• Korean Journal of Materials Research
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• v.14 no.10
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• pp.688-695
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• 2004

The capacitor contact barrier(CCB) layers have been introduced in the FeRAM integration to prevent the Pt/Al reaction during the back-end processes. Therefore, the interdiffusion and intermetallic formation in $Pt(1500{\AA})/Al(3000{\AA})$ film stacks were investigated over the annealing temperature range of $100\sim500^{\circ}C$. The interdiffusion in Pt/Al interface started at $300^{\circ}C$ and the stack was completlely intermixed after annealing over $400^{\circ}C$ in nitrogen ambient for 1 hour. Both XRD and SBM analyses revealed that the Pt/Al interdiffusion formed a single phase of $RtAl_2$ intermetallic compound. On the other hand, in the presence of TiN($1000{\AA}$) barrier layer at the Pt/Al interface, the intermetallic formation was completely suppressed even after the annealing at $500^{\circ}C$. These were in good agreement with the predicted effect of the TiN diffusion barrier layer. But the conventional TiN CCB layer could not perfectly block the Pt/Al reaction during the back-end processes of the FeRAM integration with the maximum annealing temperature of $420^{\circ}C$. The difference in the TiN barrier properties could be explained by the voids generated on the Pt electrode surface during the integration. The voids were acted as the starting point of the Pt/Al reaction in real FeRAM structure.

• Korean Journal of Materials Research
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• v.15 no.3
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• pp.202-208
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• 2005

The surface states of gate dielectrics affect device performance severely in Pentacene OTFTs. We have fabricated organic thin-film transistors (OTFTs) using pentacene as an active layer with chemically modified $SiO_2$ gate dielectrics. The effects of the surface treatment of $SiO_2$ on the electric characteristics of OTFTS were investigated. The surface of $SiO_2$ gate dielectric was treated by normal wet cleaning process, $O_2-plasma$ treatment, hexamethyldisilazane (HMDS), and octadecyltrichlorosilane (OTS) treatment. After the surface treatments, the contact angles and surface free energies were measured in order to analyze the surface state changes. In the electrical measurements, typical I-V characteristics of TFTs were observed. The field effect mobility, $\mu$, was calculated to be $0.29\;cm^2V^{-1}s^{-1}$ for OTS treated sample while those for the HMDS, $O_2$ plasma treated, and wet-cleaned samples were 0.16, 0.1, and $0.04\;cm^2V^{-1}s^{-1}$, respectively.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.20 no.2
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• pp.101-105
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• 2010

Silicon electrode and ring in a plasma etcher those are in contact with harsh plasma suffer from periodic heating and cooling during their lifetime. This causes the silicon components failure due to thermal stress remaining the persistent slip bands (PSBs) on their surfaces. The factors that determine the lifetime of silicon electrode and ring were discussed with respect to silicon ingot. The impurity level and the average defect concentration measured with glow discharge mass spectrometer (GDMS) and microwave photo-conductance decay (${\mu}$-PCD) were compared with the grade of silicon ingots those are divided to slip-free and slip-allowed ingot. Some silp-allowed samples showed planar defects along <110> direction on {001} surface. The role of these defects was suggested from the viewpoint of the lifetime of silicon components.

• International Commerce and Information Review
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• v.12 no.3
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• pp.391-412
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• 2010

As traditional import regulations have decreased all over the world in recent decades, the usage of "unconventional" trade protection measures has grown in the developing countries. In particular, antidumping investigations have risen rapidly and have growing in India and China. Therefore, this thesis aims to provide countermeasures to our government and Korean exporting companies by studying characteristics of antidumping. India is one of the most frequent initiators of antidumping cases by protecting their industries and impeding imports from FTA. This year, economic exchanges of Korea and India will be increasing by the conclusion of CEPA. This will lead to the increase of dispute by import regulations. Under such circumstances, to decrease Indian antidumping cases Korea will respond as follows. i)If antidumping laws, system and practice of India have injustice or are different from WTO rules, our government will have to indicate injustice and actively urge Indian government to make corrections. For example, they are continuous bilateral contact about the problems, fallacy of calculation of dumping margin, and intense investigations into cause and effect relationship and losses in dumping market, ect. ii)Our government should give more support to the small and medium exporting company which have difficulties in dealing with trade conflicts, counseling, arbitrating a lawyer. iii)Our government which is in control of domestic trade relief system should strengthen its investigation ability about new regulations and moniter import regulations of India. Over the long time, Korean companies need to export competitive advantage items of a higher value-added business and build solidarity by technology transfer. Accordingly, that will result in the decrease of trade dispute in India.

