• Title/Summary/Keyword: constant angle

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CMP of BTO Thin Films using Mixed Abrasive slurry (연마제 첨가를 통한 BTO Film의 CMP)

  • Kim, Byeong-In;Lee, Gi-Sang;Park, Jeong-Gi;Jeong, Chang-Su;Gang, Yong-Cheol;Cha, In-Su;Jeong, Pan-Geom;Sin, Seong-Heon;Go, Pil-Ju;Lee, U-Seon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.05a
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    • pp.101-102
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    • 2006
  • BTO ($BaTiO_3$) thin film is one of the high dielectric materials for high-density dynamic random access memories (DRAMs) due to its relatively high dielectric constant, It is generally known that BTO film is difficult to be etched by plasma etching, but high etch rate with good selectivity to pattern mask was required. The problem of sidewall angle also still remained to be solved in plasma etching of BTO thin film. In this study, we first examined the patterning possibility of BTO film by chemical mechanical polishing (CMP) process instead of plasma etching. The sputtered BTO film on TEOS film as a stopper layer was polished by CMP process with the sell-developed $BaTiO_3$- and $TiO_2$-mixed abrasives slurries (MAS). respectively. The removal rate of BTO thin film using the $BaTiO_3$-mixed abrasive slurry ($BaTiO_3$-MAS) was higher than that using the $TiO_2$-mixed abrasive slurry ($TiO_2$-MAS) in the same concentrations. The maximum removal rate of BTO thin film was 848 nm/min with an addition of $BaTiO_3$ abrasive at the concentration of 3 wt%.

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Directional Characteristics of Sleeve-gun Arrays in Marine Seismic Survey (해양 탄성파 탐사에서 슬리브건 배열의 방향 특성)

  • Yoo, Hai-Soo;Yang, Sung-Jin
    • The Journal of the Acoustical Society of Korea
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    • v.15 no.1
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    • pp.71-80
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    • 1996
  • Characteristics of sleeve-gun arrays installed on the R/V Onnuri were analyzed and compared with survey data. In the case of cluster array, the beam width in the frequency range up to 814Hz is constant as $179.5^{\circ}$, and rapidly narrows in the frequency range of 814-1631Hz. However, in the case of long and wide arrays, as the frequency increases, the beamwidth decreases. The optimal frequency is 69Hz. the main lobe of vertical inclination has its maximum amplitude at phase angle $0^{\circ}$. The optimal frequency of cluster array which produces little side lobe is less than 1631Hz, and those of long and wide arrays are less than 108Hz. As a result, the cluster array produces a good source for high-resolution seismic survey, while the long and wide arrays are suitable for the survey of deep structures. The final high-resolution seismic section with cluster array was compared with that of long and wide arrays.

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Influence of Anisotropic Property Ratio of Orthotropic Material on Stress Components and Displacement Components at Crack tip Propagating with Constant Velocity Under Dynamic Mode I (동적모드 I 상태에서 직교 이방성체의 이방성비가 등속전파 균열선단의 응력성분과 변위성분에 미치는 영향)

  • 이광호;황재석;최선호
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.19 no.1
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    • pp.87-98
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    • 1995
  • When the crack in orthotropic material is propagating under dynamic model I load, influences of anisotropic property ratio $E_{L}$/ $E_{T}$ on stress and displacement around propagating crack tip are studied in this paper. When M<0.55 and .alpha.=90.deg.(.alpha.; the angle of fiber direction with crack propagating direction, M; crack propagation velocity/shear stress wave velocity), the influence of $E_{L}$/ $E_{T}$ on stress .sigma.$_{x}$, .sigma.$_{y}$, .tau.$_{xy}$ and .sigma.$_{\theta}$ is the greast on .sigma.$_{y}$. Except M<0.55 and .alpha.=90.deg., it is the greast on .sigma.$_{x}$ in any situation. Increasing $E_{L}$/ $E_{T}$, stress components are increased or decreased. When maximum stress is based, the stress .sigma.$_{x}$(.alpha.=90.deg.), .sigma.$_{y}$(.alpha.=0.deg.) and .tau.$_{xy}$ (.alpha.=90.deg.) are decreased with increment of $E_{L}$/ $E_{T}$ in M=0. any stresses except .sigma.$_{*}$x/(.alpha.=0.deg.) are decreased with increment of $E_{L}$/ $E_{T}$ in M=0.9. When .alpha.=90.deg., the influence of $E_{L}$/ $E_{T}$ on displacement U and V is V>U in any velocities of crack propagation, when .alpha.=0.deg., it is VU in M>0.75 and when $E_{L}$/ $E_{T}$ is increased, U and V are decreased in any conditions.sed in any conditions.tions.tions.tions.

