• 제어로봇시스템학회논문지
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• 제17권6호
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• pp.566-572
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• 2011

In recent semiconductor and FPD (Flat Panel Display) manufacturing processes, high clean-class delivery operation is required more and more for short working time and better product quality. Traditionally SLIM (Single-sided Linear Induction Motor) is widely used in the liner drive applications because of its simplicity in the rail structure. A magnetically levitated (Maglev) unmanned vehicle with SLIM traction, which is powered by a CPS (Contactless Power Supply) can be a high precision delivery solution for this industry. In this paper unmanned FPD-carrying vehicle, which can levitate without contacting the rail structure, is suggested for high clean-class FPD delivery applications. It can be more acceptable for the complex facilities composed with many processes which require longer rails, because of simple rail structure. The test setup consists of a test vehicle and a rounded rail, in which the vehicle can load and unload products at arbitrary position commanded through wireless communications of host computer. The experimental results show that the suggested vehicle and rail have reasonable traction servo and robust electromagnetic suspensions without any contact. The resolution of point servo errors in the SLIM traction system is accomplished under 1mm. The maximum gap error is ${\pm}0.25mm$ with nominal air gap length of 4.0mm in the electromagnetic suspensions. This type of automated delivery vehicle is expected to have significant role in the clean delivery like FPD glass delivery.

• 대한설비공학회지:설비저널
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• 제18권2호
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• pp.130-137
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• 1989

본 논문은 1. 초청정기술의 현황, 2. 초청정장치의 요소기술, 3. 초청정장치의 개요, 4. 국부청정실의 기본계획에 대해 기술하고 있다. 1. 초청정기술의 현황에서는, 본 연구수행의 방향설정을 위해 미국과 일본의 관련 학${\cdot}$협회의 동향 및 최근에 발표된 논문에 근거한 초청정기술의 연구경향과 과제 등을 파악 분석했다. 2. 초청정장치의 요소기술에서는, 초청정장치 개발에 필요한 미립자제거, 환경조건과 오염제어 기술을 확립하기 위해, Filter와 System Ceiling 방식, 온${\cdot}$습도, 진동, 정전기제어 기술에 관한 문제점과 대책에 대해 검토했다. 3. 초청정장치의 개요에서는, 초청정장치로써 대표적인 클린벤취의 관련규격, 설계요점 등을 검토하여 설계를 위한 기초자료로 삼았다. 4. 국부청정실의 기본계획에서는 상기의 요소기술과 기초자료에 근거하여 본 연구를 수행하기 위한 Line 형의 클린터널 유닛의 기본계획을 수립했다.

• 분석과학
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• 제25권3호
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• pp.190-196
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• 2012

납에 의한 노출에 대한 평가에는 주로 전혈 중 납을 사용하고 있으나 전혈 중 납은 납의 단기 노출에 대한 정보만을 제공한다는 단점이 있다. 납 노출의 만성적 노출지표인 혈장 중 납을 분석하기 위해서는 수 ng/L의 극미량 분석이 요구되어 납의 만성지표로서의 효용성 검증에 어려움이 있다. 본 연구에서는 납 노출 근로자의 만성 노출 지표로서 혈장 중 납을 분석하기 위하여 유도결합플라즈마 질량분석법을 정립하였다. 외부환경으로부터의 오염을 최소화시키기 위해 class 1,000 수준의 청정실을 설치한 후 가동 전과 후의 부유 분진량을 확인한 후 극미량 시료 분석을 수행하였다. 표준 우태아 혈청을 이용하여 표준물 첨가법에 의한 표준편차를 이용하여 계산한 최소검출한계는 4.3 ng/L, 최소정량한계는 12.2 ng/L이었으며, 신호-대-잡음 비로 계산한 최소검출한계는 7.0 ng/L, 최소정량한계는 22.1 ng/L이었다. 20 ng/L부터 2,000 ng/L 농도 범위에서 정밀도는 4% 이내였으며, 우태아 혈청에 20-2,000 ng/L의 농도로 첨가하여 계산한 회수율은 92.3-101.3%로 양호한 결과를 얻었다. 본 연구에서 제시한 방법을 사용하여 납 노출근로자의 혈장 및 혈청 중 납 분석이 가능하였으며 이를 통해 납의 만성노출에 대한 조사가 가능할 것으로 판단된다.

