• Title/Summary/Keyword: co-sputter

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CHARACTERIZATION OF MAGNETIZATION BEHAVIOR IN Co/Pd PERPENDICULAR ANISOTROPIC MULTILAYERS

  • Oh, Hoon-Sang;Joo, Seung-Ki
    • Journal of the Korean Magnetics Society
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    • v.5 no.5
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    • pp.655-658
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    • 1995
  • Magnetization behavior of sputter-deposited Co/Pd multilayers were characterized, and it has been found that even when the multilayers are sputtered at low pressure (10 mTorr), the coercivity of the multilayers can be increased to large extent without noticeable change of saturation magnetization by increasing the deposition pressure of Pd underlayer. It turned out that the surface topology of Pd underlayer gets rough as deposition pressure increases, which consequently affects the magnetization reversal mode of Co/Pd multilayers from domain wall motion to magnetic spin rotation. The enhancement of coercivity is attributed to the domain wall pinning effect which is comected with the surface roughness of Pd underlayer on which Co/Pd multilayers grow.

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Preparation of Co-Cr Thin Films by Facing Targets Sputtering (대향타겟스퍼터링에 의한 Co-Cr 박막의 제작)

  • ;;;;;S. Nakagawa;M.Naoe
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.5
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    • pp.418-422
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    • 1998
  • The Co-Cr films are one of the most suitable candidates for perpendicular magnetic recording media. The facing targets sputtering(FTS) system has a advantage of preparing films over a wide range of working gas pressure on plasma-free substrate. In this study, we investigated the possibility of employing FTS system for depositing Co-Cr films. The Co-Cr thin films were deposited with various sputter gas pressure($P_Ar$, 0.1~10mTorr) by using FTS apparatus at temperature of $40^{\circ}C and 220^{\circ}C$, respectively. Crystallographic and magnetic characteristics were evaluated by x-ray diffractometry (XRD) and vibrating sample magnetometer(VSM), respectively. Under argon gas pressure at 0.1mTorr, films with morphologically dense microstructure, good c-axis orientation and higher coercivity were obtained. It has been confirmed that the FTS system is very useful for preparing Co-Cr thin film recording media.

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Preparation and Magnetic Properties of Co-system Amorphous Thin Film by the Sputter method (스파터법에 의한 Co-계 비정질박막의 제작과 자기특성)

  • 임재근;문현욱;서강수;신용진
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1994.11a
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    • pp.190-191
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    • 1994
  • In this paper, We study on the fabrication of amorphous this film of zeromagnetostriction material and the magnetic properties. This films are fabricated by using sputtering method with input power of 400∼607[W], Ar gas pressure of 3∼ 9[mTorr] and target composition of Fe$\sub$4.7/ Co$\sub$74.3/Si$_2$B$\sub$19/. Sample this films with diameter of 14[mm ] and thickness of 27-30[$\mu\textrm{m}$] were obtained through experiments. When we analyzed the magnetic properties before and after annealing with sample thin films, we confirmed that magnetic domain wall amorphous thin films consisted for Neel magnetic domain wall with the width of about 1[$\mu\textrm{m}$].

PbS/CdS QDs as Co-sensitizers for QDSSC

  • Kim, U-Seok;Seol, Min-Su;Yong, Gi-Jung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.371-371
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    • 2011
  • 본 연구에서는 황화납(PbS)과 황화카드뮴(CdS)을 감응물질로 하는 양자점 감응형 태양전지를 만들고 효율을 측정하였다. Sputter를 이용하여 고진공의 상태에서 산화아연(ZnO) film을 seed layer로 증착한 후 수열합성법으로 ZnO 나노선을 합성한다. 합성된 나노선을 successive ionic layer adsorption and reaction (SILAR) 법으로 PbS, CdS 양자점을 합성하고 이를 주사전자 현미경(SEM), X-선 회절(XRD)을 통해 확인하였다. 또한 PbS와 CdS의 co-sensitizer를 합성하고 diffused reflectance spectra (DRS)를 측정함으로써 넓은 범위의 광흡수도를 확인할 수 있었다. Co-sensitizer의 합성 방법을 달리하여 PbS/CdS를 합성한 후 각각의 효율을 측정해보고, 더 높은 효율을 내기 위한 방안에 대해 고찰하였다.

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Vertical In-Line Machine Concept for OLED Manufacturing

  • Hoffmann, U.;Campo, M.;Bender, M.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2004.08a
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    • pp.742-745
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    • 2004
  • A profitable mass production of Organic Light Emitting Diode (OLED) displays needs a new type of manufacturing equipment. We have developed a vertical In-Line machine (VES400) equipped with linear etch sources (e.g. to activate an ITO layer), standard magnetron sputter sources for ITO and metal and linear evaporation sources for the organic and metal materials. We present new results concerning the linear evaporation sources for organic materials. We have optimized the vertical thickness non uniformity for the evaporation of different organic materials and achieved deviations of less than ${\pm}$ 5 % for the vertical thickness over a substrate height of 400 mm. We will further report first results about the long term stability of the deposition rate for different organic materials using rate control..