• Journal of the Microelectronics and Packaging Society
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• v.18 no.4
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• pp.27-32
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• 2011

Tin nanoparticles were synthesized at room temperature by a compulsive reduction reaction using tin(II) acetate and tin(II) chloride precursors. When an identical amount (0.015 g) of polyvinyl pyrrolidone (PVP) was added, it was concluded that the probability of abnormally big particles forming increased with an increase in PVP molecular weight, resulting in the wide distribution of Sn nanoparticles. Differential scanning calorimetry measurements were carried out using diethylene glycol solution containing synthesized tin nanoparticles. When the population of specific particles with sizes below 35 nm was adequate, the melting point depression peaks of tin nanoparticles corresponding to the specific size were observed besides an evaporation endothermic peak of DEG during the first heating. Because DEG was evaporated and tin nanoparticles in contact became molten and coarsened during the first heating, a melting peak of bulk tin was only observed at $232^{\circ}C$ during the second heating.

• Journal of the Microelectronics and Packaging Society
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• v.27 no.3
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• pp.83-88
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• 2020

The evolution of smartphones has led to numerous researches in the mechanical behavior of flexible devices. Due to the nano-size of the thin flexible film, nanoindentation is widely used to evaluate its mechanical behaviors, such as elastic modulus, and hardness. However, the commonly used Oliver-Pharr method is not suited for analyzing the indentation force-depth curves of hard films on soft substrates, as the effects of soft substrate is not considered theoretically. In this study, the elastic modulus of the thin film was evaluated with references to other reported models which include the substrate effect, and with calibration of the indentation depth for the pile-ups between the indenter and test surface. We fabricated test samples by deposition of amorphous metal film on polyimide and silicon wafers for verification of modified models.

• Bulletin of the Korean Chemical Society
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• v.28 no.12
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• pp.2396-2400
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• 2007

Transparent In-doped (1 at.%) zinc oxide (IZO) thin films are deposited by pulsed DC magnetron sputtering with H2 mixed Ar atmosphere on glass substrate without any heating process. Even at room temperature, highly c-axis oriented IZO thin films were grown in perpendicular to the substrate. The hydrogenated IZO (IZO:H) film isolated in H2 atmosphere for 30 min exhibited an average optical transmittance higher than 85% and low electrical resistivity of less than 2.7 × 10?3 Ω·cm. These values are comparable with those of commercially available ITO. Each of the IZO films was used as an anode contact to fabricate organic light-emitting diodes (OLEDs) and the device performances studied. At the current density of 1 × 103 A/m2, the OLEDs with IZO:H (H2) anode show excellent efficiency (11 V drive voltage) and a good brightness (8000 cd/m2) of the light emitted from the devices, which are as good as the control device built on a commercial ITO anode.

• Corrosion Science and Technology
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• v.14 no.4
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• pp.177-183
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• 2015

Prestressed Concrete steel Cylinder Pipe (PCCP) is extensively used as seawater pipes for cooling in nuclear power plants. The internal surface of PCCP is exposed to seawater, while the external surface is in direct contact with underground soil. Therefore, materials and strategies that would reduce the corrosion of its cylindrical steel body and external steel wiring need to be employed. To prevent against the failure of PCCP, operators provided a cathodic protection to the pre-stressing wires. The efficiency of cathodic protection is governed by the anodic performance of the system. A mixed metal oxide (MMO) electrode was developed to meet criteria of low over potential and high corrosion resistance. Increasing coating cycles improved the performance of the anode, but cycling should be minimized due to high materials cost. In this work, the effects of $RuCl_3$ concentration on the electrochemical properties and lifespan of MMO anode were evaluated. With increasing concentration of $RuCl_3$, the oxygen evolution potential lowered and polarization resistance were also reduced but demonstrated an increase in passive current density and oxygen evolution current density. To improve the electrochemical properties of the MMO anode, $RuCl_3$ concentration was increased. As a result, the number of required coating cycles were reduced substantially and the MMO anode achieved an excellent lifespan of over 80 years. Thus, we concluded that the relationship between $RuCl_3$ concentration and coating cycles can be summarized as follows: No. of coating cycle = 0.48*[$RuCl_3$ concentration, $M]^{-0.97}$.

