• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.259-259
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• 2008

The LTCC (Low Temperature Co-fired Ceramic) technology meets the requirements for high quality microelectronic devices and microsystems application due to a very good electrical and mechanical properties, high reliability and stability as well as possibility of making integrated three dimensional microstructures. The wet process, which has been applied to the etching of the metallic thin film on the ceramic substrate, has multi process steps such as lithography and development and uses very toxic chemicals arising the environmental problems. The other side, Plasma technology like ion beam sputtering is clean process including surface cleaning and treatment, sputtering and etching of semiconductor devices, and environmental cleanup. In this study, metallic multilayer pattern was fabricated by the ion beam etching of Ti/Pd/Cu without the lithography. In the experiment, Alumina and LTCC were used as the substrate and Ti/Pd/Cu metallic multilayer was deposited by the DC-magnetron sputtering system. After the formation of Cu/Ni/Au multilayer pattern made by the photolithography and electroplating process, the Ti/Pd/Cu multilayer was dry-etched by using the low energy-high current ion-beam etching process. Because the electroplated Au layer was the masking barrier of the etching of Ti/Pd/Cu multilayer, the additional lithography was not necessary for the etching process. Xenon ion beam which having the high sputtering yield was irradiated and was used with various ion energy and current. The metallic pattern after the etching was optically examined and analyzed. The rate and phenomenon of the etching on each metallic layer were investigated with the diverse process condition such as ion-beam acceleration energy, current density, and etching time.

• Journal of the Institute of Electronics and Information Engineers
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• v.50 no.10
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• pp.41-49
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• 2013

This paper suggests the dielectric resonator antenna using LTCC process for mm-wave car radar system. In this paper, dielectric resonator antennas (DRA) operated in 76-77 GHz frequency band are designed. And, using the LTCC process, the structures of dielectric resonator with SRR (split ring resonator) inside and those of dielectric resonator with probe inside are suggested. Linear polarization antennas and circular polarization antenna are designed for the DRA with probe inside. Three kinds of the DRA antennas are designed and their characteristics are calculated using CST RF simulation tool. The designed antennas are fabricated and measured and the measured results are compared with calculated results. The measured operating frequencies of DRAs are within 76 GHz to 77 GHz, which are close to the calculated results, and the measured gains are about 8.15 dBi to 10.82 dBi.

• Journal of the Korean Solar Energy Society
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• v.29 no.5
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• pp.45-52
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• 2009

Fossil power plants firing lower grade coals or equipped with modified system for $NO_x$ controls are challenged with maintaining good combustion conditions while maximizing generation and minimizing emissions. In many cases significant derate, availability losses and increase in unburned carbon levels can be attributed to poor combustion conditions as a result of poorly controlled local fuel and air distribution within the boiler furnace. In order to develop a on-line combustion tuning system, field test was conducted at operating power boiler. During the field test the exhaust gases' $O_2,\;NO_x$ and CO was monitored by using a spatially distributed monitoring grid located in the boiler's high temperature vestibule and upper convective rear pass region. At these locations, the flue gas flow is still significantly stratified, and air in-leakage is minimal which enables tracing of poor combustion zones to specific burners and over-fire air ports. using these monitored information we can improving combustion at every point within the furnace, therefore the boiler can operate at reduced excess $O_2$ and gas temperature deviation, reduced furnace exit gas temperature levels while also reducing localized hot spots, corrosive gas conditions, slag or clinker formation and UBC. Benefits include improving efficiency, reducing $NO_x$ emissions, increasing output and maximizing availability. Discussion concerning the reduction of greenhouse gases is prevalent in the world. When taking a practical approach to addressing this problem, the best way and short-term solution to reduce greenhouse gases on coal-fired power plants is to improve efficiency. From this point of view the real time optimized combustion tuning approach is the most effective and implemented with minimal cost.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2000.11a
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• pp.61-64
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• 2000

