• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.04b
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• pp.39-42
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• 2000

As gate dimensions continue to shrink below $0.2{\mu}m$, improving CD (Critical Dimension) control has become a major challenge during CMOS process development. Anti-Reflective Coatings are widely used to overcome high substrate reflectivity at Deep UV wavelengths by canceling out these reflections. In this study, we have investigated Batchtype system for PECVO SiOxNy as Anti-Reflective Coatings. The Singletype system was baseline and Batchtype system was new process. The test structure of Singletype is SiON $250{\AA}$ + Cap Oxide $50{\AA}$ and Batchtype is SiON $250{\AA}$ + Cap Oxide $50{\AA}$ or N2O plasma treatment. Inorganic chemical vapor deposition SiOxNy layer has been qualified for bottom ARC on Poly+WSix layer, But, this test was practiced on the actual device structure of TiN/Al-Cu/TiN/Ti stacks. A former day, in Batchtype chamber thin oxide thickness control was difficult. In this test, Batchtype system is consist of six deposition station, and demanded 6th station plasma treatment kits for N2O treatment or Cap Oxide after SiON $250{\AA}$. Good reflectivity can be obtained by Cap Oxide rather than N2O plasma treatment and both system of PECVD SiOxNy ARC have good electrical properties.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.04a
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• pp.44-44
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• 2008

To date, rubbing has been widely used to align LC molecules uniformly. Although rubbing can be simple, it has fundamental problems such as the generation of defects by dust and static electricity, and difficulty in achieving a uniform LC alignment on a large substrate. Therefore, non contact alignment has been investigated. Ion beam induced alignment method, which provides controllability, nonstop process, and high resolution display. In this study, we investigated liquid crystal (LC) alignment with ion beam (IB) that non contact alignment technique on polyimide and electro-optical characteristics of twisted nematic (TN)-liquid crystal display (LCD) on the polyimide under various ion beam angles. In this experiment, Polyimide layer was coated on glass by spin-coating and Voltage-transmittance(VT) and response time characteristics of the TN cell were measured by a LCD evaluation system. The good characteristics of the nematic liquid crystal (NLC) alignment with the ion beam exposure polyimide surface was observed. The tilt angle of NLC on the PI surface with ion beam exposure can be measured under $1^{\circ}$ for all of irradiation angles. In addition, it can be achieved the good EO properties, and residual DC property of the ion beam aligned TN cell on polyimide surface.

• Journal of Ocean Engineering and Technology
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• v.25 no.6
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• pp.60-65
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• 2011

A low temperature plasma carburizing process was performed on AISI 316L austenitic stainless steel to achieve an enhancement of the surface hardness without degradation of its corrosion resistance. Attempts were made to investigate the influence of the processing temperatures on the surface hardened layer during low temperature plasma carburizing in order to obtain the optimum processing conditions. The expanded austenite (${\gamma}_c$) phase, which contains a high saturation of carbon (S phase), was formed on all of the treated surfaces. Precipitates of chromium carbides were detected in the hardened layer (C-enriched layer) only for the specimen treated at $550^{\circ}C$. The hardened layer thickness of ${\gamma}_c$ increased up to about $65{\mu}m$ with increasing treatment temperature. The surface hardness reached about 900 $HK_{0.05}$, which is about 4 times higher than that of the untreated sample (250 $HK_{0.05}$). A minor loss in corrosion resistance was observed for the specimens treated at temperatures of $300^{\circ}C{\sim}450^{\circ}C$ compared with untreated austenitic stainless steel. In particular, the precipitation of chromium carbides at $550^{\circ}C$ led to a significant decrease in the corrosion resistance. A diamond-like carbon (DLC) film coating was applied to improve the wear and friction properties of the S phase layer. The DLC film showed a low and stable friction coefficient value of about 0.1 compared with that of the carburized surface (about 0.45). The hardness and corrosion resistance of the S phase layer were further improved by the application of such a DLC film.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.31 no.3
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• pp.129-134
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• 2018

