• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.434-437
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• 2005

Chemical Mechanical Polishing (CMP) has become an essential step in the overall semiconductor wafer fabrication technology. In general, CMP is a surface planarization method in which a silicon wafer is rotated against a polishing pad in the presence of slurry under pressure. The polishing pad, generally a polyurethane-based material, consists of polymeric foam cell walls, which aid in removal of the reaction products at the wafer interface. It has been found that the material removal rate of any polishing pad decreases due to the so-called 'pad glazing' after several wafer lots have been processed. Therefore, the pad restoration and conditioning has become essential in CMP processes to keep the urethane polishing pad at the proper friction coefficient and to allow effective slurry transport to the wafer surface. Diamond pad conditioner employs a single layer of brazed bonded diamond crystals. Due to the corrosive nature of the polishing slurry required in low pH metal CMP such as copper, it is essential to minimize the possibility of chemical interaction between very low pH slurry (pH <2) and the bond alloy. In this paper, we report an exceptional protective coated conditioner for in-situ pad conditioning in low pH Cu CMP process. The protective Cr-coated conditioner has been tested in slurry with pH levels as low as 1.5 without bond degradation.

• Research in Community and Public Health Nursing
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• v.18 no.2
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• pp.232-241
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• 2007

Purpose: The aim of this study was to explore the health-related quality of life of caregivers for demented elders. Method: The subjects of this study were 170 pairs of demented elders and their caregivers. Socio-demographic characteristics of the demented elders and the caregivers, Barthel index and SF-36 were used in this study. Data analysis procedure included t-test, ANOVA, Pearson correlation coefficient, and hierarchical multiple regression. Results: The score of overall health-related quality of life (HRQoL) was 288.62 in norm-based scoring. The major factors that affect HRQoL of the demented elders' caregivers were burden, the age of the caregiver, ADL and gender of the demented elder, and these factors explained 34.5% of HRQoL. Conclusion: The factors significantly affecting the caregivers' HRQoL were burden, the age of the caregiver and ADL. The effective social support system should be considered in respective nursing interventions to decrease the level of burden and to increase HRQoL in demented elders' caregivers. Further studies and efforts will be needed to investigate preceding factors of burden and HRQoL.

• Journal of Electrical Engineering and Technology
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• v.3 no.1
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• pp.88-93
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• 2008

The electromagnetic parameters of a permanent magnet synchronous motor (PMSM) such as the open load permanent magnet flux, d axis reactance $X_d$, and q axis reactance $X_q$, are most essential to the performance analysis and optimization design of the motor. Based on the numerical analysis of the 3D electromagnetic field, the three electromagnetic parameters of permanent magnet synchronous motors with U form interior rotor structures are calculated by FEA. The rules of the leakage coefficient and reactance parameters changing with the air gap length, permanent magnet magnetism length, and isolation magnetic bridge dimensions in the rotor are given. The calculated values agree well with the measured values. The FEA results are integrated with the self compiled electromagnetic design program to optimize the prototype motor. The tested performances of the prototype motor prove that the method is suitable for the optimization of motor structure.

• Journal of Korean Ophthalmic Optics Society
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• v.12 no.1
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• pp.85-90
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• 2007

We deposited thin films of ZnS(Zinc Sulphide), in which was used antireflection coating material of glasses-lens on silicon and slide-glass substrates using spin coating method, and measured spectra of ellipsometry angles ${\Delta}$ and ${\Psi}$ in the photon-energy range of 1.5~5.0 eV using a variable angle spectroscopic ellipsometer. The optical constants, refractive index and extinction coefficient, of ZnS were determined via the dispersion parameters extracted from the curve-fitting process based on Jellison-Modine dispersion function.

• Journal of Microbiology and Biotechnology
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• v.11 no.6
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• pp.1055-1060
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• 2001

Experimental data for the on-line estimation of cell concentration and growth rate are presented. For this purpose, we utilized the on-line calculation of the oxygen uptake rate (OUR), which was derived from a liquid phase dynamic mass balance for the oxygen during the active growth phase in cyclosporin A (CyA) fermentation. The cell yield coefficient, based on the oxygen $(Y_{x/o})$for both suspended and immobilized cells of Tolypocladium inflatum, was estimated as $1.9 gDCW/gO_2$ from a very good linear correlation between the cell mass produced and the total oxygen consumed. The calculated yield showed a good agreement with the value of $(Y_{x/o})$ generated from the correlation between the cell growth rate and the oxygen uptake rate. In addition, further experimental data are given, which were also applied to determine the specific oxygen uptake rate of T. inflatum cells during the exponential phase of CyA fermentation. A theoretical basis for the analysis of these fermentation parameters is also provided.

