pp.529-530
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- 2009