• 의료ㆍ복지 건축 : 한국의료복지건축학회 논문집
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• 제29권3호
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• pp.17-28
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• 2023

Purpose: This study aims to provide basic data for the future construction plans of the Infectious Disease Hospitals by analyzing the area composition and required room ratios in the wards and ICU of currently under-construction infectious disease hospitals. Methods: 3 Methods have been used in this paper. 1) This study conducted a literature review on major considerations and related guidelines for hospitals specializing in infectious diseases using existing data. 2) Based on the objects and activities of the hospital space, zones and areas were set for each department according to infection control. 3) Based on the established zones and areas, basic plan drawings of three hospitals specializing in infectious diseases currently under construction were collected and architectural drawing analysis was performed. Results: 1) Infectious Diseases Hospital must have a spatial organization that can accommodate patient isolation, infection control, efficiency of medical service, and changes. 2) Zones for infection control are divided into negative pressure and non-negative pressure zones based on airborne precaution isolation. It is divided into clean and contaminated zone according to class of cleanliness by Aseptic technique. Areas are classified by objects (patients, healthcare workers, supplies) and activities (access, medical treatment, support), and a system for organizing space is established based on this. 3) By analyzing the area composition of each departmental area, each required room, and each required space in the wards and intensive care units, it provides basic data for the spatial organization for architectural planning of the infectious disease hospital. Implication: It can be used as basic data when planning related facilities by analyzing the characteristics of the space plan of the required room according to the relationship between activities, movement lines, and operation plans based on user behavior.

• 한국표면공학회지
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• 제34권1호
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• pp.33-38
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• 2001

10cm-diameter Si(100)∥$1.3\mu\textrm{m}$-X$1.3_2$X$1.3\mu\textrm{m}$-$SiO_2$∥Si(100) afers were prepared using a fast linear annealing (FLA) equipment. 1.3$\mu\textrm{m}$-thick $SiO_2$ films were grown by dry oxidation process. After cleaning and premating the wafers in a class 100 clean room, they were heat treated using with the FLA and conventional electric furnace. Bonded area and bond strength of wafer pairs were measured using a infrared (IR) camera and razor blade crack opening method, respectively. It was confinmed that the bonded area by FLA was around 99% and the bond strength value reached 2172mJ/$\m^2$, which is equivalent to theoritical bond strength. Our result implies that thick $SiO_2$ SOI may be prepared more easily by using $SiO_2$$SiO_2$ bonding interfaces then those of Si/$SiO_2$'s.

• 환경위생공학
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• 제24권3호
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• pp.16-27
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• 2009

In this paper, I examined the level of fine dust in medical institutions, educational institutions and multi-purposed facilities to grasp the exact state of the present, and decided the level of air-borne particulate(KSM ISO Standard and ISO Standard 14644-1). We compared new proposed cleaner equipped with HEPA Filter with general cleaner and analyzed the rate of removal according to height, air volume and the equipment with the compulsive air intake. Through this comparison, I reached the conclusion as follows: 1. According to the examination, the fine dust of medical institutions, educational institutions and multi-purposed facilities in Kwang Ju is class 9. 2. The filter used in general cleaner on the market is that of HEPA-type, and its removal efficiency for fine particles($0.3{\sim}0.5{\mu}m$) is very low. 3. In the removal efficiency of new proposed cleaner equipped with HEPA Filter, the higher it is, the better, especially more than 180cm in height. 4. In case it is operated for 5 minutes under the condition of the space of $9.4m^{3}$ and the maximum air volume equipped with two induction pipes, we can keep the air cleanness level of 5 ~ 6. 5. To maintain the air cleanness for a long time, if we first operate for 5 minutes at maximum air volume and then operate at medium maximum air volume, we can keep the air cleanness with low energy.

• Food Science and Biotechnology
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• 제16권1호
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• pp.18-22
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• 2007

The objective of this study was to develop and assess the performance of an aseptic system for liquid milk contained in plastic bottles, from a small-scale production standpoint. Commercial sterility tests conducted on the bottled milk were utilized in our assessments of the system, via the identification and monitoring of the principal points of the process. Four 150 L batches of milk with pH values of approximately 6.7 were heat-processed at between 137 and $143^{\circ}C$ for 10 see in a plate heat exchanger, and then aseptically transferred to 500 mL high-density polyethylene (HOPE) bottles, in an ISO class 7 clean room. The aseptic condition of the bottles was achieved via 10 see of rinsing with a mixture containing 0.5% peracetic acid and 0.8% hydrogen peroxide at $30^{\circ}C$, followed by another rinse with sterile water. Of the 4 batches processed, 2 were determined to exhibit commercial sterility, on the basis of the physical-chemical and microbiological criteria adopted. It was concluded that some adjustment of the processing line was required in order to achieve full commercial sterility for all processes. The aseptic system developed and assessed in this study was demonstrated to have great potential for the processing and transferring of milk into plastic bottles, from a small-scale production standpoint.