Experimental Studies of Characteristics of Strength and Deformation Behaviour of Frozen and Cyclic Frozen-thawed Clayey Soils (동결 및 동결-융해작용을 받는 점성토의 강도와 그의 변형거동)

  • 유능환;유영선;유연택
    • Magazine of the Korean Society of Agricultural Engineers
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    • v.33 no.2
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    • pp.112-119
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    • 1991
  • Some experiments were carried out to investigate the effects of freezing and thawing on the strength and strain characteristics of alluvial silty clay under the different temperatures, loading and moisture conditions. The results were as follows; 1. The soil used was proved to be consisted of silty clay with honey-combed structure, and showed higher dilatancy, frost activity and lower stability in natural state. 2. Soil treated with freezing and thawing cycles showed lower compressive strength compared with the non treated, The strength decreased with incement of freezing and thawing cycles. It's shapes of stress-strain curves were flat and did not formulate a peak while the peak strength of higher moisture content soil decreased with the increment of moisture content. It's decrement ratio was most distinctly shown at the first one cycle of freezing and thawing. 3. The cohesion decreased due to freezing and thawing cycles but internal frcition angle was not changed. 4. The liquid limit decreased with increment of freezing and thawing cycles, and became almost constant after three cycles of freezing and thawing. 5. The strength under simple loading at failure mode was appeared to be higher compared with the cyclic loading after freezing and thawing but initial moisture content effect was not observed. 6. Ice lense was not observed within 50% of ice content ratio but observed over 100%. The higher the ice content ratio, the higher the peak strength. As a matter of fact, it seems that an optimum ice content ratio exists for plastic mode and the least compressive strength.

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Numerical Analysis on Radiative Heating of a Plume Base in Liquid Rocket Engine (플룸에 의한 액체로켓 저부면 복사 가열 해석)

  • Sohn Chae Hoon;Kim Young-Mog
    • Journal of the Korean Society of Propulsion Engineers
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    • v.9 no.3
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    • pp.85-91
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    • 2005
  • Radiative heating of a liquid rocket base plane due to plume emission is numerically investigated. Calculation of flow and temperature fields around rocket nozzle precedes and thereby realistic plume shape and temperature distribution inside the plume are obtained. Based on the calculated temperature field, radiative transfer equation is solved by discrete ordinate method. With the sample rocket plume, the averaged radiative heat flux reaching the base plane is calculated about 5 kw/m$^{2}$ at the flight altitude of 10.9 km. This value is small compared with radiative heat flux caused by constant-temperature (1500 K) plume emission, but it is not negligibly small. At higher. altitude (29.8km), view factor between the base plane and the exhaust plume is increased due to the increased expansion angle of the plume. Nevertheless, the radiative heating disappears since the base plane is heated to high temperature (above 1000 K due to convective heat transfer.

A Study on Course Stability in Accordance with Configuration of Ships (선형에 따른 선박의 침로 안정성에 관한 연구)

  • 권종호
    • Journal of the Korean Institute of Navigation
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    • v.10 no.2
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    • pp.97-114
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    • 1986
  • Ship's maneuverability is very important factor in safe ship handling and economical ship operation. Steering characteristics are consisted of course stability and maneuverability. Today in many advanced ship-building countries, they study ship's course stability, using model ship tests, such as straight line tests, rotating arm tests and Planar Motion Mechanism (PMM) etc., in tow in tanks. It is the purpose of this paper to provide ship's handlers with better understanding of steering characteristics and to help them in safe controlling and manevering . In this paper, the author simulated response of various vessels, running straight course with constant speed, and they are disturbed by small external disturbance of one degree yaw angle with no angular velocity . The author used the hydrodynamic derivtives resulted at tests of Davidson's laboratory in Stevens Institute of Technology, New Jersey, U.S.A. Course stability was evaluated and analyzed in various respects, such as block coefficient, ratio of ship's length to beam, draft and rudder area ratio etc. The obtained results are as follows : (1) The ship's course stability is affected by magnitude of block coefficient greatly. In case that the block coefficient is more than 0.7, the deviation varies at nearly same rate but the requistite time to reach the steady course is different. (2) The ship's course stability is affected by magnitude of L/B. When the dimensionless time reaches about 3, the deviation and requisite time to reach the steady course are influenced nearly same. After the dimensionless time is about 3, they change on invariable ratio. (3) The effect to course stability by L/T and RA' can be neglected. (4) The reason why thy VLCC and container feeder vessel are unstable on their course is that their block coefficient is generally more than 0.8 and the ratio of ship's length to beam is about 6.0.