• Geomechanics and Engineering
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• v.8 no.6
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• pp.811-828
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• 2015

Proper modelling of the basal resistance terms is key in simulating the motion of fluidized granular flow. In this paper, standard depth-averaged governing equations of granular flow are used together with the classical Coulomb, Voellmy, and velocity dependent friction models (VDFM). A high-resolution modified TVDLF method is implemented to solve the partial differential equations without numerical oscillations. The effects of basal resistance terms on the motion of granular flows such as geometric shape evolution, travel times and final deposits are analyzed. Based on the numerical results, the predictions of the front and rear end positions and developing length of granular flow with Coulomb friction model show excellent agreements with experiment results reported by Hutter et al. (1995), and illustrate the validity of the numerical approach. For the Voellmy model, the higher value of turbulent coefficient than reality may obtain more reasonable predicted runout for the small-scale avalanche or granular flow. The energy exchange laws indicate that VDFM is different from the Coulomb and Voellmy models, although the flow characteristics of both three models fit the measurements and observations very well.

• Structural Engineering and Mechanics
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• v.68 no.2
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• pp.247-259
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• 2018

In this study (Part I), an advanced empirical formulation was proposed to predict the ultimate strength of initially deflected steel plate subjected to longitudinal compression. An advanced empirical formulation was proposed by adopting Initial Deflection Index (IDI) concept for plate element which is a function of plate slenderness ratio (${\beta}$) and coefficient of initial deflection. In case of initial deflection, buckling mode shape, which is mostly assumed type in the ships and offshore industry, was adopted. For the numerical simulation by ANSYS nonlinear finite element method (NLFEM), with a total of seven hundred 700 plate scenarios, including the combination of one hundred (100) cases of plate slenderness ratios with seven (7) representative initial deflection coefficients, were selected based on obtained probability density distributions of plate element from collected commercial ships. The obtained empirical formulation showed good agreement ($R^2=0.99$) with numerical simulation results. The obtained outcome with proposed procedure will be very useful in predicting the ultimate strength performance of plate element subjected to longitudinal compression.

• Structural Engineering and Mechanics
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• v.68 no.4
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• pp.459-473
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• 2018

Temperature fields and temperature deformations induced by time-varying solar radiation, shadow, and heat exchange are of great importance for the ride safety and quality of the maglev system. Accurate evaluations of their effects on the dynamic performances are necessary to avoid unexpected loss of service performance. This paper presents a numerical approach to determine temperature effects on the maglev train/guideway interaction system. Heat flux density and heat transfer coefficient of different components of a 25 m simply supported concrete guideway on Shanghai High-speed Maglev Commercial Operation Line is calculated, and an appropriate section mesh is used to consider the time-varying shadow on guideway surfaces. Based on the heat-stress coupled technology, temperature distributions and deformation fields of the guideway are then computed via Finite Element method. Combining guideway irregularities and thermal deformations as the external excitations, a numerical maglev train/guideway interaction model is proposed to analyze the temperature effect. The responses comparison including and excluding temperature effect indicates that the temperature deformation plays an important role in amplifying the response of a running maglev, and the parameter analysis results suggest that climatic and environmental factors significantly affect the temperature effects on the coupled maglev system.

• Proceedings of the Korean Society for Agricultural Machinery Conference
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• 1997.12a
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• pp.255-262
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• 1997

A low-cost and precise metering device, which is suitable to automatic mixing of nutrient-solution for hydroponic culture, was developed for small-scale growers. The metering device was composed of three parts those were supply pumps, metering cylinders and venturi tube. Those parts were controlled by personal computer with time-based odoff control method. To verify the performance of the developed metering device, the relationship between operating time and discharge was examined and the accuracy of the developed metering device was compared with commercial metering pumps. The results of this study are as follows. 1. The correlation coefficient between the flow rate and operating time was 0.9999, and the linear regression equation computed was y=21.759x, where y is the discharge(g) and x is the operating time(s). 2. The developed device has greater accuracy than commercial metering pumps in terms of the full-scale error. Calculated errors for the developed metering device and two commercial pump were $\pm$0.3 %, $\pm$2.45 % and $\pm$1.38 % respectively. 3. Above results show developed metering device is a useful tool for nutrient-solution control system.

• Journal of Biosystems Engineering
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• v.32 no.5
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• pp.332-338
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• 2007

Yield mapping is necessary for precision farming. An on-site rice weighing system for a head-feed combine was developed to measure the total weight of rice grain harvested while the combine was operated. A load cell system was used to monitor rice weights accumulated into the combine grain tank using a load cell. This method gave cumulative grain weight readings as a function of time. The system consisted of a load cell, two supporting brackets, and a computer-based data acquisition system. The weights measured with the system from two fields were compared with those obtained with a commercially available electronic balance. The response of the load cell to varying grain weights was linearly modeled, showing a coefficient of determination of 0.998 and a standard error of ${\pm}4.09kg$.