• 분석과학
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• 제28권5호
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• pp.309-316
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• 2015

본 연구에서는 ICP-MS의 혈장 중 극미량의 납 분석법을 검증하기 위하여 Class 1,000 이내의 환경조건을 확보한 후 특이성, 일내 및 일간 정확도, 정밀도, 검정곡선 등을 확인하였다. 청정실의 부유 분진량을 측정한 결과, 0.3 µm 크기는 0.3~62개, 0.5 µm 크기는 0.0~28.3 개로 총 부유분진량이 최대 90.3개로 요구 환경에 부합하였다. 우태아 혈청 공시료로 조제한 시료의 MDL (Method detection limit)은 1.77 ng/L이고, LOQ (Limit of quantification)값은 5.55 ng/L 이었다. 검정곡선은 y=1.09×10⁻³ x+4.88×10⁻²이었고, 상관계수 r=0.9999이었다. 분석법 확립을 위한 특이성, 일내 및 일간 정확성, 정밀성, 그리고 검정곡선을 확인한 결과 50 ng/L 이상에서 분석법 확인 기준에 적합하였다. 이를 토대로 분석한 일반인의 혈장 중 납 농도 평균은 55.4 ng/L 이었으며, 현직 근로자는 440 ng/L 이었고, 퇴직 근로자는 132 ng/L 이었다.

• KIEAE Journal
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• 제8권6호
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• pp.3-10
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• 2008

Since fire was founded in the world, human races have invented various heating methods. Ondol is traditional heating method in Korea. It is very the important work to trace the history and characteristics of Ondol which originated and was developed in the Korean peninsula. Especially, the study on Ondol will contribute to improving the present heating methods and predicting future ones. In this paper, we shall study through the analysis of documents such as oriental documents, the document of Choseon dynasty, European documents and American documents. In order to discover the origins of Ondol as one of the excellent heating method all over the world, This study aims at identifying the history and characteristics of Ondol in the Korean peninsula, through document analysis. Results of this study are as follows. 1) The first document about Ondol is Sookyongjoo(水經注), Chinese ancient geography book. Contents recorded in the book include the description related to Ondol at Kwankyesa temple which was located at the border land between Gogooryo(ancient Korea) and the northeast of China. 2) Ondol was popular heating method in Gogooryo(ancient Korea) and it was used in not only Gogooryo but also Silla Kingdom and Beakje Kingdom. Thereafter, it was also used widely in Goryo dynasty and Choseon dynasty. Thereby we know that Ondol has been used as a heating method for a long time in the Korean peninsula. 3) Ondol was covered with a floor paper since the beginning of Choseon dynasty. the paper made room clean and impacted on Korean life style. Because the floor was clean and warm, Koreans thus took off shoes and sat on the floor. 4) Ondol was spreaded to Jeju island in Korea before 16th century but wasn't used widely there. The reason was that Ondol was rare high class heating system and the weather was warm in Jeju island. 5) The overspreading of Ondol caused that poor people built roughly Ondol in the last of Choseon dynasty. So, the quality of Ondol gradually became lower and lower. 6) A westerner was impressed by the novelty of Ondol and Frank Lloyd Wright had played an important role to update and spread Ondol widely all over the world. Hailing Ondol as the ideal heating system, Frank Lloyd Wright began incorporating it in his buildings back in the U.S. and even invented a modified ondol system, using hot water running through pipes instead of the hot exhaust through flues.

• 한국전기전자재료학회논문지
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• 제15권4호
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• pp.301-307
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• 2002

Direct bonded SOI wafer pairs with $Si ll SiO_2/Si_3N_4 ll Si$ the heterogeneous insulating layers of SiO$_2$-Si$_3$N$_4$are able to apply to the micropumps and MEMS applications. Direct bonding should be executed at low temperature to avoid the warpage of the wafer pairs and inter-diffusion of materials at the interface. 10 cm diameter 2000 ${\AA}-SiO_2/Si(100}$ and 560 $\AA$- ${\AA}-Si_3N_4/Si(100}$ wafers were prepared, and wet cleaned to activate the surface as hydrophilic and hydrophobic states, respectively. Cleaned wafers were pre- mated with facing the mirror planes by a specially designed aligner in class-100 clean room immediately. We employed a heat treatment equipment so called fast linear annealing(FLA) with a halogen lamp to enhance the bonding of pre mated wafers We kept the scan velocity of 0.08 mm/sec, which implied bonding process time of 125 sec/wafer pairs, by varying the heat input at the range of 320~550 W. We measured the bonding area by using the infrared camera and the bonding strength by the razor blade clack opening method, respective1y. It was confirmed that the bonding area was between 80% and to 95% as FLA heat input increased. The bonding strength became the equal of $1000^{\circ}C$ heat treated $Si ll SiO_2/Si_3N_4 ll Si$ pair by an electric furnace. Bonding strength increased to 2500 mJ/$\textrm{m}^2$as heat input increased, which is identical value of annealing at $1000^{\circ}C$-2 hr with an electric furnace. Our results implies that we obtained the enough bonding strength using the FLA, in less process time of 125 seconds and at lowed annealing temperature of $400^{\circ}C$, comparing with the conventional electric furnace annealing.