• 제목/요약/키워드: contamination materials

검색결과 724건 처리시간 0.027초

A Control Algorithm for Wafer Edge Exposure Process

  • Park, Hong-Lae;Joon Lyou
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2002년도 ICCAS
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    • pp.55.4-55
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    • 2002
  • In the semiconductor fabrication, particle contamination is wide-spread and one of major causes to yield loss. Extensive testing has revealed that even careful handling of wafers during processing may cause photo-resist materials to flake off wafer edges. So, to remove the photo-resist at the outer 5mm of wafers, UV(Ultraviolet) rays are exposed. WEE (Wafer Edge Exposure) process station is the system that exposes the wafer edge as prespecified by controlling the positioning mechanism and maintaining the light intensity level In this work, WEE process station has been designed so as to significantly lower the amount of particle contamination which occurs even during the most r...

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동적인 전기장이 다마신 구리 배선에서의 절연파괴에 미치는 영향 (Effect of Dynamic Electric Fields on Dielectric Reliability in Cu Damascene Interconnects)

  • 연한울;송준영;임승민;배장용;황유철;주영창
    • 마이크로전자및패키징학회지
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    • 제21권4호
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    • pp.111-115
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    • 2014
  • 다마신 구리 배선에서의 동적인 전기장에 따른 절연체 파괴거동을 연구하였다. DC, 단극성, 및 이극성 펄스 조건 중에서 절연체의 수명은 이극성 펄스 조건에서 가장 길었다. DC 및 단극성 펄스 조건에서는 절연체에 가해지는 전기장의 방향이 바뀌지 않지만 이극성 펄스 조건에서는 전기장의 방향이 반복적으로 180도 바뀌기 때문에, 이극성 펄스 조건에서는 절연체의 구리오염이 억제되고, 이로 인해서 절연체 수명이 이극성 펄스 조건에서 가장 긴 것으로 판단된다. 단극성 펄스 조건에서 펄스 주파수가 커질수록 DC 조건보다 절연체의 수명이 증가하였다. 이는 절연체 수명에 구리오염 뿐만 아니라 내재적인 절연파괴현상이 상당한 영향을 미치며, 절연체 분자결합파괴가 일어날 확률은 펄스 폭이 좁아질수록 감소한다고 판단된다.

누룽지 생산시설에 대한 미생물학적 오염도 평가 (Evaluation of the Level of microbial Contamination in the Processing Company of Nuroong-ji)

  • 도윤호;최정식;정유경;박지현;노경환;김성수;최신영;이경윤;한의정
    • 한국식품위생안전성학회지
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    • 제25권4호
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    • pp.333-340
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    • 2010
  • 누룽지 제조시설에서 공중낙하균, 작업장 내 시설 및 환경, 제조 종사자, 제조기기 및 주변기구, 원재료, 제조공정별 미생물학적 위해도를 조사하였다. 오염도는 취급하는 재료의 종류와 처리공간의 용도에 따라 차이가 있었다. 원재료를 비롯한 설비와 기구들의 오염은 심각하지 않은 상태이지만 교차오염에 주의할 필요가 있다. 또한 사람의 간섭도가 높은 공정에서 상대적으로 높은 오염도를 나타나 개인위생관리가 중요하다. 누룽지의 제조 공정 중 굽기공정($120{\sim}170^{\circ}C$, 약 10여분)에 의해서 미생물을 억제시킬 수 있기 때문에 굽기공정을 표준화하고 이와 관련된 기구 및 시설에 대한 철저한 관리가 필요하다. 중소규모 식품제조시설에서 미생물학적 오염도 관리를 위해서는 위생시설의 확충도 중요하지만 종사자의 위생에 대한 인식수준을 향상시키는 것이 가장 중요할 것으로 생각된다.