We fabricated and characterized Low Noise Amplifier (LNA) using MCM-C (Multi-Chip-Module-Cofired) technology for 2.14 GHz IMT-2000 mobile terminal application. First, We designed LNA circuits and simulated it's high frequency characteristics using circuits simulator. For the simulation, we adopted high frequency libraries of all the devices used in LNA samples. By the simulation, Gain was 17 dB and Noise Figure was 1.4 dB. We used multilayer process of LTCC (Low Temperature Co-fired Ceramics) substrate and conductor, resistor pattern for the MCM-C LNA fabrication. We made 2 buried inductors, 2 buried capacitors and 3 buried resistors. The number of the total layers was 6. On the top layer, we patterned microstrip line and pads for the SMT device. We measured the high frequency characteristics, and the results were 14.7 dB Gain and 1.5 dB Noise Figure.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.10
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• pp.601-607
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• 2016

Piezoelectric thick films of soft $Pb(Zr,Ti)O_3$ (PZT) based commercial material (S55) were fabricated using a conventional tape casting method. Ag-Pd electrodes were printed on the piezoelectric film at room temperature and all 5 layered films with a dimension of $12mm{\times}16mm$ were successfully laminated for a multi-layered piezoelectric ceramic actuator. The laminated specimens were co-fired at $1,100^{\circ}C$ for 1 h. A flat layered and dense microstructure was obtained for the $112{\mu}m$ thick piezoelectric actuator after sintering process. Thereafter, a prototype piezoelectric speaker was fabricated using the multi-layered piezoelectric ceramic actuator which can operate as a bimorph. Its SPL (sound pressure level) characteristic was also evaluated for speaker application. Frequency response revealed that the output SPL with a root mean square voltage of 10 V increased gradually to the highest peak of 87.5 dB for 1.5 kHz and exhibited a relatively stable behavior over the measured frequency range (${\leq}20kHz$) at a distance of 10 cm, implying that the fabricated piezoelectric speaker is potential for speaker applications.

• The Journal of Advanced Prosthodontics
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• v.7 no.4
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• pp.312-316
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• 2015

PURPOSE. This study aimed to present the clinical applicability of restorations fabricated by a new method, by comparing the bond strength of between ceramic powder with different coefficient of thermal expansion and alloys fabricated by Selective laser sintering (SLS). MATERIALS AND METHODS. Fifty Co-Cr alloy specimens ($25.0{\times}3.0{\times}0.5mm$) were prepared by SLS and fired with the ceramic ($8.0{\times}3.0{\times}0.5mm$) (ISO 9693:1999). For comparison, ceramics with different coefficient of thermal expansion were used. The bond strength was measured by three-point bending testing and surfaces were observed with FE-SEM. Results were analyzed with a one-way ANOVA (${\alpha}$=.05). RESULTS. The mean values of Duceram Kiss ($61.18{\pm}6.86MPa$), Vita VM13 ($60.30{\pm}7.14MPa$), Ceramco 3 ($58.87{\pm}5.33MPa$), Noritake EX-3 ($55.86{\pm}7.53MPa$), and Vintage MP ($55.15{\pm}7.53MPa$) were found. No significant difference was observed between the bond strengths of the various metal-ceramics. The surfaces of the specimens possessed minute gaps between the additive manufactured layers. CONCLUSION. All the five powders have bond strengths higher than the required 25 MPa minimum (ISO 9693); therefore, various powders can be applied to metal structures fabricated by SLS.

• Journal of Powder Materials
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• v.17 no.4
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• pp.289-294
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• 2010

For the aim of low-temperature co-fired ceramic microwave components, sintering behavior and microwave properties (dielectric constant ${\varepsilon}_r$, quality factor Q, and temperature coefficient of resonant frequency ${\tau}_f$) are investigated in $Bi_{18}O(Ca_{0.725}Zn_{0.275})_8Nb_{12}O_{65}$ [BCZN] ceramics with addition of $V_2O_5$. The specimens are prepared by conventional ceramic processing technique. As the main result, it is demonstrated that the additives ($V_2O_5$) show the effect of lowering of sintering temperature and improvement of microwave properties at the optimum additive content. The addition of 0.25 wt% $V_2O_5$ lowers the sintering temperature to $890^{\circ}C$ utilizing liquidphase sintering and show the microwave dielectric properties (dielectric constant ${\varepsilon}_r$ = 75, quality factor $Q{\times}f$ = 572 GHz, temperature coefficient of resonance frequency ${\tau}_f\;=\;-10\;ppm/^{\circ}C$). The estimated microwave dielectric properties with $V_2O_5$ addition (increase of ${\varepsilon}_r$, decrease of $Q{\times}f$, shift of ${\tau}_f$ to negative values) can be explained by the observed microstrucure (sintered density, abnormal grain structure) and possibly high-permittivity $Bi_{18}Zn_8Nb_{12}O_{65}$ (BZN) phase determined by X-ray diffraction.