Herein, we report the manufacture of high-performance, ambipolar organic field-effect transistors (OFETs) and complementary-like electronic circuitry based on a blended, polymeric, semiconducting film. Relatively high and well-balanced electron and hole mobilities were achieved by incorporating a small amount of ionic additives. The equivalent P-channel and N-channel properties of the ambipolar OFETs enabled the manufacture of complementary-like inverter circuits with a near-ideal switching point, high gain, and good noise margins, via a simple blanket spin-coating process with no additional patterning of each active P-type and N-type semiconductor layer.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.33 no.5
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• pp.337-343
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• 2020

This study investigated the low temperature sintering with various templates of Bi-based lead-free piezoelectric ceramics. The effects of using CuO-coated Na_0.5Bi_4.5Ti₄O₁₅ templates on the sintering behavior as well as the dielectric, ferroelectric, and piezoelectric properties of Bi_1/2(Na_0.78K_0.22)_1/2TiO₃ (BNKT) ceramics have been examined. In comparison with the specimens sintered with the Na_0.5Bi_4.5Ti₄O₁₅ templates without CuO coating, those sintered with the CuO-coated Na_0.5Bi_4.5Ti₄O₁₅ templates showed larger template sizes as well as a larger electric field induced strain (S_max/E_max) of 422 pm/V after sintering at temperatures as low as 975℃. These results are promising for low-cost multilayer ceramic actuator applications.

• Journal of the Korean Institute of Gas
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• v.10 no.2 s.31
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• pp.1-6
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• 2006

In this study we proposed on effect of the photodecomcomposition of coated nanofiber by $Pd/TiO_2$ for the removal of formaldehyde gas as indoor air pollutant. The photocatalytic reactor was setup in the inside of rectangular box (volume 2 l), UV lamp and the coating nanofiber with $Pd/TiO_2$. This study investigated the reaction rate and the adsorption constant of Langmuir-Heinshelwood, conversion of formaldehyde gas on temperature ($40^{\circ}C{\sim}80^{\circ}C$), effect of conversion (%) under different concentration, and effect of conversion (%) with humidity level on added $SO_2$ gas. As results, the rate constant (k) and adsorption constant (ft) were 114.94ppmv/min, $0.0036ppmv^{-1}$, respectively. and the conversion (%) of formaldehyde gas on temperature ($40^{\circ}C{\sim}80^{\circ}C$) was decreased to about 24%, compare with the first conversion (%). In conversion effect of increasing humidity levels, the presence of sulfur dioxide further decreased than without sulfur dioxide. the decreasing reason of conversion with presence sulfur dioxide judged as a cause of interference factor on the decrease of contact chance with photocatalysts.

• Proceedings of the KAIS Fall Conference
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• 2010.11a
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• pp.488-490
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• 2010

최근 심각한 환경오염 문제와 화석 에너지 고갈로 차세대 청정 에너지 개발에 대한 중요성이 증대되고 있다. 그중에서 태양정지는 공해가 적고, 자원이 무한적이며 반 영구적인 수명을 가지고 있어 미래에너지 문제를 해결할 수 있는 에너지원으로 기대되고 있다. 본 연구에서는 P3HT(regioregular poly(3-hexylthiophene))와 PCBM(fullerene derivative [6,6]-phenyl-C61-butyric acid methyl ester)을 전자 도너와 억셉터 물질을 하나의 브랜드로 광 활성층을 형성하는 BHJ(bulk hetero junction)구조를 갖는 고분자 유기 박막 태양전지를 각각 Toluene, Mono-Chlorobenzene, Dichlorobenzene에 $60^{\circ}C$, 200rpm으로 약 12시간동안 1wt%로 교반(Stirring)한 후에 중량비(1:1 wt%)로 혼합하여 스핀코팅(Spin-coating)으로 제작하였고, 완성된 소자의 광활성층 면적은 0.04cm2이며, $150^{\circ}C$에서 후속 열처리 공정을 통해 특성 향상이 측정 되었다. 태양전지 소자 구조는 Glass / ITO / PEDOT:PSS / P3HT : PCBM / Al이다. 전류-전압, FF(Fill Factor), 변환효율 측정을 위해 solar simulator를 AM1.5 조건(100 mW/cm2)으로 이용하였으며, 소자의 최대 전류밀도는 12mA/$cm^2$, 개방전압은 0.566V이고 F.F(Fill Factor)는 55.2%이고 변환효율은 3.7%이다. 후속 열처리후 더욱 좋은 성능을 갖게 되었고, 최대 효율은 Dichl orobenzene일 때 이다.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.30 no.1
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• pp.18-27
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• 2020

