• Journal of Korean Society of Industrial and Systems Engineering
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• v.19 no.40
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• pp.341-349
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• 1996

In this paper, we deal with the problem of maintenance policies for an air filter system in clean room. Two types of maintenance policies are considered, one based on the reliability of equipment and the other one determined by the total cost including minimal repair cost. For these models, we obtain the structure of the optimal maintenance Policy which minimize the total cost. Finally we give the numerical example.

• Proceedings of the Korea Society for Energy Engineering kosee Conference
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• 1999.11a
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• pp.47-51
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• 1999

차세대 석탄가스화복합발전(Integrated Gasification Combined Cycle; IGCC)으로써 고온정제(Hot Gas Clean-up; HGCU)는 고온고압의 석탄가스 중에 있는 불순물을 고온고압에서 제거하는 기술이다. 현재 이 기술에 대한 연구가 국내외적으로 활발히 이루어지고 있으며 특히 미국 에너지성에서는 2000년까지 플랜트 효율 45%의 건식 고온정제를 채용한 IGCC 시스템을 개발 중에 있으며 나아가 목표 효율 50% 이상으로 건식 고온 정제뿐 아니라 차세대 가스터빈을 채용한 시스템으로 2010년 개발을 목표로 하고 있다.(중략)

• Clean Technology
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• v.26 no.4
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• pp.293-303
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• 2020

According to the World Health Organization (WHO), air pollution is a typical health hazard, resulting in about 7 million premature deaths each year. Sulfur dioxide (SO2) is one of the major air pollutants, and the combustion process with sulfur-containing fuels generates it. Measuring SO2 generation in large combustion environments in real time and optimizing reduction facilities based on measured values are necessary to reduce the compound's presence. This paper describes the concentration measurement for SO2, a particulate matter precursor, using a wavelength modulation spectroscopy (WMS) of tunable diode laser absorption spectroscopy (TDLAS). This study employed a quantum cascade laser operating at 7.6 ㎛ as a light source. It demonstrated concentration measurement possibility using 64 multi-absorption lines between 7623.7 and 7626.0 nm. The experiments were conducted in a multi-pass cell with a total path length of 28 and 76 m at 1 atm, 296 K. The SO2 concentration was tested in two types: high concentration (1000 to 5000 ppm) and low concentration (10 ppm or less). Additionally, the effect of H2O interference in the atmosphere on the measurement of SO2 was confirmed by N2 purging the laser's path. The detection limit for SO2 was 3 ppm, and results were compared with the electronic chemical sensor and nondispersive infrared (NDIR) sensor.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.459-462
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• 2003

This paper presents a force model of the clean tube system, which was developed as a means for transferring the air-floated wafers inside the closed tube filled with the super clean air. The recovering force from the holes for floating wafers is modeled as a linear spring and thus the wafer motion is modeled as a mass-spring-damper system. The propelling forces are modeled as linear along with the wafer location. The paper also proposes the control method to emit and stop a wafer at the center of a control unit. It shows the minimum value of the propelling force to leave from the control unit. In order to stop the wafer, it utilizes the exact time when a wafer arrives at the position to activate the propelling force. Experiments with the clean tube system built for 12 inch wafer shows the validity of the proposed model and the algorithm.

• Journal of Environmental Science International
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• v.25 no.11
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• pp.1589-1595
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• 2016

From December 2014 to November 2015, an automatic weather system (AWS) was installed over a wide road of Daegu to continuously measure meteorological factors and surface temperature. We investigated the effective operating period of the clean-road system using the daily maximum and minimum air and asphalt surface temperatures, with the aim of creating an optimum thermal environment. The clean-road system was installed over a part of the broad way of Dalgubul(Dalgubul-Daero) by Daegu Metropolitan City in 2011. Until now, the clean-road system has been operated from the middle of April to the end of September. We assumed that it was desirable that the clean-road system could be operated when the discomfort index was above 55. In conformity with the conditions, we concluded that the optimum operation period of the clean-road system is from the end of March to about the middle of October.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.22 no.10
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• pp.697-703
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• 2010

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants from the outdoor air introduced into a clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is useful for reducing the outdoor air conditioning load required to maintain a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to cool or heat the outdoor air. In the present study, numerical analysis was conducted to evaluate the recovered heat of an exhaust air heat recovery type air washer system, which is the key part of an energy saving outdoor air conditioning system for semiconductor clean rooms. The present numerical results showed relatively good agreement with the available experimental data.

• Journal of Intelligence and Information Systems
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• v.15 no.4
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• pp.213-224
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• 2009

This paper describes a real-time scheduling system re-construction project for automated manufacturing at a 300mm wafer fab of Korean semiconductor manufacturing company. During executing this project, for each main operation such as clean, diffusion, deposition, photolithography, and metallization, each adopted scheduling algorithm was developed, and then those were implemented in a real-time scheduling system. In this paper, we focus on the scheduling algorithms and real-time scheduling system for clean and diffusion operations, that is, a serial-process block with the constraint of limited queue time and batch processors. After this project was completed, the automated manufacturing utilizations of clean and diffusion operations became around 91% and 83% respectively, which were about 50% and 10% at the beginning of this project. The automated manufacturing system reduces direct operating costs, increased throughput on the equipments, and suggests continuous and uninterrupted processings.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.161-161
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• 2000

The clean mobile robot for wafer transfer is AGV that carry each wafer to each equipment. It has wafer handling technology, wafer ID recognition technology, position calibration technology using vision system, and anti-vibration technology. Wafer loading/unloading working accuracy is within ${\pm}$1mm, ${\pm}$3$^{\circ}$. By application of this AGV, we can reduce the manufacturing tack time and bring cost down of equipment.

• Electrical & Electronic Materials
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• v.10 no.5
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• pp.487-491
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• 1997

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.605-606
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• 2006