Significant Parameters for Assessing Soil Contaminant-Leaching to Groundwater and Determining Soil Sample Size in Field Survey

  • Jeong, Seung-Woo;An, Youn-Joo
    • Environmental Engineering Research
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    • 제13권2호
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    • pp.73-78
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    • 2008
  • For a given soil-contaminated site, a level of soil contamination is characterized and decisions on risk may be made from the risk assessment. The study evaluated critical design factors for the determination of sample size in the sampling design plan and the assessment of soil contaminant- leaching to groundwater. Two variables, the minimum relative detectable difference (T) and coefficient of variation (CV) were evaluated for the sample size determination. The minimum number of samples can be appropriately determined by CV under a T value greater than or equal to 0.2. Soil-contaminant leaching to groundwater was evaluated by using the Soil Screening Level equation of U.S. Environmental Protection Agency and the Risk Based Screening Level equation of American Society for Testing and Materials, with the same input parameters. The groundwater concentrations estimated from soil contaminant concentrations were significantly affected by the Darcy velocity of groundwater and the organic content of soil.

Surimi-Based Imitation Crab의 가공공정에 대한 위해미생물 분석 (Analysis of Hazardous Microbes on the Processing of Surimi-Based Imitation Crab)

  • 김창남;천석조;노우섭;오두환
    • 한국식품위생안전성학회지
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    • 제12권4호
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    • pp.346-353
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    • 1997
  • This study was undertaken to find out distribution and contamination sources of hazardous microbes through microbial hazard analysis on the processing steps of surimi-based imitation crab (SBIC). As a results of ananlysis of 9 hazardous microbes for 16 raw materials and 8 processing steps, no Samonella spp. and Escherichia coli were detected in all samples. Level and distribution of hazardous microbes in mixed color were similar to those of surimi. Changes of aerobic plate counts (APC), psychrotropic bacteria, coliforms, Staphylococcus aureus and Vibrio parahaemolyticus showed similar trends at different processing steps. Thermotrophic bacteria and aerobic sporeformers were not detected until mixing step and feeding step, respectively and not reduced after cooking step. According to the comparison of APC at each step, it was suggested that surimi, workers and silent cutter at mixing step, and mixed color, workers and bundler at packaging step were the major contamination sources of bacteria.

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Strong Red Photoluminescence from Nano-porous Silicon Formed on Fe-Contaminated Silicon Substrate

  • Kim, Dong-Lyeul;Lee, Dong-Yul;Bae, In-Ho
    • Transactions on Electrical and Electronic Materials
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    • 제5권5호
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    • pp.194-198
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    • 2004
  • The influences of the deep-level concentration of p-type Si substrates on the optical properties of nano-porous silicon (PS) are investigated by deep level transient spectroscopy (DLTS) and photoluminescence (PL). Utilizing a Si substrate with Fe contaminations significantly enhanced the PL intensity of PS. All the PS samples formed on Fe-contaminated silicon substrates had stronger PL yield than that of reference PS without any intentional Fe contamination but the emission peak is not significantly changed. For the PS 1000 sample with Fe contamination of 1,000 ppb, the maximum PL intensity showed about ten times stronger PL than that of the reference PS sample. From PL and DLTS results, the PL efficiency strongly depends on the Fe-related trap concentration in Si substrates.

오염입자가 Picoslider의 헤드-디스크 인테페이스 마찰 마모에 미치는 영향 (Effect of Particulate Contamination on the Friction and Wear of Head-Disk Interface with Picoslider)

  • 윤의성
    • Tribology and Lubricants
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    • 제16권5호
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    • pp.395-402
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    • 2000
  • The effect of particulate contamination on friction and wear between a negative-pressure picoslider and a laser-textured disk was studied. Particles of different concentrations, materials and sizes were injected to the head-disk interface (HDI), consisting of disks with various textures, at the same speed. In a contaminated environment, durability of head-disk interface gradually decreased as the particle concentration increased. Large particles caused HDI failure early and resulted in an extensive damage to the slider and disk surfaces. Hard particles also caused HDI failure earlier and damages more extensive than soft ones. Based on the test results, mechanisms of HDI failure with picoslider were presented.