Objectives: For testing asbestos stabilizer products which are used for the maintenance and management of asbestos-containing materials, durability assessment should accompany the evaluation of basic properties and performance. Therefore, in this study we designed a testing method and constructed a database of durability performance, thereby providing basic data for reliability studies of asbestos stabilizer. Methods: Since the ceiling materials targeted in this study are interior materials, test conditions of 95% relative humidity and 60℃ temperature were designed in consideration of the effect of high relative humidity in summer and seasonal indoor temperatures. Plate-shaped specimens treated with asbestos stabilizers were maintained in a thermo-hygrostat for 5, 10, and 20 days, and then the asbestos scattering prevention rate was measured by air erosion testing. Results: The scattering concentration tended to increase with time under the single humidity condition, and exceeded the indoor air quality standard of 0.01 f/cc, during the 20 days of maintenance. On the other hand, there was little change according to the temperature condition. In the case of a complex condition with temperature and humidity, the results were similar to the humidity test, but the scattering concentration increased more sharply at 20 days. Conclusions: The main deterioration factor that affects the durability of asbestos stabilizer is humidity, and the deterioration is caused by a mechanism in which the stabilizer coated on the surface is re-dissolved by moisture and evaporates or the coating layer is peeled off, which is accelerated by high temperatures.

• Journal of Korea Technical Association of The Pulp and Paper Industry
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• v.29 no.2
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• pp.76-82
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• 1997

In paper the evenness of planar distribution of mass in a small scale is called formation (orbetter:mass formation). Traditionally formation has been assessed visually, by looking the sheet of paper against transmitted light. Different kinds of optieal testers are being usd to obtain quantitative rankings htat would be independent of the observer but would well correspond to the visual assessment. However, various raw-material and process factors do influence light trans-mittance in paper and do impair the correspondence between basis weight and the optical formation measurement (or visual assessment). As the optical formation test methods do not incorporate an efficient calib ration routine, the formation of the sophisticated paper grades of today the is rather difficult to measure optically and may lead to erroneous results. It may be concluded that the optical measurement is not suitable for paper grades with high filler content. coating, heavy calendering or that are made of heavily beaten pulp, nordoes it apply for dyed or printed papers. For this reason, visual assessment and optical evaluation shoild be replaced with a measurement that gives reliable results independent on paper grode and manufacturing process. Formation measuremend based on beta radiation is suitable for all paper grades regardless to the material contents or process treatment. It is possible to measure even dyed or printed samples. Thonks to a sim ple and relioble calibration, the results are converted to real basis weight balues that remain reliable even with time. The only beta tester commercially available is the AMBERTEC Beta Formation Tester. Formation of paper does vary locally in the web. Typically there exists a formation profile, too similarly to other properties of paper. Therefore, formation should ？ ays be expressed as a mean of a sufficient amount of parallel determinations. All formation measurements should be calibrated against basis weight.

• Journal of Powder Materials
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• v.23 no.1
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• pp.38-42
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• 2016

$BaTiO_3$-coated Fe nanofibers are synthesized via a three-step process. ${\alpha}-Fe_2O_3$ nanofibers with an average diameter of approximately 200 nm are first prepared using an electrospinning process followed by a calcination step. The $BaTiO_3$ coating layer on the nanofiber is formed by a sol-gel process, and a thermal reduction process is then applied to the core-shell nanofiber to selectively reduce the ${\alpha}-Fe_2O_3$ to Fe. The thickness of the $BaTiO_3$ shell is controlled by varying the reaction time. To evaluate the electromagnetic (EM) wave-absorbing abilities of the $BaTiO_3@Fe$ nanofiber, epoxy-based composites containing the nanofibers are fabricated. The composites show excellent EM wave absorption properties where the power loss increases to the high frequency region without any degradation. Our results demonstrate that the $BaTiO_3@Fe$ nanofibers obtained in this work are attractive candidates for electromagnetic wave absorption applications.