• The Journal of Korean Academy of Prosthodontics
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• v.46 no.3
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• pp.227-237
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• 2008

STATEMENT OF PROBLEM: Zirconium oxide can be a substitute to titanium as implant materials to solve the esthetic problems of dark color in the gingival portion of implant restorations. PURPOSE: This study was performed to define attachment and growth behavior of osteoblast- like cells cultured on grooved surfaces of zirconium oxide and evaluate the genetic effect of zirconium oxide surfaces using the reverse transcriptase-polymerase chain reaction (RT-PCR). MATERIAL AND METHODS: MC3T3-E1 cells were cultured on (1) commercially pure titanium discs with smooth surface (T group), (2) yttrium-stabilized tetragonal zirconia polycrystal (Y-TZP) with machined surface (ZS group), and (3) Y-TZP with $100{\mu}m$ grooves (ZG group). Cell proliferation activity was evaluated through MTT assay and cell morphology was examined by SEM. The mRNA expression of Runx2, alkaline phosphatase, osteocalcin, TGF-${\beta}1$, IGF-1, G3PDH in E1 cells were evaluated by RT-PCR. RESULTS: From the MTT assay, after 48 hours of adhesion of MC3T3-E1 cells, the mean optical density value of T group and ZG group significantly increased compared to the ZS group. SEM images of osteoblast-like cells showed that significantly more cells were observed to attach to the grooves and appeared to follow the direction of the grooves. After 24 hours of cell adhesion, more spreading and flattening of cells with active filopodia formation occurred. Results of RT-PCR suggest that T group, ZS group, and ZG group showed comparable osteoblast-specific gene expression after 24 hours of cell incubation. CONCLUSION: Surface topography and material of implants can play an important role in expression of osteoblast phenotype markers. Zirconia ceramic showed comparable biological responses of osteoblast-like cells with titanium during a short-time cell culture period. Also, grooves influence cell spreading and guide the cells to be aligned within surface grooves.

• The Journal of Advanced Prosthodontics
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• v.10 no.3
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• pp.197-204
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• 2018

PURPOSE. To determine the extent of treatment traces, the roughness depth, and the quantity of titanium nitride (TiN) removed from the surface of CAD/CAM abutments after treatment with various instruments. MATERIALS AND METHODS. Twelve TiN coated CAD/CAM abutments were investigated for an in vitro study. In the test group (9), each abutment surface was subjected twice (150 g vs. 200 g pressure) to standardized treatment in a simulated prophylaxis measure with the following instruments: acrylic scaler, titanium curette, and ultrasonic scaler with steel tip. Three abutments were used as control group. Average surface roughness (Sa) and developed interfacial area ratio (Sdr) of treated and untreated surfaces were measured with a profilometer. The extent of treatment traces were analyzed by scanning electron microscopy. RESULTS. Manipulation with ultrasonic scalers resulted in a significant increase of average surface roughness (Sa, P<.05) and developed interfacial area ratio (Sdr, P<.018). Variable contact pressure did not yield any statistically significant difference on Sa-values for all instruments (P=.8). Ultrasonic treatment resulted in pronounced surface traces and partially detachment of the TiN coating. While titanium curettes caused predominantly moderate treatment traces, no traces or detectable substance removal has been determined after manipulation with acrylic curettes. CONCLUSION. Inappropriate instruments during regular plaque control may have an adverse effect on the integrity of the TiN coating of CAD/CAM abutments. To prevent defects and an increased surface roughness at the transmucosal zone of TiN abutments, only acrylic scaling instruments can be recommended for regular maintenance care.