입자 구형도에 따른 레이저 선가공의 비구형 흄 마이크로 입자 산포 특성 연구 (Dispersion Characteristics of Nonspherical Fume Micro-Particles in Laser Line Machining in Terms of Particle Sphericity)

  • 김경진;박중윤
    • 반도체디스플레이기술학회지
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    • 제21권2호
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    • pp.1-6
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    • 2022
  • This computational investigation of micro-sized particle dispersion concerns the fume particle contamination over target surface in high-precision laser line machining process of semiconductor and display device materials. Employing the random sampling based on probabilistic fume particle generation distributions, the effects of sphericity for nonspherical fume particles are analyzed for the fume particle dispersion and contamination near the laser machining line. The drag coefficient correlation for nonspherical particles in a low Reynolds number regime is selected and utilized for particle trajectory simulations after drag model validation. When compared to the corresponding results by the assumption of spherical fume particles, the sphericity of nonspherical fume particles show much less dispersion and contamination characteristics and it also significantly affects the particle removal rate in a suction air flow patterns.

CHARACTERIZATION AND STABILIZATION OF WASTE DUSTS FROM SHREDDED AUTOMOBILES INDUSTRIES

  • Takashi, Furuyama;Abel, Bissombolo;Sukeyuki, Mori;Masamichi, Hata;Yoshitsugu, Koga;Tetsuo, Ikejiri
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2001년도 The 6th International Symposium of East Asian Resources Recycling Technology
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    • pp.699-704
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    • 2001
  • Until recently, disposal to landfill has been the most convenient way to deal with the increasing amount of residues the shredding industries produce. But the shortage of such disposal sites and the risk that liquid drained from these waste dusts may pollute ground water have increased the environmental pressures to find more effective solutions. The present study is an alternative approach that suggests identifying waste dusts characteristics and selecting an appropriate binder for hazardous materials to reduce the amount of contaminants (mainly lead) that were leaking into the soil. Investigations on the characteristics of automobiles waste dusts show that these materials are composed mainly of cottons and sponge like substances, plastics, rubber, glasses and gravel, metals, and electric wires. Besides, the percentage in weight of organic (inflammable) materials is about 70% and the lead contamination, which has not a ionic but a particulate nature, is particularly remarkable in cottons and sponge like materials. Binding additives such as K-20 and sodium carbonate were not effective but the addition of 5 % of cement (in weight of the investigated sample) followed by a 3-minute stirring and a 4-hour storage could drastically reduce the run off of lead below the maximum authorized level. No addition of water was necessary in this method.

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빙과류의 미생물학적 위해요소에 대한 노출평가 (Exposure Assessment of Microbiological Risk Factors from Edible Ices)

  • 김태웅;최재호;박경진;오덕환
    • 한국식품위생안전성학회지
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    • 제24권3호
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    • pp.226-231
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    • 2009
  • 본 연구는 위해 미생물에 대한 빙과류의 오염수준 모니터링 결과를 바탕으로 미생물 위해평가(Microbial risk assessment : MRA)를 적용하여 노출정도를 평가하였다. 그 결과 원재료에서 S. aureus 균의 오염수준이 높았으며 살균 전 혼합액에서는 오염수준이 더욱 증가한 것으로 나타났으나 살균 후 혼합액에서는 오염 수준이 현저하게 감소하는 것으로 나타났다 한편 최종 냉동 저장된 빙과류에서의 오염수준은 초기의 원재료 오염수준보다 약간 더 감소하는 것으로 나타났다. 최종적으로 빙과류의 위해성 평가 결과, 빙과류를 1일 동안 1인이 섭취하였을 때 평균적으로 식중독에 걸릴 가능성은 최소 $5.89{\times}10^{-7}$, 최대 $5.01{\times}10^{-5}$의 발생가능성을 제시할 수 있다. 하지만 좀 더 현실적인 위해 수준을 추정하기 위해서는 빙과류의 섭취량, dose-response model(양-반응 모델) 등에 연구가 이루어져야 할 것이다.