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Magnetic Properties of Co-Cr Thin Films Deposited by FTS Method (FTS 방식으로 증착된 Co-Cr 박막의 자기적 특성)

  • Son, In-Hwan;Kim, Myung-Ho;Kong, Sok-Hyun;Kim, Kyung-Hwan;Nakagawa, S.;Naoe, M.
    • Proceedings of the KIEE Conference
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    • 1998.07d
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    • pp.1279-1281
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    • 1998
  • The Co-Cr thin films are one of the most suitable candidates for perpendicular magnetic recording media. The facing targets sputtering(FTS) method has a advantage of preparing films over a wide range of working gas pressure on plasma-free substrates. In this study, we investigated the possibility of employing FTS system for depositing Co-Cr films, Co-Cr thin films were deposited with continuously sputter gas pressure ($P_{Ar}$ = 0.1 mTorr) by FTS method at temperature of $40^{\circ}C$. We find that the change of thickness and deposition rate of sputtered Co-Cr thin films affect crystal orientation and magnetic properties. Crystallographic and magnetic properties were evaluated by x-ray diffractometry(XRD) and vibrating sample magnetometer(VSM) respectively. It has been confirmed that the FTS method is very useful for preparing Co-Cr thin film recording media.

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Influence of Pd Contents and Substrate Temperature on the Magnetic Property in Co1-xPdx Films (Co1-xPdx 합금의 Pd함량과 스퍼터 기판온도에 따른 자기적 특성 변화)

  • 이기영;송오성
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.8
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    • pp.744-751
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    • 2003
  • Co-Pd alloy thin films prepared by a DC-sputter that have self-organized nano structure(SONS), are promising for high-density information storage media in information era. We prepared the samples by varying Pd contents of 0~8.1 wt% at the substrate temperatures of room temperature (RT) and 200 $^{\circ}C$, respectively Microstructure and Pd contents of the Co$_{1-x}$ Pd$_{x}$ films are probed by a scanning electron microscope (SEM), a transmission electron microscope (TEM) and an energy dispersive spectrometer (EDS). We also investigated the saturation magnetization (Ms), remanence and coercivity of the Co$_{1-x}$ Pd$_{x}$ films. Surface roughness are measured by an atomic force microscope (AFM). We revealed that self-organized nano size Co-enriched phase and Pd-enriched phase existed with Pd contents at the substrate temperatures of RT and 20$0^{\circ}C$ through microstructure characterization. SONS helped to keep the saturation magnetization and enhance the perpendicular anisotropy with Pd contents. Out result implies that we may tune the perpendicular magnetic properties with keeping the saturation magnetization by varying substrate temperatures and Pd contents for high density magnetic recording.rding.

Colour Change of Black-dyed PET Fabrics by Sputter Coloration and Their Physical Properties (Sputter 착색에 의한 Black-dyed PET 직물의 색상 및 물성변화)

  • Koo, Kang;Won, Eun-Hee;Park, Young-Mi
    • Textile Coloration and Finishing
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    • v.18 no.4
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    • pp.11-19
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    • 2006
  • Black-dyed PET fabrics were sputtered with stainless steel through DC-magnetron type device to investigate the possibility of coloration effect, and then considered the morphological structure and physical characteristics such as water permeation ability and washing fastness. Change in color was estimated on the basis of CIELAB color system. The color coordination of metal plated PET was shifted to yellow-red from red-blue. Colour difference$({\Delta}E^*)$ was increased by sputtering conditions with increasing ion current and treatment time. Especially, $Lightness(L^*)$ value of PET was remarkably increased by sputtering, whereas $Chroma(C^*)$ increased gradually. From SEM analysis, rough and uneven craters were found and thickened on the fiber surfaces with longer sputtering time. And washing fastness was a little poor and absorption ability slightly decreased. There were little changes of breaking load and breaking extension. It was evident that observed uneven craters in the plated thin layer resulted in the colour change of PET fabrics by sputtering treatments.

Effects of Oxygen Partial Pressure on the Structural Properties of Sputtered Vanadium Oxide Thin Films (스퍼터된 바나듐 산화막의 구조적 특성에 미치는 산소 분압의 효과)

  • 최복길;최용남;최창규;권광호
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.435-438
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    • 2001
  • Thin films of vanadium oxide(VO$\sub$x/) have been deposited by r.f. magnetron sputtering from V$_2$O$\sub$5/ target in gas mixture of argon and oxygen. The oxygen/(oxygen+argon) partial pressure ratio is changed from 0% to 8%. Crystal structure, chemical composition and bonding properties of films sputter-deposited under different oxygen gas pressures are characterized through XRO, XPS, RBS and FTIR measurements. All the films prepared below 8% O$_2$ are amorphous, and those prepared without oxygen are gray indicating the presence of V$_2$O$\sub$$_4$/ phase in the films. V$_2$O$\sub$5/ and lower oxides co-exist in sputter-deposited films and as the oxygen partial pressure is increased the films become more stoichiometric V$_2$O$\sub$5/. The increase of O/V ratio with increasing oxygen gas pressure is attributed to the partial filling of oxygen vacancies through diffusion. It is observed that the oxygen atoms. located on the V-O plane of V$_2$O$\sub$5/ layer participate more readily in the oxidation process.

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