• Korean Chemical Engineering Research
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• v.50 no.1
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• pp.128-134
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• 2012

The pilot scale experiments can handle the flue gas up to 1,000 $Nm^3/hr$ for separation of carbon dioxide included in real flue gas at coal-fired power plant. The operational characteristics was analyzed with the main experimental variables such as flue gas flow rate, absorbent circulation rate using chemical absorbents mono-ethanolamine( MEA) and 2-amino-2-methyl-1-propanol(AMP). The more flue gas flow rate decreased in 100 $m^3/hr$ in the MEA 20 wt% experiments, the more carbon dioxide removal efficiency was increased 6.7% on average. Carbon dioxide removal efficiency was increased approximately 2.8% according to raise of the 1,000 kg/hr absorbent circulation rate. It also was more than 90% at $110^{\circ}C$ of re-boiler temperature. Carbon dioxide removal efficiency of the MEA was higher than that of the AMP. In the MEA(20 wt%) experiment, carbon dioxide removal efficiency(85.5%) was 10% higher than result(75.5%) of ASPEN plus simulation.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.23 no.4
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• pp.988-996
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• 1998

BN ceramics with 0.07wt% $V_{2}O_{5}$ and 0.03wt% CuO(BNC3V7) sintered at $900^{\circ}C$ where it is possible for these to be co-fired with Ag electrode. Dielectricconstant of 44.3, TCF of 22 ppm$/^{\circ}C$ and $Qxf_{o}$ value of 22,000 GHz can be obtained from BNC3V7, multilayer type band pass filters using tapped method and conventional method were designed for PCS (Personal Communication System) applications. Tapped method by adopting input/output-tapping scheme the chip filter stucture becomes simpler and needs fewer layers than that using the conventional input/output-coupling scheme. A multilayer type band pass filter fabricated by screen-printing with silver electrode after tape casting. The simulated characteristics of the fabricated filters sintered at $900^{\circ}C$ were compared with the designed ones. Even though the centered frequencies of tapped and conventional band pass chaip filters were measured to shift about 90MHz downward, the band pass characteristics of both filters were similar that of designed ones. The spuriousresonance characteristic of tapped pass chip filter was better than that of conventional chip filer.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.9
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• pp.855-861
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• 2006

Sinterability and microwave dielectric properties of $xZWO_{4}-(1-x)TiO_{2}$ ceramic systems with zinc-borosilicate glass and $TiO_{2}$ contents for LTCC(Low Temperature Co-fired Ceramics) were investigated. The addition of $3{\sim}10\;wt%$ ZBS glass ensured the sinterability below $900^{\circ}C$. In general, increasing ZBS glass content seemed to enhance the sinterability, but the quality factor($Qxf_{0}$) significantly decreased due to the formation of an excessive liquid and second phases. As for the addition of $TiO_{2}$, the dielectric constant(${\varepsilon}_{r}$) and temperature coefficient of resonant frequency(${\tau}_{f}$) showed to increase, while the quality factor($Qxf_{0}$) did not show an apparent change. The composition of $0.7xZnWO_{4}-0.3TiO_{2}$ ceramics sintered at $900^{\circ}C$ with 5 wt% ZBS glass demonstrated 21.6 in dielectric constant(${\varepsilon}_{r}$), 14,800 in quality factor($Qxf_{0}$), and $+5\;ppm/^{\circ}C$ in temperature coefficient of resonant frequency(${\tau}_{f}$).