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Ultra-wideband Antipodal Vivaldi Antenna with H-shaped Parasitic Patches (에이치(H)자 형태의 기생패치를 가진 초광대역 안티포달 비발디 안테나)

  • Jung, Dongkeun
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.21 no.9
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    • pp.1642-1648
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    • 2017
  • Ultra-wideband antennas are desired for several applications including satellite communications, radars, remote sensing system, telescopes, and microwave imaging systems. There are many types of wideband antenna structures, but the tapered slot Vivaldi antenna is advantageous in terms of cost, weight, scan angle capabilities, end-fire radiation, and ease of feeding and system integration. In this paper, a modified antipodal Vivaldi antenna is presented. A novel AVA with H-shaped parasitic patches has the capacity to improve the radiation characteristics in the whole operation frequencies. A prototype of the modified antenna with RT/duroid 5880 substrate of a relative dielectric constant (${\epsilon}_r$) of 2.2, and a thickness of 31mil is fabricated and experimentally studied as well. It measures a ${\mid}S_{11}{\mid}$ of less than -10dB and gain of 9-12dBi over 7.8-52.5GHz which shows reasonable agreement with the simulated one.

Development of Hybrid/Dual Jet Combustor for a MGT (Part I: Experimental Study on Geometric Optimization) (마이크로 가스터빈용 하이브리드/이중 선회제트 연소기 개발 (Part I: 형상 최적화를 위한 실험연구))

  • Park, Tae-Joon;Hwang, Cheol-Hong;Lee, Kee-Man
    • Journal of the Korean Society of Propulsion Engineers
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    • v.17 no.5
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    • pp.60-69
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    • 2013
  • An optimum configuration of the hybrid/dual swirl jet combustor for a micro-gas turbine was investigated experimentally. Location of pilot nozzle, angle and direction of swirler vane were varied systematically as main parameters under the conditions of constant thermal load. The results showed that the variation in locations of inner fuel nozzle and pilot burner resulted in significant change in flame shape and swirl intensity due to the changes in recirculating flow pattern and minimum flow area near burner exit, in particular, with the significant reduction of CO emission near lean-flammability limit. In addition, it was observed that the co-swirl configuration produced less CO and NOx emissions compared to the counter-swirl configuration.

Research on Thermal Performance by Different Fins in a Solar Air Heater (태양열 공기난방기에서 핀의 형상에 따른 열전달 성능 평가)

  • Choi, Hwi-Ung;Hong, Boo-Pyo;Yoon, Jung-In;Son, Chang-Hyo;Choi, Kwang-Hwan
    • Journal of the Korean Solar Energy Society
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    • v.33 no.6
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    • pp.85-91
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    • 2013
  • It is essential to reduce the amount of fossil fuel because facing with the natural problem such as a global warming. To achieve this goal, many of interests in the use of renewable energy is growing. Especially, as one of these renewable energy systems, a solar air heater invention has been conducted for enhancing the efficiency of solar air heater. According to this trend, scale-down sized experiment apparatus was constructed and performed for searching a proper fin and confirming the heat transfer performance by fin shape on constant heat condition to enhance efficiency of solar air heater. In this experiment, heat gain, convection heat transfer coefficient, number of transfer units, Nusselt number, Reynold's number, friction factor, performance factor were investigated in order to evaluate the thermal characteristics based on the real data obtained. By comparison with the each fin performance, a zigzag shape keeping a right angle to the plate had the highest value among them.

Epidermal Structure and Stomatal Types in Various Parts of Each Organ of Kalanchoe (Kalanchoe속의 기관 부위별 표피구조와 기공유형)

  • 정우규
    • Journal of Plant Biology
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    • v.30 no.2
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    • pp.79-94
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    • 1987
  • This study was carried out to investigate the epidermal structure, the stomatal types, the ontogeny of stomara in various parts of each organ of K. blossfeldiana, K. kewensis, and K. tometosa belonging to Kalanchoe. The epidermal cells were polygonal or isodiametric ones in the leaves, and mostly rectangular, tetragonal, and elongated ones in the leaves, and mostly rectangular, tetragonal, and elongated ones in the other organs. The candelabrum-like, triradiate stellete trichomes in the aerial parts of all organs of K. tomentosa were found. The cuticular striations and square crystals of calcium oxalate in the epidermal cells of petals of K. blossfeldiana were observed. The great majority of the mature stomata in various parts of all the organs were commonly helicocytic types. This type was subdivided into three subtypes such as parahelicocytic, anomohelicocytic, and dianisocytic stomata on the basis of the division angle of the guard mother cells. Somethies, the anisocytic type was found in most organs. This type was subdivided into three subtyes such as paranisocytic, nomoanisocytic, and dianisocytic stomata in the same way as the helicocytic type. A new stomataltype with anisocytic stoma within a girdle of four subsidiary cells of tetracytic type in the leaf of K. kewensis was firstly observed in the vascular plants. This type was termed the coaniso-tetracytic type. The anomomeristic pattern in the mesogenous category of stomatal types was found in various organs of all the material plants. Developmental mode of stomata was constant in all the parts of each organ within the same plant. The stomata was observed to be a few similar stomatal types in various parts of each organ within the same plant. The ontogeny of all the types is eumesogenous or mesogenous type. The ontogenetic type of stomata was mostly helico-eumesogenous type in all the organs of all the material plants. The mature stoma varied from organ to in regard of the number and arrangement of subsidiary cells.

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